Optical Sensor - eng.surugaseiki.com · High Speed, High Resolution Laser Autocollimator : H900 Series HRAD ... in digital for runout, tilt and the outermost point by the dynamic

5017

Beam diameter（mm）φ1Wavelength

650

WD（mm）

150/230

Resolution

0.4/1.0/1.8 sec.

Measurement range

±0.17 ±0.9±0.5Sampling250/500kHz

Runout measurement of a precision motor. Dynamic surface and axis tilt of a polygon motor.

Measure an angle, wobble and deflection measurement of golvanometer mirror. Pitching and yawing measurement of actuator.

High speed・High resolution

Technicalguide

Selectionguide

Compact

Standard

High resolutionwide view

Screen

Ghostcancel

2 wavelength

Processingunit

Accessories

Laserautocollimatorset

Wavefrontsensor

6-axis sensor O-PIAS

Laserautocollimator

Accessories for alignment

Angle

measurem

ent

High Speed, High Resolution Laser Autocollimator : H900 Series HRAD

High-end autocollimator

■High speed sampling 500kHz(2 μsec)

Measure the angle of a displaced object at high speed

dynamically.1Measure 3,000 points/encircled if 10,000rpm

solid of revolution.

■High resolution 0.4 sec. (0.0001 degree)

Realize a measurement resolution 0.4sec.Catch the high

speed and fine angular displacement accurately.

＊In case of measurement range ±0.17 degree.

■Analog output voltages

Equiped analog output volgate to the sampling speed and can be build corelation environment for the analytical method with connecting to the oscilloscope and FFT analyzer.

※Contact us if you would like to know how to measure.

■Features

■Application

Optical Sensor

5018


Technicalguide

Selectionguide

Compact

Standard


Screen

Ghostcancel

2 wavelength

Processingunit

Accessories


Wavefrontsensor


Laserautocollimator


Angle

measurem

ent

■Functions

■Trace ■Zoom

■Adjustment automatic incident beam■Display the result・Communications

Can be visualized what

kind of trace does the

object move.

Can be recorded up to 100

data.Transport to the host

device by RS-232C.

Trace data is displayed 2

or 4 times zoom-in by the

zoom function.It is possible

to display an enlarged image

without trace.

Automatic adjustment

of incident beam that is

expected the refl ection

of the object makes

measurement stable.

Incident the beam to the mirror while rotating the polygon scanner

in actual rotation speed.Adjust the timing by the refl ection

from each surface, and measure

the angular tilt to Y direction

of each surface during

a set time period.

Available statistical displays

and acceptance

of judgmentfor each surface.

The mode is ordinarlly used. Tilt measurement of the object

in real-time.Processing and displaying tilt of the object

vibrating at high speeds driven digitally, and then output to

the other tools by high speed analog output.

Displayed measurement terms can be selected arbitrary

such as minimum, maximize and width of the XY axis.

This is for measuring runout of a precision motor.Calculate

in digital for runout, tilt and the outermost point by the

dynamic tilt of the rotation.Can be displayed in a short time

and correctly compared to the cumulative method by the

former CCD type autocollimator.

Displayed measurement terms can be selected arbitrary

such as runout, tilt, and the outermost point in addition to

each axis of XYD.

■Measurement mode

Standard Mode

Motor Mode

Polygon Mode (Compatible models only)

Tilt angle(vertical axis) of 8-axis(horizontal axis)

5019


Technicalguide

Selectionguide

Compact

Standard


Screen

Ghostcancel

2 wavelength

Processingunit

Accessories


Wavefrontsensor


Laserautocollimator


Angle

measurem

ent

Optical Sensor

87

45.2

40

6363

18 236173-φ8 69DP（The hole for sensor head fixing）

I/F

φ6H7 5DP、2 standard holes

8-4 5DP50

50100

162

30

45.256

1008272

109.5

180269

Laser outgoing position Conector

40

27.4

87

VIDEO Output

4-4 5DP200

13253.3

50

5027

.433

.511

7

74.5

126.8

58.5 2-φ8.5 68.5DP

55

I/FConector

Shutter speedLaser outgoing position

The hole for sensor head fixing

φ6H7 5DP、2 standard holes

Touch-pannel

177

179

（114）137

20°

■Dimensional outline drawings

SPECModel H900-P017C H900-P050C H900-P090C

Sampling speed250 type 250kHz（4μ sec.）500 type 500kHz（2μ sec.）

Measurement range Display deg. ±0.17 deg. ±0.5 deg. ±0.9 deg.Display min.sec. ±10 min.12 sec. ±30 min.00 sec. ±54 min.00 sec.

