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概况 Overall 东莞新科材料科学实验室简称 SAE-MSL)成立于1994 是公 司投入巨资设立的综合性的材料 检测分析评估的服务机构 实验室配备性能先进的各种表面 分析设备门类齐全的常规理化 分析仪器以及标准化的环境可 靠性试验设备实验室拥有一支 经验丰富的专业团队现有职员 110多人博士或硕士学历的技术 人员占35%以上 实验室服务范围涵盖半导体电子器件纳米科技通信车材料新能源等行业材料 表面分析和表征电子产品洁净 度检测和微污染物控制高分子 材料分析与表征环境可靠性试 洁净室聚合物材料环境 管理物质电磁兼容及产品失效 分析等领域积累了丰富的经验和 成就在国际相关产业中享有盛 实验室通过持续的投入教育培 与国内外同行实验室间科技产业界及著名院校等进行学 术交流和合作表面分析及坏品 分析能力已达到国际一流水平 实验室依据国际标准 ISO/IEC17025建立严谨的质量控 制和保证体系并于2005年获得 了中国合格评定国家认可委员会 (CNAS)认可 ( CNAS L1977 ) Founded in 1994, SAE-MSL was invested by SAE Magnetics (H.K.) Ltd, as a comprehensive material testing, analysis and evaluation organization. - 01 - SAE-MSL is equipped with a variety of surface analysis equipment, physical and chemical analysis instruments and environmental reliability test equipment. It is staffed with a group of competent and experienced professionals. There are 110 employees, and above 35% of them got Dr. or master degree. SAE-MSL service covers many industries such as Semiconductor, Photonics, Nanotechnology, Telecommunication, Automotive Materials and New energy. The experiences and achievements acquired in surface analysis, Cleanness & micro-contamination analysis, Environmental reliability test , Cleanroom, Polymer, Environment management substances test etc. made MSL enjoy high reputation in related fields. The surface analysis and failure analysis ability of SAE-MSL has reached world first-degree level through continual investment, training and technical communication with foreign or domestic labs, high-Tech industries and many famous universities. SAE-MSL built up a religious quality assurance and control system according to ISO/IEC 17025, and obtained the accreditation of CNAS (CNAS L1977) in 2005.

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Page 1: Overall - china.tdk.com.cn

概况Overall

东莞新科材料科学实验室(简称SAE-MSL)成立于1994年,是公司投入巨资设立的综合性的材料检测、分析、评估的服务机构。

实验室配备性能先进的各种表面分析设备,门类齐全的常规理化分析仪器,以及标准化的环境可靠性试验设备。实验室拥有一支经验丰富的专业团队,现有职员110多人,博士或硕士学历的技术人员占35%以上。

实验室服务范围涵盖半导体、光电子器件、纳米科技、通信、汽车材料、新能源等行业。在材料表面分析和表征,电子产品洁净度检测和微污染物控制、高分子材料分析与表征、环境可靠性试验、洁净室、聚合物材料、环境管理物质、电磁兼容及产品失效分析等领域积累了丰富的经验和成就,在国际相关产业中享有盛誉。

实验室通过持续的投入,教育培训,与国内外同行实验室间,高科技产业界及著名院校等进行学术交流和合作,表面分析及坏品分析能力已达到国际一流水平。

实验室依据国际标准ISO/IEC17025建立严谨的质量控制和保证体系,并于2005年获得了中国合格评定国家认可委员会(CNAS)认可 ( CNAS L1977 )。

Founded in 1994, SAE-MSL was invested by SAE Magnetics (H.K.) Ltd, as a comprehensive material testing, analysis and evaluation organization.

- 01 -

SAE-MSL is equipped with a variety of surface analysis equipment, physical and chemical analysis instruments and environmental reliability test equipment. It is staffed with a group of competent and experienced professionals. There are 110 employees, and above35% of them got Dr. or master degree.

SAE-MSL service covers many industries such as Semiconductor, Photonics, Nanotechnology, Telecommunication, Automotive Materials and New energy. The experiences and achievements acquired in surface analysis, Cleanness & micro-contamination analysis, Environmental reliability test , Cleanroom, Polymer, Environment management substances test etc. made MSL enjoy high reputation in related fields.

