Operating manual - Wordentec · 2008. 9. 9. · 2 Introduction IMG300.opm. 3. DESCRIPTION 3.1 Basic unit 3.1.1 Ionization measurement board This measurement board which is standard

Operating manual

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. Instruments

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T ABLE OF CONTENTS

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1. Important information

1.1 Information marked Note, Caution and DANGER

1.2 Protection against static discharges

1.3 Symbols

1.4 Explanation of code characters

1.5 Validity

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2. Introduction

2.1 Features

2.2 System overview

2.2.1 Basic unit

2.2.2 Supplementary p.c. boards

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3. Description

3.1 Basic unit

3.1.1 Ionization measurement board

3.1.2 Emission current setting

3.1.3 Emission current monitoring

3.1.4 Filament protection

3.1.5 Anode voltage monitoring

3.2 Supplementary p.c. boards

3.2.1 Pirani measurement boards

3.2.2 Cold cathode measurement boards

3.2.3 pirani / cold cathode measurement boards

3.2.4 Interface boards

3.3 Keasuring principles

3.3.1 Ionization measuring circuit

3.3.2 pirani and cold cathode measuring circuit

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5. Operation

5.1 Measuring with the IMG 300

5.1.1 Power on procedure

5.1.2 Dependence on gas type

5.1.3 Validity of displayed data

5.1.4 Accuracy of the displayed data

5.1.5 Alignment

5.2 Front panel

5.3 operating modes

5.4 Control key overview

5.5 SENSOR mode

5.5.1 Switching the gauge head on / off

5.5.2 out of range

5.5.3 Automatic gauge head selection

5.5.4 Self-monitoring

5.5.5 Degas mode

5.6 LOOK UP- / SET UP mode

5.6.1 Recalling / modifying

the equipment parameters

5.6.2 Summary of groups and functions

5.6.3 Standard parameters

5.6.4 Switching functions «Thresh»

5.6.5 Display mode «DispMode»

5.6.6 Measurement unit «Measunit»

5.6.7 IHR gauge head type «GaugeTyp»

5.6.8 Emission «Emission»

5.6.9 Degas time «DegTime»

5.6.10 Filament current «Filament»

5.6.11 Filament current monitoring «Protect»

5.6.12 Pressure monitoring «Protect»

5.6.13 Filament selection «Filament»

5.6.14 Filament test «Filament»

5.6.15 Filter time constant «Filter»

5.6.16 Calibration factor «CalFact»

5.6.17 P.c. board identification «slot x»

5.6.18 Interface «RS-232-C»

5.6.19 Parameter set «Paramset»

5.6.20 Hot start «Hotstart»

5.6.21 Under range control of

cold cathode measurement «PE-Urctl»

5.6.22 Access authorization «code»

5.6.23 Program version «PRG Numb»

5.6.24 Test programs «Test»

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4. Installation

4.1 Power connection

4.2 P.c. boards

4.2.1 Removing / installing the p.c. boards

4.3 Gauge head connections

4.3.1 Ionization gauge head

4.3.2 pirani and cold cathode gauge heads

4.4 Anode voltage interlock

4.5 Analog signal output

4.6 External initiation of switching function

4.7 19" Rack installation

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Table of contents IMG300.0Dm

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33

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Appendix

A Characteristic curves IHR measurement circuit

B Gas type dependence of the gauge head

C Literature

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6. Technical data

6.1 General

6.2 Basic unit


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7. Error messages, troubleshooting

7.1 Service and repair situations

7.2 Warnings

7.3 Error messages

7.3.1 Contact setting of the relays

in the event of a fault

7.4 Troubleshooting

7.4.1 Installation problems

7.4.2 Operating and alignment problems

7.4.3 Defects

~8. Maintenance 40

8.1 Alignment of the pirani measurement circuit 40

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9. RS-232-C interface

9.1 Installation and connection diagram

9.2 Data transmission

9.2.1 Definitions

9.2.2 Flow control

9.2.3 Communication protocol

9.3 Mnemonics

9.3.1 Measured values

9.3.2 switching functions

9.3.3 Display

9.3.4 IKR gauge head

9.3.5 Filter time constants

9.3.6 Calibration factors

9.3.7 P.c. board identification

9.3.8 Interface parameters

9.3.9 Auxiliary functions

9.3.10 Error messages

9.4 Program examples

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10- Spare parts, accessories

10.1 Basic unit


10.3 Power cable

10.4 Gauge head cable

10.5 Accessories for rack mounting

Table of contents iiIMG300opm

1. IMPORTANT INFORMATION

1 .1 Information marked Note, Caution and DANGER

NOTE: Draws the attention to the possibility of measurementerrors.

CAUTION: Draws the attention to operations that could damage themeasuring equipment or peripheral devices.

DANGER: Draws the attention to the possibility of personal injuryor danger to life for the operator or nearby persons.

1 .2 Protection against static discharges

CAUTION: certain electronic components are highly sensitive tostatic discharges which means that precautions to preventstatic charges must be taken. P.c. boards are to be storedin antistatic bags or containers.

BALZERS may decline any warranty obligations for defectscaused by the violation of this recommendation.

1 .3 Symbols

The following symbols are used:

~ Hazardous electrical vol tage

~ Refer to the operating instructions

..L Protective ground yellow/green)

1 .4 Explanation of code characters

The following types of brackets are used in these instructions:

< > Designation of the operator control/component (key, poten-tiometer, test socket, etc.)

« » Indication, response ( screen text, display data, LED, etc. )

» « Operating mode, effect ( »degas« , etc. )

1 .5 Validity

These operating instructions apply to ion gauge controls with serialnumbers BG 509782 --.You can read out the version of your equipmentby following the instructions in section 5.6.23.

General 1,..n'1nn ~n~

2. INTRODUCTION

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2.1 Features-Ionization pressure gauge for various BALZERS gauge heads.

-Additional slot either for dual Pirani, single cold cathode orcombined cold cathode/Pirani measurement board.

-Two slots for interface boards.

-continuous analog signal for each measuring circuit.

-six programmable switching functions with two thresholds each.

