Innovating Test Technologies

Cascade Microtech Nucleus Software enhances your test

investment by providing quick results in a flexible and

integrated environment. Each wafer test step from

loading and aligning, creating wafer maps, collecting test

data, and analyzing results has been carefully crafted to

optimize your time spent taking measurements.

Nucleus Prober Control Software

AcceleratedTesting through Superior SoftwareFlexibility

The heart of a semiautomatic

wafer probe station is the control

software. The software must

make it easy to control the

prober and all its functions.

Nucleus does that and more.

This next generation prober

control software is powerful, yet

extremely flexible, easy-to-learn

and use, and allows you to

customize the control of your

S300 or Summit semiautomatic

probe station.

Increased Productivity throughQuick Setup and Flexibility

Nucleus Software: Getting Your Job Done

Control and PerformanceGetting your tests done quickly iskey in today’s fast-paced semiconduc-tor manufacturing world. Nucleusmakes your job easier with intelligentfeatures that are tailored for themodern test lab.

Nucleus design is based onCascade’s long established knowledgeof wafer test needs. Whether you’retesting a single die or a batch ofwafers, you can rely on the produc-tivity enhancements of NucleusSoftware.

Stable and Reliable SoftwareNucleus uses an ultra-stable 32-bitsoftware core, Nucleus SystemManager, designed to run onWindows NT/2000. Together theseprovide a stable and robust environ-ment for precision wafer testing. TheNucleus System Manager directs allprober hardware including the preci-sion motorized stage with full closed-loop encoder feedback, while theNucleus Interface provides the GUIwindows. This client server designenables rock-solid stability and givestrouble-free operation.

Free Virtual Mode AvailableTry out the Nucleus featuresdescribed with a free virtual modeversion that runs on your WindowsNT or 2000 computer.

The CD comes with all the docu-mentation, tutorials, example wafermaps and script files that the fullNucleus version contains.

Productivity WizardsYour test setup tasks are automatedwith the easy-to-use wizards. Eachstep is clearly shown to the user in aconcise manner for quick under-standing.• Wafer map setup – die size, wafer

size• Two-point align for wafers on S300

systems • Distance tool for measuring die

sizes

Ease of Use Features• Live video window that supports point & shoot movement • Integrated motion control window• Wafer map with integrated Subsite support• Automated 2-point wafer alignment for S300 systems• Audio and voice feedback let you concentrate on your test

The main tool bar gives instant access to functions that you use every day.

The easy-to-use graphical subsite window enhances productivity by letting youquickly setup multiple probe locations on each die. Use the move commandsthat are enhanced for subsite moves or use the Die Mode on the motioncontrol window to move to subsites.

Point & Shoot in the live video windowmakes it possible to move with ease tofeatures on your wafer.

Sophisticated Tools that Speed Your Workfor Precision Prober Control Instant Access to MotionControlThe motion control window makesyour test setup faster by giving youprecise control of machine move-ment. Each feature of the windowhas been carefully detailed for flexi-bility and clarity so your time ismaximized when configuring a test.

The mode field of the windowshows what type of move will occur.Change the mode by clicking on thelistbox or by pressing the mode but-ton on the joystick. The audio feed-back tells you mode selected so youdon’t have to look at the screen.

The programmable position but-tons on the left of the window letyou move to frequently used posi-tions. Right-click to change the posi-tion. The button labels and tool-tiptext are editable as well.

Intelligent WindowConfiguringThe Motion Window displays onlythose fields which apply to thecurrent mode.

In Scan mode, set the movespeed with the slider or quick setspeed buttons. In index mode (notshown) there are fields for setting the move size – it is automaticallyfilled in with the die size from thewafer map.

Move to centerof travel.

Move to loadposition.

The tool tip textshows you the

values you haveset in each of the

programmablebuttons.

Move to contact.Right-click to setthe contact height.

Select the move modeor press the modebutton on thejoystick.

Select speed forscan moves byclicking here ordragging the slider.

