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Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February 2020, Photonics West 2020 Site Zhang 1 , Christian Hellmann 2 , and Frank Wyrowski 3 1 LightTrans International UG, Jena, Germany 2 Wyrowski Photonics GmbH, Jena, Germany 3 Applied Computational Optics Group, Friedrich Schiller University Jena, Germany

Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

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Page 1: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Modeling of High Contrast Metasurfaces and Their Performance in General Optical System

4 February 2020, Photonics West 2020

Site Zhang1, Christian Hellmann2, and Frank Wyrowski31 LightTrans International UG, Jena, Germany2 Wyrowski Photonics GmbH, Jena, Germany3 Applied Computational Optics Group, Friedrich Schiller University Jena, Germany

Page 2: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Teams

photo from wikitravel

Jena

LightTrans (since 1999)• Optical technologies

development• Technical support,

seminars, and trainings• Engineering projects• Distribution of VirtualLab

Fusion, together with distributors worldwide

LightTrans International2

(since 2014)

Page 3: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Optical Design Software and Services

LightTrans International3

Booth #4545(German pavilion)

Page 4: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Physical-Optics System Modeling

4

Solve Maxwell’s equations for given source field and components.

LightTrans International

Page 5: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Physical-Optics System Modeling

5

Solution of Maxwell’s equations with one field solver, e.g. FEM, FMM, or FDTD, for

entire system not feasible because of numerical effort!

LightTrans International

Page 6: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Physical-Optics System Modeling

6

How to obtain a reliable and fast physical optics solution -

whenever possible?

LightTrans International

Page 7: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Connecting Optical Technologies / Maxwell Solvers

7

Field Solver Lenses, …

Field Solver Gratings, …

Field Solver micro-and nano-structures Field Solver fibers,

Field Solver Prisms, …

LightTrans International

Page 8: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Connecting Optical Technologies / Maxwell Solvers

8

Problem: Application of a single field solver, e.g. FEM or FDTD, to the entire system: Unrealistic numerical effort

Solution:• Decomposition of system and

application of regional field solvers. • Interconnection of different solvers

and so to solve the complete system.

free space prisms,

plates, cubes, ...

lenses & freeforms

apertures & boundaries

gratings

diffractive, Fresnel, meta

lensesHOE, CGH,

DOEmicro lens &

freeform arrays

SLM & adaptive

components

diffractive beam

splitters

diffusers

scatterer

waveguides & fibers

crystals & anisotropic

components

nonlinear components

Field Solver

LightTrans International

Page 9: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

VirtualLab Fusion – Diffractive Optics Applications

free space

prisms, plates, cubes, ...

lenses & freeforms

apertures & boundaries

gratings

diffractive, Fresnel, meta lenses

HOE, CGH, DOEmicro lens & freeform arrays

SLM & adaptive components

diffractive beam splitters

diffusers

scatterer

waveguides & fibers

crystals & anisotropic components

nonlinear compon…

9

Field Solvers

LightTrans International

Selection of VirtualLab Fusion applications for metasurfaces

Page 10: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

General Design Procedure

LightTrans International10

Desired phase profile Metasurface unit cell look-up table

Distribution of cells

Post-optimization

- analytically given- ray tracing design- IFTA calculation- ...

- theoretical model- FDTD/FEM/FMM calculation- ...

State-of-the-art: exchange between several different software programms, e.g., ray tracer, FDTD solver, and Matlab ...

A seamless workflow within one platform?

Page 11: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Blazed Meta-Grating Composed of Square Pillars

P. Lalanne, et al., "Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings," Opt. Lett. 23, 1081-1083 (1998)

Join our demo session tomorrow:Date: Wednesday, 5 February 2020 | 13:30 – 14:45 Location: Moscone Center West, 2nd level, Room 2009

Page 12: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Building Block / Unit Cell Analysis

TiO2 (n=2.30)

height (H)

pillar diameter (d)

pitch (D)

pillar diameter (d)

d

pitch (D)

D

x

y

x

z

square pillar

LightTrans International12

glass (n=1.52)

Page 13: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

TiO2 (n=2.30)

transmission amplitude/phase vs. pillar diameter (@633nm)glass (n=1.52)

height (H)

pillar diameter (d)

pitch (D)

Building Block / Unit Cell Analysis

index mismatch

x

z

variable

380nm

545nm

LightTrans International13

Page 14: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Distribution of Cells Linear Phase

#1 #2 #3 #4 #5d 118nm 179nm 201nm 247nm 293nm

f=d/D 0.31 0.47 0.53 0.65 0.77

∆𝜓𝜓 0.20𝜋𝜋 0.69𝜋𝜋 0.98𝜋𝜋 1.40𝜋𝜋 1.73𝜋𝜋height (H)

pillar diameter (d)

pitch (D)

x

z

variable

380nm

545nmSelection of pillar diameters follows from P. Lalanne, et al., Opt. Lett. 23, 1081-1083 (1998)

LightTrans International14

TiO2 (n=2.30)glass (n=1.52)

Desired phase is a linear phase!