-Two external control inputs for switching functions.

-Digital filtering of the measured values.

-All parameters programmable manually and via the RS-232-C inter-

face.

-Nonvolatile parameter memory.-IMR gauge head protection based on pressure and heating current.

-Automatic emission changeover.

-Programmable hot start.

-Two-stage code lock.

-Exchanaeable p.c. boards, conversion or retrofitting capabilities.

2.2 System overview

') ? 1 Rasic unit

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For correct installation of the gauge head, please refer tothe instructions in section 4.3.

"

""""""'- --

Vacant slots Power supply

~B

~ ~..~ \...,

+IMR -gauge heads

HP gauges: BA gauges:

IMR 310 (KF) IMR 320 (KF)IMR 310P (KF) IMR 325 (CF)IMR 312 (CF)

DANGER:

Introduction IMG300.opm2

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3. DESCRIPTION

3.1 Basic unit

3.1.1 Ionization measurement boardThis measurement board which is standard equipment of the basic unit,is suited either for Bayard-Alpert or high-pressure gauge heads. Itessentially consists of an emission current control circuit and alogarithmic electrometer amplifier. Two control inputs are availablefor external control of the measuring circuits and the switchingfunctions. As on the other measurement boards there is also an analog

signaloutput.

3.1.2 Emission current settingIf you select the automatic emission current setting (Emi Auto), theunit works with lower emission at high pressures and with highemission at low pressures. The changeover occurs about two decadesbelow the upper measurement limit of the connected gauge head. Thehysteresis is approx. 1/2 decade.This standard setting is satisfactory for most applications. Forspecial applications you can select a fixed value for one of the twoemission currents (refer to section 5.6.8).

3.1.3 Emission current monitoringIf the actual emission current deviates from the preset value by morethan 15%, e.g. because the gauge head cable is too long, the errormessage «EmissErr» comes. At the same time the emission and the anodevoltage are switched off.

3.1.4 Filament protectionDuring the operation the filament is protected against burn-out in

two different ways (filament protection):

Filament current monitoringThe filament current I is monitored by the microprocessor. Duringdegas the selected cutoff limit I (refer to section 5.6.11) isautomatically increased by 20% ba~ed on the higher heating current

consumption.If the monitoring circuit responds the error message «I>Ip_IMR»occurs. The emission and the anode voltage are switched off.

Pressure monitoringIf a fixed pressure limit P is exceeded, the emission as well as theanode voltage are switched bff. The corresponding error message is

«p> Pp_IMR» .

Description IMG300.opm4

3.1.5 Anode voltage monitoring

The anode voltage is monitored by an over-power protection circuitwhich responds in the event of short circuits and glow discharges inthe gauge heads.

If the power drawn exceeds approx. 15 W, the emission as well as theanode vol tage are swi tched off and the error message «AnodeErr»appears.The same error messages occurs if the connection <IMR enable> (ex-ternal anode voltage interlock) is open (also refer to section 4.4.)


Refer to the relevant operating instructions 3

3.2.1 Pirani measurement boards

pirani measurement boards contain two independent medium vacuummeasurement circuits. One gauge head connector, two trimmerpotentiometers, and one analog signal output are available for eachmeasurement circuit. The pirani measurement circuits are alwaysenabled when the ion gauge control is switched on. The analog signalsare continually available, independently of the pressure indication.

Measurement boards for different gauge heads and line lengths areavailable.

3.2.2 Cold cathode measurement boards

Each cold cathode measurement board for high vacuum and ultrahighvacuum contains one measurement circuit. An analog signal output isalso available. When the gauge head is switched on, the analog signalis continually available, independently of the pressure indication.

Measurement boards for the pressure range of 10-1° mbar and lowerfeature a special electronic circuit which limits the measuringcurrent to 100 ~A. This greatly extends the life of the gauge heads.

Various measurement board versions are available that cover a widerange of measuring applications.

3.2.3 Pirani / cold cathode measurement boards

As the name implies, this category of boards features one pirani andone cold cathode measurement circuit. The characteristics of thesemeasurement circuits correspond to the measurement boards describedabove.

.

np~('!rint-inn ~IM('1~ nnm

3.2.4 Interface boards

Two interface board types are available for card slot C. Both containan RS-232-C interface and five relays with floating changeover con-tacts. Four of these can be assigned to any measurement circuit andbe used directly for controlling the processes. The fifth relay tripsin the event of a fault. The principal difference between these twotypes is the switching voltage of the relays and the type of inter-face port.Slot B is reserved for an additional interface board which is not yetavailable at this time.

3.3 Measuring principles

3.3.1 Ionization measuring circuit

The quantity measured is the pressure-dependent ionization current ofa hot cathode gauge head. On their trajectory to the positive elec-tron collector, the electrons emitted by the cathode ionize the ex-isting gas molecules. As a result, positively charged ions are crea-ted which can be measured with the aid of the ion collector. Theemission current is stabilized by a control circuit which means thatwithin the measuring range the ion current is proportional to thepressure. The measuring current is converted to a corresponding vol-tage by the electrometer amplifier and subsequently evaluated.

3.3.2 Pirani and cold cathode measuring circuit

Refer to the separate operating instructions 3]

Description6 IMG300.opm

4. INSTALLATION

DANGER: Whenever it is likely that the protection has been impai-red, the apparatus shall be made inoperative and be securedagainst any unintended operati. The protection is likely tobe impaired if, for example, the apparatus:-shows visible damage,-fails to perform the intended measurements,-has been subjected to prolonged storage under unfavoura-

ble conditions, ,-has been subjected to severe transport stresses.

4.1 Power connection

You can connect the IMG 300 without voltage adaptation to any con-ventional supply system equipped with protective ground. A matchingpower cable is normally supplied with each unit.

DANGER: The mains plug shall only be inserted in a socket outletprovided with a protective earth contact. The protectiveaction must not be negated by the use of an extension cordwithout a protective conductor.

To ensure continual grounding, connect the power cablebefore any other cables and conversely, detach all othercables before the power cable.

If you make a power cable to suit yourown requirements, you will need and EU-standard appliance connector (refer tosection 10.3).