Move to thereference die.

Move to theauxiliary chuck.

Right-click toset the location.

Nucleus Motion Control is easy to use and learn. Itsintuitive grouping of functions lets you focus onyour testing task.

Move to separate.Right-click to setthe separationdistance.

The Mode List isused to select howthe stage willmove.

Click the mouse, orpress the ModeButton on thejoystick.

Check boxesshow which

items will beselected by the

joystick.

Push this button to changemodes. The Voice feedback willtell you the new mode selected.

The joystick and motion controlwindow are connected throughthe software. The mode appliesto the buttons on the GUI aswell as on the joystick.

Integrated Video Point &ShootThe integrated video with its point &shoot function can be used to quicklymove targets on the video window tothe crosshair. Move the mouse overthe video window and double-clickto make the stage move that featureto the crosshair.

Point & shoot can be used at anytime in the setup process whetheryou are aligning the wafer, moving tosubsite locations, measuring die sizesor looking at your probe alignment.

The integrated video windowkeeps track of the microscope zoomsettings for you. When you switchobjective lenses or zoom settings,click on one of the zoom factor but-tons and point & shoot automaticallyuses the correct movement ratios.

Alignment Tool WizardThe alignment tool aligns the waferstreets with the stage. On the S300station, which has motorized theta,this is a simple two-point alignment.Stations with manual theta controlcan use the hard align feature.

The alignment wizard walks youthrough two quick steps: 1. Move toone side of the wafer on a street, clickNext. 2. Move to the other side ofthe wafer, click Next. The systemdoes the rest.

The integrated video window speeds test setup with point & shoot. Double-click anywhere in the video window to move that point to the crosshair.

Double clickhere to moveto thecrosshair

Two-Point Align uses two quick steps for aligningthe wafer in theta on S300 stations.

Nucleus Makes it HappenThe goal is to walk up to a Nucleus probing station and rapidly set it up fortaking measurements on your wafer. Nucleus achieves that goal through themany nuances of the GUI that speed your stride through the setup to your firstmeasurement.

Nucleus has clear functions and easy-to-use features that minimize learningtime. You’ll be performing tests in a matter of minutes.

Customizable Main Tool BarThe main tool bar gives you quickaccess to the windows and functionsused most often.

Each user can add or delete but-tons on the tool bar to meet theirown requirements.

Click here to send thechuck up or down.

Open motioncontrol window.

Turn vacuumon/off.

Start two pointauto align.

Lampon/off.

Open live video windowand point & shoot.

Open remotedebug window.

Open wafer map andsubsite windows.

Multi-User SupportTo get the best productivity fromyour prober system, multiple engi-neers and test operators can eachhave their own login names and pref-erences. Nucleus provides: • Password login security• Personalized ID and setup

preferences• Logs when each user logs into

the system Window locations, joystick modesettings and user stage positions areexamples of items that each user canset for their own needs.

Measuring TapeThe measuring tape lets you take aquick measurement of features onyour wafer. Simply drag the mouseacross the window.

Use it to measure die sizes or dis-tances between test structures.

Distance Tool for MeasuringOn-WaferThe distance tool uses two steps torapidly measure the die size on yourwafer. The die size estimate is auto-matically filled in from the wafermap. Use the point & shoot func-tions on the video and wafer mapwindows to quickly move thecrosshair to features. When you arefinished, click “copy to wafer map”to set the die size in the wafer map.

Choose whichbuttons youwant on thetool bar.

Get a quick measurementof features using the

measuring tape.

The user list window lets you createpersonalized user logins and assignadministrative privileges.

You can quickly measure die sizes using thedistance tool.

Graphical Subsite WindowThe sophisticated subsite window letsyou graphically add locations toprobe on each die. Use the Point &Shoot function to move to subsitepads and then click the Add Subsitebutton. The subsite list can bechanged by dragging items in the list,sorting and renumbering.

