MNE 2021GUIDE FOR

PARTICIPANTS

Micro and Nano Engineering ConferenceTurin, Italy | September 20th - 23rd, 2021

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Welcome Address Welcome to the 47th International Conference on Micro- and Nano-Engineering, the flagship conference of the international Micro and Nano Engineering society (iMNEs). Putting in place an in-presence edition in these times of covid pandemic has been very challenging, but we saw it as the first opportunity to be again together as a community, after the cancellation of the 2020 edition in Leuven. We wanted to offer again to scientists, technologists and companies the opportunity to meet and talk in person, to discuss, exchange ideas, find solutions for producing original technologies and devices. Travelling, however, is still not possible or safe for everyone and the hybrid format of 2021 will also give the chance to attendees who cannot join the event in person to participate online at MNE2021. MNE2021 will be therefore quite different from previous editions, but at the same time will be one of the first big conferences in Europe and worldwide to be organised also in presence. This has required to setup both live presentations and recording/streaming for oral presentations, a hybrid poster session with online and in-presence presenters and both physical and virtual booths and exhibitors. We hope that this will be an additional step towards the return to normality and that the next editions will be in the standard only in-presence format, which would be a very positive sign for the entire humanity. The in-presence 2021 edition of MNE comes back to Italy after the 1999 and 2010 editions in Rome and Genova respectively, and it will be hosted in Torino, a city which will surprise and charm you with its extraordinary beauties and its prestigious history. 380 abstracts, not including invited and plenary presentations, will be presented from 42 countries and 5 continents (23 from Europe, 12 from Asia, 3 from America 2 from Oceania and 2 from Africa). This is a very good result in these times, proving that Micro and Nano Engineering is firmly recognised as a not to be missed event for its scientific community and well established to roadmap its bright future. The review process, thanks to invaluable help of the International Technical Program Committee (ITPC), resulted in a program containing 101 oral talks (of which 6 plenary and 19 invited talks) and 279 poster contributions. Such an outstanding technical program is the result of the hard work of a big team, made up of many individuals. We wish to express our sincere gratitude to authors, co-authors, research supervisors and professors, session chairs and attendees. Many of you are part of the ITPC and took part in the abstract selection process. As MNE2021 organisers, we really appreciate your valuable time and effort. You all are also invited to serve as reviewers for the manuscripts, that will be published in a special issue of the Elsevier Journal Micro and Nano Engineering (Elsevier - MNE). A further acknowledgement also goes to the members of the iMNEs board and of the International Steering Committee for their useful advice and continuous encouragement. MNE keeps on carrying the tradition of a Technical Exhibition. This year we are proud to host about 25 companies, willing to be part of and contribute to the best success of our Conference, together with Conference Partners who also provided a relevant support together with a financial contribution. The MNE international school has been scheduled on Monday 20 September, before the opening of MNE, with fantastic lectures from outstanding scientists. The participation to MNE2021 of more than 430 people, with about 300 in presence and 130 online, represents a very encouraging result for the future. As Organizing Committee of MNE2021, we wish you a very productive and interesting conference. Enjoy MNE2021! Massimo De Vittorio and Fabrizio Pirri – MNE2021 Conference Chairs Matteo Cocuzza, Andrea Lamberti and Ferruccio Pisanello – MNE2021 Program Co-Chairs Lucrezia D’Ettorre and Rosaria Petrolo – CCI – MNE2021 Conference Secretariat

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Join the international Micro and Nano Engineering society iMNEs This year, each attendee of the MNE2021 can opt for a free one-year membership of iMNEs to support the goals of the society and to be part of its community. In future, iMNEs members receive a discount on their MNE registration fee. iMNEs is a not-for-profit organisation. It mandates every year members from a different European country to form a local organizing committee for hosting a future MNE conference. With your membership you distinguish yourself as a player in the field of Micro and Nano Engineering and you support iMNEs in:

• organizing the MNE conference • promoting Micro and Nano Engineering • recognizing individuals for their life time achievements (MNE Fellow Award) or boosting the career of young

researchers (Young Investigator Award and Lectureship) • guaranteeing free of charge publication of your MNE-related work in special issues of a peer reviewed journal • shaping our community with the help of your ideas brought forward at the annual iMNEs assembly

See also the website of iMNEs (https://www.imnes.org). We encourage you to join iMNEs now.

Committees GENERAL CHAIR

Massimo De Vittorio (IIT & Università del Salento) CO-CHAIR:

Fabrizio Pirri (Politecnico di Torino & IIT) HONORARY CHAIR:

Massimo Gentili (Past Chair MNE Steering Comm.) PROGRAM CO-CHAIRS: Matteo Cocuzza (Politecnico di Torino) Andrea Lamberti (Politecnico di Torino) Ferruccio Pisanello (IIT) NATIONAL PROGRAM COMMITTEE:

Monica Bollani, CNR – Politecnico di Milano – Italy Luca Businaro, CNR – Italy Mario Caironi, IIT – Italy Patrizio Candeloro, Università di Catanzaro – Italy. Lucia Curri, University of Bari & CNR – Italy Francesco De Angelis IIT – Italy Sergio Ferrero, Politecnico di Torino – Italy Annamaria Gerardino, CNR – Italy Marco Grande, Politecnico di Bari – Italy Marco Lazzarino, CNR – Italy Giuseppe Maruccio, Università del Salento – Italy

Cecilia Pederzolli, FBK – Italy Pasqualantonio Pingue SNS – Italy Luciano Scaltrito, Politecnico di Torino – Italy MNE INTERNATIONAL STEERING COMMITTEE Jean-Francois de Marneffe, Belgium Michel Despont, Switzerland Zahid Durrani, United Kingdom Massimo De Vittorio, Italy Evangelos Gogolides, Greece Gabi Grützner, Germany Yoshihiko Hirai, Japan Alexander Liddle, USA Michael Muehlberger, Austria Francesc Pérez-Murano, Spain Urs Staufer (Chair), The Netherlands Stephan Sylvest Keller, Denmark Christophe Vieu, France

INTERNATIONAL TECHNICAL PROGRAM COMMITTEE: Vladimir Aksyuk, USA Nerea Alayo, Spain Esteve Amat, Spain Mikhail Baklanov, China Josh Ballard, USA Francesco Basoli, Italy

Joan Bausells, Spain Pierluigi Bellutti, Italy Fabio Biscarini, Italy Karl Boehringer, USA Anja Boisen, Denmark Martin Brandl, Austria Hubert Brueckl, Austria Francesca Brunetti, Italy

Ada-Ioana Bunea, Denmark Stefano Cabrini, USA Mario Caironi, Italy Susana Cardoso De Freitas, Portugal Andrea Cattoni, France Hengky Chandrahalim, USA Wen-Huei Chang, Taiwan Lei Chen, USA

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Yifang Chen, China Yong Chen, France Rebecca Cheung, UK Hierold Christofer, Switzerland Nikos Chronis, USA Mike Cooke, UK Maxime Darnon, Canada Jean-Francois De Marneffe, Belgium Emiliano Descrovi, Italy Lorena Dieguez, Portugal Jakub Dostalek, Austria Christian Dussarrat, Japan Demetre Economou, Usa Stamate Eugene, Denmark Weileun Fang, Taiwan Filippos Farmakis, Greece Maria Farsari, Greece Monika Fleischer, Germany Laurent Francis, France Hiroshi Fukuda, Japan Jan Genoe, Belgium Gerald Gerlach, Germany Konstantinos Giannakopoulos, Greece Evangelos Gogolides, Greece Markus Graf, Switzerland Anja Haase, Austria Cornelis Hagen, The Netherlands Anpan Han, Denmark Michael Haslinger, Austria Harry Heinzelmann, Switzerland Yoshihiko Hirai, Japan Klas Hjort, Sweden Robert Ilic, USA Toshiro Itani, Japan Henri Jansen, Denmark Choi Jin-Woo, USA Grigoris Kaltsas, Greece Songphol Kanjanachuchai, Thailand Dimitrios Kazazis, Switzerland Stephan Sylvest Keller, Denmark Dieter Kern, Germany Beomjoon Kim, Japan

