MAIREAD SHINNORS

ANALOG DEVICES INTERNATIONAL

LIMERICK

IRELAND

Our People are our

Future

ADI celebrates 50 years in Business

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Communications

Industrial

Instrumentation

Portable Media Audio/Video

Medical Imaging

Industrial Instrumentation

Communications

Computer Portable Media

Medical Imaging

Audio/Video

Analog Devices Inc. What do we do ?

A global leader in high-performance semiconductors for signal processing applications Covert Real world Signals to Digital

Where do you find our products?

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Multi media Medical Imaging

Car’s Industrial Robots

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Analog Limerick Campus 40 Yrs. old next Year

Established in 1976 as ADI’s CMOS Facility.

Approximately 1100 employees.

State-of-the-art Mixed Signal Wafer Fabrication

ADI’s European Research and Development Centre is based in

Limerick, New building opened in 2015 which won the first LEED

Platinum award in Ireland.

Leadership in Energy & Environment Design

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OPEX Programs supports

ADI’s Operational Principals + Process Control Pyramid

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Safety

Safety Focus Group

Environment

6S Sustain

Materials

Back To Basics

Operations New Product

New Equipment

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ADI Limerick – Process Control & Continuous Improvement – 2014 /

2015

2014 / 2015 Operational Excellence Program Objectives:

SAFETY – Promote compliance to all SAFETY protocols on Site,

encouraging open discussion on improving systems and

communications through engagement.

The removal of obstacles to FLOW, through the application of Lean

Tools and systems.

The elimination of WASTE through the promotion of Cross functional

Collaboration, with the primary focus being at the tool level.

Utilise and engage the Talents of ALL EMPLOYEES to take

responsibility for identifying waste and obstacles to the delivery of

ADI’s Operating principles of Safety , Quality , Output and Value 4

Money -

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Your People are your Greatest Asset

How do you create an environment where people feel they are valued in the organisation ?

Encourage engagement by giving more tool ownership

Provide opportunities outside of their Primary Roles where they can develop Skills which will

enhance their career opportunities

Value your employee as well as the customers

Focus on development of Skills at the tool user level.

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Procedure Spec Updates

Historically all procedures were written by the Eng group .

Over the last 12 months all our production spec’s have been

rewritten my the MTM group in collaboration with the Eng group.

Different shifts took ownership for different WorkCentre's and these

Spec rewrites were project based.

► Less text More picture ‘ a picture is worth a thousand words ‘

► This reduced Spec size by 75% in some cases

► Precise and easy to use for training

► Plan is to insert Video’s into the specs to be used as training

aids.

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Back 2 Basics Program 2015 S

afe

ty

• Define Assessment – IPAD Model

• Fix / Task discrepancies

• Report Metric & Actions – Monthly EHS Rep meeting

• Support Safety Project Group >3mths.

En

viro

nm

en

t

• Cleanroom Conformance

• 6S Sustain Audit Program

• 2016 Airlock – Install Xmas

• Inkless Fab – Goal Jan 16

• Equipment Service & Support - Spares

Ma

teria

ls

• Silicon Storage – Boxes , Cassettes , Racks , Stockers, Internal Cleaning

• Silicon Handling – Transfer Tools , Notch Align, Compliance, Training and Awareness

• Silicon Management – Use / Reuse

12 SUPPORTING YIELD

Keith Higgins

Manu Supervisor

John Guerin

MTM

Teresa Counihan

MTM

Safety Focus Group

KEITH HIGGINS

MANUFACTURING SUPERVISOR

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Standard Safety in the workplace

► We are all responsible for our own safety and the safety of others in the workplace by adhering to

all safety procedures set in place. Good Practise and Good Standards.

► The EHS department is responsible for the overall safety of the Plant and the people who work

there.

Safety Statement

Monthly EHS Safety meetings

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Problems we wanted to Address

► Site Safety Spec LK00606

Written by the EHS Department for EHS ,

No interaction with the MTM’s post initial induction training on LK00606

► Lack of Engagement by the MTM’s in relation to ownership for safety issues on Shift.

► EHS monthly meeting

No time allocated for Reps to discuss issues/Concerns highlighted from their Shifts

Very little Personal Development training provided for MTM’s in relation to Safety

► 8 Point Safety handover

Paper based logbook

Not always completed

Book goes missing

Need and IT solution to replace logbook

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Safety - Safety Focus Group

► SAFETY – Promote compliance to all Safety protocols on Site, encouraging open discussion on

improving systems and communications through engagement on Shift.