The surface analysis and failure analysis ability of SAE-MSL has reached world first-degree level through continual investment, training and technical communication with foreign or domestic labs, high-Tech industries and many famous universities.

SAE-MSL built up a religious quality assurance and control system according to ISO/IEC 17025, and obtained the accreditation of CNAS (CNAS L1977) in 2005.

Page 2: Overall - china.tdk.com.cn

服务项目一览Service Items Summary

• 表面元素成分分析(EDX, AES, TOF-SIMS)• Surface elemental analysis

• 元素成分半定量分析(AES, EDX)• Element semi-quantitative analysis

• 表面元素成分分布和纵深分布分析(AES)• Surface element mapping/depth profile analysis

• 元素成分及化学价态分析(XPS)• Element and chemical bonding states analysis

• 痕量污染物成分分析(TOF-SIMS, EDX)• Trace organic compounds analysis

• 表面粗糙度测量(Zygo, AFM)• Surface roughness measurement

• 表面形貌和尺寸测量 ( AFM, SEM, TEM )• Surface Morphology and Dimension measurement

• 薄膜及涂层厚度测量(TEM, SEM, XRF, Zygo)• Thin film and coating thickness measurement

• 金属材料金相分析 ( SEM )• Metallography analysis

• 切片分析 ( FIB, CP, TXP, Lapping )• Cross section analysis

材料表面分析Material Surface Analysis

化学分析Chemical Analysis

• 离子含量测试(IC)• Ion content test

• 液体颗粒计数(LPC)• Liquid particle counting

• 非挥发性/可冷凝的挥发性残留物(NVR/CVR)• Non-volatile/Condensable volatile residue

• 硅油/DOP/酰胺定性定量分析(FTIR)• Silicon oil/DOP/Amide quantitative analysis

• 动态/静态顶空有机挥发物(GC-MS DHS/SHS)• Outgassing using Dynamic/Static headspace

• 可萃取的金属含量(ICP-MS, ICP-OES)• Extractable metal content

• 微污染物成分分析(FTIR, Raman)• Micro contamination composition analysis

• RoHS六项测试 (ICP-MS, UV-Vis, GC/MS)• RoHS 6 items test

• 材料元素成分分析 (XRF, ICP-OES)• Metal material composition

• 有机物成分分析 (TOF-LC/MS, Pyrolysis-GC/MS)• Organic composition

聚合物成分及性能测试Polymer Composition & Properties Test

环境可靠性试验Environmental Reliability Test

• 塑料、橡胶主成分分析 (Pyrolysis-GC/MS, FTIR)• Main composition of plastic and rubber

• 涂料、油墨和粘合剂主成分分析 (Pyrolysis-GC/MS, FTIR)• Main composition of paint and ink

• 粘合剂固化条件选择(DSC,FTIR)• Adhesive curing condition selection

• 聚合物分子量测试 ( GPC )• Molecular weight test

• 聚合物材料机械性能测试• Mechanical properties test

• 聚合物材料热学性能测试• Thermal properties test

• 聚合物材料绝缘电性能测试• Electric properties test

• 聚合物材料涂层性能测试• Coating properties test

• 高温试验 (25~300ºC)• Dry heat test

• 低温试验 (-10~-70ºC)• Cold test

• 温度冲击 (-65~150ºC)• Thermal shock

• 恒定湿热 (5~93ºC, 15~98%RH)• Damp heat, Steady

• 交变湿热 (-40~93ºC, 15~98%RH)• Damp heat, Cyclic

• 高加速应力试验 (105~143ºC, 75~100%RH)• HAST

• 混合气体腐蚀试验• Mixed flowing gas corrosion test

• 盐雾腐蚀试验• Salt spray test

- 02 -

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服务项目一览Service Items Summary

- 03 -

电磁兼容测试-车载 / EMC Test-Vehicle

• 辐射测试 (ALSE)测试频率20Hz - 6GHz

• 传导测试(电压法)测试频率150kHz - 200MHz

• 传导测试(电流法)测试频率150kHz – 1GHz

• 瞬态传导测试 (ISO 7637-2)

