10
NanoMAX: A hard x-ray nanoprobe beamline at MAX IV Ulf Johansson* a , Ulrich Vogt b , Anders Mikkelsen c a MAX IV Laboratory, Lund University, Box 118, 221 00 Lund, Sweden b Biomedical and X-Ray Physics, Department of Applied Physics, KTH/Royal Institute of Technology, Albanova University Center, 106 91 Stockholm, Sweden c Synchrotron Radiation Research, Department of Physics, Lund University, Box 118, 221 00 Lund, Sweden ABSTRACT We describe the design of the NanoMAX beamline to be built among the first phase beamlines of the MAX IV facility in Lund, Sweden. NanoMAX will be a hard X-ray imaging beamline providing down to 10 nm in direct spatial resolution, enabling investigations of very small heterogeneous samples exploring methods of diffraction, scattering, absorption, phase contrast and fluorescence. The beamline will have two experimental stations using Fresnel zone plates and Kirkpatrick-Baez mirror optics for beam focusing, respectively. This paper focuses on the optical design of the beamline excluding the experimental stations but also describes general ideas about the endstations and the nano-focusing optics to be used. The NanoMAX beamline is planned to be operational late 2016. Keywords: X-ray imaging, X-ray microscopy, X-ray optics, Nanoprobe, Synchrotron radiation, Ray tracing, MAX IV 1. INTRODUCTION The new Swedish synchrotron radiation facility MAX IV is currently under construction in Lund in the south of Sweden. It will consist of a linear accelerator for full energy, top-up injections and two storage rings, one with 1.5 GeV and one with 3.0 GeV electron energy. The linear accelerator will also serve as the electron source for a short pulse facility and, in a possible future upgrade, a free electron laser. Eight initial beamlines have been funded and are planned to be operational in 2016. The NanoMAX beamline will be built at the 3 GeV storage ring, an ultra-low emittance ring ideally suited for this type of beamline. It is a hard X-ray imaging beamline for micro- and nano-beams and will enable imaging applications exploring absorption, diffraction, scattering, and fluorescence methods. This type of beamline opens up for new opportunities within a very broad range of research fields 1 , with the possibility to study nanoscale objects with atomic scale precision in realistic environments and in complex heterogeneous structures. As a result, one or more hard X-ray micro/nano imaging beamlines 2-5 either have been constructed or are under construction at virtually all synchrotrons with sufficiently high brightness. In the design phase of the present beamline several of these other designs have been carefully studied. The NanoMAX beamline will feature two experimental stations. The first station will use zone plates to reach smallest focus sizes with the long term goal to achieve a direct 10 nm spatial resolution. The second station will use Kirkpatrick- Baez mirror optics with spot sizes down to 300 nm or better. The major components and characteristics of the beamline are depicted in figure 1 and table 1. Experimental features of the beamline will be implemented in a sequential fashion, to allow a high quality in available methods. The beamline commissioning will start early 2016 and first user experiments are expected to be possible late 2016. X-Ray Nanoimaging: Instruments and Methods, edited by Barry Lai, Proc. of SPIE Vol. 8851, 88510L © 2013 SPIE · CCC code: 0277-786X/13/$18 · doi: 10.1117/12.2026609 Proc. of SPIE Vol. 8851 88510L-1 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 09/03/2014 Terms of Use: http://spiedl.org/terms

NanoMAX: A hard x-ray nano probe beamline at MAX IV...NanoMAX: A hard x-ray nano probe beamline at MAX IV Ulf Johansson* a, Ulrich Vogt b, Anders Mikkelsen c aMAX IV Laboratory, Lund

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Page 1: NanoMAX: A hard x-ray nano probe beamline at MAX IV...NanoMAX: A hard x-ray nano probe beamline at MAX IV Ulf Johansson* a, Ulrich Vogt b, Anders Mikkelsen c aMAX IV Laboratory, Lund

NanoMAX: A hard x-ray nanoprobe beamline at MAX IV

Ulf Johansson*a, Ulrich Vogtb, Anders Mikkelsenc aMAX IV Laboratory, Lund University, Box 118, 221 00 Lund, Sweden

bBiomedical and X-Ray Physics, Department of Applied Physics, KTH/Royal Institute of Technology, Albanova University Center, 106 91 Stockholm, Sweden

cSynchrotron Radiation Research, Department of Physics, Lund University, Box 118, 221 00 Lund, Sweden