Robert Kirchner, Germany Maria Kitsara, France Michael Kiziroglou, UK Armin Knoll, Switzerland Manfred Kohl, Germany George Kokkoris, Greece Michael Kraft, Belgium Pavel Kulha, Austria Roberto Lazzaroni, Belgium Joshua Lee, China Thierry Leichle, French Wen Lianggong, China James Alexander Liddle, USA Chun-Hung Lin, Taiwan Ran Liu, China Hans Loeschner, Austria Martin Lopez, Portugal Leandro Lorenzelli, Italy Regina Luttge, The Netherlands Luca Maiolo, Italy Eleni Makarona, Greece Laurent Malquin, French Radu Malureanu, Denmark Simone Marasso, Italy Rodolphe Marie, Denmark Iñigo Martin, Spain Eugenio Martinelli, Italy Giuseppe Maruccio, Italy Vincenzo Mastronardi, Italy Shinji Matsui, Japan Constantine Megaridis, USA Santos Merino, Spain Athanasios Milionis, Switzerland Despina Moschou, UK Xavier Munoz-Berbel, Spain Gonzalo Murillo, Spain Pascal Normand, Greece Calogero Oddo, Italy Heidi Ottevaere, Belgium James Owen, USA Anna Palau, Spain Leonidas Palilis, Greece

Tung-Ming Pan, Taiwan Athanasios Papathanasiou, Greece Stefan Partel, Austria Francesc Perez-Murano, Spain Panagiota Petrou, Greece David Peyrade, French Marco Pisanello, Italy Filippo Pisano, Italy Cristina Potrich, Italy Philip Prewett, UK Iris Prinz, Austria Niels Quack, Switzerland Marzia Quaglio, Italy Antonio Qualtieri, Italy John Randall, USA Ioannis Raptis, Greece Gemma Rius, Spain Francesco Rizzi, Italy Alex Robinson, UK Kurt Ronse, Belgium Francois Rossi, The Netherlands Alejandro Silhanek, Belgium Urs Staufer, The Netherlands Samuel Stavis, USA Rafael Taboryski, Denmark Maria Tenje, Sweden Christos Tsamis, Greece Angeliki Tserepi, Greece Dimitris Tsoukalas, Greece Yoshishige Tsuchiya, UK Joris Van de Vondel, Belgium Jeroen A van Kan, Singapore Christophe Vieu, Frence Nikos Vourdas, Greece Remco Wiegerink, The Netherlands Sandra Wolff, Germany Chun Zhao, China Cui Zheng, China Cezar Zota, Switzerland Ioannis Zuburtikudis, Greece

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Conference Information MNE 2021 is organized around 4 main topics: Topic A (Advanced Nanopatterning), Topic B (Nanofabrication and Manufacturing for Functional Structures / Surfaces), Topic C (Micro-Nano Devices and Systems for physical applications, electronics, photonics and energy) and Topic D (Micro & Nano Devices and Systems for Life Sciences, Chemistry, and Agrofood Sectors). MNE 2021 has attracted approximately 400 participants. The MNE Committees encourage authors to submit papers (regular, accelerated publications, reviews or news and opinions) to 4 open thematically focused issues of Micro and Nano Engineering Journal (MNE by Elsevier) related to the conference topics. MNE also sponsors the annual Young Investigator Award, which will be presented at the conference. MNE has two related conferences in the USA (EIPBN), and in Japan (MNC). STRUCTURE The MNE scientific program begins on Tuesday, September 21th, and ends in the afternoon of September 23rd. Prior to the Scientific Program, on Monday, September 20th, there will be the MNE International School for those registered, followed by the Welcome Reception and Opening of the Conference and Exhibition. The Program features 3 parallel sessions, plenary talks, invited presentations, oral and poster presentations (evaluated by the International Program Committee), and a commercial exhibition. MNE poster and oral presentations have equal scientific significance. Two Poster sessions (I, II) will be held respectively on the 21st and the 22nd of September. MNE2021 is an hybrid conference, and welcomes both online and in presence attendees and presenting authors. CONFERENCE VENUE Lingotto Convention Center, Via Nizza, 280, 10126 Torino booking@centrocongressilingotto.it REGISTRATION & HOSPITALITY DESK - OPENING HOURS

Monday September 20th 16:30 – 20:00 Tuesday September 21st 08:00 – 18:00 Wednesday September 22nd 08:00 – 18:00 Thursday September 23rd 08:00 – 18:00

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COVID SAFETY AND RELATED REGULATIONS

Covid-19 Governmental Restrictions in Effect Torino and its region, Piemonte, as of today September 13th, are inserted among the low COVID risk zones (white region). Before entering Italy, passengers are required to complete a specific digital Passenger Locator Form (dPLF). Please visit https://app.euplf.eu/#/ and https://reopen.europa.eu/en/ for more information. NATIONWIDE MEASURES - ALL ITALIAN ZONES/REGIONS EU Digital Covid Certificate (Green Pass) The Digital Covid Certificate is required:

• to eat in bars/restaurants indoors; • to attend theatre, shows, concerts, sporting events (preassigned seating only and social distancing of 1

meter, even if outdoor); • to enter museums, exhibitions, other cultural sites; • to enter swimming pools, gyms, team sports, wellness centers indoors; • to attend fairs, trade shows, conferences; • to enter thermal centers, theme parks; • to enter cultural centers, social and recreation centers (indoors), except for pre-education centers, summer

camps; • to enter casinos, bingo halls, games halls; • to enter public exam centers.

You will need a Covid-19 Digital Certificate (Green Pass), or an equivalent certificate:

• to board aircraft for national flights; • to board interregional ships and ferries; • to travel on Intercity and High Speed trains; • to travel on inter-regional buses and charter buses.

Mask wearing (any type of mask) • Masks required outdoors as long as social distancing of at least 1 meter cannot be maintained. • In certain outdoor contexts masks are still required, e.g. at the market, while in a queue, all outdoor spaces of

hospitals and health clinics. • Masks are required in all indoor places other than your home, including public transport, public offices,

shops, museums, galleries etc. • In restaurants, bars, and cafés you may remove your mask only when seated, indoors and outdoors. • If you have guests in your home, wearing a mask is recommended. • Exceptions: when practicing sport, for under 6s, for those suffering from particular pathologies or disabilities

that are incompatible with wearing a mask. Social distancing

• Maintain a distance of 1 meter. Hand washing / sanitizing

• Washing hands regularly with soap and water or use a hand sanitizer is recommended. For more information: https://www.salute.gov.it/portale/nuovocoronavirus/homeNuovoCoronavirus.jsp (Italian/English language) https://www.governo.it/it/articolo/domande-frequenti-sulle-misure-adottate-dal-governo/15638#zone (only Italian language)

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REGISTRATION FEES

REGISTRATION TYPES Until August 6th, 2021 From August 7th, 2021 On site registration Standard Attendee (in presence) € 680 € 830 € 870 Student Attendee (in presence) € 390 € 470 € 520 Standard Attendee (on line) € 400 € 450 Student Attendee (on line) € 200 € 250 MNE International School € 120 € 150 € 180 Accompanying Persons € 230 € 270 € 280 Please consider that registration fees for attendees in presence include all the social events scheduled for the conference, lunches and coffee breaks. Cancellations Policy: Pre-registered participants who are unable to attend the conference will have their paid fees reimbursed as follows. Written notice of non-attendance has to be sent to the conference secretariat. All refunds will be processed after the conference. Before August 20th, 2021: 50% will be charged as a processing fee From August 21st, 2021: no refund Please note that, due to the COVID 19 emergency, it will be possible to modify your registration from in presence fee to online fee at any time. The cost difference will be reimbursed except for an administrative handling cost of 20€.