• 脉冲抗扰度测试 (ISO 7637-2/-3, EN 50498)

• 辐射抗扰度测试(ISO 11452-2, 100V/m)

• 横电波小室 (TEM cell) (ISO 11452-3, 200V/m)

• 大电流注入(BCI)测试 (ISO 11452-4, 300mA)

• 带状线 (Strip line) (ISO 11452-5, 200V/m)

• 磁场抗扰度 (M/F) (ISO 11452-8, 1000A/m)

• 手持发射机(Portable Transmitter)(ISO 11452-9)

• 静电放电 (ESD)(ISO 10605)

• 辐射骚扰

• 传导骚扰

• 功率骚扰

• 辐射抗干扰

• 传导抗干扰

• 静电放电

• 快速脉冲群

• 雷击

• 电压跌落和中断

• 工频磁场

• EN 55032 / CISPR 32 / GB 9254

• EN 55014-1, -2 / CISPR 14-1, -2

• GB 4343.1, 2

• EN 55015 / CISPR 15/ GB 17743

• EN 55013 / CISPR 13/ GB 13837

• EN 55011 / CISPR 11/ GB 4824

• EN 55024 / CISPR 24

• FCC Part 15, Part 18 and Part 25

• ICES-001, ICES-003, ICES-005

• VCCI&AS/NZS CISPR13, 15

• EN 61547 / IEC 61547

• EN 61000-4-X / IEC 61000-4-X

• GB 17626.X

电磁兼容测试-非车载 / EMC Test- Non Vehicle

• 表面电阻/电阻率测试• Surface resistance/resistivity Test

• 体积电阻/电阻率测试• Volume resistance/resistivity Test

• 衰减时间测试• Decay time test

• 静电压/摩擦电压测试• Electrostatic/Triboelectric charge voltage test

• 电荷量测试• Charge quantity test

• 点对点电阻测试• Point-to-point resistance test

• 对地电阻测试• Resistance to ground

• 静电放电屏蔽• Static discharge shield

• 防静电袋测试• Shielded bag test

ESD 测试ESD Test

• 开封或切片• Decapsulation or X-section preparation

• 粘结失效• Adhesion failure

• 焊接失效• Solder failure

• 腐蚀分析及机理研究• Corrosion analysis and study

• 材料物理缺陷表征• Material physical defects characterization

• 污染物,扩散物,掺杂物分析• Contaminants, diffusion, dopant analysis

• 微观结构的缺陷分析• Analysis of defects in microstructures

• X-ray 成像/ 超声波检查• X-ray imaging/C-SAM system inspection

失效分析Failure Analysis

Page 4: Overall - china.tdk.com.cn

表面分析实验室Surface Analysis Lab

MSL表面分析实验室配备有世界先进的表面分析仪器(如聚焦离子束、透射电镜、飞行时间二次离子质谱仪、俄歇电子能谱仪、光电子能谱仪、原子力显微镜及各种扫描电镜),可提供材料表面及界面形貌表征,成分及内部晶体结构解析等综合性的表面分析服务。

MSL Surface analysis lab is equipped with the state-of-the-art surface analysis instruments (FIB, TEM, TOF-SIMS, AES, XPS, AFM and kinds of SEM/EDS), which provide comprehensive surface analysis service including surface & interface topography characterization, composition and inner crystal structure analysis.