Reflected spot abservation camera Sold separately（C mount）Ｂuilt-inCentroid detection Luminance centroid within measurement range (1 point)Resolution 0.4 sec. 1.0 sec. 1.8 sec.Measurement wavelength Semiconductor laser 658nm±10nmLaser output 5.0mW or less（Typ2.5mW）　Class 3ROutgoing beam diameter φ1mm and less（outgoing 1/e2）The measurement object distance 230±30mm＊ 150±30mm＊

Signal processor

Display(operation) 5.7 TFT color LCD（touch-pannel type）

FunctionsAngle measurement, Relative origin, Switching units (deg./min.sec.)

3 of measurement mode (Standard/Motor/Polygon),Judgment of acceptanceControl the motorized and manual outgoing beam volume,Trace,Zoom,Data output

OutputAnalog output

Choose from 2CH X:（±10V）、Y:（±10V）、D:（0-10VOutput impedance 300Ω　Offset within ±20mV

Digital output 2CH open corrector output (1CH is output for acceptance)

InputTrigger input 1CH external sampling signal input（TTL level＜50kHz）Digital input 5CH photo coupler isolated input

Communication port RS-232C Measurement data output, controller inputEnvironment Recommended/strage environment 20±3℃/10-40℃（non-condensing）Power supply voltage AC100-240V±10％　50/60Hz（15W）External dimension（Sensor head） W162×H269×D87mm W117×H200×D87mmWeight（Sensor head） 4.1kg 1.8kgExternal dimension（Signal processor） W177×H179×D137mmWeight（Signal processor） 2.1kgAccesarry Power code, connecting code and instruction manual（0.4kg）Compatible tilt stage HB12

●Sensor head　H900-P050C、H900-P090C●Sensor head　H900-P017C

●Signal processor　HSP-100S （H）

＊The measurement length to maximize its potential

5020


Technicalguide

Selectionguide

Compact

Standard


Screen

Ghostcancel

2 wavelength

Processingunit

Accessories


Wavefrontsensor


Laserautocollimator


Angle

measurem

ent

■Set of measurement confi guration

■Model

Measurement range ・Resolution Sampling speed Product name Model Confi guration items Standard accessory Remark

Measurement range ：±0.17 deg.Resolution ：0.4 sec.

250kHzHigh Response Angle Displacement HRAD（Set of measurement／250kHz） H900-P017C-F250

H900-P017C-250SPower codeConnecting cable※2

Instruction manua

With C mount（Camera sold

separately）

HA12 High rigidity stand（Long）HB12 High rigidity tilt



Instruction manua

HA12 High rigidity stand（Long）HB12 High rigidity tilt




Instruction manua

Built-in camera※1

HA12S High rigidity standHB12 High rigidity tilt



Instruction manuaHA12S High rigidity standHB12 High rigidity tilt




Instruction manua

Built-in camera※1




Instruction manua


■Set of measurement　（Mainbody（Optical head specifi cation＋Signal processor）＋Ｔilt＋Stand）

Measurement range ・Resolution Sampling speed Product name Model Confi guration items Standard accessory Remark


250kHzHigh Response Angle Displacement HRAD250kHz/Stand-alone

H900-P017C-250S（H900-P017C）

Power codeConnecting cable※2

Instruction manua

With C mount（Camera sold

separately）

（HSP-100S）


H900-P017C-500S（H900-P017C）（HSP-100SH）



H900-P050C-250S（H900-P050C）


Instruction manuaBuilt-in camera※1（HSP-100S）


H900-P050C-500S（H900-P050C）（HSP-100SH）



H900-P090C-250S（H900-P090C）


Instruction manuaBuilt-in camera※1（HSP-100S）


H900-P090C-500S（H900-P090C）（HSP-100SH）

Measurement range ・Resolution Sampling speed Product name Model Confi guration items Standard accessory RemarkViewing：±0.17deg.Resolution：0.4 sec.Correspond to ~30,000rpm