EXHIBITION AND INDUSTRIAL SESSION The MNE2021 Commercial Exhibition will start on Monday, September 20th, and will be open throughout all Conference days. Exhibitors will have both physical and virtual booths. The list of companies with physical booth and their position inside the conference venue can be found in the map on page 3 and in the MNE2021 mobile guide To access the virtual exhibition booths please log in and visit the Expo Area section on the live.mne2021.org platform. The list of exhibitors and sponsors and detailed information about the companies can be found on the mne2021 conference website www.mne2021.org, in the section “SPONSOR AND EXHIBITION” by clicking on the logo of each company. An industrial session of oral presentations will be held on Thursday 21st September, in the Londra Room:

15:30-15:40 RAITH 16:45-16:50 Boston Micro Fabrication 15:40-15:50 STS Elionix (SemtechSolutions) 16:50-16:55 FEMTOPrint 15:50-16:00 Allresist 17:00-17:05 GenISys 16:00-16:10 Heidelberg Instruments 17:05-17:10 Vistec Electron Beam 16:10-16:20 Nano Dimension - DragonFly AME 17:10-17:15 JEOL 16:20-16:30 Nano Dimension - Fabrica 17:15-17:20 Micro resist technology 16:30-16:35 AMO 17:20-17:25 upnano 16:35-16:40 Assing 17:25-17:30 Gambetti 16:40-16:45 Zyvex Labs

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MNE2021 MOBILE APP GUIDE To view the MNE 2021 guide on your mobile device, you’ll need to do the following:

1. Download the Ex Ordo app on your phone from either the App Store (iOS) or the Google Play Store (Android)2. The installation process will take a few minutes. Once the app is installed, click the Ex Ordo icon that now

appears on your phone screen.3. You can now search for the guide. To find the guide type in MNE 2021 into the search box.4. If you would like to receive notifications from the conference organisers and interact with other users of the

guide you will have to register and log in. Here is an article that explains the process - Check in and Connect NOTE: You have to create a new account for logging into the guide. The credentials used to submit abstracts or presentations will not be recognised in the mobile app when you try to log in. MICROGRAPH CONTEST A micrograph contest is organized by the MNE Organizing Committee. Winners will be awarded during the gala dinner. Participants are kindly asked to submit their micrographs until Monday September 13th at the following web page https://www.zyvexlabs.com/contests/2021-3/. You can vote for the best micrograph using the mobile application: use the heart button in each picture to like your preferred entries in the “Micrograph Contest” tab. You will need to login to vote. POSTER PRESENTATIONS There are two poster sessions on Tuesday 21st and Wednesday 22nd. Each poster will be displayed during the whole conference from Tuesday 21st until morning of Thursday 23rd. The posters are grouped according to the thematic areas A, B, C, and D in the program. Each poster board will have a poster identification number. Please leave them on display and do not block them in order to provide a means for orientation for visitors of the poster session. Online posters have a smaller printed format and a QR code, that you can scan to interact with the presenting author remotely. Posters will be placed on the panels with double sided tape to be supplied by the Congress Secretariat. It is the Presenter’s obligation to put up and also remove the poster from the panel. Posters left after the end of the congress will be destroyed. The Congress Secretariat bares no responsibility for posters left behind. POSTER SESSION I ODD Numbers Please be at your Poster area or online, ready for a presentation on Tuesday, September 21st, 15:30-18:00 POSTER SESSION II EVEN Numbers Please be at your Poster area or online, ready for a presentation on Wednesday, September 22nd, 15:30-18:00 BEST POSTER AWARDS The MNE conference gives much weight and importance to the poster session. Contributions selected for poster presentation do not have less scientific quality than contributions selected for oral presentations, but their contents are expected to be more suitable for communication in poster form. To highlight the importance of the poster session, awards are given to the best posters. The posters will be evaluated per topic and four Best Poster Awards will be given out, one for each topic:

- Advanced Nanopatterning- Nanofabrication and Manufacturing for Functional Structures/Surfaces - Micro-Nano Devices and Systems for physical applications, electronics, photonics and energy - Micro & Nano Devices and Systems for Life Sciences, Chemistry, and Agrofood Sectors.

The evaluation will be based on the assessment of the abstract reviewers and by the poster examination from the jury during the conference. Winner announcement: The Best Poster Award Winners will be announced during the conference dinner on September 22nd. Poster Awards are sponsored by RAITH.

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MNE 2021 SPECIAL ISSUES – CALL FOR PAPERS SUBMISSION The MNE2021 Organizing Committee invites MNE2021 participants to submit papers to four (4) OPEN to all and THEMATICALLY FOCUSED special issues of Micro and Nano Engineering Journal (a new dynamic open access journal affiliated with iMNES) entitled:

• NanoPattern 2021 • NanoFabrication 2021 • Devices-MEMS 2021 • Lab-on-Chip 2021

Please refer to the specific special issue to see the thematic areas and select the issue appropriate for you. Each special issue call is an ‘open call’. This means that, while including selected papers presented at MNE2021, it is also open to other authors of the related scientific community. Manuscript submission deadline: October 31st, 2021 Your paper and associated supplementary information should comprise a complete, novel and full description of your work. Manuscripts of the special issue will be submitted and reviewed via the online Elsevier Editorial Manager Operating System. Accepted papers will be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article processing charges. This is a SPECIAL agreement between MNE2021 conference and MNE journal. Instructions for authors

• The standard submitted manuscripts are regular articles of MNE journals (4-6 pages). • Review papers (7-10 pages) are encouraged from invited/plenary speakers and leading members of the

community. If you are not an MNE invited speaker and you wish to submit a review, please contact Evangelos Gogolides (e.gogolides@inn.demokritos.gr, Editor-in-Chief, of MEE, MNE journals) or Matteo Cocuzza (matteo.cocuzza@infm.polito.it, MNE 2021 Program Co-Chair) with a proposal and outline.

• News and opinions papers are also welcome from plenary/invited speakers. Again, please contact the Editor-in-Chief or the MNE 2021 Program Co-Chair with a proposal.

• Highly novel work that deserves rapid dissemination can be submitted as an accelerated publication (up to 4 pages) and will be given high priority. In that case please declare that in your cover letter and explain the reasons.

• For all publications, we encourage you to supply additional information, audios/videos, etc. as on-line supplementary material to appear on the web, but not in the printed version. Your supplementary material will be available directly from ScienceDirect or Scopus.

• For general enquiries, please contact Matteo Cocuzza (MNE 2021 Program Co-Chair). • Please submit papers directly using the MNE journal Submission web page

https://www.editorialmanager.com/mne/default.aspx . Select the appropriate special issue and the correct file type (regular paper, review paper, etc.). The submission opens on September 1st, 2021 and closes after the submission deadline.

Please note that the special issue papers undergo the same high-standard review process as any other MNE paper. At least two reviews need to be in agreement per paper before decision, and the typical rejection rate is 50-60%. Therefore, please make sure that both the technical content of your paper and your presentation style and language are of high quality, and that the content is novel, unpublished, and not being considered for publication elsewhere. Do NOT submit work that is not complete yet, or has partially been published before, even if that work is presented in the conference. Please also note that on-line software is used to check plagiarism and duplicate publications. Please check the author guidelines at https://www.elsevier.com/journals/micro-and-nano-engineering/2590-0072/guide-for-authors.

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SOCIAL EVENTS WELCOME RECEPTION The Conference Welcome Reception will take place on Monday, September 20th, from 16:30 to 20:00 at the Conference Venue (Lingotto Congress center). GALA DINNER The Conference Official Gala Dinner will be hosted at the Royal Palace Palazzina da Caccia di Stupinigi, September 22nd, at 19:30. Transfer from the conference venue will start at about 19:00. A tour of the Royal Palace will preceed the gala dinner. During the dinner the winners of best poster awards and of the micrograph contest will be announced. For online attendees the award ceremony can be followed at the link reported on the MNE website https://www.mne2021.org/socialprogram/. Dress Code: informal CLOSING CONCERT On September 23rd, at 5 pm, the MNE2021 conference will be closed by a concert by l'Astrèe, Turin baroque ensemble. The Four Seasons by Antonio Vivaldi will be played by the ensemble, performed by Francesco D'Orazio. OFFICIAL LANGUAGE English will be the official language of the Conference and no simultaneous translation will be provided. CERTIFICATE OF ATTENDANCE Certificates will be provided after the completion of the Scientific Program. CONFERENCE BADGE Please wear your personal badge at all times. Entrance to the Conference area will only be permitted to guests wearing their name badge. The Congress Center Personnel will allow the entrance of persons with a valid COVID pass (see section “COVID SAFETY AND RELATED REGULATIONS”) CURRENCY Italy’s monetary unit is the Euro. No other currency is accepted and it is best to exchange dollars or other currency at a bank. INSURANCE We cannot accept responsibility for any personal loss, accidents or damages to participants and/or accompanying persons. Participants are strongly advised to obtain personal insurance to cover any eventuality that may occur during the Congress. VISA All foreigners intending to enter Italy must provide the documentation required to justify the reasons and duration of their stay as well as, in some prescribed cases, the availability of adequate economic means and lodging. In some cases you need a visa, application for which can be made at the Italian Diplomatic and Consular Representations in your country of residence. TRANSPORTATION Owing to its position, Torino – easily reached by car, train or plane – is the natural connection point between the surrounding Alpine valleys and is where the major national and international communication routes converge. Discover traffic information in real time: updates on traffic and road conditions in Piedmont www.muoversinpiemonte.it BY BUS There are many links connecting the main cities in Italy and abroad with Torino. For information on routes, prices and timetables: www.busradar.it www.comparabus.it Autostazione EXTRA.TO: Corso Bolzano/Via Grattoni-Torino – www.extrato.it Autostazione Terminal Bus: Corso Vittorio Emanuele II 131h – www.autostazionetorino.it

