Overview of Sandia National Laboratories MEMS ...scme-nm.org/files/Sandia_MNT_SCME_2011.pdf · Overview of Sandia National Laboratories MEMS TechnologiesMEMS Technologies Dr. Keith

Overview of Sandia National Laboratories

MEMS TechnologiesMEMS Technologies

Dr. Keith Ortiz, ManagerMEMS Technologies Department, 1749

Microsystems Science, Technology & Components CenterS di N ti l L b t iSandia National Laboratories

May 9, 2011Sandia National Laboratories is a multi-program laboratory operated by Sandia C ti h ll d b idi f L kh d M ti f th U S

Unlimited ReleaseSlide 1

Corporation, a wholly owned subsidiary of Lockheed Martin company, for the U.S. Department of Energy's National Nuclear Security Administration undercontract DE-AC04-94AL85000.

SAND2010-8720

Contents

• Sandia National Laboratories

• What are MEMS?What are MEMS?

• How are MEMS made?

• SUMMiT™: Sandia Ultraplanar, Multilevel MEMS Technology

• Working with Us


Sandia National Laboratories


“Exceptional service in the national interest”since 1945

AT&T: 1949–1993 Martin Marietta: 1993–1995Lockheed Martin: 1995–Present

Government-Owned Contractor-Operated (GOCO) Federally Funded Research & Development Center (FFRDC)


Part of the DOE National Laboratory System and Production Sites

Pacific Northwest

Idaho

F i

Argonne

Brookhaven

LawrenceBerkeley

Sandia

Ames

Thomas Jefferson

Fermi

NationalEnergy Technology

KCP

PrincetonLawrenceLivermore

Stanford Linear

NationalRenewableEnergy

Y 12

Oak Ridge

Los Alamos

Sandia

JeffersonAccelerator Center

SavannahRiver

Y-12

Pantex SRP

KEY:

= NNSA Labs

= Production Sites

= Science

= Nuclear Energy = Energy Efficiency and Renewable

= Fossil Energy

= Environmental Management


= Nuclear Energy Energy Efficiency and Renewable

Sandia’s People

On-site workforce: 11,200 FY08 permanent workforce: 8,400 FY08 gross payroll: $886.1M

FY08 b d t $2 3B FY08 budget: $2.3B

Technical Staff (3,844) by Degree(End of FY08)

Computing 16%

El t i l E i i 19%

Other Fields 17%

Chemistry 4%Math 2%

Other Science 4%Physics 6%


Mechanical Engineering 16%Electrical Engineering 19%

Other Engineering 15%

Four Modern Mission Areas

Nuclear Weapons D f S t d A tNuclear Weapons

Homeland Security d D f

Defense Systems and Assessments

and Defense


Energy, Resources and Nonproliferation

Enabled by Strong Science and Engineering

Research Disciplines

MaterialsPulsed PowerComputerScience ate a sPulsed PowerScience

EngineeringSciences

Micro Electronics Bioscience

Sciences


Microsystems Engineering Sciences d A li ti (MESA)and Applications (MESA)


What are MEMS?What are MEMS?

L 3 F l l b litt 45 d i


Laser, 3 Fresnel lenses, beam splitter, 45 degree mirror

MEMS are everywhere!What are MEMS?

$7.8B market in 2008, growing at ~14% per year*

Unlimited ReleaseSlide 11*http://www.researchandmarkets.com/product/64d8ff/mis07_status_of_the_mems_industry

Top MEMS Manufacturers in 2009What are MEMS?


Example: Analog Devices ADXL50 Accelerometer


Creative ForcesWhat are MEMS?

W k t Mi S l

Driving the application of MEMS in the marketplace

Make Things Smaller Reduce Cost Work at Micro Scales

Create Arrays Integrate


How are MEMS made?How are MEMS made?


How are MEMS made?MEMS technology is derived from

standard CMOS technologiesg

Lith h Et hiD iti Lithography EtchingDeposition


Surface MicromachiningHow are MEMS made?

1980s


Example One Layer Process (1)How are MEMS made?

