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EDS Immediate materials identification at the push of a button. Supplement your EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo Scientific MagnaRay WDS or Thermo Scientific QuasOr EBSD system.

NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

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Page 1: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

EDSImmediate materials identification at the push of a button. Supplement your EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo Scientific™ MagnaRay™ WDS or Thermo Scientific™ QuasOr™ EBSD system.

Page 2: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

Thermo Scientific NORAN System 7 – The complete EDS system High throughput, impeccable accuracy, no compromise The Thermo Scientific™ NORAN™ System 7 EDS system provides the ultimate in microanalytical capabilities for the modern electron microscopy lab: X-ray detectors with the highest sensitivity, pulse processors with the highest throughput and the most sophisticated software suite available.

The NORAN System 7 produces accurate results and answers in seconds making your lab a better, more productive place to work.

• Accurate and automatic peak identification and quantification

• Standardless quantitative analysis as good as full standards analysis

• X-ray maps and linescans with complete matrix correction and background subtraction

• Phase mapping using COMPASS* – exclusively licensed to Thermo Scientific

• Full line of X-ray detectors with sensors from 10 to 100 mm2 active area and exclusive slotted collimator for maximum X-ray collection

• Live time analysis, and complete site license for unlimited analysis stations with full data integrity.

• Data reporting with flexible layouts. Available in common formats: EMSA for spectra, TIFF for images, CSV for tabular data and linescans.

Peak identification and quantification accuracy is obtained through our exclusive and time-tested deconvolution of overlapped peaks, Phi Rho Z matrix correction, and spectrum background removal.1, 2, 3 These techniques have been in use for more than 30 years. We eliminate user subjectivity so that every user gets the same answer.

* COMPASS phase mapping is patented by US Patent 6,584,413 B1.

1. McCarthy, J.J., Schamber, “Least-Squares Fit with Digital Filter,” Proceedings of the Workshop on Energy Dispersive X-ray Spectroscopy, 1979

2. McMillan, D.J., Bauman, G.D., Schamber, F.H. “Experience with Multiple-Least-Squares Fitting with Derivative References,” Microbeam Analysis, 1985

3. Bastin, G.F., Heijligers, H.J.M., van Loo, F.J.J. “A Further Improvement in the Gaussian Phi (Rho Z) Approach for Matrix Correction in Quantitative Electron Probe Microanalysis,” 1985

Page 3: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

UltraDry EDS Detector Enabling high-resolution, high count rate EDS microanalysis

Dual Detector OperationThe NORAN System 7 allows up to two detectors to be attached to a single analyzer system and electron microscope. Data can be collected in any acquisition mode using either a single detector or both detectors simultaneously. Dual detector operation enables up to 2,000,000 input X-ray counts per second processing capability, and the ability to simultaneously collect data from two separate angles. When high-throughput operation is essential, our dual detector operation doubles your active area. Pair two detector sizes for maximum throughput and resolution. For example, pair two 100 mm2 detectors for a full 200 mm2 active area.

The Thermo Scientific™ UltraDry™ Silicon Drift X-ray Detector provides superior energy resolution at incredibly high collection rates. Using an integrated FET and proprietary electronics, the UltraDry is the front-end of high throughput EDS acquisition and rapid data analysis. Detector electronics are optimized to handle pulse pile-up and sum peaks and to minimize dead time – meaning faster and more accurate answers than ever before.

With a full range of detector sizes for the best selection in resolution and throughput, an exclusive slotted collimator for optimal working distances, dual detector operation and the best solid angle performance, the UltraDry EDS detector is your window to productivity and complete answers.

Unleash Your Productivity with UltraDry• Unique slotted collimator for high performance

across a wide range of working distances

• Crystal active area options: 10 mm2, 30 mm2, 60 mm2, and 100 mm2

• Input count rates greater than 1 million counts per second

• Smallest in-microscope form factor for the best solid angle of collection

• No-LN operation and convenience

Page 4: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

Quantitative Mapping Confidence in your results

Take Your Data Anywhere

The NORAN System 7 was designed for the easy transfer of information over a data network. This allows the microscopist to run the NORAN System 7 and microscope together, or to analyze data away from the lab. Projects are stored as folders in Windows® Explorer®, which groups the analyses of samples or sample sets for easy retrieval. NORAN System 7 software can be installed on multiple computers using the site license included with every system. Access data files and chemical libraries over your lab’s network.

Projects can then be conveniently accessed and analyzed from your office or any other compatible computer within the facility. Data can also be situated on a Windows Server System™ allowing for backup and support by your local IT group.

Difficult to interpret sample compositions can now be identified effortlessly with the NORAN System 7 exclusive automatic quantitative mapping. Going far beyond simple X-ray maps, NORAN System 7 sets a new standard in data presentation. With just one click, difficult-to-interpret X-ray maps are transformed into clear element maps without peak overlaps or background effects. This fully quantitative analysis is done effortlessly and provides results you will have confidence in every time.

Only the NORAN System 7 produces full quantitative analysis from every point in your sample.