ABSTRACT We describe the design of the NanoMAX beamline to be built among the first phase beamlines of the MAX IV facility in Lund, Sweden. NanoMAX will be a hard X-ray imaging beamline providing down to 10 nm in direct spatial resolution, enabling investigations of very small heterogeneous samples exploring methods of diffraction, scattering, absorption, phase contrast and fluorescence. The beamline will have two experimental stations using Fresnel zone plates and Kirkpatrick-Baez mirror optics for beam focusing, respectively. This paper focuses on the optical design of the beamline excluding the experimental stations but also describes general ideas about the endstations and the nano-focusing optics to be used. The NanoMAX beamline is planned to be operational late 2016. Keywords: X-ray imaging, X-ray microscopy, X-ray optics, Nanoprobe, Synchrotron radiation, Ray tracing, MAX IV

1. INTRODUCTION

The new Swedish synchrotron radiation facility MAX IV is currently under construction in Lund in the south of Sweden. It will consist of a linear accelerator for full energy, top-up injections and two storage rings, one with 1.5 GeV and one with 3.0 GeV electron energy. The linear accelerator will also serve as the electron source for a short pulse facility and, in a possible future upgrade, a free electron laser. Eight initial beamlines have been funded and are planned to be operational in 2016. The NanoMAX beamline will be built at the 3 GeV storage ring, an ultra-low emittance ring ideally suited for this type of beamline. It is a hard X-ray imaging beamline for micro- and nano-beams and will enable imaging applications exploring absorption, diffraction, scattering, and fluorescence methods. This type of beamline opens up for new opportunities within a very broad range of research fields1, with the possibility to study nanoscale objects with atomic scale precision in realistic environments and in complex heterogeneous structures. As a result, one or more hard X-ray micro/nano imaging beamlines2-5 either have been constructed or are under construction at virtually all synchrotrons with sufficiently high brightness. In the design phase of the present beamline several of these other designs have been carefully studied. The NanoMAX beamline will feature two experimental stations. The first station will use zone plates to reach smallest focus sizes with the long term goal to achieve a direct 10 nm spatial resolution. The second station will use Kirkpatrick-Baez mirror optics with spot sizes down to 300 nm or better. The major components and characteristics of the beamline are depicted in figure 1 and table 1. Experimental features of the beamline will be implemented in a sequential fashion, to allow a high quality in available methods. The beamline commissioning will start early 2016 and first user experiments are expected to be possible late 2016.

X-Ray Nanoimaging: Instruments and Methods, edited by Barry Lai, Proc. of SPIE Vol. 8851, 88510L© 2013 SPIE · CCC code: 0277-786X/13/$18 · doi: 10.1117/12.2026609

Proc. of SPIE Vol. 8851 88510L-1

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Proc. of SPIE Vol. 8851 88510L-2

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Page 3: NanoMAX: A hard x-ray nano probe beamline at MAX IV...NanoMAX: A hard x-ray nano probe beamline at MAX IV Ulf Johansson* a, Ulrich Vogt b, Anders Mikkelsen c aMAX IV Laboratory, Lund

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Page 4: NanoMAX: A hard x-ray nano probe beamline at MAX IV...NanoMAX: A hard x-ray nano probe beamline at MAX IV Ulf Johansson* a, Ulrich Vogt b, Anders Mikkelsen c aMAX IV Laboratory, Lund

corresponding to a photon energy range of 5 – 30 keV. The first harmonic is attenuated with diamond CVD filters in front of the mirrors to reduce power load and power density on the mirrors and the monochromator crystals. It is possible to select filters with different thicknesses or run without filter. A common design for the front end is used for all beamlines at the 3 GeV ring. In addition to fixed masks and movable slits for power load reduction the front end includes safety shutters, beam diagnostics, bremsstrahlung collimation and an electron beam deflector.

2.3. Beamline mirrors The basic principle for the beamline optical design is the following. The undulator source is imaged into an intermediate point at 51 meter distance and simultaneously monochromated. This secondary source is in turn imaged by the nano-focusing optics; the KB-mirrors or the Fresnel zone plate. Two white beam mirrors are used to focus the source into a stigmatic image at 51 meter distance from the undulator, where the secondary source aperture (SSA) is located. The first mirror (VFM) deflects the photon beam horizontally and focuses the beam in vertical direction by sagittal focusing. The second mirror (HFM) also deflects the beam horizontally and focuses the beam in horizontal direction by meridional focusing. The VFM has a fixed curvature while the HFM is bendable with cylindrical shape. The HFM has three coating stripes, Si, Rh and Pt. With the Si coating high harmonic contribution is reduced at photon energies below 10 keV. Rh is used in the range 10 – 22 keV and Pt above 22 keV. The VFM has a Pt coating. Both mirrors are water cooled with clamping to the mirror sides or by interfacing with eutectic metal. The most important mirror parameters are listed in table 2. The geometry of deflecting the beam horizontally by both mirrors has some important advantages; the beam path is horizontal for the whole beamline; gravity does not act in the mirror meridional direction; slope errors influence the beam less in sagittal direction than in meridional direction. The latter is important because the undulator source size in vertical direction is only a few μm (FWHM). In horizontal direction the source size is about 100 μm, hence slope errors and vibrations in meridional direction are less apparent. Table 2. Specifications for the vertically and horizontally focusing mirrors.

