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Nikon NSR TFHi14DL Serial Number 1616002 Photo Test Results

Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

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Page 1: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Nikon NSR TFHi14DL

Serial Number 1616002

Photo Test Results

Page 2: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Exposure Intensity and Uniformity

Page 3: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Distortion Data

Page 4: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Wafer Flatness

Page 5: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

LSA Focus

Page 6: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

LSA Tele

Page 7: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Best Focus

Page 8: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Stage Stepping Precision

Page 9: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Reticle Rotation

Page 10: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

FIA Overlay

Page 11: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

LSA Overlay

Page 12: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Wafer Loader Repeatability

Page 13: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

500 Wafer Run

Page 14: Nikon NSR I14TFH - GCE Market · 1 024 1026 1027 1 1 1 030 1 1029 1028 1028 1029 1026 1 028 1031 1 033 1 1 1 1 1 1 033 1 032 1 1 1025 ... 051613 DIS I.MESR AN01002 2013-05-16 % Distortion

Hardware / Software Version Summary