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DynacalDynacal®® Permeation Devices – Permeation Devices – Part Numbering SystemPart Numbering System
Contents Perm IndexBackNext
ContentsContents
Use the button to go through the presentation page by page,or go directly to any topic below by clicking on its title.
Contents
TopicsWhat is a permeation tube? How does it work?Types of Dynacal® permeation devices
Wafer devicesTubular devicesDiffusion vials
How are part numbers determined?
Part number format
1 Dynacal2 Type of device – page 1 2 3 43 Certification4 Permeation rate determining factor
Determining factor – breakdown for wafer deviceNine most common wafer devices
5 Permeant gas designation – page 1 2 6 Special device designation – page 1 2 7 Certification, special range or accuracy
Part number examples – 1 2 3Special formulas – page 1 2 3Estimate permeation rate at unknown temperatureTolerance chart – page 1 2 Diffusion Vial part number format
Returns to this page
Returns to the main permeation device indexPerm Index
1XX – XXX – XXXX – XXXX – XXXX
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Next
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What is a permeation tube? How does it work?What is a permeation tube? How does it work?
A permeation tube is a sealed permeable membrane containing solid, liquid or liquefiable gases that permeate through the walls of the membrane at a constant rate.
The device is maintained at a constant temperature to establish constant vapor pressure inside the device. This results in an equilibrium between liquid/solid and the vapor phase of the chemical compound. The vapor escapes through the walls of the permeable membrane at a constant rate as long as the set point temperature is maintained. A measured flow of an inert gas such as nitrogen, helium, argon etc. is passed through the permeation chamber where the device is housed to capture and mix with the vapor resulting in known volumetric concentration in ppm/ppb. By varying the dilution flow rate one is able to generate a wide range of concentrations using a single device.
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Types of DynacalTypes of Dynacal®® permeation devices permeation devices
Wafer Tubular
90 F3
F Wafer
60 F3
40 F3
50 F3
30 F3
T Wafer
50 T3
40 T3
30 T4
30 T3
Diffusion Vial
A B C D
STD #10STD NYLONSILICONXLTLE #3LE #2LEHE #2HE
XLT XLT #3XLT #2
STD #19
STD #10
STD LE #2
STD #19
STD #10
STD
LE #3
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Wafer devicesWafer devices
A wafer device is a type of permeation device that uses a metal reservoir and a circular TFE or FEP permeable membrane
Wafer devices have an active length of 4.6 cm and an outer diameter of 1.6 cm
Designed to allow very low permeation rates
Available with or without certification
An example of a wafer type
30T4: 30 Wall thickness, in thousandths of
an inchT TFE (Permeable membrane)4 Diameter of cap bore measured in
sixteenths of an inch
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Tubular devicesTubular devices
Dynacal tubular devices are primarily made out of different types of PTFE permeable membranes of varying wall thickness. They are available in active lengths of 0.5 to 20 cm long.
Each device is custom sized to generate the required mass per unit time to match the concentration range requirements of a specific application.
Typical permeation rates range from 5 ng/min to 50,000 ng/min for a single device.
Available with or without certification.
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Diffusion vialsDiffusion vials
A diffusion vial is a Pyrex reservoir attached to a Pyrex stem having a fixed bore size. The reservoir is filled with the liquid or solid material of interest. When maintained at a constant temperature, the material establishes a two phase equilibrium between the solid/liquid and gas phase where the gas diffuses through the bore of the stem. By varying the stem length and the bore size, one is able to vary the permeation rate at a set point temperature.
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How are part numbers determined?How are part numbers determined?
There is a logical progression to each part number, once you understand the basic formula. Each number in the sequence represents a specific aspect of the device: for example, the type of tubing, the active length of the tube, or the chemical being used.
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Part number formatPart number format
1. Dynacal
2. Type of device (ref: Tech Note 1002)
3. Certification (ref: Tech Note 1002)
4. Permeable areaTubular: Active Length in mm (range: 0.5 cm to 20.0 cm)
Wafer: Wall thickness (0.030 – 0.090”)
5. Chemical number (ref: Rate Table & Price Sheet)
6. Special device designation (may not apply to all devices)
7. Certification, special range or special accuracy (i.e.: C, U or S)
1XX – XXX – XXXX – XXXX – XXXX
2 3 4 5 6 71
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DynacalDynacal®®
The first digit of all Dynacal devices will be designated as “1”.