A complete set of remote com-mands enables moving to subsites,adding subsites and changing fieldvalues such as the label and X/Y offsets.

Use subsites in conjunction withthe Data Value Parameters functionof the Wafer Map to show real timetest results of subsites for each die.

Productivity Tools• Extensive online help and user

guides eliminate paper manualsfrom your clean room.

• Tutorial sections are written fornew users to help them quicklylearn about the time-savingfeatures in Nucleus.

• Remote programming tools fordeveloping and debuggingcustom test software.

• Operator alerts via email for“last die tested” or “vacuumlost,” etc.

Remote Wafer SetupYour test program can take charge ofcreating wafer maps automatically.Nucleus has a full set of remote com-mands for creating and modifyingwafer maps and subsites. This totaltest integration means productivitygains by removing the operator stepsfor setup.

Nucleus comes with examplescript files that show how to createwafer maps using the remotecommands.

Wafer Map WizardThe wafer map wizard helps you rap-idly create a new wafer map. Enter thedimensions, select the reference dieand mark which die to test.

Edge SenseThe intelligent edge sensing functionin Nucleus lets you specify the searchband and search speed for detectingthe Z height switch.

Click here tomove to asubsite.

Management of subsites is simplified by thegraphical subsite window.

Wizard functions such as the wafer mapwizard are one of the ways Nucleus speedsyour test setup.

Z-height sensing is straightforward with theedge sense setup window.

RF Application SupportYour RF testing is optimized byNucleus with essential features thatsimplify your tasks.

Moving to an ISS on the auxiliarychucks is simplified with the aux but-tons on the motion control window.

Added safety for your probes hasbeen added with the aux chuckzones. The stage automatically senseswhen moving from the wafer to theaux chucks and moves down in zbefore moving between zones.

DC/CV SupportNucleus also seamlessly integrateswith popular DC/CV test softwaresuch as Metrics Technology’s I/CV2.0. I/CV performs I-V and C-Vcharacterization tests and can gener-ate histograms, statistical reports andtables of measured characteristiccurves or extracted parameters. It alsoallows for different tests per device.

FA SupportFailure analysis tasks are simplifiedwith the enhanced features inNucleus.

Integrated live video with point& shoot gives you precision move-ment to ultra-fine features on-wafer.

Motorized positioners have reso-lution of 0.1 micron with the option-al AutoProbe module.

Flexibility for All Measurement Applications

Click here to move to an ISS onthe auxiliary chuck.

The chuck zones functionprotects your probe tips whenthe ISS is a different thicknessthan your wafer.

WinCal is Cascade’s VNA calibration utility thatis seamlessly integrated with Nucleus. Itprovides easy and accurate calibration ofnetwork analyzers for precision on-wafermeasurements.

Real Time Result MonitoringA quick glance at the wafer map andhistogram will assure you of thevalidity of the test. The Wafer Mapdisplay shows binning and histograminformation as your test isproceeding.

The content of the histogram andstatistics windows is customizable soyou only see the information youneed for your current application.

Real-time statistics of your testfor min./max. values, standard devia-tion and the number of die in eachbin are updated with each test result.

Data Parameter Values fromRemote CommandsYour test program sends test resultvalues to Nucleus to create binassignments and colors for each die.Simply add one additional remotecommand to send the result. Nucleuswill store values for each subsite oneach die. Using an advanced partialmap data access method, the storageis fast and uses minimum memory.

Test Monitoring At-A-Glance

Wafer map parameters giveinstant visibility to your testresults with customizablehistogram and legendinformation. A quick glance atthe wafer map shows thestatus of tests.

Select which parameter todisplay.

Select which subsite to display.

Real-time monitoring of results.

Legend shows the meaning ofdie colors.

Histogram of results.

