Pilot Control software brochure

The SemiProbe PILOT Control software Suite is integrated with all SemiProbe semi and fully automated Probe Systems for Life. Employing the SemiProbe patented adaptive architecture, software modules can be added to the base system as needed. PILOT Control Software consists of a Microsoft Windows-based user interface relying on the SemiServer for communicating to and from the probe system. Individual customer applications can be integrated with PILOT Control Software for a more customized system to meet individual needs. This increases the

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PILOT Control Software Suitepower and flexibility of the system and decreases the time to market compared with competitive solutions. The PILOT software comes with standard modules including Navigator and Position Matrix, with more sophisticated options like the Vision module available. Modules interfacing to the SemiServer have a set of remote commands so they can be accessed by any other module, giving any module the capability to perform its own specific function, yet access all other features of the suite seamlessly.

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Copyright 2011 SemiProbe, Inc. All rights reserved. Probe System for Life and SemiProbe are registered trademarks. Lab Assistant, IRIS Wafer Inspection and Pilot control software are trademarks of SemiProbe, Inc. All other trademarks are the property of their own respective owners.

SEMISERVER

The SemiServer is the engine of the PILOT Control software. It controls the communication between all PILOT Control Software Suite modules and enables access to the probing system in an asynchronous fashion through the use of the Prober Interface module. The SemiServer uses the .NET framework for all communications via TCP/IP connections.

The SemiServer enables access of the prober by multiple modules at the same time and eliminates the burden of retesting every feature of the software when a single change occurs.

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NAVIGATOR

Navigator is the control hub for the probe system. The Navigator module can: •align a wafer •set index and Z heights •control the theta direction •bring the chuck to contact or separation •turn the chuck vacuum on or off •place a wafer in the load position •enable the joystick

The chuck can also be controlled with a directional-arrow keypad or the up, down, left and right buttons on the keyboard to simulate the joystick and mark sections of the wafer that do not pass inspection.

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VIS ION

The Vision module performs the “Align Wafer”, “Find Home” and “Find Feature” commands on the probe system automatically. Each of the Vision module’s commands can be used in the visual analysis of the wafer and enables the creation of templates or sets the starting home location to be displayed when the wafer is aligned.

Images of the die can be also recorded and saved for later use. Setup of the Vision module is done through a wizard that guides the user step-by-step, making training to use the software an easy task.

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POSIT ION MATRIX

The Position Matrix module creates a spreadsheet format table used to save specific locations and set a home location on the wafer or device under test (DUT). These locations can be used to revisit the same locations on the original wafer or on another wafer or (DUT). The Position Matrix module is an effective alternative to a wafer map when the points of interest are not equidistant on a wafer or a DUT.

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WAFER MAP

The Wafer Map module automatically generates a mathematical equivalent of a wafer based on the wafer’s size and die size. The Wafer Map enables the user to add and remove die to mimic the actual wafer.The user can then bin the die based on pass/fail criterion and save the wafer map. The Wafer Map module is equipped with the unique ability to rotate the wafer, enabling back-side and front-side inspection or probing. Results are automatically transferred to the front-side wafer map and bad die are automatically transferred as marked. Wafer Map files can be exported to Excel or HTML for viewing and reporting.

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PILOT PLOT

SemiProbe offers a built-in plotter function for PILOT Control Software. With the Pilot Plot module, data is read from a file and graphed on the Plot Chart. Key features of the Pilot Plot module include: • zooming on an area of interest • finding the value of a specific data point • displaying with customized axes • displaying up to three axes per plot and up to four plots

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Documents

Pilot Control software brochure