Mirror VFM HFMMirror substrate Silicon Silicon Mirror shape Circular cylinder (sagittal) Circular cylinder (meridional) Grazing angle of incidence 2.7 mrad 2.7 mrad Optically active length 400 mm 400 mm Coating stripe Pt Si, Rh, and Pt Meridional slope error < 0.5 μrad rms < 0.5 μrad rms Sagittal slope error < 5 μrad rms < 5 μrad rms Micro roughness <0.2 nm rms <0.2 nm rms Radius 68.84 mm (sagittal), fixed shape 9443 meter (meridional), bendable shape Distance from source 25.2 m 25.8 m Distance to image plane 25.8 m 25.2 m

2.4. Monochromator A Si(111), cryo-cooled, fixed-beam, double-crystal monochromator (DCM) in horizontal diffraction geometry is following directly after the mirrors. We have chosen the horizontally deflecting design because we believe it improves beam stability. With this design small horizontal crystal vibrations do not significantly broaden the image of the source. Also the mechanical design can be made rigid and gravitational forces do not act in the diffraction direction. Drawbacks of the horizontal design are lower transmission in the 5 – 7 keV range and slightly worse energy resolution compared to a design with vertical diffraction geometry. However, with the relatively small size of the undulator source these drawbacks are less apparent. The most important parameters for the monochromator are listed in table 3.

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Table 3. Most important parameters for the double crystal monochromator. Crystals Silicon (111) Direction of diffraction Horizontal, left on first crystal, right on second crystal, seen from above Operation Fixed beam offset, approximately 10 mm Energy range 5-30 keV Bragg angle range 23.3 – 3.7 ° Source distance 28 meter Max. absorbed power 35 W Max. absorbed power density 12 W / mm2 (at 5 keV)

The monochromator and the two mirrors are situated in the first optical hutch. Space is also reserved in this hutch for a possible future upgrade with a double multilayer monochromator (DMM). With a DMM the photon flux can be increased one to two orders of magnitude which can be advantageous for, e.g., X-ray fluorescence measurements on low-concentration samples. 2.5. Secondary source aperture The secondary source aperture (SSA) acts as a flexible source for the succeeding nano-focusing optics. The SSA consists of two pairs of slits, positioned 51 meters from the undulator source, where the vertical and horizontal opening can be set independently. By having this flexibility in defining the shape and size of the source the transverse coherence length can be tailored to match the Fresnel zone plates, KB-optics or other possible future optics, in order to reach spot sizes set by the diffraction limit. By opening the slits one can optimize for high flux conditions using enlarged spot sizes. The SSA is situated in a small temperature controlled optics hutch on the main ring floor. Together with the SSA a beam viewer and an X-ray beam position monitor (XBPM) is installed. The XBPM can be used to stabilize the beam position by regulating the pitch angle of the second crystal in the monochromator in a closed loop control. 2.6. Experimental stations NanoMAX has two experimental stations and scanning X-ray microscopy is the fundamental imaging mode. Both stations are located in a 20 meter long experimental hutch in the satellite building. The hutch may possibly be divided by a radiation wall to allow for measuring with the first station while preparation work is done in the second half. Alternatively, by not dividing the hutch a third experimental setup may be possible to build if future ideas arise. The design of the two experimental stations is in an early phase. We have arranged two workshops to collect requests from potential future users and from international experts on nano-probe beamlines. At this time we have the following conceptual ideas. The first experimental station, at approximately 33 meter distance from the SSA, uses Fresnel zone plates to achieve smallest possible focal spots. The realistic initial goal is to achieve a 30-50 nm spot within the energy range 5 – 12 keV. Zone plates will be developed and provided by a group from the Royal Institute of Technology in Stockholm. The long term goal is to achieve 10 nm spot size. Samples are scanned in X, Y for 2D mapping and also rotated for 3D mapping. Sample environments on this station have to be small because the available distance between optics and sample is in the mm to cm range and varies with photon energy. Thus for example in-situ sample environments have to be constructed in rather small dimensions. Such technologies have been successfully developed for a number of very different situations ranging from liquid cells8 for biology to heated gas cells for catalysis9. The second experimental station, at approximately 43 meter distance from the SSA, uses two plane-elliptical mirrors in Kirkpatrick-Baez configuration to achieve a spot size in the 100 – 1000 nm range. Compared to the first station, the distance between optics and sample is more generous allowing for more complex and large sample setups. We expect this station to be configured with users’ equipment rather frequently while for the FZP-station the setup will be more static and with a tighter integration between sample stage/environment and optics. Main experimental methods are nano-diffraction, X-ray absorption, X-ray phase-contrast, X-ray fluorescence. We also plan to explore coherent diffraction imaging (CDI) methods, e.g., ptychography in various forms.