Data Parameter SetupSimple yet powerful, the test dataparameter setup window lets youquickly set up a binning strategy foryour test results so you can monitorthem in real time:• Data label name for selecting on

the wafer map display • Range of good measurement values • Number of bins for good values • Threshold values between bins • Assign colors to each bin

Test Analysis for AdvancedPass/Fail MonitoringCombine test results in a concisemanner to get instant yield analysisof your wafer.• Select two or more measurement

parameters• Assign a range of good values

for each• Pick a color source• On the

wafer map display, select the testanalysis for display

• The wafer map will be updated inreal-time to validate your tests

Number ofbins forresults.

Range forvalidresults.

Assigncolors tobins.

Easy setup of the parameter display lets youtake advantage of the real time data analysiswith just a few quick steps.

Select whichparameters to combinefor pass/fail.

Specify rangeof passingvalues.

Pick color todisplay forpass/fail.

Test analysis is a powerful tool that lets you combine multiple test values into a single pass/failresult for display on the wafer map.

Accelerate Your Test Integration with EnhancedRemote Programming and Debug

Remote WindowQuick integration of remote pro-grams is the intent of the Nucleusremote window. If you are creatingyour own test software, this windowwill speed you through the debugprocess.

All remote commands andresponses are shown on the log win-dow. They can also be sent to a logfile for evaluation.

A direct command entry windowis available to try single commands.The command and result will beshown on the log window. Creating afile of commands and then executingthese are simplified with the scriptbuttons.

Remote InterfacesNucleus uses industry standard inter-faces to receive remote commands:• RS-232 Serial• IEEE-488 (GPIB) • DDE (Windows Dynamic Data

Exchange). Accessible from allWindows programming languagesincluding LabVIEW, Visual Basicand C/C++.

Summit SCPI RemoteCommands The SCPI remote command set inNucleus was designed to speed yoursoftware development and integra-tion. The command set is completeand rich with functions that arerobust and clearly organized.

If you have software currentlycontrolling PCS, Nucleus can beused immediately to execute thesame command stream. Improvedproductivity has been added withnew command groups includingparameter test data, wafer setup andthermal control.

Customize the layout of thiswindow. Every portion of this

window can be edited.

Log all remote commandsand responses to a file.

Enter single line commandsfor a quick interactive trial.

Status of GPIBcommunication.

Click here to run a samplescript file. Right-click to edit

the file.

The Nucleus remote debugwindow will speed your test

integration. The functions andlayout are carefully crafted

for quick and easyunderstanding of the remote

communication stream.

Standard Test SoftwarePackage IntegrationNucleus software continues the CMIlegacy of Summit integration withindustry standard test software pack-ages. We partner with key companiesin the industry to provide completesolutions for every wafer test applica-tion need. Examples of supportedtest packages include: Metrics I/CV,Agilent IC-CAP, BTA Technology(Celestry) BSIMPro, SilvacoUTMOST, and many others.

Drivers and sample programs areavailable for Agilent VEE Pro 6,LabVIEW, MS Visual Basic, andAgilent/TransEra Basic for Windows.

HP BASIC

Sample ScriptsTo help you quickly learn to use theremote commands for controllingNucleus, more than 25 sample scriptfiles of remote commands are includ-ed. These script files illustrate how aremote program can create wafermaps and subsites, setup parametersfor real time monitoring, and sendreal time test results for displayingon the Nucleus wafer map.

Nucleus Software Modules add

productivity value. The optional

Software Modules can be added

to your system to meet your test

requirements.

Vision – Alignment of Die

using the Video image.

Resolution down to 0.25

microns.

AutoProbe – Software Control

of Microscope and Micro-

positioners with GUI or remote

commands.

Thermal – Automatic die size

compensation for thermal

expansion.

System Customization with Add-On Capabilities

Nucleus Vision Software Module

Pattern recognition for die steppingcan be added with the NucleusVision Module. This turnkey solu-tion has quick and easy setup forX/Y alignment to adjust die spacing.

For example, in applications thatuse blue tape, the Vision Module canbe used to shift the stage at each diemove. No changes are required inyour remote program to take advan-tage of this feature.