Super-SEM高倍数高分辨率图像High resolution image by Super-SEM

Hitachi Super-SEM

3D image of scratch on slider

Nano-carbon tube 130,000X

TEM 纳米多层材料分析Nano multi-layer analysis by TEM

FEI TEM

Glass Nano coating structure study

AFM 表面形貌分析Surface profile analysis by AFM

Bruker AFM

Nano recess data analysis

Nano-carbon tube 10,000X

- 04 -

Page 5: Overall - china.tdk.com.cn

表面分析实验室Surface Analysis Lab

仪器 Equipment 测试能力 Capability 测试项目 Test Item

TEM Point resolution: 0.23nm Angstrom resolution observation

TOF-SIMSProbing depth: <30Ǻ; Detection limit: 1ppm;

Spatial resolution: 0.2umSurface composition analysis (elemental & molecular)

AESProbing depth: 4~50Ǻ; Detection limit: 0.1~1%;

Spatial resolution: 10nmSurface elemental composition, Element mapping, Depth profile

FIB/CP FIB size: 5/10nm at 10PA beam current Ion milling, Cross section and Deposition

XPS Detection limit: 0.1wt%; Element scope: Li ~ U Valence state analysis, Coating depth analysis

Nanoindenter Max depth: 5um(Z), 15um(X); Resolution: 0.04nm(Z), 4nm(X) Nano material hardness & Young modulus

Super-SEM Spatial resolution: 0.5nm Angstrom resolution observation

SEM/EDX Spatial resolution: 1nmNano resolution observation,

Surface composition analysis (elemental)

AFM Resolution:10nm (X-Y); 0.1nm (Z) Surface topography, Roughness

Wyko/Zygo Resolution: 5um (X-Y); 0.1nm (Z) Surface topography, Roughness

AES 表面元素分析Surface element analysis by AES

TOF-SIMS 成分Mapping Composition mapping by TOF-SIMS

XPS 镀层深度分析Coating depth analysis by XPS

PHI TOF-SIMS

Pd isotopes SIMS spectrum

PHI AES

Composition of contamination on metal

Thermo XPS

Multilayer coating depth analysis

表面分析实验室主要仪器一览Surface analysis lab equipment summary

Red: C16H29O2Cu2+

Green: AuBlue: C3H7O+

- 05 -

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MSL化学分析实验室配备有先进的测试仪器,建立了完善的质量控制体系,可为客户提供微污染物分析、材料成分分析和电子产品及洁净室辅料(如手套、无尘布和口罩等)清洁度等方面的测试。

MSL chemical analysis lab is not only equipped with advanced instruments, but also has established a integrated quality control system to provide customer with kinds of analysis including micro-contamination analysis, material composition analysis and cleanliness test of electric products & clean room consumable material (such as glove, wipe and facemask, etc).

化学分析实验室Chemical Analysis Lab

FTIR 微污染物成分测试Micro-contamination test by FTIR

GC/MS 有机挥发物成分测试VOC test by GC/MS

IC 离子污染测试Ion contamination test by IC

Thermo Nicolet FTIR Agilent GC/MS

One component in PCBA VOC Composition of micro-contamination

Dionex IC

Standard anion content

- 06 -

清洁度测试Cleanliness test

颗粒Particle

元素Element

不挥发残留NVR

ICP-MSICP-OES

IC-CationIC-Anion

SEM/EDSLPC

SO2/NOx

有机物Organics

分子Molecule

离子Ion

有机挥发物VOC

Micro-balanceFTIR

CVRDHS/SHS

清洁度测试项目Cleanliness testing items

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TOF-LC/MS 有机物成分分析Organic content analysis by TOF-LC/MS

ICP-MS 元素测试Elemental content test by ICP-MS

XRF 主成分元素含量测试Main elemental content test by XRF

Agilent TOF LC/MSThermo ICP-MS SHIMADZU XRF

化学分析实验室Chemical Analysis Lab

仪器 Equipment 测试能力 Capability 测试项目 Test Item

GC/MS M/Z:1.6~1050 Solvent purity, VOC(DHS, SHS)

FTIR Wavenumber scope : 4000-400 cm-1 Organic composition analysis

IC DL: 1µg/L Ion content test(cation & anion)

ICP-MS/ICP-OES MS DL : 0.1µg/L; OES DL : 1mg/L Elemental content test

TOF-LC/MS DL : 0.1mg/L Organic analysis and quantitative

Raman Laser wavelength : 532, 633, 785nm Inorganic composition analysis

XRF 13Al ~ 92U Elemental content test

LPC 8 channel (0.5~20µm) Liquid particle counting

UV-Vis 200nm ~ 900nm Composition analysis and quantitative

Micro-balance Max wt. 2.1g; Min wt. 0.1µg Non-volatile residue

化学分析实验室主要仪器一览Chemical analysis lab equipment summary

Metal element content testPolyoxyethylene ether type surfactantsElement detection limit of ICP-MS