If the unit is rack mounted, the AC line voltage should be suppliedvia a switched power distributor.

4.2 p .c. boards

DANGER: For safety reasons,with dummy panels.

vacant slots should always be covered

4.2.1 Removing / installing the p.c. boards

DANGER: Although it is of the plug-in type, the ionization measu-rement board is an integral part of the IMG 300. It is notpermitted to operate the ion gauge control without theIM 300.

The procedure for installing / removing the supplementary plug-inboards is described in the relevant operating instructions [3].

Installation 7IMG300.opm

4.3 Gauge head connections

DANGER: Additional protective measures should be implemented ifcertain processes in the vacuum system (e.g. flashoverscause dangerous voltages on the gauge head terminals.

The gauge head cables should not be run parallel to linesproducing strong noise.

NOTE

4.3.1 Ionization gauge head

DANGER: The IMR gauge head is to be installed in the vacuum chamberin accordance with the relevant operating instructions [4],[5 .

The gauge head is linked to the <IMR> connector by means of the7-conductor cable (with integrated coaxial cable). This connector canbe interlocked.

On the bottom right at the rear panel of theIMG 300 there is a ground pin which is to beconnected to ground if an IMR 310P gauge headis used.

The gauge heads of the series IMR 310 and IMR 320are automatically recognized by the ion gaugecontrol and the corresponding parameters are se-lected.

The maximum cable length of 30 m (conductor cross-section 1.5 mm2)may only be exceeded by increasing the conductor cross-section(special cable required).

4.3.2 Pirani and cold cathode gauge heads

Refer to the separate operating instructions [ 3 ]

Anode voltage interlock < IMR enable >

ion gauge control is equipped with an anode voltage interlock.

Install the IMR gauge head correctly so that it is safe totouch.

DANGER:

Installation8 IMG300.opm

If in your specific application you rcannot install the IMR gauge head insuch a way that it is safe to touch, Bildyou must provide a floating contact on pin assignJlent viewed froJIthe vacuum chamber to make sure that the connector facethe anode voltage is automaticallyswitched off when the contact is ope-ned. Depending on the system type thisoccurs when the vacuum chamber door isopened, the bell is lifted, etc. The ,

contact is to be connected by means ofa screened cable to the <IMR enable>terminal on the rear panel of the iongauge control. The screening is connec- Lted to the gauge control over pin 2 andis left open on the vacuum chamberside.

In all other cases it suffices to bypass the contact with the sup-plied jumper. If the contact remains open, the message «AnodeErr» isdisplayed when the emission is switched on.

The anode voltage interlock acts only on the IMR gauge headand not on the high voltage of any cold cathode measurementcircuit.

DANGER

4.5 Analog signal output <OUTPUT>

Each measurement circuit features an analogsignal output. Matching connectors (diam.2 mm) are supplied.

. Pin assignment vievwd fromthe connector face

2

4.6 External initiation of switching function < EXT IN >

with corresponding selection of thecontrolling source (refer to section5.6.4), the switching function can beset to »on« via this socket. A TTLsignal or a floating contact can beused for this purpose.

Use of a shielded cable is recommended(shielding on pin 2).

1- 4: EXT 1 IN

3- 5: EXT 2 IN

2: Chassis

~

Installation QIMG300opm

4.7 19" Rack installation

The IMG 300~can be installed in a 19" rack mount adapter according toDIN 41494, but not in older rack frames conforming to BALZERS stand-ard.

DANGER: If the unit is built into a 'rack frame the necessary pro-tective system (protection against foreign substances andwater) must be adhered to, e.g. switching boxes accordingto DIN V DE 0113.

The ambient temperature inside the rack must not exceed+50 °C.

CAUTION:

If older units (BALZERS standard) are to be installed in the samerack frame as the IMG 300 (DIN), a special adapter is required (referto section 10.5).

Installation10 IMG300.opm

5. OPERA TION

5.1 Measuring with the IMG 300

5.1.1 Power on procedure

CAUTION: Before you switch on the equipment, check that all p.c.boards, connection cables and gauge heads are installedcorrectly (refer to Section 4) and that the technicalparameters are satisfied (refer to Section 6).

DANGER: Any interruption of the protective conductor inside or out-side the apparatus or disconnection of the protective earth

, terminal is likely to make the apparatus dangerous. Inten-

tional interruption is prohibited.

~

The power switch is located on the back of the unit. After power hasbeen switched on, the ion gauge control performs a self-test and re-activates the parameters which where in effect before the power wasswitched off. After approximately two seconds all measurement cir-cuits with activated hot start (refer to Section 5.6.20) and alloperational Pirani gauge heads are switched on. The measured value ofthe first measurement circuit in operation will be displayed.

After switching off wait 10 seconds before turning the unit on again(start circuit reset, defined soft-start).

Make sure that the <IMR enable> connection is closed, otherwise theemission cannot be switched on (refer to section 4.4).

5.1.2 Dependence on gas type

The measurement indication of the ion gauge control depends on thegas type. A calibration factor of 1.00 relates to nitrogen (N2).

For other gases please note that the calibration factors listed inAppendix B have to be taken into consideration.

5.1.3 Validity of displayed data

The measured values displayed after power provide information on thepressure in your vacuum system. Depending on the condition of thegauge heads as well as the electrical and thermal time constants, itmay take a while before the reading stabilizes (given astatic pres-sure). This is particularly important to note if you intend to usethe measurement results for control functions.

5.1.4 Accuracy of the displayed data

No generally valid statement concerning the accuracy of the measuredvalues can be made. In addition to the gas type it depends largely onthe actual condition of the gauge head.

The momentary accuracy of the gauge head can only be determined bycomparison with reference equipment. For reliable comparison measure-ments, particularly at pressures below 10-4 mbar, different calibra-tion pumping stations are available.

Operation 11IMG300opm

5.1.5 Alignment

Ionization and cold cathode measurement circuits are factory-alignedand require no recalibration.

pirani measurement circuits are also factory-aligned. For accuratemeasurements please refer to the separate operation instructions [3].

