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NSF Nano-scale Science and Engineering Center
for Scalable and Integrated NanoManufacturing (NSEC SINAM, CMMI-0751621)
Xiang Zhang (Director), Mechanical Engineering Department, University of California at Berkeley.
SINAM’s goal is to establish a nano-manufacturing paradigm of new
technologies that tackle critical challenges: 2D features below 20 nm; high
dimensional fabrication and heterogeneous integration of multiple functionalities.
Environment
Research Vision
Nano Fluidic CircuitsUltra Sensitive Bio-sensor
Ultra Compact light
source & integrated
photonics
3D Terabit Memory
Vision: Develop a nano-manufacturing paradigm to
provide the quantum leap from lab science to industrial
revolution.
The impact of nanotechnology on the
environment is a hot topic, both politically and
scientifically. SINAM works toward a new
design paradigm where energy consumption
and external impacts are built into the design
process. In accordance with this philosophy,
efforts to characterize efficiency and
environmental impacts of nano-manufacturing
are paramount. Nano-scale devices have the
potential to provide energy savings in certain
phases of their life-cycle. However greater
cost, in terms of energy, is a major trade-off
with the increased precision in manufacturing.
Understanding the expenditure of energy
during the manufacturing phase is crucial to
ensuring energy savings over a products entire
life cycle. In addition, studies of
environmental and social impact,
manufacturing capabilities, materials use, and
human and ecological toxicity are being
investigated to realize a truly new paradigm in
manufacturing design.
Top-down nano-manufacturing approach aimed at developing and
discovering techniques for nano-fabrication in the 1–50 nm range.
Adapt hard disk technology for mask-less plasmonic nano
lithography (PNL). Here, 80 nm features were created
using PNL system scanned at 10 m/s.
Nano Imprint
Lithography: 1-20 nm
molds for 2D
applications.Si
SiGe
Deposition
Etching
Imprinting
40 nm20
10
8 4
4nm imprinted features
Integrated Research Groups: An innovative concurrent systems engineering approach,
tackles these grand challenges aimed at issues of scalability, productivity and
efficiency.
A nano-manufacturing paradigm will greatly impact human society as did the
industrial and technological revolutions. SINAM embraces the responsibility to
educate, assess environmental impact and create business.
120 nm
0 10 20 30 40 50 60 70
Cheaper, better consumer products
New ways to detect and treat human
diseases
Increased national security and
defense
New ways to clean the environment
Physical and mental improvements for
humans
Nano-Manufacturing Summer Academy/REU
Connecting to research
• High school students, teachers, undergrads
• Short courses, lab experience, competitions,
internships
MS
HS
UG
GR
Discover Nanotechnology (Grades 7-12)
Inquiry based modules
• See and feel the Nano-world
• Graduate teaching fellowships.
• Piloted in Los Angeles and Oakland
Interdisciplinary Curricula
• Undergrad.: Nano-Mfg. design projects
• Graduate: SINAM research based modules
Graduate Young Investigator (GYI)
• SINAM graduate student competition
• GYI brings 2+ faculty from different disciplines
• Funding for innovative research project
SINAM is responsible for gathering and disseminating the facts
of nanotechnology’s potential impact on society. SINAM has
liaised with the RAND corporation to study the current societal
impact of Nano-manufacturing.
SINAM’s educational programs span all education
levels and include initiatives for under-represented
communities, 7th-12th grade programs, undergraduate
summer academy and graduate young investigator
program. Public perception of the potential benefits of Nanotechnology
0 5 10 15 20 25 30 35
Economic Disruption
Losing personal privacy
Arms race
Breathing nanoparticles that
accumulate in body
Uncontrollable spread of nanorobots
Public perception of the potential risks of Nanotechnology
Flying head
Plasmonic lens Illumination
30 nm Features
A nano-precision Multi-scale Alignment and
Positioning System (MAPS) is the test-bed for
scalable plasmonic lithography and nano imprinting.
Education, Society and Ethics Economic
Top-Down Nano-Manufacturing
SINAM attracts industrial partnerships through progressive
research programs and collaboration initiatives. The Industrial
Affiliates Program with a new standardized IP agreement helps to
rapidly integrate new partners.
Spin-off companies currently operate as a result of SINAM
research. NanoLithoSolutions produces inexpensive nano imprint
lithography tools. Synilixir Therapeutics applied system
optimization schemes to search for combination drugs. Kalinex
Inc. is developing technology to emulate the sense of smell,
which is the only human/animal sense that has not yet been
replicated in small devices and systems. Nano-CAD developed by
SINAM has helped several start-ups.
Kalinex Inc.LBNL, NRL, LLNL, NIH, UIUC-NSEC,
CNSI, CITRIS, and International
Collaborators
0
250
500
750
1000
1250
1500
1750
2000
2004
2005
2006
2007
2008
2009
2010
2011
Year
1,0
00$
22nm half pitch
New energy systems engineering strategies to scale up the
technologies in with product design and development.
New organo-
metallic
compounds. It is
another novel way
to convert solar
energy into
chemical form for
storage and
transportation.
Hybrid top-down and bottom-up technologies for massively
parallel integration of heterogeneous nano-scale components
into higher order structures and devices.
Assembly Motherboard
Micro/nano Fluidics
100 nm 100 mm 100 mm
Addressing &
Data acquisition
Gene ExpressionCell
Separation
In-Situ
Amplification
SINAM has successfully demonstrated a range of
hybrid fabrication approaches. Second phase
research will be applications driven. This will
include integrated bio-sensors for medical
diagnostics, a $1.5 Billion/year market.
Efficient light-trapping is extremely important to
reduce the cost of crystalline silicon solar cells by
decreasing the silicon mass while increasing the
device efficiency. SINAM researcher found that
systematic symmetry breaking of periodic
nanostructures achieves an absorptance that closely
follows the Lambertian limit for isotropic incident
radiation.
Hybrid Nano-Manufacturing
New Energy Systems Engineering