- 07 -

Polyoxyethyleneether type surfactants

Page 8: Overall - china.tdk.com.cn

聚合物分析实验室Polymer Analysis Lab

MSL聚合物分析实验室可为客户提供聚合物材料的成分表征及各种性能测试,测试对象包括:塑料,橡胶,粘合剂,涂料和油漆等。 MSL polymer analysis lab can provide customer with composition analysis & property test of polymer material including plastic, rubber,

adhesive, coating and paint.

TGA 衡量不同材料的分解温度Material pyrolysis temp. test by TGA

DSC 评价PET结晶度PET crystallinity evaluation by DSC

TMA 测量Tg及膨胀系数Tg & CTE measurement by TMA

流变仪衡量热熔黏度变化Viscosity measurement by Rheometer

0 200 400 600 800 1000 1200 140010

3

104

105

Pot life of two hot melt adhesives

Com

ple

x v

iscosity

* [P

a s

]

time t [s]

good bad

FTIR 测量胶水固化度Curing rate measurement by FTIR

PE DSC / TGA

Seiko DMS / TMA

Shimadzu Autograph

GPC 测量聚合物分子量Molecular wt. measurement by GPC

Agilent GPC

聚合物分析实验室主要仪器Main equipment of Polymer lab

- 08 -

Page 9: Overall - china.tdk.com.cn

失效分析实验室Failure Analysis Lab

MSL失效分析实验室在电子产品失效分析尤其是粘接失效,焊接失效和腐蚀分析方面拥有丰富的知识背景和经验,可为客户查明产品失效原因,提高产品质量。

MSL failure analysis lab has capabilities and rich experiences in electric products failure analysis, especially adhesion failure, soldering failure and corrosion analysis, which can help customer find the rootcause and improve product quality.

失效分析流程Failure analysis process

失效分析Failure analysis

判断失效模式OM/SEM

物理缺陷Physical defect

污染物Contamination

腐蚀Corrosion

污染源判断Contamination source

失效机理分析Failure mechanism

失效分析Failure Analysis

成分分析Composition analysis

腐蚀成分(XPS/EDS/AES/SIMS)

Corrosion composition

表面失效Failure on surface

内部缺陷 (X-Ray/C-SAM)Inside defect

开封 / 切片Decapsulation/X-section

形貌测量(SEM/AFM/Zygo)

Profile measurement

形貌观察 (SEM/Zygo)Profile observation

无机物(EDS/AES/SIMS/XRF)

Inorganic

有机物(FTIR/SIMS/Raman)

Organic

IC Pad 焊接失效IC Pad solder failure

After decapsulation

Soldering failure (SEM 1,000X)

FPC 变色FPC discoloration

OM image

TOF-SIMS mapping

Green- CuRed- Au

- 09 -

Page 10: Overall - china.tdk.com.cn

环境可靠性测试实验室Environmental Reliability Testing Lab

KSON HAST

MSL环境可靠性测试实验室可按照GB, MIL, IEC等标准或客户要求进行高温、低温、温度冲击、恒定湿热、交变湿热、气体腐蚀和加速老化等多种模拟环境下的可靠性试验。

MSL environmental reliability testing lab can perform simulated environmental tests, such as high temp. and low temp. test, thermal shock test, steady damp heat, cyclic damp heat, gas corrosion test, HAST etc. according to GB, MIL and IEC standard methods or customer’s required method.