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In Torino trains, buses, taxis and car hire are available for everyone, from those in wheelchairs to mums with buggies. www.turismabile.it BY CAR Five motorways come to the city via the ring road that runs along the north, west and south sides of the town: – A4 Trieste-Venezia-Milano-Torino – www.autostrade.it – T1/T2-A5 Tunnel Monte Bianco-Aosta-Torino – www.ativa.it – www.tunnelmb.com – A6 Savona-Torino – www.autostrade.it – A21 Piacenza-Torino – www.autostrade.it – T4-A32 Tunnel Fréjus-Torino – www.sitaf.it – www.tunneldufrejus.com There are a number of slip roads off the A55 ring road for the areas just outside the city (airport, Lingotto, Juventus Stadium, Rivoli, Venaria Reale, Stupinigi included); for the town centre, the main exits are Corso Regina Margherita (North) and Corso Allamano (South). An extensive road network connects Torino with the province and, from there, to the main national and trans-European roads: SS 10 Monselice (Pd)-Torino SS 11 Venezia-Torino SS 20 Ventimiglia-Col di Tenda (Cn)-Torino SS 23 France-Sestriere-Torino SS 24 France-Cesana Torinese-Torino SS 25 France-Colle del Moncenisio-Torino SS 26 France/Switzerland-Aosta-Torino BY TRAIN Torino is a very important railway junction, especially for fast connections throughout Italy and part of Europe on the Lyon-Paris line with the trains Frecciarossa, Frecciabianca, Italo and TGV. There are five stations in town, two of them international (Porta Nuova and Porta Susa) while three are mainly for local transport and the metropolitan rail service (SFM): Porta Nuova – Corso Vittorio Emanuele II 53 Porta Susa – Corso Bolzano Lingotto – Via Pannunzio 1 Stura – Corso Romania 501 Rebaudengo Fossata – Via Fossata The trains to/from the airport (and then going on to the Valli di Lanzo) and to Alto Canavese are provided by GTT-Gruppo Torinese Trasporti departing from the stations: Dora – Via Giachino; Porta Susa – Corso Bolzano For information and timetables of trains: Trenitalia – www.trenitalia.com NTV – Italo – www.italotreno.it GTT – SFM – www.sfmtorino.it SNCF – TGV – www.tgv-europe.com/it FROM THE AIRPORT In the airport complex, on the “Arrivals” floor, taxis and hire car firms can easily be found; Torino can also be reached by train and bus. BY TRAIN The SFMA railway line connects the airport with the Dora GTT in 19 minutes, from where it is possible to reach Porta Susa, the underground and the city centre. Once the “Integrated Ticket B”, costing €3.00, has been stamped, it is usable for 120 minutes on SFMA, the underground, and the GTT urban and suburban network. All tickets can be bought at the ticket office in the Arrivals hall, the Airport and Dora GTT stations, and at bars and tobacconists showing the GTT sign. GTT – SFM – www.sfmtorino.it The new DORA EXPRESS service From 11th September 2017, a new bus route connects the Dora and Porta Susa stations, allowing commuters and tourists to reach the Airport or the city centre quickly and easily. BY BUS The journey time for the bus service between the airport and Torino centre is about 45 minutes, stopping at Porta Susa and Porta Nuova. Tickets cost €7.00 and on board the bus with a supplement of €1.00. SADEM – www.sadem.it BY TAXI

17

Taxis are available outside the Arrivals hall and reach the centre of Torino in about 30 minutes, for a cost of approximately €36. TAXI TORINO – www.taxi-torino.it CAR HIRE The main car hire companies can be found at the airport: their offices are located in the Arrivals hall and inside the tunnel of the multi-storey car park. A transport service is available for the disabled between the airport and city: the vehicles are found on the Arrivals floor in an easily accessible reserved area. Passengers wishing to use this service should contact the free-phone number shown at least 48 hours in advance (9am-1pm / 2pm-3pm). 800.514999 – www.aeroportoditorino.it The city of Torino also has direct daily bus services to the Intercontinental Airport “Malpensa 2000” (about 100km) and Bergamo Orio al Serio (about 190km). SADEM – www.sadem.it

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19

Instructions for presenters and session chairs

OPENING TIMES OF THE SLIDES CENTER Monday September 20th 17:00 – 20:00 Tuesday September 21st 09:00 – 18:00 Wednesday September 22nd 09:00 – 18:00 Thursday September 23rd 09:00 – 18:00

IF YOU ARE A CHAIR PERSON Please locate your session room in due time. Please be at your session room at least 15 minutes prior to the start of the session. We may remind you that speakers need to strictly observe the time schedule. Before the session starts, please check that all presenters are present. Before each presentation, please introduce the presenter by stating his/her name and affiliation. Online talks should be streamed with the pre-recorded presentation, and presenting authors will be online for the questions and answers session. Online questions will be allowed by the online platform.

ORAL PRESENTATIONS For all the MNE Conference oral contributions, a pre-recorded presentation is required. This is valid for both the online and in presence participants; In presence participants will have a live presentation and the pre-recorded video will be employed only in case of technical issues. Please go to the Slides Center to upload your presentation at most three hours before your presentation. For online participants the pre-recorded presentation will be employed as default, but authors must guarantee their live participation to the corresponding event slot to answer questions and to animate the scientific debate; the pre-recorded contributed presentations must last 12 minutes. The preferred mode comprises slides and speaker (webcam view) displaying. Please make sure to include an introductory slide including the authors’ list (with your name underlined), affiliations and talk title. POSTER PRESENTATIONS Please prepare your Poster (for the upload to the MNE online platform, https://authors.mne2021.org/) in PDF format. Poster presentation in presence You can hung your printed poster (A0 format, portrait orientation) on the dedicated board in the poster area and interact as usual with the MNE participants; We will also offer an interactive networking tool (chat) in the corresponding section on the MNE online platform at live.mne2021.org for the MNE remote participants interaction. Further information and details will follow closer to the date of the event. Poster presentation online The presenting poster author should be available for questions during the corresponding poster session. To this aim, we will offer an interactive networking tool (chat) in the corresponding section on the MNE online platform at live.mne2021.org. Further information and details will follow closer to the date of the event; A copy of your poster in A1 format will be printed by the MNE Organization, hung on the dedicated board in the poster area and equipped with a QR code so that participants can also directly access the corresponding electronic copy and chat on the MNE online platform to interact directly with the remotely connected authors.

20

Program at a glance

09:00-16:3016:30-20:00

08:30-08:45

08:45-09:30

09:30-10:15

10:15-10:45Auditorium 500 Room Londra Room

10:45 -12:45 Session A1:Imprinting & Soft Lithography

Session B1: Micro-Nanofab for photonics

Session C1:MEMS/NEMS Technology

12:45-14:00

14:00-15:30 Session A2:3D Lithographies

Session B2: Micro-Nanofab for electronics

Session C2: Fluidic Technologies

15:30-18:00

08:45-09:30

09:30-10:15

10:15-10:45Auditorium 500 Room Londra Room

10:45 -12:45Session A3:

Functional Structures & Materials

Session B3: Micro & Nano structures and

devices

Session C3:Biosensors technologies

12:45-14:00

14:00-15:30Session A4:

Nanostructures and applications

Session B4:Technologies for micro and nano

photonics I

Session C4:Iteractions with biosystems

15:30-18:0019:30-23:30

Auditorium 500 Room Londra Room

8:30 -10:30Session A5:

Electron & Ion beam technologies

Session B5:Technologies for Metasurfaces

Session C5:Technologies for micro and nano

Photonics II10:30-11:00

11:00-12:30Session A6:

Technologies for organic/biological matter

Session B6:Wearable technologies

Session C6:Implantable devices

12:30-13:45

13:45-15:00Session A7: Advanced Photon

LithographySession B7:

Late Abstracts

Session C7:Interacting with cells and

bacteria15:00-15:30

15:30-16:15

16:15-17:00

17:00-18:00

September 21

September 20

September 23

Registration and Welcome Reception

Plenary 3:Boris N. Chichkov (Leibniz University Hannover - Germany)

Laser bioprintingPlenary 4:

Anja Boisen, 2021 MNE Fellow Award (DTU - Denmark)Micro/Nano Engineering and Drug Delivery

Opening Ceremony Plenary 1:

Andrea Onetti (STMicroelectronics - Italy)Sensors: Cogito, Ergo Sum

Plenary 2:John A. Rogers (North Western University - USA)

