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neoCoat®-electrodes Features and descriptions NeoCoat SA offers different types of BDD-Electrodes. The electrodes consist of a polycrystalline boron-doped diamond (BDD) coang deposited on a silicon substrate. NeoCoat® BDD- electrodes are suitable either for water treatment or electro- analycal applicaons. Doped-Diamond Electrodes NeoCoat has developed a large range of boron doped diamond (BDD) electrodes on silicon substrate. In NeoCoat’s facility high quality diamond coangs are deposited on large-scale HFCVD reactors. By using various specific cung techniques, NeoCoat is able to offer a wide variety of custom electrode shapes and sizes. Standard neoCoat ® BDD/Si electrodes Standard BDD coang characteriscs: - Film thickness = 2-3 µm - Boron concentraon = 500 ppm - Resisvity = 100 mW.cm Available shapes, sizes and substrates: p-silicon Thickness (mm) Shape and size (mm) Coated side Monocristalline 2 rectangle, 25 x 50 Monopolar (one) Monocristalline 2 rectangle, 25 x 50 Bipolar (both) Monocristalline 2 disc, Ø 100 Monopolar (one) Monocristalline 2 disc, Ø 100 Bipolar (both) Polycristalline 1 square, 100 x 100 Monopolar (one) Polycristalline 1 square, 100 x 100 Bipolar (both) Custom neoCoat ® BDD/Si electrodes Available features (upon request) Substrate mono- or polycristalline silicon (10 -3 - 10 4 W.cm) Electrode shape disc, square, rectangular, tailored shapes External size discs (3 to 200 mm), squares (3x3 to 100x100 mm) BDD thickness from less than 100 nm up to more than 20 µm Boron concentraon 100 - 10000 ppm BDD resivity (mW.cm) 5 - 10’000 Thickness uniformity (3s) +/- 5% (within 100 mm) Grain size (average) 40 nm @ 100 nm film thickness 0.5 µm @ 3 µm film thickness DCOI (Diamond Coang On Insulator) diamond coang is also available on some insulang material such as Si 3 N 4 or Si 3 N 4 /SiO 2 Specific treatment backside metallisaon Ti/Au available on request 20 µm NeoCoat® diamond film 100 nm NeoCoat® diamond film Examples of tailored structured electrodes Oponnally, NeoCoat ® electrodes can be delivered with a special silver paste to improve ohmic contact between electrode backside and metallic support. ©2013 NEOCOAT • 0101-03.15.05 Boron-doped-diamond (BDD) electrodes on Silicon NeoCoat ® BDD electrodes have various shapes and sizes and can also be tailored to specific customer needs.

neoCoat®-electrodes · electrodes are suitable either for water treatment or electro-analytical applications. Doped-Diamond Electrodes NeoCoat has developed a large range of boron

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Page 1: neoCoat®-electrodes · electrodes are suitable either for water treatment or electro-analytical applications. Doped-Diamond Electrodes NeoCoat has developed a large range of boron

neoCoat®-electrodesFeatures and descriptions

NeoCoat SA offers different types of BDD-Electrodes. The electrodes consist of a polycrystalline boron-doped diamond (BDD) coating deposited on a silicon substrate. NeoCoat® BDD-electrodes are suitable either for water treatment or electro-analytical applications.

Doped-Diamond Electrodes

NeoCoat has developed a large range of boron doped diamond (BDD) electrodes on silicon substrate. In NeoCoat’s facility high quality diamond coatings are deposited on large-scale HFCVD reactors.

By using various specific cutting techniques, NeoCoat is able to offer a wide variety of custom electrode shapes and sizes.

Standard neoCoat® BDD/Si electrodes

Standard BDD coating characteristics:

- Film thickness = 2-3 µm - Boron concentration = 500 ppm - Resistivity = 100 mW.cm Available shapes, sizes and substrates:

p-silicon Thickness (mm) Shape and size (mm) Coated side

Monocristalline 2 rectangle, 25 x 50 Monopolar (one)

Monocristalline 2 rectangle, 25 x 50 Bipolar (both)

Monocristalline 2 disc, Ø 100 Monopolar (one)

Monocristalline 2 disc, Ø 100 Bipolar (both)

Polycristalline 1 square, 100 x 100 Monopolar (one)

Polycristalline 1 square, 100 x 100 Bipolar (both)

Custom neoCoat® BDD/Si electrodes

Available features (upon request)

Substrate mono- or polycristalline silicon (10-3 - 104 W.cm)

Electrode shape disc, square, rectangular, tailored shapes

External size discs (3 to 200 mm), squares (3x3 to 100x100 mm)

BDD thickness from less than 100 nm up to more than 20 µm

Boron concentration 100 - 10000 ppm

BDD resitivity (mW.cm) 5 - 10’000

Thickness uniformity (3s) +/- 5% (within 100 mm)

Grain size (average) 40 nm @ 100 nm film thickness0.5 µm @ 3 µm film thickness

DCOI (Diamond Coating On Insulator)

diamond coating is also available on some insulating material such as Si3N4 or Si3N4/SiO2

Specific treatment backside metallisation Ti/Au available on request

20 µm NeoCoat® diamond film 100 nm NeoCoat® diamond film

Examples of tailored structured electrodes

Optionnally, NeoCoat® electrodes can be delivered with a special silver paste to improve ohmic contact between electrode backside and metallic support.

©20

13 N

EOC

OAT

• 0

101-

03.1

5.05

Boron-doped-diamond (BDD)electrodes on SiliconNeoCoat® BDD electrodes have various

shapes and sizes and can also be tailoredto specific customer needs.

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