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Development of Millimeter-Wave Accelerating Structures Using Precision Metal Forming

1.0

1.1

Significance and Background Information, and

Identification and Significance of the Propose

High Energy Physics is a science that works at the hi vable accelerator energy levels. Historically, that energy has increased exponentially through a combination of new technologies for particle acceleration and the increasing of the size, and cost, of facilities. Current fiscal constraints make fiirther increases in facility size and cost difficult, and yet the science is more than ever dependent on advances in technology. Thus, the field of high-energy physics faces a serious challenge: how to obtain higher accelerator energies to conduct research on physical phenomena such as electroweak symmetry breaking at reasonable costs.

One way of meeting this challenge is through the development of high gradient accelerating structures. Classical accelerator technology is based on radio-frequency (RF) driven metallic structures, and accelerating gradients of up to approximately 0.1 GeV/m have been achieved. General considerations of energy efficiency and RF breakdown argue that extending RF driven metallic structures to higher gradients will require smaller, millimeter wavelength sized accelerating structures. However, there are a number of scientific and technological advances necessary for this to be realized. Precision mass fabrication of accelerating structures is one of the major advances required to achieve a cost-effective high-energy facility. Accelerating structures typically have a dimensional tolerance that are 0.1 % of the RF wavelength and in some critical areas that tolerance can be a factor of two or three tighter. Therefore, the tolerances for a millimeter wavelength structure are roughly 1 - 2 microns (pm).

This proposal is focused on studying, improving, and then applying precision metal forming technology to accelerator manufacturing. When this work has been successfully completed one important aspect of the design and manufacture of high gradient accelerator will have been shown to be feasible. The successful development of such millimeter wavelength accelerating structures will ultimately not only vastly decrease the size and cost of a new generation of accelerators, but will also lead to significant commercial opportunities in the defense and transportation sectors.

1.2 Background

The production of millimeter wavelength radio-frequency structures requires working within a tolerance of 1-2 micrometers (pm). Both deep X-ray lithography (LIGA), and wire Electro-Discharge Machining (EDM) can achieve those tolerances, and they are being investigated. Metal forming, the subject of this proposal, is another

This report was prepared as an aCCOUnt ol work sponsored by an agency of the United States Government. Neither the United States Government nor any agency thereof, nor any of their cmploytcs, makes any warranty. e x p m or implied, or assumes any legal liability or responsibility for the accuracy, completeness, or use- fulness of any information, apparatus, product, or process disclosed, or repttsents that its use would not infringe privately owned rights. Reference herein to any spe- cific commercial product, proctss, or smice by trade name, trademark, manufac- turer. or othcmke do# not necessarily constitute or imply its endorsement, m m - mcnd&tion, or favoring by the United St+ Government or any agency thmof. The views and opinions of authors expressed herein do not necessarily state or reflect those of the United States Govcrnwnt or any agency thereof.

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DISCLAIMER

. Portions of this document may be illegible in electronic image products. Images are produced from the best available original document.

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possibility with a number of attractive features. A modern metal forming facility can mass process millimeter scale metallic objects at a rate of 2000 objects per minute with tolerances on the order of 2 - 3 pm. Only a modest improvement in tolerances is needed, and this performance has to be demonstrated with materials appropriate for an accelerator. If that is done successfully, the high production rate would make the process ideal for building a large accelerator.

There is great promise of high accelerating gradients in RF structures produced by the metal forming process. The resultant pieces have rounded features-due to the flowing properties of metals-and hold the potential for additional processing, Finally, the metal forming process has the advantage that the interface joint used in the accelerating structure can be parallel to the RF induced current flow. Therefore, the RF properties of structures produced by metal forming methods will not be adversely affected if there is some difficulty bonding the millimeter wavelength structures.

We believe that the metal forming process holds excellent possibilities for the mass production of millimeter wavelength accelerating structures.

1.3 Technical Approach

The approach we intend to take on this project focuses initially on understanding the plastic deformation properties of highly conductive material such as Oxygen Free High Conductive Copper (OFHC) and GLIDCOP AL-15. Using this knowledge, several standing wave structures will be produced for detailed evaluation of dimensional accuracy, reproducibility, and surface finish. These standing wave structures will be produced using a variety of material conditions and machine press settings. An optimal combination of initial material condition and press setting will be identified and employed to fabricate a single prototype accelerating structure. This structure itself will be evaluated for dimensional accuracy, reproducibility, and surface smoothness, and will then be evaluated for performance by powering it with lower power microwave energy.