Mechanical Assembly as a Route to 3D Micro/nanosystemsCoffee Break

Lunch Break

POSTER SESSION I (ODD NUMBERS)&

INDUSTRIAL SESSION (Londra Room)

Auditorium

Auditorium

MNE2021 International School

CLOSING CONCERT AND REMARKS

September 22

Coffe Break

Lunch Break

Coffe Break

Plenary 5:Paolo Vineis (Imperial College London - UK)

Technological developments in the study of the health impact of environmental exposuresPlenary 6:

Zhenan Bao (Stanford University - USA)Skin-Inspired Organic Electronics

Coffee Break

Lunch Break

SOCIAL DINNER

Auditorium

POSTER SESSION II (EVEN NUMBERS)

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Plenary Speakers ANDREA ONETTI Analog, MEMS and Sensors Group Vice President; MEMS Sensors Division General Manager; STMicroelectronics

SENSORS: COGITO, ERGO SUM TUESDAY, SEPTEMBER 21st 8:45 – 9:30 Abstract: When I started my journey into sensor world, sensors were an anomaly. Today, after only a quarter of a century, the world around us is full of sensors, most of which are connected to the cloud. By measuring multiple variables in the analog world and digitalizing them, sensors are a key enabler of the third and fourth waves of Artificial Intelligence Era: the Sensing AI and the Autonomous AI Eras, respectively. Daily and with tireless pace, the sensors inflate the Big Data digital world sphere. Internet of Things and Augmented reality technologies allow human kind to properly use the data collected by the sensors. But this is only one face of the coin. Indeed, once these data are fed in the latest generation algorithms of the big companies, they boost the profit of those companies and we became the means to others’ end. Sensors became a new source of human behavioral surplus with more predictive power, accelerating the transition toward surveillance capitalism, where free will and critical thinking are at risk. In this talk, after highlighting the key milestones of sensor development in the last twenty-five years and the future trend, I will argue how I see feasible the symbiosis between the Big Data, free will, critical thinking and a more transparent digital world.

Bio: Andrea Onetti is Group Vice President in the Analog, MEMS and Sensors Group and General Manager of ST’s MEMS Sensors Division and has held this position since February 2016. Onetti joined STMicroelectronics' R&D Lab in Castelletto, Italy, in 1990, as a designer of mixed-signal audio IC’s and moved into Product Management five years later, in charge of Marketing for Consumer Audio. Under his leadership, his organization became a Product Division and Onetti’s scope was enlarged to include management of planning, operation, and quality of audio products. In 2011, ST created the Audio and Sound Business Unit, targeting the whole audio chain, from detectors (ME MS microphones) to transducers (MEMS speakers), under Onetti’s charge. Most recently, he added responsibility for the Analog and Audio Systems Division, including catalog analog standard products.

Onetti has several patents for analog circuit implementations in the Audio domain. Andrea Onetti was born in Pavia, Italy, in 1965, and graduated with a Degree in Microelectronics from University of Pavia.

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JOHN A. ROGERS Department of Materials Science and Engineering; Northwestern University, USA

MECHANICAL ASSEMBLY AS A ROUTE TO 3D MICRO/NANOSYSTEMS

TUESDAY, SEPTEMBER 21st 9:30 – 10:15 Abstract: Complex, three dimensional (3D) assemblies of micro/nanomaterials form naturally in biological systems, where they provide sophisticated function in even the most basic forms of life.  In spite of their broad potential utility in man-made devices, design options for analogous abiotic 3D mesostructures are severely constrained by the comparatively primitive capabilities that are available with established techniques for materials growth, assembly and 3D printing.  This talk summarizes progress on strategies that rely on geometric transformation of preformed 2D functional micro/nanostructures into 3D architectures by controlled processes of actively induced compressive buckling.  The emphasis is on the foundational materials and mechanics principles, computational approaches that enable inverse designs, and examples of applications in areas ranging from thermoelectrics to microelectromechanical systems to biologically inspired open mesoscale microfluidic/electronic networks as functional interfaces to 3D cell cultures, including spheroids, organoids, assembloids and mini-brains. Bio: Professor John A. Rogers obtained BA and BS degrees in chemistry and in physics from the University of Texas, Austin, in 1989.  From MIT, he received SM degrees in physics and in chemistry in 1992 and the PhD degree in physical chemistry in 1995.  From 1995 to 1997, Rogers was a Junior Fellow in the Harvard University Society of Fellows.  He joined Bell Laboratories as a Member of Technical Staff in the Condensed Matter Physics Research Department in 1997, and served as Director of this department from the end of 2000 to 2002.  He then spent thirteen years on the faculty at University of Illinois, most recently as the Swanlund Chair Professor and Director of the Seitz Materials Research Laboratory.  In the Fall of 2016, he joined Northwestern University as the Louis Simpson and Kimberly Querrey Professor of Materials Science and Engineering, Biomedical Engineering and Medicine, with affiliate appointments in Mechanical Engineering, Electrical and Computer Engineering and Chemistry, where he is also Director of the recently endowed Institute for Bioelectronics.  He is a member of the National Academy of Engineering, the National Academy of Sciences, the National Academy of Medicine, the National Academy of Inventors and the American Academy of Arts and Sciences. 

23

BORIS N. CHICHKOV Leibniz University Hannover, Institute of Quantum Optics, GERMANY

LASER BIOPRINTING WEDNESDAY, SEPTEMBER 22nd 8:45 – 9:30 Abstract: In this lecture, we will discuss laser-based techniques applied for precise generation of 3D scaffolds for tissue engineering and for printing living cells and microorganisms into 3D patterns. For the scaffold generation, two-photon polymerization (2PP) technique is applied, which allows writing CAD structures directly into the volume of photosensitive polymer solutions. Scaffolds from different biomaterials like organic-inorganic Sol-Gel-Composites (e.g., zirconium-hybrids), biodegradable polymers (e.g., polylactic acid (PLA), polycaprolactone (PCL), polyethylene glycol (PEG)), and hydrogels (e.g., gelatin, hyaluronic acid, chitosan, alginate, gellan gum) or hydrogel blends, have been generated with this technique. Applications of this technique for in vitro development of human iPSC-derived functional neuronal networks will be discussed. For arranging cells in 3D patterns, laser-assisted bioprinting (LAB) based on the laserinduced forward transfer process is used. Different cell types, including primary cells, stem cells, and iPS cells embedded in hydrogels as extra-cellular matrix, have been printed. Our current progress in laser printing of microorganisms will be also discussed. Both 2PP and LAB techniques are capable of advancing 3D cell culture towards CAD defined and precisely arranged 3D cell models and “organ-on-chip” systems. Printed tissue, for example skin, can be used for analyzing the effect of agents like pharmaceuticals or cosmetics ex vivo and, by applying human primary cells, it might be applied instead of animal tests

Bio: Professor at the Leibniz University Hannover, Institute of Quantum Optics, Hannover, Germany Graduated with honors and received PhD in Physics from Moscow Institute of Physics and Technology in 1981. Started his scientific carrier at P.N. Lebedev Institute of Physics, Russian Academy of Sciences in Moscow and later worked in many research centers worldwide. At present, he is Professor of Physics at Leibniz University Hannover, Institute of Quantum Optics and Chair of Nanoengineering. Scientific areas: laser physics and laser applications, nanoengineering, additive manufacturing technologies, quantum and nonlinear optics, nano- and biophotonics, biomedical implants and devices, tissue engineering and regenerative medicine.

24

ANJIA BOISEN Technical University of Denmark, DENMARK

MICRO/NANO ENGINEERING AND DRUG DELIVERY MNE Fellow Award 2021

WEDNESDAY, SEPTEMBER 22nd 9:30 – 10:15 Abstract: Our research center of excellence ‘IDUN’ combines research in nanosensors/centrifugal microfluidics and microfabricated devices for oral drug delivery. This allows us to explore the synergy between sensor development and search for new pharmaceutical delivery tools and materials. I will show examples of recent findings and results within drug/polymer characterization, microdevices for drug delivery and diagnostics. Also, new applications within therapeutic drug monitoring using Surface Enhanced Raman Scattering will be presented as well as sensor integration with centrifugal microfluidics platforms. Bio: Anja Boisen is head of section and professor at department of Health Technology, Technical University of Denmark. Also, she is heading a DNRF and Villum Centre of Excellence named ‘IDUN - Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics’. Her research group focuses on development and application of micro and nano mechanical sensors and microfabricated systems for oral drug delivery. Anja is cofounder of companies Cantion, Silmeco BluSense Diagnostics and LightNovo. She is among others member of the board of the Leo Foundation, the board of Villum Foundation, the Danish Academy of the Technical Sciences and the Royal Danish Academy of Sciences. In 2008 she was awarded the largest research prize in Denmark, the Villum Kann Rasmussen award and in 2012 she was awarded the EliteForsk Award from the Danish ministry of Research, Innovation and Higher Education. In 2013 she received the ‘Sapere Aude – top researcher award’ from the Danish Council for Independent Research. Recently, in 2020 she was awarded the Order of Dannebrog by her Majesty the Queen of Denmark.