Quantitative element map of a complex geological sample

Silicon transistor showing the advanced metal gate, high-k dielectric and doped source/drain regions

Advanced semiconductor device with a high resolution view of the Hf-Si-O gate structure

Page 5: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

Spectral Imaging X-ray Microanalysis Setting the foundation for mistake-free analysis

Spectral Imaging has revolutionized X-ray microanalysis. With a complete spectrum acquired at every point it is the centerpiece for all imaging, X-ray mapping, Linescan and advanced automated analysis. With one click, the NORAN System 7 collects data that can be analyzed repeatedly without the need for re-acquiring or changing acquisition parameters. Once the data is collected, you may choose to analyze it locally at the microscope or take the data offline to a different computer for report preparation.

Point & Shoot

Quality Control

Chemical Typing

Spectral Match

Full Standards Quantification

Qualitative Identification

Failure Analysis

Linescan

Profiling

Interface Measurement

Quant Mapping

True Elemental Distributions

Quantitative Phase Mapping

COMPASS

Absolute Phase Mapping

Trace Element Mapping

Subtle Phase Discrimination

Spectral ImagingThe spectral imaging data set contains an electron image and a spectrum at every point.

EDS Data for Multiple Analytical Methods

Spectral Imaging provides for the display of any number of element maps, both during and after the acquisition. It includes a rich set of data extraction and analysis functions for interpreting the data.

Each spectrum can be used for standardless or full standards quantitative analysis. A single button selection changes the display from a summed spectrum to a maximal spectrum.

Spectral Imaging establishes your data set for NORAN System 7 analysis. It allows you to analyze your EDS sample anytime, anywhere. It also is the core of our exclusive COMPASS™ technology, offering you the easiest and most efficient methods for extracting answers from your microscope with the utmost confidence and skill.

Page 6: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

Positive Answers, Maximum Productivity

The NORAN System 7 allows you to identify phases during the acquisition. Instead of simply plotting element maps or basic R-G-B overlays, COMPASS and Xphase software determine which areas of the sample have the same composition and generates images and spectra representing the distribution of these chemical phases. This interpretation dramatically shortens your path to positive answers. Our exclusive Direct-to-Phase operation matches unknown spectra against a library of known compounds providing a contextual label for each phase.

COMPASS Enabling discovery one pixel at a time

COMPASS statistically sorts, filters and groups every pixel by its unique spectrum rather than by bulk element identification. These pixel groups are then associated as phases. COMPASS performs background subtraction, matrix corrections, peak deconvolution, peak identification and quantitative analysis on each phase. With Spectral Match each phase is uniquely identified against a spectral database.

COMPASS gives you the power to find minor or trace elements within the most complex materials systems.

COMPASS dramatically speeds the analysis of complex samples by getting to critical features with minimum data collection. If a compound is present in the sample, COMPASS will find it.

Cu-rich phase

Au/Cu-rich phase

Ag-rich phase

Page 7: NORAN System 7 Spectral Imaging X-ray Microanalysis System · 2018-04-25 · EDS X-ray microanalysis with the easy-to-use and fully integrated Thermo ... Peak identification and quantification

Standard Features that make NORAN System 7 Invaluable• Unified EDS, WDS and EBSD software platform

results in streamlined operation

• Dual Detector operation

• Intelligent and accurate analysis during the acquisition

• Spectral terminations based on time or statistics

• Unparalleled peak identification

• Standardless quantitative analysis

• Full-standards quantitative analysis

• Spectra Check spectral simulation

• One-click reports and industry standard data formats

• WDS quantitative and qualitative spectral analysis

• WDS input for linescan and mapping

NORAN System 7 Options • COMPASS

• Direct-to-Phase

• Spectral Match

• Feature Sizing

• Column Communication

• Analysis Automation

• Drift Compensation

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www.thermoscientific.com©2013 Thermo Fisher Scientific Inc. All rights reserved. COMPASS software was developed at Sandia National Laboratories and is licensed to Thermo Fisher Scientific. All trademarks are the property of Thermo Fisher Scientific Inc. and its subsidiaries. This information is presented as an example of the capabilities of Thermo Fisher Scientific Inc. products. It is not intended to encourage use of these products in any manners that might infringe the intellectual property rights of others. Specifications, terms and pricing are subject to change. Not all products are available in all countries. Please consult your local sales representative for details.

Thermo Scientific NORAN System 7 X-ray Microanalysis

Chemical Phase maps

EBSD maps

Phase spectrum

The Complete Spectral Imaging X-ray Microanalysis System Fully unified EDS, WDS, EBSD technology platform

Powerful Data acquisition

Single software program with intuitive user interface • Software options and features designed for productivity • COMPASS / Direct-to-Phase for comprehensive phase-based analysis • Unlimited software site license for off-line analysis

MagnaRay WDS • High sensitivity WDS especially in low energy range • High speed transition between elements • Fits most EDS ports

QuasOr EBSD • Complete EBSD solution

• Integrated full speed spectral image acquisition

The NORAN System 7 presents a unified interface for all our microanalysis techniques, provide you with the most comprehensive and mistake-free analysis available.