5.2 Front panel

Unit of measure

Gauge head selection indi-cation for main display

Gauge head selection indi-cation for auxiliary display

Main -

display

Auxiliarydisplay

switchingfunctionstate

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status

information

F3ALZERS IMG 300

Ion a Control

IMG

eml Lo

-eml Hi

dog ..1

HP BA

A1 A2

0f1 0f1

A2

IBJ.

,IMG

IA1

.A2 1 2 3 4 IMG A

vvvv v v-

Err set points~nsOf look up set up

sensor

D

look up

DDO-step funct group

I 1-for ~nsoron/oll PfeS5 .degM on/oIl .~up C

.00 keys0.0.0.

~

Operating informationfor combinationkeyactuation

Changeover toSET UP mode

Changeover toLOOK UP modeChangeover to

SENSOR mode;selection of gauge headwhose data are tobe displayed

,Current

operatingmode

,Error message

Operation12 Front panel IMG300opm

5.3 Operating modes

The IMG 300 can operate in three different modes:

SENSOR mode

-Pressure measurement-Select gauge head-Switch gauge head on/off

LOOK UP mode

-Read out the equipment parameters

SET UP mode

-Modify the equipment parameters

Power on, I.

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SENSOR modeExplanation

of symbols

:: ..::: .:: ::::::

',": :"", :"" .

, I

, ,

.

Keys on thefront panel

LOOK UP mode

" l 'I

::::: ...:. .

..:. .::.:: .::...

J.Press key

.

~"

00:: .: .

SET UP mode

eOperation Operating modesIMG300.opm 13

I --I

~ ~Press keys

simultaneously(refer tosection 5.4)

5.4 Control key overview

.SENSOR mode(Pressuremeasurement)

SET UP mode(parameter selection

LOOK UP mode

(Parameter inquiry)

" .:":

Select next functionin SET UP mode, if

existing

:::::: :::::: :::::: .

Select next group inLOOK UP mode

.:::::: :::::: ::':':

Select gauge head

..::":: :"::: 1.)

Switch selected gaugehead on or off

..

:::::~ :~::~: ...:.

:::::. .,.::: ::...

Modify the selectedparameter orstart the test pro-

grams.00 .° 3.)

Switch degas on or

off

..~::~~: ::~~:~ 1. )

.:':: .:::~:~ ::::~

Displayexistingerror messages

.:::::: :::::: '::'

Activate SENSOR mode

.:..:.. .:.:... 1. )

Switch degas on oroff

..;::::: :;;::: .

Activate LOOK UP mode

.....~ ::~:.: ...

.:::\:: :::::: ::'::'

Activate SENSOR mode

:::::: .::0:0: .3. )

Activate SET UP mode

..:::::: :::.:. .

::":: :::::: :::::: .

Activate LOOK UP mode

In order to void unintentional entries, certain operations requirethe actuation of two keys. The operating information on the frontpanel specifies which keys need to be pressed simultaneously. Itis important, however, that <sensor> or <look up> are not pressedbefore the other key, otherwise the basic function will be execu-ted.

operation overview14 IMG300.opm

Select next functionin LOOK UP mode

Switch selected gaugehead on or off

Delete existing errormessages

Delete existing errormessages

5.5 SENSOR mode

5.5.1 Switching the gauge head on / off

Main display Auxiliary display

Measured value ore .g.


IBlEl

Each measurement cir-cuit can be indivi-dually switched on oroff.

Manual on / off-swit-ching has priorityover the automaticcontrol.

MG Off

pirani gauge heads are not deactivated byswitching them off, only their measuringresults and the error message are suppressed.

Note: Switch on thecold cathode gaugeheads at pressures of<10-3 mbar, in orderto prevent excessivecontamination of thegauge head.

When the measurementcircuit Al is swit-ched on, the «on» LEDon the frontpanel is light.

When the measurementcircuit A2 is swit-ched on, the «on» LEDon the frontpanel is light.

When the IMG measure-ment circuit is swit-ched on, the LED«emi Lo»or «emi Hi»lights up.

5.5.2 Out of range

Main display Auxiliary display

OverRngI ...I

Measurement overrange: «or» and expo-nent which specifiesthe range limit

Measurement overrange: «OverRng»

If the measured valueis outside the measu-ring range of theboard, this will beindicated if thecorresponding gaugehead is selected.

If the ionization orcold cathode measure-ment circuit is con-trolled by anothermeasurement circuit,the display changesover automatically.

Note: If the measurement upper range limit isexceeded, the cold cathode gauge head can be-come contaminated if it remains switched on.

Operation SENSOR mode 15IMG300.opm

UnderRng...I

Measurement underrange: «UnderRng»

Measurement underrange: «ur» and expo-nent which specifiesthe range limit

Note: If the under range control is switchedoff (refer to section 5.6.21), the systemcannot distinguish between a gauge headfailure, cable interruption, and under rangeof a cold cathode measurement circuit.«Underrange» is displayed in all cases .

5.5.3 Automatic gauge head selectionIioMIi

Auxiliary displayMain display

Measured value ore.g.

Measured value ore .g .

Wa it...

A 2.,

Automatic control:«Wai t A2 » , awai t thefulfillment of thepower on condition bythe measurement cir-cuit A2.

Automatic control:«Au»

If a measurement cir-cuit is controlled byanother measurementcircuit and if eitherone is selected, the

displayautomaticallychanges over.

-If the measuredvalue drops belowthe lower thres-hold, or

-If the measuredvalue exceeds theupper threshold

w

operation SENSOR mode16 IMG300opm

5.5.4 Self-monitoring



Measured value ore.g.

A 1 OfI. ...I

If the ionization orcold cathode measure-ment circuit is self-monitored, it automa-tically switches off

-If the upperthreshold isexceeded.

The circuit must berestarted manually.

5.5.5 Degas mode

Degassing of the ionization gauge head makes sense only at low pres-sures. For this reason «degas» is only allowed at pressures below apredefined threshold (refer to section 6.2).

If the attempt to degas at higher pressures, the warning «p>PDegas»is output briefly.