1.4 Anticipated Benefits

The primary focus of the Phase I SBIR project is to explore the feasibility of mass- producing mm-wavelength accelerating structures for high energy physics research using stamping technology. There are other areas where the knowledge we gain by this research could have a significant impact. One is in the area of national defense, where the low-cost production of mm-wavelength RF surveillance systems may become possible. A second area involves the production of collision avoidance systems for the next generation of smart cars and trucks. Clearly, the mass production of mm-wavelength RF accelerating structures using stamping technology holds potential for development and application in other industrial applications.

2.0 The Phase I Technical Objectives

The work proposed here has four technical objectives: 1) to improve mass production metal forging capabilities by identifying techniques that will improve the accuracy and repeatability of punch-and-die fabricated accelerating structures; 2) to apply those techniques to the fabrication of several standing wave cavity test articles; 3) to identify the appropriate methods for evaluation and quality control of those types of accelerating structures; and, 4) to fabricate and evaluate the RF performance of a prototype standing wave accelerating structure.

2.1 Phase I Work Plan

The work we propose to conduct in Phase 1 is divided into five major tasks, each requiring approximately one month to complete. At the completion of Task 5, a final report will be prepared. For concreteness, the Phase 1 work will concentrate on a particular RF structure, a m - w a v e RF gun, shown in Figure 1. A detailed description of the work to be performed under each of the five tasks is provided below.

ExitBeam Pipe

Figure 1 Artist’s version of a mm-wave rfgun

2.1.1 Task 1. ImDlement options to increase accuracy and repeatability of punch and die sets

Several factors, both environmental and machine related, influence the accuracy and repeatability of the test hits conducted with the punch depicted in Figure 2.

Figure 2 AutoCAD rendering of the punch used to conduct test hits in Task 2

With regard to the environmental factors, the four most important are the temperature and quality of the coolant used to lubricate the punch and die set during manufacturing, the air temperature of the room in which the jig grinder-in our case, a five-axis Hauser S35 CNC Jig Grinder-is housed, and the amount of vibration experienced by the part during the cutting process.

During Task 1 we plan to evaluate several steps to reduce the magnitude of the effects of the environmental variables. The jig grinder may be relocated to a temperature- stabilized enclosure. The punch and die sets will not be machined until the air temperature has been maintained at the desired setpoint (70 _+ 2 OF) for at least 48 hours to ensure dimensional stability of the machine itself. We may retrofit the jig grinder with an auxiliary cooling system to maintain it’s lubricant temperature at (70 f 1 OF). Finally, we may need to retrofit the jig grinder with Isodamp vibration- damping equipment mounts to minimize the effect of external vibration on the cutting process.

A quality control program will be instituted to monitor the wear of the jig grinder’s cutting tool. The punch-and-die set will be cut in three steps. Step 1 will be bulk removal of the tool-hardened steel that will make up the punch and die set. At this stage in the process the punch-and-die set will be inspected and a second fine cut will be taken. At this point, inspection of the jig grinder cutting tool and work piece will reveal wear rates and programming errors. A third and final cut will be accomplished taking into account the wear rate and programming error data, thus ensuring that the punch and die sets are within the designed tolerance of +1 pm.

After jig grinding, the punch and die sets are hand-polished. This step in the manufacturing process will be conducted in a climate controled area. The temperature and humidity regulation of Dayton Reliable Tool’s CMM inspection

facility may be upgraded to ensure temperature stability and regulated humidity levels.

2.1.2 Task 2. Conduct test hits using different material and press conditions

In Task 2 we will investigate the material and adiabatic forming process conditions of highly conductive metals such as GlidCop AL-15 and Oxygen Free High Conductive Grade I1 Copper. Figure 3 presents mechanical drawings of the punch used to produce the structure to evaluate various materials and adiabatic forming process conditions.