#1 in part number format 1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Type of DeviceType of Device
0 Tubular Device High Emission
1 Tubular Device Standard Emission
2 Tubular Device Low Emission
3 Tubular Device Special
4 Wafer Device
5 Wafer Device Special
7 XLT Device Standard Emission
8 XLT Device Special
#2 in part number format – general 1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Type of Device Type of Device (cont’d 1)(cont’d 1)
#2 in part number format - specific
Tube Numerical representation in P/N Tube designation
STD 1 N/A
STD #10 1 10
STD #19 1 T33
HE 0 N/A
HE #2 0 T56
LE 2 N/A
LE #2 2 F56
LE #3 2 F59
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Type of Device Type of Device (cont’d 2)(cont’d 2)
#2 in part number format - specific
Tube Numerical representation in P/N Tube designation
Silicon 3 S56
Nylon 3 N43
XLT 7 10, T33
XLT #2 8 F56
XLT #3 8 F33, 10, T33, F59
Reference Technical Note 1002, page 5
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Type of Device Type of Device (cont’d 3)(cont’d 3)
#2 in part number format - specific
Wafer Device numerical representation
Valco 4 N/A
Valco high capacity 5 VH
Valco old style 5 OS
Monitor Labs 5 ML
CSI-MELOY 5 ME
Philips 9700 5 P
Threaded cap (Beckman) 5 TH (BK)
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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CertificationCertification
#3 in part number format
0 Uncertified
1 Tubular high range (>500 ng/min)
2 Tubular mid range (101-500 ng/min)
3 Tubular low range (20-100 ng/min)
4 Wafer high range (>100 ng/min)
5 Wafer low range (20-100 ng/min)
6 Tubular or Wafer ultra low range (5-19 ng/min)
7 Special temperatures, ranges, or accuracies
Note1: 1-6 represent certification at 30°C only.
Note2: Third digit remains 7 for all temperatures above 30°C for all rates..
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Permeation Rate Determining FactorPermeation Rate Determining Factor
001 to 200 Active tube length in mm (Formula: required rate/per cm rate)
5 - - Wafer device with “T” wafer
6 - - Wafer device with “F” wafer
7 - - Waver device with special wafer
- y - Wafer thickness (.0y”)
- - z Wafer diameter (z/16”)
#4 in part number format 1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Determining Factor – Breakdown for Wafer DeviceDetermining Factor – Breakdown for Wafer Device
Each device is then represented in the part number by a three digit code.
#4 in part number format - specific
X X Xa b c
a Represents the type of tubing. 5 – TFE , 6- FEP
b Represents the wall thickness of the tube (range of 3-9)
c Represents the diameter of the cap bore in 16th of an inch. (range of 3 or 4)
4
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Nine Most Common Wafer DevicesNine Most Common Wafer Devices
Part Number Wafer Device TypePerm Rate
Ratio
14X-534-XXXX 30T4 (.03” thick x 4/16” dia T wafer) 1.0
533 30T3 (.03” thick x 3/16” dia T wafer) 0.60
543 40T3 (.04” thick x 3/16” dia T wafer) 0.40
553 50T3 (.05” thick x 3/16” dia T wafer) 0.23
633 30F3 (.03” thick x 3/16” dia F wafer) 0.14
643 40F3 (.04” thick x 3/16” dia F wafer) 0.11
653 50F3 (.05” thick x 3/16” dia F wafer) 0.07
663 60F3 (.06” thick x 3/16” dia F wafer) 0.05
693 90F3 (.09” thick x 3/16” dia F wafer) 0.03
Reference Technical Note 1002, Table 2
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Permeant Gas DesignationPermeant Gas Designation
0001-0199 Inorganic compounds
0200-0499 Organo-metallic compounds
0500-1999 Hydrocarbons
2000-3999 Hydrocarbons containing oxygen
4000-4999 Hydrocarbons containing halogen
5000-5999 Hydrocarbons containing nitrogen
6000-6999 Hydrocarbons containing sulfur
7000-9999 Other organic compounds
#5 in part number format 1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Permeant Gas Designation Permeant Gas Designation (cont’d)(cont’d)
#5 in part number format - Examples
Chemical or Gas Grouping Designation Chemical or Gas
Inorganic compounds 0110 Hydrogen Sulfide
Organo-metallic compounds 0330 Dimethyl Mercury
Hydrocarbons 0505 Pentane-N
Hydrocarbons containing oxygen 2300 Formaldehyde
Hydrocarbons containing halogen 4201 Dichloromethane
Hydrocarbons containing nitrogen 5000 Methyl Amine
Hydrocarbons containing sulfur 6301 Dimethyl Disulfide
Other organic compounds 7600 Carbonyl Sulfide
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Special Device DesignationSpecial Device Designation
#6 in part number format
Tube Type Tube Designation
STD #10 10
STD #19 T33
HE #2 T56
LE #2 F56
LE #3 F59
CSI-MELOY ME
Silicon S56
Nylon N43
XLT 10, T33
XLT #2 F56
XLT #3 F33, 10, T33, F59
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Special Device Designation Special Device Designation (cont’d)(cont’d)
#6 in part number format
Wafer Device Special Designation
Valco High Capacity VH
Monitor Lab 8500 ML
Monitor Labs 8850 MLRA
Philips 9700 P
Threaded Cap (Beckman) TH (BK)
Specials OS, VH, LW
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Certification, Special Range or AccuracyCertification, Special Range or Accuracy
C Certified followed by temperature in °C. (i.e.: C30 or C45)
U Uncertified followed by temperature in °C. (i.e.: U30 or U50)
S Special certification, special range or special accuracy
#7 in part number format 1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Part Number Example #1Part Number Example #1
Sulfur Dioxide standard permeation tube, with the rate of 5000 ng/min, certified at 35°C.