During the degassingof the ionizationgauge head the cur-rent degas time isshown on the auxi-liary display, provi-ded the IMG measure-ment circuit isselected.

I r;{? D

!BJ1~/fjDt = 0 : 3 4

I. ...I

Degassing lastsanother 34 seconds

Upon activation of «degas», gentle degassing, i.e. with 1 W, isperformed during the first five seconds, before degassing with thefull power of 10 W occurs. The total degas time can be selected(refer to section 5.6.9).

pirani and cold cathode gauge heads cannot be degassed.

Operation SENSOR mode 17IMG300opm

5.6 LOOK UP- / SET UP mode

.,5.6.1 Recalling / modifying the equipment parameters

You can check the setup of your equipment by selecting the individualparameters in LOOK UP mode by means of :~:::: [::::: [::[[[ .<group> and :::: :::: .:~~

<funct>.

In order to modify a parameter you must first select it in LOOK UPmode before you can alter with in SET UP mode with ..:: <funct>and. : .<step>. The parameter that can be changed flashes.

5.6.2 Summary of groups and functions

Group Function(s)

ThreshSETPOINT

~DispModeMeasunit

DISPT.AY

IMRGAUGE GaugeTypEmissionDegTimeFilament (heating

current)(current)(pressure)(selection(test)

ProtectProtectFilamentFilament

FILTER IMGAlA2

CALFACT IMG

Al

A.:>; ~

IDENTIFY Slot A

Slot B

Slot C

.c:;.lot D

COMMIJNIC R.C;-232-C

Groups, functions or para-meters which do not existbecause of the equipmentconfiguration will be by-passed.

AUXILIAR ParamSetHotstartPE-UrCtlCodePRG NumbTest

Operation LOOK UP-/SET UP mode18 IMG300.oom

5.6.3 Standard parametersThe standard parameters are summarized in the following table. In the'user' column you can enter your own parameter set.

UserStandardParameter

1.0.10-11 mbar

1.0.10-11 mbar

1.0.10-11 mbar

1.0.10-11 mbar

1.0.10+0 mbar

6.0.10-3 mbar

Switching function 1




Switching function I

Switching function A

Lower threshold

9.0.10-11 Jlbar

9.0.10-11 Ibar

9.0.10-11 Jlbar

9.0.10-11 Jlbar

1.5.10+0 llbar

8.0.10-3 Jlbar

switching

Switchihg

switching

switching

switching

Switching

Upper threshold

No (none)

No (none)

No (none)

No (none)

No (none)

No (none)


switching function 2

switching function 3


switching function I

switching function A

Switching function assignment

Sel/Barqmbar

Display mode

unit of measure

HP gauge

Filalll

autollatic

3.2 A

lllin

Gauge head

Filament

Emission Current selection

CUtoff threshold

Degas time

I KG measurement circuit

Measurement circuit A1


mediull

medium

medium

Filter time constant

IMG measurement circuit



1.00

1.00

1.00

Calibration factor

9600Baud rate

IMG measurement circuit

Measurement circuit Al


No

No

No

Hot start

No (disabled)PE Heasurement-underranqe-control

000 (unlocked)Code

LOOK UP-/SET UP mode 19operationIMG300opm

function 1

function 2

function 3

function 4

function I

function A

5.6.4 Switching functions «Thresh» (SETPOINT group)You obtain a measurement indication across all measurement ranges ifyou control the ionization measurement circuit with a pirani measure-ment circuit. External events can also be influenced via the relay

contacts if the IF is installed.

SET UP modeLOOK UP mode

11.0-11 No

l: Controlling source ( current pressure )

xl.O-llyy

.

x9.9+3yy

~> Threshold of the switching functionL-> Threshold of the switching function

The threshold is to be entered digit by digit.> Controlled switching function (assignment)

Note: The hysteresis between the upper and the lower

threshold pressure is at least 10% of the lower

threshold. This prevents an unsteady state. If the

upper threshold is set to a value less than the lower

threshold, this minimal hysteresis is taken as the

default.

The function of the gauge head is not influenced.

The output of measured values on the main display is not

influenced.

The switching functions are displayed cyclically.

First the lower and then the upper threshold of the

switching function is displayed.1 -) switching function 1, lower threshold

The current switching function state

can be determined at any time with

the aid of the LEDs (LEDs are light

when switching state »on«) .

-) switching function I, upper threshold

x

t..L -) switching function At upper threshold

A

~

A1 --) Measurement circuit A1

A2 --) Measurement circuit A2

IH --) IHG measurement circuit

Extl -> external control via the input <EXT 1 IN>

Ext2 -> external control via the input <EXT 2 IN>

No --) No assignment (switching function

inactive)

Assignments are only possible to existing sources.

The upper and lower threshold cannot be assigned to

different measurement circuits. The previous setting

is retained.

Changes become only effective with the next change to

SENSOR or LOOK UP lIode .

LOOK UP-/SET UP mode IMG300opmoperation20

5.6.5 Display mode «DispMode» (DISPLA y group )

SET UP lodeLOOK UP mode

Sel/~--~ L-) Mode of the auxiliary display (dot matrix

display)

> Mode of the main display (7-segment display)

IKG/Sel

Sel/Barg

Sel/ExpM

~> Main display: measured value of the selected

sensor,

Auxiliary display: 3-position measured value

of the selected sensorThe selected display lode has no influence on the other

equipment functions.

If the measured value of the same leasurement circuit is

displayed on the main and the auxiliary display, the one

on the auxiliary display contains two places after the

decimal.

~> Main display: measured value of the selected

sensor,

Auxiliary display: bar graph representation of

the lantissa

> Main display: measured value of the IMG sensor,

Auxiliary display: 2-position measured value of

the selected sensor

Changes become effective immediately.

5.6.6 Measurement unit «MeasUnit» (DISPLAY group)

LOOK UP lIode SET UP lIode

[mbar]

~> unit of measure of the displayed pressure

The indication corresponds to the LEDs on the

front panel.

rmbar]

ITorr]

[Pa]

~> unit of pressure: Pascal

.) unit of pressure: Torr

~> unit of pressure: mbar

The pressure transmitted via the interface does not

necessarily have to be expressed in the same unit of

measure.


