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RION CO., LTD. 1
Particle Measurement and
Particle Counter
1. The world of Particle Measurement2. Standards3. Principal of Particle Counter4. Traceability of Particle Counter
byKazuo Ichijo
RION CO., LTD. 2
SemiconductorSemiconductor
• Clean Room Monitoring• DI Water Measurement• Pure Chemicals
Standards: SEMI
RION CO., LTD. 3
PharmaceuticalPharmaceutical
• Particles in Injections• Clean Room Monitoring• Operation Room Monitoring• Water for Injection
Standards: USP, JP, EP
RION CO., LTD. 4
AerospaceAerospace
• Parts Cleaning• Clean Room Monitoring
Standards: NAS 1638
RION CO., LTD. 5
Hard Disk DriveHard Disk Drive
• Parts Cleaning• Clean Room Monitoring• DI Water• Pure Chemicals• Particle Generation Test
Standards: IDEMA
RION CO., LTD. 6
Precision MachiningPrecision Machining
• Clean Room Monitoring• Parts Cleaning
RION CO., LTD. 7
for Safety and Long Life Time
Hydraulic FluidHydraulic Fluid
Standards: ISO 4406ISO 11171ISO 11500NAS 1638
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TransportTransport
SpaceSpaceMachineMachine
NuclearNuclear
Semiconductor Semiconductor PharmaceuticalPharmaceutical
MedicalMedical
EnvironmentEnvironment
BiotechnologyBiotechnology
Gas(Air, Process Gases)
Gas(Air, Process Gases)
Liquid(Water, Oil, Chemicals)
Liquid(Water, Oil, Chemicals)
Particle CountersParticle Counters
The World of Particle MeasurementThe World of Particle Measurement
RION CO., LTD. 9
Standards for Particle Contamination
• Clean Room ISO 14644Fed-Std 209EJIS B9920
• Pharmacopoeia USP 24 <788> InjectionJP 13 Injection
• OIL ISO 4406, 11171, 11500NAS 1638
• Particle Counter Standards JIS B 9921 (Airborne) and B 9925 (Liquid-borne)
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Light
Particle
Light Interaction with a particle
• Particle diameter• Wavelength• Refractive index of particles• Refractive index of medium
Scattered light intensity
Reflection
Refraction
Absorption
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Particle Counter
for Air
Light Scattering
for Liquid
Light Scattering Light Extinction
RION CO., LTD. 12
Laser Beam
Particle
Scatter Pattern
Receiving Optics
Light Scattering
Interaction of Light with Particle
φφ
θθ
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Laser Beam
Particle
Scatter Pattern
Light Extinction
Integral of Scatter Pattern over αα
Detector
redirected energy
αα
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Head amp.
Power supplyLight source
PumpFilterValve
Photo-detector
Inlet
Air
Amp.
Low�pass filter
Pulse height analyzer
Counter
Display
Collector lenses
Light beam
Airborne Particle Counter
RION CO., LTD. 15
Collimator
Flow- cell
Off- axis e llipsoidal mirror
Sample
Laser Drive rThermal Controlle r
Laser Diode ( 40mW, 780nm)
Collecting lensand photo de tector
Lase r Beam(0.8×0.02mm)
Flow- Cell(inner dimension: 0.5×0.5mm)
cross section
Liquid Borne Particle Sensor
RION CO., LTD. 16
Time
Vo
ltag
e
Scattered Light Signal by Particles
Pulse Numbers
Pulse Height
Particle Numbers
Particle Size
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Time
Vo
ltag
e
0.5µm
0.3µm
Equal to and larger than 0.5µm : 1 particle
Equal to and larger than 0.3µm : 6 particles
1µm
Equal to and larger than 1µm : 0 particle
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Check Points of Particle Counter
1. Calibration2. Counting Accuracy 3. Resolution4. Concentration Limit5. Flow Rate
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Calibration1. Size calibration
Mono-disperse particlesPolystyrene Latex Spheres known size, artificial material (n=1.595)
2. Number calibrationPoly-disperse particlesISO-MTD (ACFTD)
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Time
Puls
e he
ight
Vol
tage
Pulse signals from PSL Particle
Frequency
Puls
e he
ight
Vol
tage
Signals and Distribution with PSL