Simple SetupPattern recognition setup using theVision Module is simplified to letyou concentrate on your test.

Setup Steps• Move to a target on your die.• Click “train target.” The system

stores the image of the target andthe location of the stage.

You’re done. When you command amove to a die, the pattern recogni-tion software will automatically beused to adjust the X/Y position.

Real-Time MonitoringWhen the pattern recognition isenabled, the system shows you thesearch scores and locations for eachsearch. You are assured of the accura-cy of the die placements.

Dependable AccuracyNucleus Vision uses advanced spatialpattern matching and the MMXinstruction set to accurately andquickly find your targets. Results aresub-pixel so the search accuracy canbe as fine as 0.25 microns.

Vision setup is easy with one button training.

As the station steps from die to die, the Vision module shows you thestatus of the pattern recognition searches.

Powerful Vision Features:

Auto Illumination ControlWhen enabled, this function ensuresthat the microscope illumination isturned off after the search is com-pleted so your circuit will not beaffected by the illuminator light.

Auto Objective CalibrationAutomatically calibrate the pixel-to-micron ratio of the live video image.The ratio is set once for each objec-tive lens (magnification) and thenused for the point & shoot functionon the video window as well as forthe pattern recognition alignment fordie to die moves.

Quick Enable/DisableUse the tool bar button to enable ordisable the Vision function at anytime. When it is enabled, die stepswill automatically be corrected formisplacements.

Remote Programming – No ChangesThere is no need to change yourremote program to take advantage ofNucleus Vision for die moves. Whenyou enable the function by clickingon the tool bar button, subsequentdie moves are automatically adjustedfor small position errors.

Basic or Advanced SetupMost users of Nucleus Vision willuse the basic setup dialog – simplyclick the “train target button” andyour process is ready to run. For sit-uations that require more control,the advanced button shows addition-al fields for controlling illumination,monitoring the X/Y offsets andchanging the minimum match score.

Uses

Blue tape wafers. When die havebeen sawn apart and are not equallyspaced, Nucleus Vision will correctfor die placement errors.

Thermal Expansion. When thewafer is being tested at hot or coldtemperature, Nucleus Vision willcorrect for the X/Y expansion of the wafer.

Quicker alignments. When Visionis enabled, it is not necessary to getthe wafer exactly aligned. NucleusVision will adjust for alignmenterrors in the wafer so that die to diestepping is accurate.

The advanced Vision setup can be used insituations that require more control of thesearch process.

Nucleus AutoProbe Software Module

Precision Control to 0.1 MicronThe Nucleus AutoProbe SoftwareModule provides software control ofup to 6 micropositioners and amicroscope. These channels can beindependently controlled throughthe integrated motion control win-dow in the GUI or through theremote command set.

Nucleus AutoProbe builds on theproven motion control of the ECX-56-D that provides 0.1 micron reso-lution for the microscope and posi-tioner channels.

Integrated Control WindowThe easy-to-use motion control win-dow gives instant access to all of thechannels installed on the system. Thechannel select buttons tell you whichpositioner, microscope, or chuck isselected for movement. Click on thebuttons or press the channel buttonon the joystick to change the chan-nel. The voice audio feedback willtell you which channel is selected.

Remote ProgrammingThe positioners and microscopes canbe controlled by your remote testprogram using the industry standardSCPI format commands. The com-mand set builds on the same com-mand set used for the stage, so yourprogramming task is simplified.

Drag and Drop MovementThe live video window gives youinstant control of the positionerprobe tip. Click and hold on the tip,and drag the mouse to the destina-tion. When you release the mousebutton, the probe will move to thenew location.

User Convenience PositionsEach channel can have up to 5 userpositions assigned to store “favorite”locations so you can move quicklybetween test structures.

The status windowcan be configured toshow the locationsof any channel.

Click here to selectwhich channel tomove.

Click here to moveto focus.

ConveniencePositions:Click to move.Right-click to setlocation.