The thresholds of the switching functions are

automaticallyadjusted.

5.6.7 IMR gauge head type «GaugeTyp» (IMRGAUGE group)

Operation LOOK UP-/SET UP modA ?1IMG300opm

(IMRGAUGE group)5.6.8 Emission «Emission»


Emi Auto

~ Emission current selection

When the IHG measurement circuit is switched

on, the front panel display shows the actual

emission.> Low Ellission

> Automatic changeover from low to high emission

and vice versa.


5.6.9 Degas time «DegTime» (IMRGAUGE group)


t= 1min

~otal deqas time

t= omin

.

t= lOmin

~> Total degas timeThe effective degas time is shown on the auxiliary

display under »degas« when the IHG measurement is

selected.Changes can be made in increments of one minute.

The changes become effective immediately.When »degas« is acti ve the corresponding front

panel LED is light

5.6.10 Filament current «Filament» (IMRGAUGE group)


No SET UPIf=3.19A

~ilament heating current

The heating current is only displayed if the emission is

switched on.

LOOK UP-/SET UP mode IMG300opmOperation22

Elli Auto

Elli Low

Emi High

I

5.6.11 Filament current monitoring «Protect» (IMRGAUGE group)


Ip> 3.8!..

Ip> 2.0!

I

Ip > 3.2A

-r: Filament cutoff current

L-> Haximum admissible current

ChanQes can be made in increments of 0.2 A.

The current value should be approx. 25-30% higher

than the heating current measured in the »Eli High«

position(e.g. measured heating current: If = 2.36 A

Recollended threshold: Ip = 2.95 A

Setting: Ip = 3.0 A).


5.6.12 Pressure monitoring «Protect» (IMRGAUGE group)

SET UP lodeLOOK UP lIode

No SET UPIp> 1.310+0

~lament cutoff pressure

The pressure depends on the gauge head type and is

displayed in the indicated unit of measure.

5.6.13 Filament selection «Filament» (IMRGAUGE group)

SET UP lodeLOOK UP mode

Filam 1

L-) Filament 1 in active

LOOK UP is only active if an IKR gauge containing more

than one filament is connected.

Filaml

l Filall 2

~> Filament 2 active

> Filament 1 active

~

SET UP is only possible if an IKR gauge head

containing lore than one filalent is connected

For SET UP the emission must be switched off.


8

The5.6.14 Filament test «Filament» (IMRGAUGE group)

The filament test can be conducted under atmospheric pressure.gauge head does not age because no anode voltage is applied. ~


FilamTst

L Test start

FilamTst

l: Test the active filament

Feedback: TestOkay

or: TestFail

The emission must be switched off for SET UP.

5.6.15 Filter time constant «Filter» (FILTER group)

If the measurement signals are unsteady, the measured values can befiltered for stabilizing the display and for stabilizing the swit-

ching functions.~


IHG Hedi, IHG Slow

I IHG Fast

~> Fast filter stage for IHG measurement circuit

IMG MediA1 Medi

A2 Medi

T T Filter stage

.) Slow filter stage for IMG measurement circuit> Keasurement circuit !2

I~> Medium filter stage for IMG measurement circuitI. .

L-) Measurement cIrcuIt Al

ChanQes become effective immediately.> IKG measurement circuit

Note: If the measurement signal fluctuates, fast

filtering can cause fluttering of a switching

function.~

The filter stages for the measurement circuits !1 and

!2 are set in the same way as for the IKG filter

circuit.

~

LOOK UP-/SET UP mode IMG300opmoperation24

5.6.16 Calibration factor «CaIFact» (CALFACT group)

The result of the measurements is influenced by the gas in the vacuumchamber as well as the selected measuring principle. This influencecan be eliminated by means of the calibration factor (refer toAppendix B).

LOOK UP mode SET UP mode

IMG 1.00A11.00

A2 1.00

~ Calibration factor

IHG 0.10

.

IHG 9.99

~> Calibration factor for IHG measurement

circuit

~> Measurement circuit A2

The calibration factor is entered digit by digit.

.> HeasureBlent circuit !1

Changes become only effective when the SENSOR or LOOK

UP mode is activated.-) IKG measurement circuit

If the calibration factor is not 1.00, the

corresponding front panel LEDs are light.

A calibration factor smaller than 0.10 is automati-

callv corrected to 0.10.

The calibration factors for the measurement circuits

!1 and !2 are set in the same way as for the I KG

measurement circuit.

5.6.17 p .c. board identification «Slot x» (IDENTIFY group)

LOOK UP mode SET UP mode

No SET UPCP x9L

T Detail identification

-) TVDe of circuit board

For the decoding of circuit board types as well as detail

identification refer to the separate operating instruc-

tions [3].

The identification is output for all slots according to

the same principle.

Operation LOOK UP-/SET UP mode 25IMG300opm

5.6.18 Interface «RS-232-C» (COMMUNIC group)

SET UP mode ~

L-) Transmission rate

LOOK UP is only active if an interface card is plugged

in.

I 300Baud

1200Baud

1 2400BaUd 4800Baud 9600Baud

Ii ~) Tr~n~Mi~~inn r~t~ qhOO hit/~ecL ' 4.~..~-~~~~_.. , -

> Transmission rate 4800 bit/sec

I ~> Transmission rate 2400 bit/sec

L-> Transmission rate 1200 bit/sec

L-> Transmission rate 300 bit/sec

The transmission rates of the IHG 300 and the

connected computer must be identical. ~

Changes become effective immediately

5.6.19 Parameter set «ParamSet» (AUXlLIAR group)

When the equipment is switched on, the previously active parameterset is reactivated. If the equipment is to be initialized, the de-fault values can be activated.

LOOK UP mode

~L-> Default values of the switching functions

xx

You cannot determine whether standard or user parameters

are currently active. ~ No -) Do not activate default values

L- y -) Activate default values

(also refer to section 5.6.3)

Caution: Activation of the default values has the

following effect:

-The switching functions are not assigned

-The relays drop out

-The communication with a computer may be disabled.

