studentsrepo.um.edu.mystudentsrepo.um.edu.my/2316/9/BAB_6.pdf · 6.2.1 OISF Density as a Function...
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studentsrepo.um.edu.mystudentsrepo.um.edu.my/2316/9/BAB_6.pdf · 6.2.1 OISF Density as a Function of Depth ... at Si02-Si interface during oxidation to form 01SF. This phenomenon