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ALL UNITS ON THIS PAGE ARE I N INCHES

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ALL UNITS ON THIS

Figure 3 AutoCAD drawings of the punch to be used in the test hits to produce the standing wave structure

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Annealing the material before conducting any test hits will vary the amount of pre-hit work material hardening. Also, the material’s grain orientation will be varied with respect to the structure’s symmetry axis. Finally, the thickness of the test material blanks will be varied from 250 pm to 1 mm in 250 pm steps, and the force of test hits will be incrementally varied. Bulk material will also be investigated although previous preliminary experimental results indicate that bulk highly conductive material is not a candidate for metal forming accelerator structures because of eruption of the excess material onto the surface of the work piece.

The following factors, listed below and shown in Figure 4, will be varied during the test hits.

1) Material Type 2) 3) Material Grain Orientation 4) Material Thickness 5) Impact Force

Level of Work Piece Hardening

Work Hardening Level of \ Impact Force I I

Material Thickness

Figure 4 Task 2 test plan

To recap, Dayton Reliable Tool will conduct test hits on the standing wave test structure produced in Task 1. Results of those test hits will be evaluated in Task 3.

2.1.3 Task 3. Evaluate test hits from Task 2

In this task we will evaluate the results of the test hits from Task 2 for accuracy in dimensions and form, repeatability, and surface roughness. The important issues are: the size, the tnie position of the features in the central region of the blatiks with respect to the alignment holes and the surface finish of the standing wave test structures. The size and position accuracy will be evaluated by using a coordinate

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measuring machine (CMM). The 3-dimensional profiles of the standing wave test structures will also be evaluated using a CMM. We will evaluate the Task 2 test structures surface finish at Stanford Linear Accelerator Center using a scanning electron microscope (SEM) and an atomic force microscope (AFM).

2.1.4 Task 4. Design and fabricate a prototype standing wave structure based on results from Task 3

A complete FW design will be completed in Task 4 and a prototype wiII be fabricated. The design of the prototype standing wave structure will be based on the generic idea depicted in figure 1. The critical area of the prototype is the location where the FW power is coupled into the accelerating structure. According to general RF design considerations, the typical tolerances for the body of the structure and the RF power coupler are 2 pm and 1 pm, respectively. The RF design and the manufacturing process are interrelated. The results from the test hits performed in Task 3 will be used in specifying the manufacturing process for the prototype standing wave structure. Thus, by performing test hits we will learn to improve the manufacturing accuracy and research the tolerances that are to be used for the prototype standing wave structure.

2.1.5 Task 5. Test the prototype standing wave structure

The prototype standing wave structure will be evaluated with both mechanical and RF measurement tools. The mechanical measurements will be performed with the Stanford Linear Accelerator Center’s coordinate measuring machine, using the same methodology as in Task 3 (see Section 2.1.3).

The RF measurements will be performed at low power, and will include frequency scans of reflected and forward power, and field perturbation (bead pull) measurements. These measurements will give information on the coupling of RF power into the prototype standing wave structure and the field profile of the accelerating mode. The apparatus to be used is located at SLAC; a schematic is shown in figure 5. The RF phase and amplitude are measured after two stages of down mixing, which reduces frequency from approximately 90 GHz to approximately 16 KHz where a lock-in amplifier can be used. The field perturbation measurements will be performed with a dielectric or metallic bead translated with micron accuracy using a 10 cm travel translation stage.

At the completion of Task 5 , a final report will be prepared for submission to the DOE. That report will document the results of this Phase 1 Project, including both the results of the test hits on the various materials, and evaluation results of the RF properties of the millimeter wave accelerating structures.

I l l 0 = s21 1 =s11

Figure 5 Schematic diagram of the W-band network analyzer used to measure the RF properties of structure produce by stamping technology

2.2 Performance Schedule

ID

Figure 6 illustrates the anticipated performance schedule for the Phase I work. The work will be scheduled to be completed in six months and the indicated task sequence will be followed, although the individual task duration may change somewhat.

Month 1 Month 2 I M onth 3 I M onth 4 I M 0 TaskName

Figure 6 Phase I Project Schedule

3.0 Related Research or R&D

Dayton Reliable Tool & Mfg. Co. (DRT) has been involved in the development of precision metal forming technology since 1949, when Erma1 (Ernie) Fraze founded the company as an independent designer and manufacturer of tool and die components and other manufactured products. With Mr. Fraze's patent on the integral rivet, which allows a tab to be attached to a rivet formed from the parent metal of a can top, consumer demand has been continually increasing for products in such easy-open containers. This has been a driving force in the research and development of precision stamping technology at DRT.