25

PAOLO VINEIS Imperial College London, UK

TECHNICAL DEVELOPMENTS ON THE STUDY OF THE HEALTH IMPACT OF ENVIRONMENTAL EXPOSURES

THURSDAY, SEPTEMBER 23rd 15:30 – 16:15 Abstract: With the word “exposome” we refer to the sum of all exposures (from conception onwards) of an individual, with particular focus on critical periods of life, e.g. in utero or in childhood. This is a new branch of environmental epidemiology that couples large population studies with technological developments, including the use of “sensors” and the measurement of molecules in the body. In the Molecular Signatures and Disease Pathways programme at the MRC Centre for Environment and Health we aim to improve our understanding of the causal link between exposures to common environmental contaminants and diseases, by characterizing the individuals’ external and internal exposome. Our research involves large population studies with collection of biological samples, using novel study designs and advanced multi-omic technologies (including epigenetics, proteomics, transcriptomics or metabolomics) to identify biomarkers of exposure and/or disease. The ultimate goal of this research is to reduce uncertainties in assessing the risk related to common environmental contaminants, by characterising the molecular signatures (biomarkers) of these exposures and identifying plausible pathways or networks through which they lead to disease initiation or progression. We are also exploring new approaches to measuring external exposures, including the use of silicone wristbands and other sensors.

Bio: Paolo Vineis is Chair of Environmental Epidemiology at Imperial College

London and Visiting Scientist at the Italian Institute of Technology (Genova). He is a leading researcher in the field of molecular epidemiology and his latest research focuses on environmental exposures and intermediate markers from -omic platforms in large epidemiological studies. He also investigates the effects of climate change on non-communicable diseases. Paolo Vineis is coordinator of the European Commission funded Exposomics (on air pollution) and Lifepath (H2020, on socio-economic inequalities and ageing) projects, both based on the development of omic technologies, and is a principal investigator or co-investigator of numerous international projects. He has more than 1000 publications in journals such as Nature, Science, Lancet, and Lancet Oncology. He is the author of “Health without Borders. Epidemics in the Era of Globalization”, Springer 2017.

26

ZENAN BAO K.K. Lee Professor and Department Chair in the Department of Chemical Engineering; Courtesy Professor in the Department of Chemistry and Department of Materials science and Engineering - Stanford University; Director of Stanford Wearable Electronics Initiative (eWEAR)

SKIN-INSPIRED ORGANIC ELECTRONICS THURSDAY, SEPTEMBER 23rd 16:15-17:00 Abstract: Skin is the body’s largest organ, and is responsible for the transduction of a vast amount of information. This conformable, stretchable, self-healable and biodegradable material simultaneously collects signals from external stimuli that translate into information such as pressure, pain, and temperature. The development of electronic materials, inspired by the complexity of this organ is a tremendous, unrealized materials challenge. However, the advent of organic-based electronic materials may offer a potential solution to this longstanding problem. Over the past decade, we have developed materials design concepts to add skin-like functions to organic electronic materials without compromising their electronic properties. These new materials and new devices enabled arrange of new applications in medical devices, robotics and wearable electronics. In this talk, I will discuss several projects related to engineering conductive materials and developing fabrication methods to allow electronics with effective electrical interfaces with biological systems, through tuning their electrical as well as mechanical properties. The end result is a soft electrical interface that has both low interfacial impedance as well as match mechanical properties with biological tissue. Several new concepts, such as “morphing electronics” and “genetically targeted chemical assembly - GTCA” will be presented. Bio: Zhenan Bao is Department Chair and K.K. Lee Professor of Chemical Engineering, and by courtesy, a Professor of Chemistry and a Professor of Material Science and Engineering at Stanford University. Bao founded the Stanford Wearable Electronics Initiate (eWEAR) in 2016 and serves as the faculty director. Prior to joining Stanford in 2004, she was a Distinguished Member of Technical Staff in Bell Labs, Lucent Technologies from 1995-2004. She received her Ph.D in Chemistry from the University of Chicago in 1995. Shehas over 550 refereed publications and over 65 US patents with a Google Scholar H-Index >160. Bao is a member of the National Academy of Engineering and the National Academy of Inventors. She is a Fellow of MRS, ACS, AAAS, SPIE, ACS PMSE and ACS POLY. Bao was selected as Nature’s Ten people who mattered in 2015 as a “Master of Materials” for her work on artificial electronic skin. She was awarded the inaugural ACS Central Science Disruptor and Innovator Prize in 2020, the Gibbs Medal by the Chicago session of ACS in 2020, the Wilhelm Exner Medalby Austrian Federal Minister of Science 2018, ACS Award on Applied Polymer Science 2017, the L'Oréal-UNESCO For Women in Science Award in the Physical Sciences 2017, the AICHE Andreas Acrivos Award for Professional Progress in Chemical Engineering in 2014, ACS Carl Marvel Creative Polymer Chemistry Award in 2013, ACS Cope Scholar Award in 2011, the Royal Society of Chemistry Beilby Medal and Prize in 2009, the IUPAC Creativity in Applied Polymer Science Prize in 2008. Bao is a co-founder and on the Board of Directors for C3 Nano and PyrAmes, both are silicon-valley venture funded start-ups. She serves as an advising Partner for Fusion Venture Capital.

27

Features Specifications

Electron GunAcceleration voltage

Min. beam spot size

Min. / Max.Field size

Beam current

Writing field size

Min. beam position

Loading system

ZrO/W Thermal Field Emitter

Min 100µm square Max (Option) 3000µm square

200mm wafer / 300mm wafer

Wide application coverage from high resolution to high current high speed

Max. sample size

Max 200MHz

0.1nm (at standard field)

Single autoloaderMulti autoloader300mm FOUP robot loader PEB robot loader

Scan clock

Max. writing area

Software

Beam conditionsExposure schedulePattern data converter Account managementPython scripting

elms

Inherits traditional Elionix technology to meet user’s requirements:z 150kV / 125kV acceleration voltages, if ultra-fine

patterns are most important.z 100kV for common applications and a wide variety

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marketplace. z Sample holders from small pieces commonly used

in basic research to 2/3/4/5/6/8/12 inch wafers.z Mask holders, such as for the 6025 and 9025 mask

sizes, are also available.

Complete line of automatic loading systems:z Single cassette autoloader, which is useful for

research and development applications.z Multiple cassette autoloader for small to medium

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ELS-BODENAcceleration 100kV u Single autoloader

High Performance Capabilities for High Resolution and High Throughput Applications

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ELIONIX, INC.3-7-6 Motoyokoyama-cho Hachioji Tokyo 192-0063 Japan

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with

un

matc

hed

hig

hth

rough

put

an

dth

us

en

ab

les

new

app

lications

inth

em

an

ufa

ctu

rin

gof

poly

meri

cm

icro

com

pon

en

ts.

30

31

DETAILED PROGRAM

Mon

day,

20

Sept

embe

r

8:45

amIn

tern

atio

nal S

choo

l - In

trod

ucti

onAu

la M

agna

, Pol

itecn

ico

di T

orin

o @

Lin

gotto

9am

Inte

rnat

iona

l Sch

ool -

Anj

a Bo

isen

Aula

Mag

na, P

olite

cnic

o di

Tor

ino

@ L

ingo

ttoCh

aire

d by

: Dr.

Fili

ppo

Pisa

no a

nd P

rof.

