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Nikon NSR TFHi14DL Serial Number 1616002 Photo Test Results

Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

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Page 1: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

Nikon NSR TFHi14DL

Serial Number 1616002

Photo Test Results

Page 2: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

Exposure Intensity and Uniformity

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Distortion Data

Page 4: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

Wafer Flatness

Page 5: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

LSA Focus

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LSA Tele

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Best Focus

Page 8: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

Stage Stepping Precision

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Reticle Rotation

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FIA Overlay

Page 11: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

LSA Overlay

Page 12: Nikon NSR I14TFH - gcemarket.com€¦ · TSOFT : AL-B2. Fri Oct Tue 14 Close Download Dawn I Dad Daunlüad Downl oad DownlElad Dawn I Dad Count Date . Count Date . Count Date . File

Wafer Loader Repeatability

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500 Wafer Run

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