SLAC Accelerator Research Department B has an extensive, integrated program devoted to the application of mm-wave RF to high gradient acceleration. Components of this program include:

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dimensions on beam dynamics. 0

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Theoretical work concentrating on the consequences of small structure

Design of RF structures for acceleration and mm-wave power sources. Techniques for producing and manipulating high power mm-wave radiation Microwave and mm-wave instrumentation. (Some of that instnunentation.wil1 be used for task 5 of this proposal.) Experimental study of gradient limitation due to cyclic pulsed heating. Experimental study of RF breakdown.

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0 RF structure fabrication.

The latter activity is the one directly related to this proposal. An early, extensive survey of the dimensional accuracies, repeatabilities, surface finishes and other

properties of different manufacturing techniques identified deep X-ray lithography (LIGA) and wire electro-discharge machining (EDM) as two promising manufacturing techniques. Both are being actively explored. The EDM work is being supported in part by a DOE SBIR grant to Ron Witherspoon, Inc, and LIGA work is being done in collaboration with Sandia National Laboratory (Livermore).

More recently we have become aware of the outstanding potential of precision metal forming which appears to have close to the needed tolerances, good properties for RF cavities, and a high production rate. Some preliminary experiments conducted with DRT have been encouraging and have led to the interest expressed in this proposal.

4.0 Principal Investigator and other Key Personnel

Principal Investigator - Mr. Steve Short, has been employed by DRT for 12 years and currently serves as the Lead Engineer for the Tooling Group, which specializes in ultra-precision stamping of thin gauge materials. His experience through the ranks throughout his 23-year engineering career has included detailing, designing, engineering management, and project management. Mr. Short has also played a key role in the research and development of new processes and techniques which have resulted in new technology that has revolutionized the metal packaging industry from both a manufacturing process and end product performance standpoint.

Project Manger - Mr. Dave Bohlender for the past 30 plus years has been directly involved in the design, manufacture and testing of single stage dies, components and die systems. These include but are not limited to single, multistation dies and progressive systems, deep draw dies, coining dies and blanking dies. End users are the beverage can industry in the manufacture of easy open cans and containers, and the Aerospace industry in the manufacture of precision components with tolerance k 0.000050 inch. Work is with various materials including aluminum and steel. Mr. Bohlender will serve as the principal contact between DRT and SLAC.

SLAC Project Manger - Dr. Robert H. Siemann, a professor at Stanford University and head of the Stanford Linear Accelerator Center’s Accelerator Research Department B. Dr. Siemann received his Bachelor degree from Brown University in 1964, and his Ph.D. from Cornell University in 1969. Prior to coming to Stanford in 1991, Dr. Siemann was a professor at Cornell University, where he served as Director of Operations of the Wilson Laboratory and as a Guest Scientist at the Fermi National Accelerator Laboratory. He has served on a number of DOE and NSF advisory and review panels, and the Accelerator System Advisory Committee of the Spallation Neutron Source. His areas of specialization include nuclear instrumentation and methodology.

Additional SLAC Key Personnel - Dr. Dennis T. Palmer, is a Post-Doctoral Research Associate at the Stanford Linear Accelerator Center, Accelerator Research

Department B. Dr. Palmer received his Bachelor degree from the University of California, San Diego in 1990. He received his Masters (1991) and his Ph.D. (1998) in Applied Physics from Stanford University. He has taught courses in the field of RF Accelerator Technology for the United States Particle Accelerator Schools, Stanford University, and University of California San Diego. On this project, Dr. Palmer will serve as SLAC's principle point of contact between SLAC and DRT.

5.0 Facilities/Equipment

5.1 Dayton Reliable Tool & Mfg. Co.

DRT's 120,000 square foot shop is located in Dayton, Ohio. It includes a manufacturing area, offices, inspection lab, separate climate controlled rooms, engineering facility and a 10,000 square foot research and development area. Since 1949, DRT has specialized in precision prototype punch and die tooling and production work. All work flowing through the shop is tracked by a computer network using shop management software which assists in job scheduling and quality control. A summary of the DRT hydraulic and mechanical presses that can be used in this Phase 1 SBIR is listed in Table 1. DRT's major pieces of manufacturing and inspection equipment and their quantity are listed in Table 2.