Luci

ano

Scal

trito

Mic

ro a

nd N

ano

Engi

neer

ing

for

drug

cha

ract

eriz

atio

n, p

atie

ntm

onit

orin

g, a

nd o

ral d

rug

deliv

ery

»An

ja B

oise

n ( T

echn

ical

Uni

vers

ity o

f Den

mar

k)

10:3

0am

Inte

rnat

iona

l Sch

ool -

Cof

fee

Brea

k

10:4

5am

Inte

rnat

iona

l Sch

ool -

John

A. R

oger

sAu

la M

agna

, Pol

itecn

ico

di T

orin

o @

Lin

gotto

Chai

red

by: D

r. F

ilipp

o Pi

sano

and

Pro

f. Lu

cian

o Sc

altr

ito

Flex

ible

Ele

ctro

nic

and

Mic

rofl

uidi

c Sy

stem

s fo

r th

e H

uman

Bod

y»

John

A. R

oger

s (N

orth

wes

tern

Uni

vers

ity)

12:1

5pm

Inte

rnat

iona

l Sch

ool -

Lun

ch

1:15

pmIn

tern

atio

nal S

choo

l - B

oris

N. C

hich

kov

Aula

Mag

na, P

olite

cnic

o di

Tor

ino

@ L

ingo

ttoCh

aire

d by

: Dr.

Fili

ppo

Pisa

no a

nd P

rof.

Luci

ano

Scal

trito

Lase

r pr

inti

ng o

f nan

opar

ticl

es a

nd li

ving

cel

ls»

Bori

s N

. Chi

ckov

( Ins

titut

e of

Qua

ntum

Opt

ics,

Lei

bniz

Uni

vers

ität

Han

nove

r)

2:45

pmIn

tern

atio

nal S

choo

l - C

offe

e Br

eak

3pm

Inte

rnat

iona

l Sch

ool -

Eva

ngel

os G

ogol

ides

Aula

Mag

na, P

olite

cnic

o di

Tor

ino

@ L

ingo

ttoCh

aire

d by

: Dr.

Fili

ppo

Pisa

no a

nd P

rof.

Luci

ano

Scal

trito

Supe

rhyd

roph

obic

sel

f-cl

eani

ng s

urfa

ces:

Pri

ncip

les,

fabr

icat

ion,

char

acte

riza

tion

, dur

abili

ty»

Evan

gelo

s G

ogol

ides

(NCS

R, In

stitu

te o

f Nan

osci

ence

and

Nan

otec

hnol

ogy)

4:30

pmIn

tern

atio

nal S

choo

l - C

oncl

usio

n

Tues

day,

21

Sept

embe

r

8:30

amO

peni

ngAu

dito

rium

8:45

amPl

enar

y 1:

And

rea

One

tti

Audi

toriu

mCh

aire

d by

: Pro

f. M

assi

mo

De

Vitt

orio

and

Pro

f. M

atte

o Co

cuzz

a

Sens

ors:

Cog

ito,

Erg

o Su

m»

Andr

ea O

nett

i (An

alog

, MEM

S an

d Se

nsor

s G

roup

Vic

e Pr

esid

ent;

MEM

S Se

nsor

s D

ivis

ion

Gen

eral

Man

ager

; STM

icro

elec

tron

ics)

9:30

amPl

enar

y 2:

John

A. R

oger

sAu

dito

rium

Chai

red

by: P

rof.

Mas

sim

o D

e Vi

ttor

io a

nd P

rof.

Mat

teo

Cocu

zza

Mec

hani

cal A

ssem

bly

as a

Rou

te t

o 3D

Mic

ro/n

anos

yste

ms

»Jo

hn A

. Rog

ers

(Dep

artm

ent o

f Mat

eria

ls S

cien

ce a

nd E

ngin

eeri

ng;

Nor

thw

este

rn U

nive

rsity

, USA

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

32

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

10:1

5am

Coff

ee B

reak

10:4

5am

A1

-Se

ssio

n A

1: Im

prin

ting

& S

oft

Lith

ogra

phy

Audi

toriu

mCh

aire

d by

: Dr.

Vin

cenz

o M

astr

onar

di a

nd P

rof.

Piet

ro A

sina

ri

10:4

5am

Ener

gy-s

elec

tive

pla

smon

ic n

anor

eact

ors

»D

r. E

itan

Oks

enbe

rg1 , D

r. Il

an S

hles

inge

r1 , Dr.

Ang

elos

Xom

alis

2 , Dr.

Andr

ea B

aldi

3 , Pro

f. Je

rem

y Ba

umbe

rg4 , D

r. A

. Fem

ius

Koen

deri

nk1 ,

Prof

. Eri

k G

arne

tt1 (1

. Cen

ter

for

Nan

opho

toni

cs, A

MO

LF, S

cien

ce P

ark

104,

109

8 XG

, Am

ster

dam

, The

Net

herl

ands

, 2. N

anoP

hoto

nics

Cen

tre,

Cave

ndis

h La

bora

tory

, Dep

artm

ent o

f Phy

sics

, JJ T

hom

pson

Ave

nue,

Uni

vers

ity o

f Cam

brid

ge, C

ambr

idge

, CB3

0H

E, U

nite

d Ki

ngdo

m, 3

.D

IFFE

R –

Dut

ch In

stitu

te fo

r Fu

ndam

enta

l Ene

rgy

Rese

arch

, De

Zaal

e20

, 561

2 A

J, Ei

ndho

ven,

The

Net

herl

ands

; Dep

artm

ent o

f Phy

sics

and

Astr

onom

y, V

rije

Uni

vers

iteit

Amst

erda

m, D

e Bo

elel

aan

1081

, 108

1 H

V,Am

ster

dam

, The

Net

herl

ands

, 4. U

nive

rsity

of C

ambr

idge

)

11:1

5am

Prin

ting

Dif

frac

tive

Opt

ics,

Lig

htgu

ide

Gra

ting

s an

d M

etal

ense

sw

ith

Hig

h A

spec

t Ra

tio

Nan

ofea

ture

s us

ing

Nan

oim

prin

tLi

thog

raph

y an

d H

igh

Refr

acti

ve In

dex

Nan

opar

ticl

e In

ks»

Mr.

Vin

cent

Ein

ck1 , M

s. M

ahsa

Tor

feh1 , M

r. A

ndre

w M

cClu

ng1 , D

r. D

aeEo

n Ju

ng1 , D

r. M

ahda

d M

anso

uree

1 , Pro

f. Am

ir A

rbab

i1 , Pro

f. Ja

mes

Wat

kins

1 (1. U

nive

rsity

of M

assa

chus

etts

)

11:3

0am

Fabr

icat

ion

of a

n an

tire

flec

tive

str

uctu

re o

n a

lent

icul

ar le

nsar

ray

mad

e of

hig

h ha

rdne

ss U

ltra

viol

et c

urab

le r

esin

»M

r. K

atsu

yuki

Yat

agaw

a1 , Pro

f. Ju

n Ta

nigu

chi1 , M

r. S

hin

Hiw

asa2 (1

.To

kyo

Uni

vers

ity o

f Sci

ence

, 2. A

utex

, Inc

.)

11:4

5am

Blu-

ray

Dri

ve B

ased

Mas

kles

s H

igh-

Thro

ughp

ut a

nd L

arge

-Are

aSp

in W

riti

ng M

icro

litho

grap

hy S

yste

m»

Prof

. Edw

in H

wu1 , M

r. M

artin

Vos

s1 , Dr.

Rom

an S

lipet

s1 , Mr.

Tie

n-Je

nCh

ang1 , P

rof.

Anja

Boi

sen1 (1

. Tec

hnic

al U

nive

rsity

of D

enm

ark)

12pm

Fabr

icat

ion

of fi

lms

wit

h su

rfac

e hi

erar

chic

al m

icro

/nan

ost

ruct

ures

for

plas

tic

inje

ctio

n m

oldi

ng»

Ms.

Olg

a M

unta

da-L

ópez

1 , Dr.

Pat

ríci

a So

usa2 , D

r. Jo

rdi L

lobe

t1 , Mr.

Carl

os S

aez3 , M

s. N

ekan

e Lo

zano

3 , Pro

f. Fr

ance

sc P

erez

-Mur

ano4 (1

.IM

B-CN

M (C

SIC)

, 2. I

NL-

Inte

rnat

iona

l Ibe

rian

Nan

otec

hnol

ogy

Labo

rato

ry, 3

. EU

RECA

T, C

entr

e Te

cnol

ògic

de

Cata

luny

a, 4

. Ins

titut

e of

Mic

roel

ectr

onic

s)

12:1

5pm

One

-ste

p pr

inti

ng o

f met

ahol

ogra

m u

sing

nan

opar

ticl

e-em

bedd

edre

sin

»M

r. Jo

ohoo

n Ki

m1 , M

r. D

ong

Kyo

Oh1 , P

rof.