Changes are only effective when the SENSOR or LOOK UPmode is activated.

~

IMG300opm

5.6.20 Hot start «Hotstart» (AUXlLIAR group)

By activating the hot start, a measurement circuit can be automati-cally reenabled after a power failure. This is particularly useful inthe case of self-monitoring.


No No No

~> Hot start measurement circuit !2

No No No

IK !1 !2

~> Hot start activated

~> Hot start measurement circuit A1

L-> Hot start not activated

> Hot start IHG measurement circuit

The hot start is activated individually for each

leasurelent circuit.

5.6.21 Under range control of cold cathode measurement «PE-UrCtl)) (AUXlLIAR group)

The behavior of switching functions assigned to the cold cathodemeasurement circuit, can be adjusted (except in the case of self-

assignment).


UrCtl No

~> The «UnderRnq» is interpreted as a measured

value (switchinq function remains »on«)

UrCtl y

I Urctl No

~> The «UnderRng» is interpreted as a measured

value ( swi tching function remains »on« )

.) «UnderRng» is interpreted as a fault (switching

function changes to »off« ) .The switching func-

tion does not change to »on« until the measured

value has remained within the measuring range of

the cold cathode measurement board for at least

10 seconds.

~Caution: Cold cathode measurement circuits for the

range 10-11 sometimes requires more then 10 sec. for

the transition «OverRng» -) «UnderRng».

LOOK UP-/SET UP modeOperation 27IMG300oom

5.6.22 Access authorization «Code» (AUXlLIAR group)

As a protection against inadvertent or unauthorized manipulations onthe operating states of the sensors or the parameters, the operation

may be partially inhibited.


unlocked

~> Equipment not locked 11

Co OOOxx.

Co 999xx

L Code number

The code number is entered digit by digit.

xx

~ No -> Do not store code

.

{for code 000)

y -) Store code (the equipment is unlocked)

(for code 001 to code 998)

y. -) Store code (the SET UP mode is inhibited)

yl-> Store code (the equipment is locked)

(except sensor changeover and LOOK UP mode))

(for code 999)

y -) Store code (the equipment is unlocked.

However it cannot be re locked (refer to

section 7.4.2))

Changes become only effective when SENSOR or LOOK UP

mode is activated.

5.6.23 Program version «PRG Numb» (AUXlLIAR group)


No SET UP509782--

L Change index

> Program version of the firmware

Depending in the index, the program may perform

additional functions.

If a different program version is installed these

operating instructions become invalid.

LOOK UP-/SET UP modeOperation IMG300.0pm28

~

5.6.24 Test programs « Test» (AUXlLIAR group)

SET UP lIodeLOOK UP lode

Test

L Test programs

Display

RAM

EPROH

Keys

1/0

A/D conv.

RS-232-C

: ~> Interface (if configured)

1-) AID converter

L-> I/Os (only if no measurement board

installed)

~> Input keys (only if measurement board

installed)

L) EPROK

L-) RAM

L-) Displays

Display

I > Test start (Test runs continuously)

L> Test stop

RAM

L Test start

Feedback: Okayxxxx

or: Failxxxx

~> tested RAM memory location

EPROH

L Test start

Feedback:

or:

Keys

l Test start

Feedback: TestOkay

or: TestFail

IMG300opm operation LOOK UP- /SET UP mode 29

okayxxxx

Failxxxx

L Checksum

w1/0

L Test start

Feedback: TestOkay

or: TestFail

RS-232-C

L Test start

Feedback: rxd YYYY

~> ASCII characters transmitted

across the interface

For additional information to the test program please

refer to the I KG 300 maintenance instructions.

Operation LOOK UP-/SET UP mode30 IMG300opm

6. TECHNICAL DA T A

6.1 General

Unless specified to the contrary, the following information applies

to all modules of the IMG 300.

Admissible temperature

Storage -40 'C ...+65 'C

Operation + 5 'C ...+50 'C

Relative humidity max. 80% at temperatures up to +31 'C

decreasing to 50% at +40 'C

only indoors

Height up to 2000 m NNApplication

6.2 Basic unit

Keasurement range 2)

HP gauge head

BA gauge head

1.0 mbar ...1.0.10-6 mbar

1.0.10-2 mbar ...1.0.10-9 mbar

Suitable gauge heads

HP gauge head

BA gauge head

IKR 310, IKR 312, IKR 310P

IKR 320, IKR 325

Gauge head factor

HP gauge head

BA gauge head

1.65 llbar-1

5.2 llbar-1

Max. length of measurement line max. 30 m (1.5 02)

Operating data for IKR gauge head

a) Measurement operation

Emission current Auto

High

automatic changeover of the emission two decades before the upper

range limit

Low ~ High: < 6.3 .10-3 mbar (HP gauge heads)

High ~ Low: > 1.6 .10-2 mbar

Low ~ High: < 6.3 .10-5 mbar (BA gauge heads)

High ~ Low: > 1.6 .10-4 mbar

50 JlA (HP gauge head)

1.6mA (BA gauge head)

5 JlA (HP gauge head)

160 JlA (BA gauge head)

+170 V

+ 30 V

0 V

max. 18 W

Low

Anode voltage

Filament potential

Ion collector potential

Heating power

b) Degas operation

Emission current

Anode voltage

Degas tiBle

20 mA

+450 V

0 ...10 minutes, adjustable

Technical dataIMG300opm 31

Filament cutoff

Stroll

Pressure

I > 2.0 A ...3.8 A, adjustable

p > 1.3 mbar (HP gauge head)

p > 1.3.10-2 mbar (BA gauge head)

~

Interlocking of degas ON

Pressure p ~ 1.0.10-4 mbar (HP gauge head)

p ~ 1.0.10-5 mbar (BA gauge head)

0 big +10 V

> 11.5 V

max. 2 mA

400 n

SignaloutputMeasured value, analog

Error message (Error)

Current

output resistance

100 per s

5 per s

Measuring rate

Display rate

Filter time constant

Slow

Medium

Fast

Woolapprox. 2.7 S

approx. 320 ms

approx. 35 ms

Response time (10 ~ 90%)

for sudden pressure rise

10-6 ~ 1 mbar

10-6 ~ 10-2 mbar

10-9 ~ 10-2 mbar

10-9 ~ 10-4 mbar

< 150 ms (HP gauge head)