Smart ConfigurationThe positioners can be right-hand orleft-hand operation. The firmwarewill automatically detect whichdirection is selected and switch axisdirection and icons.

MS1-8 programmable micropositioners enableprecision submicron hands-off probing as wellas automated step and repeat sub-die testing.

The motorized microscope mount lets youprogram moves to view your probe contactson pads.

Nucleus Thermal Software Module

Automatic ThermalCompensationThe Nucleus Thermal module givesyou automatic compensation forexpansion or contraction due totemperature. Your productivity isimproved because it is not necessaryto reset the die size when the chucktemperature changes. The die sizesare automatically adjusted in realtime as the chuck temperatureincreases.

Easy Access to the ThermalChuckThe Nucleus Thermal module givesyou easy access to controlling thethermal chuck temperature. Enter atemperature value and click with themouse. You can monitor the chucktemperature as it changes value. The thermal status window showswhen the chuck is changing tempera-ture and when it reaches the com-manded value.

Remote Thermal ControlYour test program can control theparameters of the thermal chuck sys-tem and monitor the current chucktemperature using remote com-mands. A complete set of SCPI for-mat commands for setting the tem-perature is included in the thermalmodule.

Essential Thermal Control forParametric MeasurementsThe Nucleus Thermal module givesyou the control you need for para-metric tests at temperature. TheSummit 12000-Series and S300-Series probing stations are configuredwith industry standard thermal con-trollers and the patented guardingand shielding technology to give youthe low-noise, low-leakage and low-capacitance measurements that onlyCascade Microtech can deliver.

Supported ControllersThese thermal controllers are

supported by the Nucleus ThermalModule:

TPO3000ATPO3200ATPO3010BTPO3210BTPO315ATPO315BTPO3215ATPO3215BTitan

Automatic compensation for thermal expansion.As the chuck temperature changes, the die stepsizes are adjusted for expansion or contraction. The thermal module gives you quick and easy

access to the thermal chuck.

Innovating TestTechnologiesfor bettermeasurementsfaster

Cascade Microtech, Inc., 2430 NW 206th Avenue,Beaverton, Oregon 97006, USAToll Free: 1-800-550-3279Phone: 503-601-1000 Fax: 503-601-1002Europe: +44 1295-812828 Japan: 03-5478-6100Email: sales@cmicro.com www.cascademicrotech.comCopyright © 2001 Cascade Microtech, Inc. MicroChamber, FemtoGuard,

AttoGuard, Air Coplanar and the Cascade Microtech logo are trademarks

of Cascade Microtech, Inc. All other trademarks are the property of their

respective owners. All specifications subject to change.

NUCLEUS-DS-0901Data subject to changewithout notice

Ordering Information

New StationsSemiautomatic:• Nucleus Software is included with

Cascade Microtech’s 12000-Seriesand S300-Series Semiautomaticprobe stations.

• Computer controllers supplied byCascade Microtech includeWindows NT/2000. For furthercomputer and OS specificationsplease consult the factory.

Manual:• To use software-controlled micro-

scope or motorized positioners witha manual probe station, NucleusP/N 123-568 should be ordered aswell as the AutoProbe Module

UpgradesUpgrades from PCS, order P/N 123-568. Bring the superior productivityof Nucleus software to your Summit12000 Series probing system.

For information on systemupgrades, see the Nucleus Upgradedocument NUCLEUS-UPG-0901.

Software ModulesNucleus Vision P/N 123-572Requires high performance digitizer

P/N 125-200

Nucleus AutoProbeP/N 123-569Hardware supported:• High-resolution motion controller

box• Motorized microscope bridge-

mounts• Motorized microscope focus• Programmable DC positioners• Programmable RF positioners

Nucleus ThermalP/N 123-570

OS CompatibilityNucleus Software runs on theseOperating Systems:

Windows NT 4.0Order Service Pack 6 or higher.

Windows 2000Order Service Pack 1 or higher.

Supported Stations• Summit 12000-Series • S300-Series