500kHz

High Response Angle Displacement HRAD（PD built-in）500kHz/Stand-alone

H900-P017-500S（H900-P017C） Power code

Connecting cable※2

Instruction manua

（HSP-100SH）

Viewing：±0.5 deg.Resolution：1.0 sec.Correspond to ~90,000rpm

High Response Angle Displacement HRAD（PD built-in） 500kHz/Stand-alone

H900-P050-500S（H900-P050）

（HSP-100SH）

※1　Comfi rmable the measurement surface that could be caught a high quality refl ection with focusing spot on the CCD screen.※2　Cable connects to the sensor head and signal processor.※3　May be impossible camera corresponded due to Polygon model incorporate PD for timing.Available Standard/Motor mode in the Polygon model.

■Polygon compatible model※3

■High Response Angle Displacement HRAD　Mainbody（Optical head specifi cation＋Signal processor）

Tilt stage（HB12）

Sensor head

Stand（HA12S）

※Power code, connecting code and instruction manual are included.

Signal processor

5021

X=－0.3degY= 0.0degD= 0.3deg

Surface tilt

ＰＳＤ

ＰＤ

Detector

Measurement objects

Focusing lensPosition

Angle

Measurement objects

Collimating lens


Technicalguide

Selectionguide

Compact

Standard


Screen

Ghostcancel

2 wavelength

Processingunit

Accessories


Wavefrontsensor


Laserautocollimator


Angle

measurem

ent

H900 Technical Guide

Detector Product

CCD H350 H400H450 H600

PSD H900

Different a detector

Dinamic measurement for polygon scanner motorMeasurable total surface tilt level with high speed rotation.

Head for polygon made"There is Polygon mode program as standard on the part of signal processing, but the head for polygon mode for measurement is required."

Divided positioning sensor(Vertical480pixel × horizontal640pixel)

Detect the CCD with dividing information of vertical and horizontal.Also multiple refl ection SPOT are identifi ed.（HIP-1200 multi-spot measurement)

CCD　　Charge Coupled Device PSD　　Position Sensitive Detector

Non-divided type positioning sensor utilizing surface resistance of photo diode.

It has the exellent positioning resolution and response by getting the continuous electric signal (X/Y coordinates)

Multiple refl ectio SPOT are not identifi ed. (Not available multi-spot measurement)

Strengths

Weaknesses

Monitor display

Mirror surface detection method and measurement timing"The head makes measurement trigger pulse by receiving high speed PD to split the laser refl ection in the headfrom the Polygon motor."

Optical Sensor

■Diff erent from laser autocollimator H350, H400, H450 and H600

■What is Polygon compatible model?

5022

Measurement objects

PSDAnalog

A/D Conversion

H900

Digital

Angle conversion D/A Conversion

drawing

Determ-ination

Application software

２ｃｈ

Analog

Managing laser output

Digital signal

Oscilloscope

Correction of non-linear

A

B

A

B

World's Fastest500,000Hz


Technicalguide

Selectionguide

Compact

Standard


Screen

Ghostcancel

2 wavelength

Processingunit

Accessories


Wavefrontsensor


Laserautocollimator


Angle

measurem

ent

Almost critical speed part consists of the hardwear.

【A/D Conversion】PSD A/D conversion

Instantly correction

【High speed degital correction of non-linear】

Can be secure S/N by a wideband by Suruga original circuit(an amplifi er and A/D converter that built-in the head).

PSD is superior in position resolving and responsiveness, but it may be became the reason of the measurement error due to non-linear characteristic by a light receiving condition.Can be showed a more right value by a correction of non-linear of the hardwear in the high-speed measurement environment of 500kHz.

Actual valueActual value

theoretical value theoretical value

Measurement error：small

■The world's fastest angle measuring technology

Documents

Optical Sensor - eng.surugaseiki.com · High Speed, High Resolution Laser Autocollimator : H900 Series HRAD ... in digital for runout, tilt and the outermost point by the dynamic