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4e+06

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Table 4. Spsource size

Figure 7. Ircolumn: KBμm in diam

Photon fluxesbeen simulateundulator prpolarization e The curves insize of the zoadapted to theoperating at

pot sizes on thee and the optics

Photo5000 8333 1166725000Geom

rradiance at theKB-optics positiometer and corres

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n figure 8 are one plate it hae diameter of 10 keV and 3

e secondary souentrance and e

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7 0

metric image

e nano-focusingon at 43 meter spond to the lar

the secondary8. The results

rror reflectivi

calculated wias to be illumthe zone plate

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urce aperture. Txit arms.

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g optics positionfrom the SSA.

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aperture, and h ray tracing sismission, los

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al size FWHM (

osition at 33 mow: 25000 eV. te acceptance a

at the FZP animulations in Mses due to p

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culated from the

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Page 9: NanoMAX: A hard x-ray nano probe beamline at MAX IV...NanoMAX: A hard x-ray nano probe beamline at MAX IV Ulf Johansson* a, Ulrich Vogt b, Anders Mikkelsen c aMAX IV Laboratory, Lund

1

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We would likrecommendatNanoMAX b

[1] Ice, G.

334(606[2] Somogy

Synchro[3] Schroer

FalkenbInstr. M

[4] MartíneS., Petithard X-10-18 (2

, with these pflux at the sam

Photon flux incin the curves on SSA opening

AX beamline ution with higThe beamline

sioning phase

ke to thank ctions from theeamline is fun

E., Budai, J. 60), 1234-123yi, A., Kewishotron Soleil," A, C. G., Boye

berg, G., WellMeth. In Phys. R

z-Criado, G., tgirard, S., Raray microprob

2012).

parameters, esmple will be in

ident on the seccur when chan

g of 20 x 20 μm

will be a vergh photon fluxe will have twowill start early

colleagues fore panel with ended by the K

D. and Pang9 (2011). h, C. M., PolAIP Conf. Proe, P., Feldkamenreuther, G. Res. A616, 93Tucoulou, R

ack, A., Sans,be beamline I

timated to 1xn the 1010 phot

condary sourcenging undulato2.

4.

ry competitivx taking advao experimentay 2016 and by

ACKNO

r valuable comexperts from A

Knut and Alice

RE

g, J. W. L., "

lack, F. and Moc. 1365, 57-6mp, J. M., Paand Reimers,

3-97(2010). ., Cloetens, P J. A., SeguraID22 of the E

x1012 photons/tons/s range at

e aperture, afteror harmonic alo

SUMMAR

e and versatilantage of the al stations alloy the end of 20

OWLEDGE

mments to theAPS, ESRF a

e Wallenberg f

REFERENCE

The Race to

Moreno, T., "60 (2011) atommel, J., S, N., "Hard X

., Bleuet, P., a-Ruiz, J., SuEuropean Syn

/s. If we assumt 10 keV.

r the aperture, aong the photon

RY

le hard X-rayextraordinary

owing for diffe016 we plan to

EMENT

e optical desiand Petra III thfoundation tog

ES

X-ray Micro

"The Scanning

Samberg, D., -ray nanoprob

Bohic, S., Cauhonen, H., Sunchrotron Rad

me the zone p

and at the FZP energy axis. Th

y imaging beay low emittanerent sample so be in operati

gn work. Esphat has reviewgether with tw

beam and Na

g Nanoprobe

Schropp, A.be at beamline

auzid, J., Kieffusini, J. and Viation Facility

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he three lower

amline aimingnce of the MAsetups and dettion.

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w

m V s.

r e

e

at

., l.

é, e

9,

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