► Members

Keith Higgins ( Fab ) , Claire Frawley ( Probe )

EHS Reps / MTM’s

EHS – Elaine Egan / Anne Marie O Dwyer / Tara

► 14 members not including the EHS Department

All 14 have 3rd level Education in H+S

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Safety Focus GROUP

MTM’S

Technicians

MTM EHS REP’S FETAC Trained

► Each shift has a EHS Reps , The safety reps receive an Initial 3 day course and then a refresher course every 3 years.

The course covers at a top level:

Health & Safety Legislation

Role and Function of the Safety Representative and Safety Consultation.

Hazard risk assessments

Accident investigation and reporting

Active and reactive monitoring

Effective communication skills

The EHS Rep attends the Monthly EHS meeting and raises any issues or concerns they have on behalf of

their shift.

The EHS Reps are members of the Safety Focus Group

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► 8 point Safety handover

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Safety Focus Group

► Site Safety Spec LK00606

Focus on improving MTM Awareness &Interaction with the Site Safety Spec

MTM’S to rewrite the Spec in the same format as the Operation Spec’s

Recertification being reviewed annually.

► EHS monthly meetings

EHS MTM REP’s now have a 15 minute slot at the monthly meeting where they report on Audit discrepancy’s and present Shift safety concerns and solutions.

An IPad App was sourced to replace the logbook

EHS Reps completed the audit daily.

Questions are scoring and weighted.

► VDA6 Audit Manager – IPAD APP

► Corrective Actions within Manufacturing control

► Metric Based scoring App

► Fix it , Tasks or Project’s Projects owned by the EHS Department

► Capture Idea’s and Suggestions to Improve

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Audit Discrepancies

Audit Examples

► IPad APP

Data Base for collecting Discrepancies i.e. Photo’s

► Metric Based, scored accordance to adherence

► Some other examples of on shift discrepancies

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Conclusion

► Safety Focus Group has given the MTM’s, Tec’s and Supervisors on shift a vehicle to

Audit , Assess and Fix on shift Safety discrepancy Task's .

► By providing Training for the EHS Reps they are now confident with their skill and knowledge to

participate on projects with the EHS group.

► By Investing in your people you are investing in your future.

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Inkless /Paperless Fab Project

JOHN GUERIN

8’ WAFER FAB MTM

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Inkless Fab

► The issue of Graffiti /Biro marks were highlighted through our 6S Audits.

► History of Ink damage in the Fab

Both Legacy and recent – Accidental & Deliberate – Hard to remove

Suits being dumped as unable to remove Ink in Cleanroom Wash cycle

► Our solution was to go inkless in FAB

Ink is a metallic contaminate,

6S Shine golden tool required us to remove all biro marks from equipment .

Ink damage does not look good when showing Customers around .

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Alternatives to the notebook and Pen

► All requirements were identified across all functional groups in relation to data and information

storage , Biro’s , note books , logbooks ,manuals and spreadsheets etc.

► A replacement for these was sourced to be used in a trial.

► MTM’S recommended Boogie boards to replace their notebooks and designed a way to attach a

boogie board to the production Trolleys.

► Supervisors used a boogie board that can store data if required

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Information Management –

Equipment and Engineering ,

• Books are Stored @ Desks – Brought in / out

of Fab – Poor Housekeeping

• Not shared with other members of the Team

• No standard method for record keeping

• Not Searchable – Hard to find specific notes,

results and experiments

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► 27 Notebooks@$13

► $350

► 1 tablet 400e

Versus

Hardware Trialled

• Several devices were trialled.

• Hardware of choice was the Dell 10” Tablet.

• Windows based software.

• OneNote used as primary software tool.

• This started out as an inkless fab project but has turned out to be far more successful and have now become more of an information management project. The benefits are endless.

• All groups very impressed and very eager to get involved, the general consensus of the guys participating in the trail is that they will never go back to a notebook again.

• Full Trial approved for the IPD area . WIFI connected and Tablets in place .

• Rollout to other area’s expected early next year, Boogie boards already in place in all areas.

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Wafer Handling Improvement Team

TERESA COUNIHAN

MANUFACTURING MTM

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The Problem

► Defects and scrap due to mishandling of wafers by individuals and tools

► A Cross Functional Team of Eng’s ,Equip Tec’s and MTM’s was put in place to look at all aspects of

Wafer Mishandling .

