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NEMS and Nanofabrication Prof. Francesc Pérez-Murano [email protected]

NEMS and Nanofabrication - CSIC · advanced AFM methods and functional properties. NEMS and Nanofabrication group Free standing nano-cantilever Thickness: 25 nm Width: 200 nm . Institut

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NEMS and Nanofabrication

Prof. Francesc Pérez-Murano [email protected]

Institut de Microelectrònica de Barcelona

July 18th, 1992

20 nm

Nanolithography on Si(100) by STM 20 nm resolution in 1991

Local anodic oxidation by SPM

NEMS and Nanofabricatio group

Institut de Microelectrònica de Barcelona

Research on nanomechanical and nanoelectronic structures and devices applicable in miniaturized integrated systems: nanofabrication technologies,

advanced AFM methods and functional properties.

NEMS and Nanofabrication group

Free standing nano-cantilever Thickness: 25 nm Width: 200 nm

Institut de Microelectrònica de Barcelona

Nanolithography area @ CNM clean room

AFM

SEM

e-beam writer UV-Nanoimprint

Thermal NIL FIB (Dual beam)

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

1985

Institut de Microelectrònica de Barcelona

Nanofabrication for nanoelectronics

Today:

• >109 Transistors in one micro-processor • Minimum dimension of transistor: 22 nm

Institut de Microelectrònica de Barcelona

SPIE Advanced lithography 2011, 2012, 2013

DIRECTED SELF ASSEMBLY (DSA)

PLACYD

Institut de Microelectrònica de Barcelona

16 nm lines

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

Nanotubes and Nanowires

Institut de Microelectrònica de Barcelona

Alternative nanolithography

AFM nanolithography

AFM local anodic oxidation

FIB Nanofabrication

.J Vac. Sci.Technol. B 27, 2691 (2009); IEEE NEMS 2012

Institut de Microelectrònica de Barcelona

NEMS

Institut de Microelectrònica de Barcelona

Nanomechanical resonators

315 kHz 1.8 MHz

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

Nanomechanical sensors

Avidin-biotin bio-recognition event

Review of Scientific Instruments 83, 015002 (2012)

Biomolecular recognition

Shi et al. Nanomedicine. 2012;7(10):1625-1637

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

AFM technology

AFM Cantilevers with (insulated) conducting tips

Polymeric AFM probes

Institut de Microelectrònica de Barcelona

Advanced AFM chracterization

Quantitative nanomechanical characterization

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

Running projects

SNM: Single Nanometer Manufacturing for beyond CMOS devices

FP7-ICT (2013-2017)

AIM4NP: Automated in-line Metrology for Nanoscale Production

FP7-NMP (2013-2016)

CoLiSa: Computational lithography for Self Assembly FP7-ICT (2013-2017)

PLACYD: Pilot Line for directed self-assembly FP7-ENIAC (2014-2017)

HEARTEN: A co-operative mHEALTH environment targeting adherence and management of patients suffering from Heart Failure.

Horizon 2020 Health (2015-2018)

NEMS-BIO-2: Dispositivos micro/nano-electromecánicos avanzados para la detección de biomoléculas

Plan Nacional MICINN-DG (2012-2014)

FORCE-for-FUTURE: Tecnologías de microscopía de fuerzas para aplicaciones en nanomecánica y nanomedicina

Consolider MICINN. (2011-2015)

SGR- NANOFABRICACION: Grup de Nanofabricació i propietats funcionals de nanoestructuras

Generalitat de Catalunya (2014-2016)

NANeau: Afinidad y estructura del agua interfacial sobre superficies nanoestructuradas en condiciones ambientales

Plan Nacional MICINN-DG (2013-2015) (Associat)

SiNSoC: Silicon Nanotube Solar Cells AC-Explora –Ingenio. (2012-2013)

Institut de Microelectrònica de Barcelona

Institut de Microelectrònica de Barcelona

Most relevant publications in 2014

From an Organometallic Monolayer to an Organic Monolayer Covered by Metal Nanoislands: A Simple Thermal Protocol for the Fabrication of the Top Contact Electrode in Molecular Electronic Devices. Advanced Materials Interfaces 1, 1400128 (2014)

Sub-10 nm Resistless Nanolithography for Directed Self-Assembly of Block Copolymers. ACS Applied Materials & Interfaces 6, 21596-21602 (2014)

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators. Nature Communications 5, 4313 (2014)

Increasing the elastic modulus of graphene by controlled defect creation. Nature Physics. doi:10.1038/nphys3183. (2014)

Batch fabrication of insulated conductive scanning probe microscopy probes with reduced capacitive coupling. Microelectronic Engineering 119, 44-47 (2014)

H-bonding driven assembly of colloidal Au nanoparticles on nanostructured poly (styrene-b-ethylene oxide) block copolymer templates. Journal of Materials Science 49, 5246-5255 (2014)

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation. Nanotechnology 25, 135302 (2014)

On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography. Journal of Applied Crystallography 47, 613-618 (2014)

Towards the Fabrication of the Top‐Contact Electrode in Molecular Junctions by Photoreduction of a Metal Precursor. Chemistry-A European Journal 20, 3421-3426 (2014)

Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry. Nanofabrication. 1, 80-85 (2014)

Preparation of nascent molecular electronic devices from gold nanoparticles and terminal alkyne functionalised monolayer films, Journal of Materials Chemistry C 2, 7348-7355 (2014)

Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers. Nanofabrication 1, 8-15(2014)

Institut de Microelectrònica de Barcelona

NANONEMS.IMB-CNM.CSIC.ES

Institut de Microelectrònica de Barcelona

From CNM to the world: Post-docs (2007-2013)

OFERTES PER TREBALLS D’INVESTIGACIO

GRUP DE NANOFABRICACIO I SISTEMES

NANOELECTROMECANICS

TREBALL FINALS DE CARRERA

TEMA: NEMS, NANOFABRICACIO I AFM

Requisits: Bon expedient acadèmic. Interès per la recerca.

Interessats contactar amb:

Prof. Francesc Pérez-Murano

IMB-CNM, CSIC. UAB

e-mail: [email protected]

Telefono: 93 594 77 00

TREBALLS FINALS DE MASTER

TESI DOCTORALS

ESTADES DE RECERCA I PRACTIQUES

OFERTES PER TREBALLS D’INVESTIGACIO

GRUP DE NANOFABRICACIO I SISTEMES

NANOELECTROMECANICS

Interessats contactar amb:

Prof. Francesc Pérez-Murano

IMB-CNM, CSIC. UAB

e-mail: [email protected]

Telefono: 93 594 77 00

JAEINT_EX15_0581

(1-SEP a 31-OCT) o (1-OCT a 30 NOV)

“Exploring the limits of nanofabrication”

2.000 €

https://sede.csic.gob.es/intro2015