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Institut de Microelectrònica de Barcelona
July 18th, 1992
20 nm
Nanolithography on Si(100) by STM 20 nm resolution in 1991
Local anodic oxidation by SPM
NEMS and Nanofabricatio group
Institut de Microelectrònica de Barcelona
Research on nanomechanical and nanoelectronic structures and devices applicable in miniaturized integrated systems: nanofabrication technologies,
advanced AFM methods and functional properties.
NEMS and Nanofabrication group
Free standing nano-cantilever Thickness: 25 nm Width: 200 nm
Institut de Microelectrònica de Barcelona
Nanolithography area @ CNM clean room
AFM
SEM
e-beam writer UV-Nanoimprint
Thermal NIL FIB (Dual beam)
Institut de Microelectrònica de Barcelona
Nanofabrication for nanoelectronics
Today:
• >109 Transistors in one micro-processor • Minimum dimension of transistor: 22 nm
Institut de Microelectrònica de Barcelona
SPIE Advanced lithography 2011, 2012, 2013
DIRECTED SELF ASSEMBLY (DSA)
PLACYD
Institut de Microelectrònica de Barcelona
Alternative nanolithography
AFM nanolithography
AFM local anodic oxidation
FIB Nanofabrication
.J Vac. Sci.Technol. B 27, 2691 (2009); IEEE NEMS 2012
Institut de Microelectrònica de Barcelona
Nanomechanical sensors
Avidin-biotin bio-recognition event
Review of Scientific Instruments 83, 015002 (2012)
Biomolecular recognition
Shi et al. Nanomedicine. 2012;7(10):1625-1637
Institut de Microelectrònica de Barcelona
AFM technology
AFM Cantilevers with (insulated) conducting tips
Polymeric AFM probes
Institut de Microelectrònica de Barcelona
Advanced AFM chracterization
Quantitative nanomechanical characterization
Institut de Microelectrònica de Barcelona
Running projects
SNM: Single Nanometer Manufacturing for beyond CMOS devices
FP7-ICT (2013-2017)
AIM4NP: Automated in-line Metrology for Nanoscale Production
FP7-NMP (2013-2016)
CoLiSa: Computational lithography for Self Assembly FP7-ICT (2013-2017)
PLACYD: Pilot Line for directed self-assembly FP7-ENIAC (2014-2017)
HEARTEN: A co-operative mHEALTH environment targeting adherence and management of patients suffering from Heart Failure.
Horizon 2020 Health (2015-2018)
NEMS-BIO-2: Dispositivos micro/nano-electromecánicos avanzados para la detección de biomoléculas
Plan Nacional MICINN-DG (2012-2014)
FORCE-for-FUTURE: Tecnologías de microscopía de fuerzas para aplicaciones en nanomecánica y nanomedicina
Consolider MICINN. (2011-2015)
SGR- NANOFABRICACION: Grup de Nanofabricació i propietats funcionals de nanoestructuras
Generalitat de Catalunya (2014-2016)
NANeau: Afinidad y estructura del agua interfacial sobre superficies nanoestructuradas en condiciones ambientales
Plan Nacional MICINN-DG (2013-2015) (Associat)
SiNSoC: Silicon Nanotube Solar Cells AC-Explora –Ingenio. (2012-2013)
Institut de Microelectrònica de Barcelona
Most relevant publications in 2014
From an Organometallic Monolayer to an Organic Monolayer Covered by Metal Nanoislands: A Simple Thermal Protocol for the Fabrication of the Top Contact Electrode in Molecular Electronic Devices. Advanced Materials Interfaces 1, 1400128 (2014)
Sub-10 nm Resistless Nanolithography for Directed Self-Assembly of Block Copolymers. ACS Applied Materials & Interfaces 6, 21596-21602 (2014)
High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators. Nature Communications 5, 4313 (2014)
Increasing the elastic modulus of graphene by controlled defect creation. Nature Physics. doi:10.1038/nphys3183. (2014)
Batch fabrication of insulated conductive scanning probe microscopy probes with reduced capacitive coupling. Microelectronic Engineering 119, 44-47 (2014)
H-bonding driven assembly of colloidal Au nanoparticles on nanostructured poly (styrene-b-ethylene oxide) block copolymer templates. Journal of Materials Science 49, 5246-5255 (2014)
Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation. Nanotechnology 25, 135302 (2014)
On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography. Journal of Applied Crystallography 47, 613-618 (2014)
Towards the Fabrication of the Top‐Contact Electrode in Molecular Junctions by Photoreduction of a Metal Precursor. Chemistry-A European Journal 20, 3421-3426 (2014)
Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry. Nanofabrication. 1, 80-85 (2014)
Preparation of nascent molecular electronic devices from gold nanoparticles and terminal alkyne functionalised monolayer films, Journal of Materials Chemistry C 2, 7348-7355 (2014)
Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers. Nanofabrication 1, 8-15(2014)
OFERTES PER TREBALLS D’INVESTIGACIO
GRUP DE NANOFABRICACIO I SISTEMES
NANOELECTROMECANICS
TREBALL FINALS DE CARRERA
TEMA: NEMS, NANOFABRICACIO I AFM
Requisits: Bon expedient acadèmic. Interès per la recerca.
Interessats contactar amb:
Prof. Francesc Pérez-Murano
IMB-CNM, CSIC. UAB
e-mail: [email protected]
Telefono: 93 594 77 00
TREBALLS FINALS DE MASTER
TESI DOCTORALS
ESTADES DE RECERCA I PRACTIQUES
OFERTES PER TREBALLS D’INVESTIGACIO
GRUP DE NANOFABRICACIO I SISTEMES
NANOELECTROMECANICS
Interessats contactar amb:
Prof. Francesc Pérez-Murano
IMB-CNM, CSIC. UAB
e-mail: [email protected]
Telefono: 93 594 77 00
JAEINT_EX15_0581
(1-SEP a 31-OCT) o (1-OCT a 30 NOV)
“Exploring the limits of nanofabrication”
2.000 €
https://sede.csic.gob.es/intro2015