117-083-0082-C351. 1 Dynacal2. 1 Tubular Device – Standard Emission tube3. 7 Special temperatures, ranges, or accuracies
(customer request unit to be certified at a temperature other than 30°C)
4. 083 Active tube length in mm (8.3 cm). Active length
is calculated using active length formula5. 0082 Chemical compound designation for Sulfur
dioxide6. N/A for this part number7. C35 Certified at 35°C
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Part Number Example #2Part Number Example #2
Sulfur dioxide, low emission permeation tube, with the rate of 450 ng/min , certified at 30°C.
122-013-0082-F56-C301. 1 Dynacal
2. 2 Tubular Device – Low Emission
3. 2 Tubular mid range (101-500 ng/min)
4. 013 Active tube length in mm (1.3 cm)
5. 0082 Sulfur dioxide numeric representation
6. F56 LE #2, Low Emission Tube
7. C30 Certified at 30°C
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Part Number Example #3Part Number Example #3
Nitrogen oxide wafer device, Valco Style, certified at 40°C
147-553-0081-C401. 1 Dynacal
2. 4 Wafer device
3. 7 Special temperatures, ranges, or accuracies
4. 553 50T3 (.05” thick x 3/16” dia T wafer)
5. 0081 Nitrogen dioxide numeric representation
6. N/A for this part
7. C40 Certified at 40°C
1XX – XXX – XXXX – XXXX – XXXX
1 2 3 4 5 6 7
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Special FormulasSpecial Formulas
Active Length (mm) = Required Rate (ng/min) /Per cm Rate (answer will be in cm)
Total Rate (ng/min) = Active Length x Per cm Rate
Tubular Devices
For rates:
>500 ng/min Accuracy = +/- 2%
101-500 ng/min Accuracy = +/- 2% or +/- 5 ng/min
Whichever is greater
20-100 ng/min Accuracy = Rate x 5% or +/- 2 ng/min
Whichever is greater
5-19 ng/min Accuracy = +/- 10%
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Special Formulas Special Formulas (cont’d)(cont’d)
Wafer Devices
For rates:
>100 ng/min Accuracy = Rate x 5%
20-100 ng/min Accuracy = Rate x 5% or +/- 2 ng/min
Whichever is greater
5-19 ng/min Accuracy = Rate x 10%
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Special Formulas to find the following:Special Formulas to find the following:
P Permeation rate (ng/min)
F Flow rate (cc/min or 1pm)
C Concentration (ppm or ppb)
K Molar constant = 24.46/molecular wt. of compound
P = (F x C) / K
F = (P x K) / C
C = (P x K) / F
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Estimate permeation rate at unknown temperatureEstimate permeation rate at unknown temperature
log P1 = log P0 + α(T1-T0)
Log = Base 10
P1 = Perm rate (ng/min) at new temperature (ºC)
P0 = Perm rate (ng/min) at known temperature (ºC)
T1 = New temperature (ºC)
T0 = Known temperature (ºC)
α = Temperature coefficient
Note: Before exposing device to higher temperatures, end user must consult VICI Metronics to obtain information on maximum temperature settings.
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Tolerance ChartTolerance Chart
Device OD Rate Range Act Length (cm) (+/-) (cm)
HE 0.98 >100 +/- 15% 0.5 to 2020 to 100 +/- 25%5 to 19 +/- 50%
STD/STD #10 0.64 >100 +/- 10% 0.5 to 2020 to 100 +/- 25%5 to 19 +/- 50%
STD #19 0.64 >100 +/- 15% 0.5 to 2020 to 100 +/- 25%5 to 19 +/- 50%
LE (Capsule) 0.98 >100 +/- 25% 1 or 2 5 to 100 +/- 50%
LE #2 0.98 >100 +/- 10% 0.5 to 20 20 to 100 +/- 20%
5 to 19 +/- 50%
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Tolerance Chart Tolerance Chart (cont’d)(cont’d)
Device OD Rate Range Act Length (cm) (+/-) (cm)
LE #3 0.98 >100 +/- 15% 0.5 to 2020 to 100 +/- 20%5 to 19 +/- 50%
Silicon 0.98 >100 +/- 15% 0.5 to 10 20 to 100 +/- 25%5 to 19 +/- 50%
Nylon 0.98 >100 +/- 15% 0.5 to 20 20 to 100 +/- 25%5 to 19 +/- 50%
All Wafer 1.6 20 to 100 +/- 25% 4.6Devices 5 to 19 +/- 50%
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Diffusion Vial Part Number FormatDiffusion Vial Part Number Format
1. 19 = Diffusion Vial
2. Bore size
3. Chemical number
4. Certification designation
5. Special designation
19X - XXXX – XXX/X - S1 432 5