环境可靠性测试实验室设备一览Environmental reliability testing lab equipment summary & Standards

环境可靠性测试实验室实验室部分仪器Equipment of environmental reliability testing lab

ESPEC Thermal Shock Yamasaki Gas Corrosion Chamber

仪器 Equipment 测试能力 Capability

温湿度试验箱T/H Chamber

(-20/-40 ~ 150 oC; 30 ~ 98% RH) (-20/-40 ~ 150oC; 20 ~ 98% RH)

( +5 ~ +85 oC; 40 ~ 95% RH)

加速老化试验箱HAST

105 ~ 143 ºC, 75 ~ 100 %RH

高低温试验箱High/Low Temp. Chamber

-70 ~ 180 ºC, 1.0 ºC/min; 2.5 ºC/min

高温试验箱Oven

25 ~ 250 ºC

冷热冲击试验箱Thermal Shock

(+60 ~ 200 oC; -75 ~ -10 oC) (+60 ~ 150 oC; -65 ~ -10 oC)

(-55 ~ 150 oC )

气体腐蚀试验箱Gas Corrosion Chamber

25 ~ 80 ºC, 75 ~ 95 %RH;HCl, Cl2, NO2, SO2, H2S

盐雾试验箱Salt Spray Chamber

/

• GB/T 2423.3; GB/T 2423.4• GB/T 2423.50; GB/T 2423.51• JESD22-A104-B• J-STD-020B• MIL-STD-883E• MIL-STD-202G• JIS C 0025; JASO D 001• EIAJ ED-2531A• ASTM B827/ EIA-364-65• ISO 10062 / ASTM B845-97• ISO 21207/ IEC60068-2-60• GB/T2423.17• GB/T2423.18/IEC60068-2-11

Humidity Chambers

适用标准R

efe

ren

ceSta

nd

ard

- 10 -

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电磁兼容测试实验室EMC Testing Lab

MSL电磁兼容测试实验室现可对电子产品尤其是车载电子提供EMC测试服务。 MSL EMC testing lab can provide electric product EMC testing services to customers (especial automotive electric product ).

辐射骚扰测试Radiated Emission

空间辐射测试Space Radiation

传导骚扰测试(电压法)Conducted Emission (voltage method)

脉冲抗干扰测试Pulse Immunity

辐射抗干扰测试Radiated Immunity

EMC 实验室车载电子测试项目Testing items for automotive electric products

No. 测试项目 Test item 测试能力 Capacity 对应标准 Standard

1 Radiated Emission 150kHz~2.5GHz CISPR 25

2 Conducted Emission (voltage) 150kHz~200MHz CISPR 25

3 Conducted Emission (current) 150kHz~1GHz CISPR 25

4 Transient conducted test ≤100A ISO 7637-2

5 Radiated Immunity ≤100V/m ISO 11452-2

6 Pulse Immunity ≤100A, 800V ISO7637-2/-3, EN50498

7 TEM Cell ≤200V/m ISO11452-3

8 BCI ≤400mA ISO11452-4

9 Strip line ≤200V/m ISO11452-5

10 M/F Immunity ≤1000A/m ISO11452-8

11 Portable Transmitter Immunity ≤1000A/m ISO11452-9

12 ESD ≤30kV ISO 10605

13 CE mark 30 MHz~1GHz EN 50498

14 Electrical Loads ≤100A ISO 16750-2

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Page 12: Overall - china.tdk.com.cn

静电测试实验室ESD Testing Lab

MSL 静电测试实验室主要测试服务项目为防静电材料特性测试。 The main services in MSL ESD testing lab is ESD material performance testing.

Surface resistance/resistivity meter Charged Plate Monitor

Coulombmeter Electrostatic voltmeter

防静电材料性能测试主要仪器Main equipment of ESD material performance testing

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Shielded bag test system

• 表面电阻/电阻率测试• Surface resistance/resistivity test

• 体积电阻/电阻率测试• Volume resistance/resistivity test

• 衰减时间测试• Decay time test

• 静电压/摩擦电压测试• Electrostatic/Triboelectric charge

voltage test

• 电荷量测试• Charge quantity test

• 点对点电阻测试• Point-to-point resistance test

• 对地电阻测试• Resistance to ground

• 静电放电屏蔽• Static discharge shield

• 防静电袋测试• Shielded bag test

Static Decay Meter

测试项目Testing items