< 40 ms (HP gauge head)

< 150 ms (BA gauge head)

< 40 ms (BA gauge head)

PE under range control

Minimum required availability of

the measured value within the

cold cathode measurement range 10 S

Control input <EXT IN> TTL compatible

(pull-up resistance 4.7 kn to +5 V) ~

Anode voltage interlock <IHR enable>

length of line max. 30 m (~ 0.75 mm2)

Display

Main display

Auxiliary display

status

Error messaqe

15 mm 7-segment luminous digits

2-position mantissa, l~-position exponent

5 mm alphanumeric display

8-digit 5x7 dot matrix

30 LEOs

1 LED, red

Additional slots for

Measurement boards

Interface boards

1 (slot A)

1 (slot C)

~

Technical data IMG300opm32

Available supplementary boards

Pirani

Cold cathode

Combined Parani/cold cathode

PI300D,

PE 30OC9,

CP 300C9,

CP 300ClO,

CP 300TlO,

CP 300Tll.

PI 300DN,

PE 300CIO,

CP 300C9N,

CP 30OCION

CP 300TION

CP 300T.1.1N

PI300DL,

PE 300T1O,

CP 300T9L,

PI300DLN

PE 300T1l

CP 300T9LN

.,CP 300TlOL,

CP 300TllL,

CP 300TlOLN

CP 300TllLN

Power connection

Voltage(according to EN 61010)

Frequency

Connected load

Fuses F1. F2

100 to 240 VAG %10%Overvoltage category I50 to 60 Hz130 VA2.0 slow, 250 V, 05x,

Equipment connection

Gauqe head <IKR Bicc-Vero UTGO 18-7SVDEU, 7-pin socket

integrated coaxial connector

Amphenol C91E, 5-pin socket

Laboratory connector, 2 mm"' Control input <EXT IN

signal output <OUTPUT

IP 30 (Protection against foreign objects > .

no protection against water)

According to IEC 3481 DIN V DE 0411 part 1110.7:DIN V DE 0411 part 1 a 12.80

Protection category IContamination degree 2 (according to EN 61010)

Emission EN 50081-2 (93)Immunity.; EN 50082-2 (95)

2.5 mmProtection

Safety

Radio interference suppress1

Weiqht

Dimensions

~

-L25

Measurement ranqe N_-equivalent


The technical data for the supplementary measurement and interfaceboards are contained in the separate operating instructions [3].

DANGER: Before you connect any external elements, check that theyare compatible with the above technical data.

-

t'!IM~oom

RemedyDisplay possible cause

A2 Err

6)

Connect the gauge head

Replace the cable

Replace the gauge head

ErnissErr

4 )

Use correct gauge headcable (refer to Section6.3)

Connect the cable or thegauge head (refer tosection 4.3.1}

Check the gauge headcable / gauge head

Fill Err~)

Switch to filament 2, ifexisting

Replace the filament

Connect the gauge headcable

Fi12 Err4)

Switch to filament 1, if

existing

Replace the filament

Connect the gauge headcable

Press <funct> keyIdle Err7 )

I>Ip-IMR4)

Increase the limit (referto Section 5.6.11)

Check gauge head cable /gauge head

Release keyKey Err7)

Exchange the basic unitKey blocked

Error messages 35IMG300opm

RemedyDisplay possible cause

~PROM defective Exchange the basic unitProm Err7)

Momentary pressure exceedslimit for IKR gauge head

wait until the pressureis below the limit

p>Pp-IKR5)

Switching function A has

swi tched to »off« ( self-

monitoring)

Manually switch on thecold cathode measurementcircuit when the pressureis again below the thres-hold

Momentary pressure exceedslimit for the gauge head

wait until the pressureis below the limit

p>Pp-IMR

4 )

Switching function IMG hasswitched to »off« (self-monitoring)

Manually switch on theionization measurementcircuit when the pressureis again below the thres-hold

RAM deff!r-:tive Exchange the basic unitRam Err7)

Press <funct> keyRam Lost7 )

strong external inter-terence (electromagnetic)

If necessary, reenter theuser parameters becausethe default parametershave automatically beencopied.

RAM defective Exchange the basic unit

Transmi~Rion errorRS Err7\

Transmit correct values

Interfa~~ defectiv~ Replace the interfaceboard 3)

SlotAErr7)

Wrong board in slot A Insert board into thecorrect slot 3)

SlotBErr7)

Wrong board in slot B

SlotCErr7)

Wrong board in slot C

SlotDErr7)

Card incorrectly identi-tied

Exchange the basic unit

StackErr7)

Stack overflow Press <funct> key

Error messaqes36 IMG300opm

Display possible cause Remedy

Press <funct> keyTask Err7)

If this error occursfrequently, replace thebasic unit

Check the gauge head /gauge head cable

Type-IMR

.)

Watch dog timer -overflowdue to strong external in-fluence (electromagnetic)

Press <funct> keyWdog Err7)

If this error occursfrequently, replace thebasic unit

DANGER: Please read the instructions in Section 4 before youperform any manipulations on the board.

3)

Fault in IMG measurement circuit

Fault in measurement circuit Al

Fault in measurement circuit A2

Fatal error

4)

5)

6)

7)

7.3.1 Contact setting of the relays in the event of a fault

The relays on the IF 300A or IF 3008 circuit board behave as followswhen a fault occurs:

A contact 1..4 (switching function) is normally open if:

-a fault in the assigned measurement circuit-or a fatal error exists.

Contact 5 (error status) is de-energized if:

-a fault of a measurement circuit-or a fatal error exists.

For additional information concerning the relay contact states referto the separate operating instructions [3].

Error messages 37IMG300opm

Documents

Operating manual - Wordentec · 2008. 9. 9. · 2 Introduction IMG300.opm. 3. DESCRIPTION 3.1 Basic unit 3.1.1 Ionization measurement board This measurement board which is standard