Page 15: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

perio

d (5

D)

H=545nmx

y

x

z

perio

d (5

D)

D=380nm

Distribution of Cells Linear Phase

#1 #2 #3 #4 #5d 118nm 179nm 201nm 247nm 293nm

f=d/D 0.31 0.47 0.53 0.65 0.77

∆𝜓𝜓 0.20𝜋𝜋 0.69𝜋𝜋 0.98𝜋𝜋 1.40𝜋𝜋 1.73𝜋𝜋

Selection of pillar diameters follows from P. Lalanne, et al., Opt. Lett. 23, 1081-1083 (1998)

LightTrans International15

Page 16: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Performance Evaluation: Transmitted Phase Distribution

perio

d (5

D)

x

y

x

z

perio

d (5

D)

D=380nm

directly behind the grating

LightTrans International16

Page 17: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Performance Evaluation: Transmitted Phase Distribution

perio

d (5

D)

x

y

x

z

perio

d (5

D)

D=380nm

directly behind the grating

5 µm 5µm behind the grating (evanescent waves damped)

LightTrans International17

linear phase with 5 levels

Page 18: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

x

y

x

z

perio

d (5

D)

D=380nm

Performance Evaluation: Diffraction Efficiency

LightTrans International18

grating performance evaluation Efficiency

TE-polarization 80.2%

TM-polarization 74.2%

Average 77.2%

Same average efficiency value reported in P. Lalanne, et al., Opt. Lett. 23, 1081-1083 (1998)

Page 19: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Post-Optimization of Metagrating

LightTrans International19

perio

d (5

D)

x

z

- varying pillar positions- varying pillar diameters- 10 variables in total

downhill simplex optimization with FMM/RCWA for grating analysis

Page 20: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Post-Optimization: Initial vs. Optimized Structure

EfficiencyTE-polarization 80.2 %

TM-polarization 74.2%

Average 77.2%

EfficiencyTE-polarization 85.5%TM-polarization 87.0%Average 86.3%

LightTrans International20

Page 21: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Design of Meta-Grating as Large-Angle Spot Projector

Page 22: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Design Task

input beamwavelength 940 nm

~60°

beam splitting grating- splitting into 3× 3 spots- period 2 × 2 µm

How to design diffractive beam splitters that work beyond paraxial condition, especially with good uniformity and

zeroth-order diffraction under control?

?

LightTrans International22

Page 23: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Desired Phase Profile Design (IFTA)

With differently random phase distributions as starting points, IFTA calculates different possible design results.

LightTrans International23

Page 24: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Building Block / Unit Cell Analysis

LightTrans International24

n=1.

5

n=3.8U = 400 nm

H = 465 nm

d

single nanopillar as the building block of the metasurface

unit cell dimension

nanopillar diameter

nanopillar height

selected parameter range

Page 25: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Distribution of Cells

phase-only transmission

phase-diameter map / librarymetasurface structure

LightTrans International25

Page 26: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Performance Evaluation: Initial Design

LightTrans International26

pillar height=465nm

top view of initial metagrating

diffraction efficiencies

Overall efficiency

79.4 %

Uniformity error (PV)

22.7 %

Uniformity error (RMS)

16.7 %

Page 27: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Post-Optimization of Metagrating (PV Uniformity Error)

LightTrans International27

initial structure

- keep pillar positions- varying pillar diameters- 25 variables in total

downhill simplex optimization with FMM/RCWA for grating analysis

Page 28: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Post-Optimization of Metagrating (RMS Uniformity Error)

LightTrans International28

initial structure

- keep pillar positions- varying pillar diameters- 25 variables in total

downhill simplex optimization with FMM/RCWA for grating analysis

Page 29: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Cross-Platform Simulation and Optimization

batch filexml files

LightTrans International29

Page 30: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

pillar height=465nm

Evaluation of Optimized Metasurface Design

LightTrans International30

diffraction efficiencies

Overall efficiency

79.7 %

Uniformity error (PV)

3.1 %

Uniformity error (RMS)

2.3 %

top view of optimized metagrating

Page 31: Modeling of High Contrast Metasurfaces and Their Performance … · 2020. 2. 18. · Modeling of High Contrast Metasurfaces and Their Performance in General Optical System 4 February

Optical Design Software and Services

LightTrans International43

Booth #4545(German pavilion)