Table 1 Summary of DRT's hydraulic and mechanical presses that can be used in this Phase 1 SBIR

Quantity Description

37 CNC Machining Centers 14 CNC Jig Grinders 20 Manual Jig Grinders

Various I Inspection Equipment 6 CNC Lathes 37 Surface Grindino

9 4

a , 1 ! Super Abrasive Machining I ! 5 Axis Grinder

EDM Machines RAM EDM

Table 2 Summary of DRT's manufacturing equipment that will be used in this Phase 1 SBIR

5.2 Stanford Linear Accelerator Center

SLAC has numerous UNIX and NT based workstations with the electromagnetic simulation codes needed to design mm-wave structures. Those include SUPERFISH, MMIA, and GLIDFIL. For RF measurements at mm-wavelength, SLAC has established a complete system capable of measuring the phase and amplitude of mm- wave signals at low power. A schematic diagram of this W-band network analyzer system is shown in Figure 5

The plating shop at SLAC has a dedicated facility for the plating and cleaning of mm- wave structures. Both electroplating and electropolishing can be performed. SLAC also has extensive brazing facilities for both hydrogen atmosphere and vacuum high temperature brazing under close temperature and gas atmosphere composition control. The light fabrication department at SLAC is a fully equipped manufacturing facility machining. SLAC has a Leitz coordinate-measuring machine (CMM), with a measurement accuracy of k0.5 pm, which is enclosed in a temperature and humidity controlled laboratory.

For surface studies, SLAC has a scanning electron (SEM) and atomic force microscope (AFM). These instruments can provide surface topography for test articles in 2D and 3D views, respectively. The surface roughness of test articles can be determined by using the atomic force microscope. The SEM is also outfitted with a sensitive x-ray spectrometer, permitting energy dispersive x-ray spectroscopic (EDX) analysis of the surface materials, which reveals the elemental content of surface inclusions. Also, there is an Auger analysis chamber for photoelectron spectroscopic ( X P S ) analysis, permitting a more refined means of identifying contaminants by their elemental composition.

6.0 Consultants and Subcontractors

The Stanford Linear Accelerator Center (SLAC) has agreed to serve as a subcontractor on this project. The role SLAC plays in the project will be focused in three areas.

1) 2) the detailed physical evaluation of the test pieces produced by DRT. 3 ) of the accelerating structure produced under this Phase I proposal.

SLAC will support the design of the higher complex accelerating structure. Using their unique coordinate and surface analysis tools, SLAC will support

Finally, SLAC will conduct low power radio frequency testing and evaluation

A letter expressing Stanford Linear Accelerator Center’s support for this project is attached.

7.0 Similar Grant Applications, Proposals, or Awards

No other similar proposal has been submitted to any other federal agency for SBIR Phase I funding.

8.0 Documentation of Multiple SBIR Phase I1 Awards

The offeror, Dayton Reliable Tool 8~ Mfg. Co., has not received phase 11 SBIR awards in the previous five years.

P.O. BOX 586 DAYTON, OHIO 45409

618 GREENMOUNT BLVD. DAYTON, OHIO 4541 9

PHONE: 937-298-7391 FAX: 937-298-71 90

2/5/01 Research & Development Department Page 1 of 14

Oualitv Control ReDort

QC No: 3287 ProjectlShop Order No.: 5001 58 Company Name: Stanford University Attention: Greg Martin Prepared By: Steve Short Requested By: Greg Martin

Distribution: T. Crothers, S. Harrold, G. Martin, J. Milinovich, S. Short, J. Shrout, G. Van Gundy

SUBJECT: Development of millimeter-wave accelerating structure using precision metal-forming technology.

RESULTS:

November 13,2000

Stripper springs (4) C300-045-1500. Spacer stack-up .146” (soft shims).

0 Variables done on old copper material. + .080” material thickness.

+ .093” material thickness. - Actual part measurement in punch and die area: .051”.

- Actual part measurement in punch and die area: .059”.

November 14.2000

0 Stripper springs - Danly (4) red 318’’ diameter x 1.500 F.L. .080” material thickness.

0 Face clearance on retainers: .082” / .010” lead-check stop blocks. 0 Actual part measurements in punch and die: .048” / .013” lead-check on stop

blocks with .147” solid spacer under die insert. Variables done on old copper material.