Start with single-crystalsilicon wafer

Deposit layerof sacrificial oxide



Dark Field MaskMask

Spin on light-sensitivephotoresist

Expose photoresist to light using oxide mask



Develop photoresist

Etch awayoxide not protectedby photoresist


y p


Strip off photoresist

Deposit conformallayer of polysilicon



Clear Field

Spin on light-sensitivephotoresist

Mask

Expose photoresist tolight using polysilicon mask



Develop photoresist

Etch awayEtch awaypolysilicon notprotected by photoresist



Strip off photoresist

Etch away sacrificialoxide to complete


Example One Layer Process (Final Product)

How are MEMS made?

( )

Flexible cantilever style arms

Hole in oxide created anchor post


Bulk MicromachiningHow are MEMS made?

Wet Etch Pressure Sensors 1960s


Deep Reactive Ion Etching (DRIE) MicromachiningHow are MEMS made?

“Bosch Etching” ~1994

Basic ProcessBasic ProcessBasic ProcessBasic Process


SUMMiT™: Sandia Ultraplanar, M ltil l MEMS T h lMultilevel MEMS Technology


SUMMiT™ Process Layers

SUMMiT V™


All PolySi is doped with Phosphorus

Chemical Mechanical Polishing (CMP)

SUMMiT V™

Pre CMPPre CMP Post CMPPost CMP

Planarized Planarized SurfaceSurface

P l iliP l ili

OxideOxide

PolysiliconPolysiliconPolysiliconPolysilicon

PolyPoly OxideOxide

Planarized Oxide

Planarized Oxide

PolyPoly OxideOxidePolyPoly


Complex structures can be built using CMPComplex structures can be built using CMP

SUMMiT™ Process Cross-sections:Released Structure (Double Ratchet)

SUMMiT V™

FIB cross-section of fabricated SEM perspective deviceview of fabricated

device


SUMMiT V™ Process Cross-sections:Double Ratchet

SUMMiT V™


SUMMiT V™ Example: Six Gear Train


SUMMiT V™ Extension: SUMMiT With Integrated Fluid Technologies (SWIFT™)

Silicon nitride layers are optically transparent and insulating

g g ( )


SUMMiT V™ Example: Optical Programmable Array Logic (OPAL)g ( )


Working with Us


Commercial access to SUMMiT™ V: SAMPLES Program

MEMS Prototyping on Multi-Project Wafers• 5 layers of low-stress polysilicon

S d d• Standard processes • CMP planarization • Batch fabrication • AlCu metalization layer – 0.70 µm

100 l d t• 100 unreleased parts • Release available on request


MEMS University Alliance

• The University Alliance program – Facilitates education in MEMS – Fosters relationships with the academic community– University Alliance Design Competition (SUMMiT V™)

Texas Tech University

Air Force Institute of Technology

University of Illinois at

University of North Carolina Charlotte

Texas Tech University

University of Oklahoma

University of Utahy

Urbana-Champaign

University of FloridaNorth Dakota State College of Science

Central New Mexico Community College

Arizona State UniversityNew Mexico State University

University of ArizonaMontana State University

University of New Mexico


38

Montana State University

Contact Information

Keith [email protected]( )(505) 844-2072

www.mems.sandia.gov


NASA ST6 Inertial Stellar Compass

What are MEMS?

p

Tech Demo

• Star-tracking camera• 3-axis system of MEMS gyros from Draper Laboratory* • TacSat-2 satellite launched in December 16, 2006• Rotation mesurement accuracy goal of 0.1 degrees• Demonstrated accuracy within about 0.05 degrees**


* http://nmp.nasa.gov/st6/** http://www.aoas.org/article.php?story=20080421114426719

Raytheon Excalibur (155mm)

What are MEMS?

( )

One of about four MEMS guided munitions programs


General Electric MEMS Microswitch

What are MEMS?

A Paradigm shift in Electrical Distribution & Control

MEMS-Solid-state Hybrid Switchy• <1 µsec operation • 400 volts per switch• 0.25 amps per switch •>10 million cycles lifey• Low “on” resistance • High “off” isolation

Benefits• Size, weight, integration• Fault current limiting • Arc-less AC and DC switching

Beam

Gate Beams

Gate


Contact

Documents

Overview of Sandia National Laboratories MEMS ...scme-nm.org/files/Sandia_MNT_SCME_2011.pdf · Overview of Sandia National Laboratories MEMS TechnologiesMEMS Technologies Dr. Keith