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Materials & Handling Transfer Tool Team

►Goals

►Transfer Tools - Teresa Counihan MTM – Reduce occurrence of handling & near-miss scrap incidences

– Improve performance & uptime of transfer tools

► Manual Handling , Notch Aligners - Shane McLaughlin MTM

– Identify areas & implement solutions to reduce handling (Notch aligners)

►Training & Awareness - Mairead O Connor MTM – Back to Basics

– Set standards and roll-out training to all groups

– Induction training and create training material

Transfer tools

RAPIDRANS Vertical Transfer

FSI, EPI, WB4/WB6

IDLWs Vertical Transfer

WB5, 65FSI splitting

AWTs Automatic

Horizontal Slide Transfer

FSIs

GATs Manual

Horizontal Slide Transfer

Varians, Transfer room

BPP8s Horizontal

Batch Pick and Place

Semitools

SPP8s Horizontal

Single Pick and Place

Diff, Litho isles, CMP tool, IPD

UV cures

27 tools in total across all tool types

Type Description Tools serviced

Transfer tools Transfes Transfer Tools

Issue 1: Undetected FSI Cassettes (A192-81MJ-26)

New type Carrier switches do not have enough travel tolerance to detect the presence of White FSI Cassettes.

• Traditionally, the older type Carrier switches could be wound up or down.

• This is not best practice.

• Carrier switches should not need to be adjusted.

• Switch tolerances should be wider to accommodate various FSI cassette profiles.

A192-81MJ-

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Cassette

Carrier

Switch

AWT Historical issue

Issue 2 : Wafer Bumping during Transfer

This problem occurs when the pusher arm fails to transfer wafers from one cassette type to another.

• Usually more frequent when transferring the maximum load of 25 wafers.

• Occurs on all AWT tools.

• To recover from this error, the operator needs to reset the tool and repeat the transfer step.

Vendor Solution: A new modified mother board (Rev C) is available and is installed in 62AWT. However, as this tool failed to run since its refurbishment, this mother board has not yet been qualified.

Pusher

Arm

AWT Historical Issues: AWT historical issues

AWT Historical Issues: Issue 3: Slipping Motor Gear Head

This issue causes the belt to intermittently slip and not operate the pusher arm.

The Gear head is attached to the Motor shaft using a ‘Nyloc’ nut which if removed frequently loses its tightening effect.

Analog Solution: A single grub screw drilled through the gear head and through the motor shaft. The drill hole on the gear head is counter sunk to prevent damage to the belt.

Nyloc

Nut

Grub

Screw

Vendor Site Visit

► When the issues were highlighted to the Vendor they were insistent that all these errors had been

tested for during the manufacturing process and no issues arose.

► It was decided that a site visit to the vendor was appropriate to help identify the cause of the

problems.

We brought an example of the Teflon boats which we use as most of our problems occurred when

transferring wafers to and from these boats.

► We wanted to address the 3 main problems that I previously highlighted .

Bumping

Arm failing to retract due to a slipping Motor Gear Head

Undetected FSI Cassettes

On Site Test Evaluation:

1. Failure to Detect FSI Cassettes:

► Provided an existing FSI cassette which had been recently used in 62FSI.

► Reproduced error on 62AWT in the presence of the Vendor engineers.

► Established that the cassette used by the vendor was a virgin cassette and never used in the FSI process.

► Identified fundamental difference between both cassette profiles.

► The problem identified was that the cassette profile is effected over time due to the FSI process.

► Requested that the type of Carrier switch be changed to accommodate varying profiles.

► The Vendor insisted on maintaining current switches as they use a Micro-switch activator instead of spring

loaded sensor which they believe is more accurate and prevents carrier misplacement problems.

On Site Test Evaluation:

2. Slipping Motor Gear Head:

► Vendor acknowledged that this was not a good design.

► Vendor to discuss internally the possibility of implementing a design change.

► Note: For 62AWT, EMU have replaced the ‘Nyloc’ nut with a conventional nut instead.

3. Wafer Bumping During Transfer:

► Frequency of this error presented to the Vendor as a snap shot from a typical 12 hour shift.

► This problem has yet to be qualified with Rev. C mother board.

Closing Actions:

► To follow up with Vendor and ensure hardware changes are implemented to the Motor gear head for

all AWT tools.

► To ensure that vibration testing is also included as part of AWT final test sequence.

► To ensure AWT tool recognises the warped profile of the FSI Cassette.

► Analog training spec’ to be updated to include revised safety operation of AWT i.e. pusher arm will no

longer retract when the front Cassette is lifted. A consequence of the new Rev C. mother board.

Teresa – My Journey in Analog

► I am with the company 18 Years , I am an MTM in the Diffusion and Imp area of Fab .

► Outside my core role I have had the opportunity to develop in the following areas.

Redesigned and created new spec’s in my area. I am currently working on inserting Video as a training aid

within the spec’s.

Knowledge Assessments, I worked with an Engineering to create a Knowledge Assessment process in Diff.

Knowledge Assessor, I trained as an assessor and now I assess in the Diff area .

Previous to this MTM’S could only be assessed by an Eng or Supervisor.

I participate in Improvement projects, Site visits and interact with tool suppliers to better improve my work

area.

I have been trained as an ERT (Emergency Response Team Member).

As you can see here

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Conclusion

► Any Question ?

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