Revised: 5/8/02 - p1a.d

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Thickness . I32 (Pb) . I32 (Pb) . I32 (Pb) . I32 (Pb)

January 10,2001

Set-up with .147” shim under die. Face clearance is .080” at .010” on blocks. Hit .093” copper - lead check of blocks is .0170”.

0 Hit .080” copper - lead check of blocks is .0170”. Hit .093” copper with .120” spacer under die - lead check on blocks is .0115”.

0 Hit .093” copper with .130” spacer under die - lead check on blocks is .0120”.

January 30 - February 1,2001

Blocks .128” .O82” .0103”/.0105” .133” .080” .0103”/.0108” .140” .074” .0105”/.0112” .147” .O67” .0104”/.0112”

Made four new spring pins (580” over all height) to accommodate new Danly 9-0606-36 springs. Altered spring diameter from .345” diameter to .335” diameter to fit spring pockets - four springs required. All above improvements to provide more spring pressure to strip part off of punch. Add .45” x .060” chamfer on bottom of pressure pad R4217 to allow pressure pad to bottom out on punch flange. Alteration of punch (R4052B) provided additional .030” more travel for pressure pad.

Pressure Pad (down position)

NOTE: Added larger chamfer to base of punch. Now punch surface is approximately .003”/.005” below retainer surface.

Lower tool shim stack-up - see chart below. (NOTE: tool surfaces must be kept free of any oil accumulation.)

I Material I Spacersize I Faceclearance I Leadcheckon I

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Mate ria I Thickness

.105” (Cu)

.105” (Cu)

.105” (Cu)

.105” (Cu)

Ran five lead samples at .140” spacer setting.

Spacer Size Face Clearance Lead Check on

.I I O ” .087” .01 55”/.0167”

.097” .OE17” .O 1 45”/. 0 1 60”

.120” .078” .O 1 52”/. 0 1 68”

.128” .072” .0157”/.0171”

Blocks

Set-up on Copper (old batch)

Material Spacer Size Face Lead Check on

Set-up on T-40 (copper not fired)

Thickness .093”/.095”

Clearance Blocks .128” .072” .01 55”/.0168”

.093”/.095”

.093”/.095” .133” .069” .0164”/.0178” .140” .061” .0164”/.0181”

.093”/.095” * .093”/.095” * -

.140” (adj. ran .005”: .056” .0105”/.0106”

.140” (adj. ran .005”: .054” .0102”/.0104” Fired

.093”/.095” *

.093”/.095” *

* NOTE: Punch damaged on T-40 non-fired material Iiabeled #I - #5.

.142” (on stop block:

.147” (on stop block1

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February 2,2001

0 Since the good punch got damaged, decided to use the 2”d punch whose contour was out of specification.

0 With the die down on stop blocks, lower spacer setting at .142” which produced .053” face clearance between punlch and die surfaces.

The following samples were run on the above settings.

T-40 .094”/.095” Thickness Copper :2 Samples Non-fired Material T-40 .094”/.095” Thickness Copper :2 Samples Fired Material T-50 .094”/.095” Thickness Copper :2 Samples Non-fired Material T-50 .094”/.095” Thickness Copper :2 Samples Fired Material T-60 * .094”/.095” Thickness Copper :2 Samples Non-fired Material T-60 * .094”/.095” Thickness Copper :2 Samples Fired Material

* Upper punch got slightly damaged in weak area making these last four samples.

CONCLUSION (for sample run from January 301-February 2, 2001):

In order to achieve the clarity in all the areas of the form cavities, tremendous coining is necessary to make the copper material flow in all the areas of the contour cavities. The 60-ton gap frame press is at the limit. It is very close to locking on the bottom of the stroke.

The next problem is that a weak, thin section area of the punch has been bent. This is from a combination of coining pressure aind material flowing across the weak, thin section.

Question: Can the contour weak area be strengthened or do we need to look at heating the copper material up to allow material to flow better with less coining?

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DRT After - 1

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DRT After - 2

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DRT Before -1

DRT Before -2

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DRT - Jean

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RF Gun after Stamp - C2c iris

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RF Gun after Stamp - full

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RF Gun after Stamp - half

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RF Gun after Stamp rf gun - X32

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