Juns

uk R

ho1 (1

. Poh

ang

Uni

vers

ity o

f Sci

ence

and

Tec

hnol

ogy

(PO

STEC

H))

12:3

0pm

UV-

assi

sted

em

boss

ing

of m

icro

gel s

hape

s w

ith

vary

ing

geom

etri

es fo

r or

al m

acro

mol

ecul

e de

liver

y»

Ms.

Sha

hana

Bis

hnoi

1 , Dr.

Riti

ka S

ingh

Pet

erse

n2 , Dr.

Las

se H

øjlu

ndEk

lund

Tha

mdr

up1 , P

rof.

Step

han

Sylv

est K

elle

r3 , Pro

f. Le

ticia

Hot

sa-

Riga

u1 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k, 2

. DTU

Nan

olab

- N

atio

nal

Cent

re fo

r N

ano

Fabr

icat

ion

and

Char

acte

riza

tion

Tec

hnic

al U

nive

rsity

of D

enm

ark,

3. D

TU N

anol

ab, T

echn

ical

Uni

vers

ity o

f Den

mar

k)

10:4

5am

B1 -

Sess

ion

B1: M

icro

-Nan

ofab

for

phot

onic

sSa

la 5

00Ch

aire

d by

: Dr.

Tiz

iana

Sto

meo

and

Fra

nces

co M

adar

o

10:4

5am

Hyp

erbo

lic N

anop

arti

cles

Bas

ed D

ual F

unct

ion

Plat

form

for

SERS

and

Ther

mop

lasm

onic

s»

Dr.

Yin

gqi Z

hao1 , D

r. A

liaks

andr

Hub

arev

ich2 , D

r. Ji

anan

Hua

ng3 , M

s.M

arzi

a Ia

ross

i1 , Dr.

Tet

iana

Bor

zda2 , D

r. F

ranc

esco

Tan

tuss

i2 , Dr.

Fran

cesc

o D

e An

gelis

1 (1. I

stitu

to It

alia

no d

i Tec

nolo

gia,

Gen

ova,

Ital

y, 2

.Is

titut

o Ita

liano

di T

ecno

logi

a, 3

. Uni

vers

ity o

f Oul

u)

11am

Plas

mon

ic m

echa

nica

lly c

ontr

olle

d br

eak

junc

tion

s»

Dr.

Flo

rian

Lai

ble1 , D

r. K

ai B

raun

2 , Mr.

Mar

tin E

berl

e2 , Pro

f. D

iete

r P.

Kern

1 , Pro

f. Al

fred

J. M

eixn

er2 , P

rof.

Mon

ika

Flei

sche

r1 (1. U

nive

rsity

of

Tübi

ngen

Inst

itute

for

Appl

ied

Phys

ics

and

Cent

er L

ISA+

, 2. U

nive

rsity

of T

übin

gen

Inst

itute

of P

hysi

cal a

nd T

heor

etic

al C

hem

istr

y an

d Ce

nter

LISA

+)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

33

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

11:1

5am

Biom

imet

ic c

olou

r en

gine

erin

g fr

om n

atur

e to

app

licat

ions

»Pr

of. S

ilvia

Vig

nolin

i1 (1. U

nive

rsity

of C

ambr

idge

)

11:4

5am

Elec

tron

Bea

m In

duce

d D

epos

itio

n of

pla

smon

ic n

anop

illar

s on

nano

met

ric

tape

red

opti

cal f

iber

s fo

r op

tica

l cha

ract

eriz

atio

n of

sing

le p

lasm

onic

str

uctu

res

»D

r. A

nton

io B

alen

a1 , Dr.

Fili

ppo

Pisa

no1 , D

r. M

arco

Pis

anel

lo1 , D

r.Fe

rruc

cio

Pisa

nello

1 , Pro

f. M

assi

mo

De

Vitt

orio

1 , Dr.

Ros

a M

ach

Batll

e1 ,D

r. C

rist

ian

Cira

cì1 , M

s. M

aria

nna

D'A

mat

o2 , Dr.

Che

ngjie

Din

g2 , Pro

f.Al

bert

o Br

amat

i2 (1. I

stitu

to It

alia

no d

i Tec

nolo

gia,

Cen

ter

for

Biom

olec

ular

Nan

otec

hnol

ogie

s, 2

. Lab

orat

oire

Kas

tler

Bros

sel,

Sorb

onne

Uni

vers

ité, C

NRS

,EN

S-PS

L)

12pm

Des

ign

and

Fabr

icat

ion

of a

Pho

toni

c W

aveg

uide

Sw

itch

Bas

ed o

na

VO2

Film

»M

r. Z

ixio

ng L

I1 , Dr.

San

az R

astjo

o1 , Ms.

Ann

ika

Ewy2 , M

r. X

iao

WAN

G3 ,

Prof

. Alfr

ed L

udw

ig3 , P

rof.

Man

fred

Koh

l1 (1. I

nstit

ute

of M

icro

stru

ctur

eTe

chno

logy

, Kar

lsru

he In

stitu

te o

f Tec

hnol

ogy(

KIT)

), 2.

Inst

itute

of

Mic

rost

ruct

ure

Tech

nolo

gy (I

MT)

, Kar

lsru

he In

stitu

te o

f Tec

hnol

ogy

(KIT

), 3.

Inst

itute

for

Mat

eria

ls, R

uhr-

Uni

vers

ität B

ochu

m (R

UB)

)

12:1

5pm

Fabr

icat

ion

of li

ght

man

agem

ent

nano

-str

uctu

res

as a

n st

rate

gyto

enh

ance

ligh

t ab

sorp

tion

and

to

redu

ce r

efle

ctiv

ity

for

phot

ovol

taic

s»

Dr.

Jord

i Llo

bet1 , D

r. P

atrí

cia

Sous

a2 , Mr.

Hel

der

Fons

eca2 , M

r. A

shis

hPr

ajap

ati3 , M

r. A

nkit

Chau

han3 , D

r. C

arlo

s Ca

laza

2 , Dr.

Gil

Shal

ev3 (1

.In

stitu

te o

f Mic

roel

ectr

onic

s of

Bar

celo

na, 2

. IN

L- In

tern

atio

nal I

beri

anN

anot

echn

olog

y La

bora

tory

, 3. B

en G

urio

n U

nive

rsity

of t

he N

egev

)

12:3

0pm

Min

iatu

rise

d 3D

mon

olit

hic

opti

cal s

yste

m fo

r pa

rtic

les’

sen

sor

'on-

a-ch

ip'

»D

r. R

osan

na T

osca

no1 , D

r. A

ndre

a Lo

vera

1 , Dr.

Gab

riel

Jobe

rt2 , D

r.Pi

erre

Bar

rita

ult2 , D

r. M

arys

e Fo

urni

er2 , D

r. C

yrie

lle M

onpe

urt2 , D

r.Pi

etro

Ber

nasc

oni1 , D

r. D

anie

le B

raga

1 (1. F

emto

prin

t SA,

Muz

zano

,69

33, S

witz

erla

nd, 2

. CEA

-LET

I Min

atec

, Uni

vers

ité G

reno

ble-

Alpe

s, F

-38

000

Gre

nobl

e, F

ranc

e)

10:4

5am

C1 -

Sess

ion

C1: M

EMS/

NEM

S Te

chno

logy

Sala

Lon

dra

Chai

red

by: D

r. F

ranc

esco

Riz

zi a

nd P

rof.

Hub

ert B

ruec

kl

10:4

5am

Non

-inva

sive

sw

allo

win

g m

onit

orin

g sy

stem

bas

ed o

n so

ft a

ndfl

exib

le p

iezo

elec

tric

sen

sor

»D

r. L

ara

Nat

ta1 , D

r. F

ranc

esco

Gui

do2 , D

r. L

ucia

na A

lgie

ri1 , D

r.Vi

ncen

zo M

astr

onar

di1 , D

r. F

ranc

esco

Riz

zi1 , D

r. E

lisa

Scar

pa1 , D

r.An

toni

o Q

ualti

eri1 , D

r. M

aria

Ter

esa

Toda

ro3 , D

r. V

ince

nzo

Sallu

stio

4 ,Pr

of. M

assi

mo

De

Vitt

orio

5 (1. I

stitu

to It

alia

no d

i Tec

nolo

gia,

2.

Piez

oski

n, 3

. Ist

ituto

di n

anot

ecno

logi

a, C

NR,

4. A

SL L

ecce

, 5. I

stitu

to)

11am

Fabr

icat

ion

met

hod

for

near

ly-p

erfe

ct c

ircu

lar

chan

nel s

truc

ture

sus

ing

Buri

ed C

hann

el T

echn

olog

y an

d H

NA

etc

hant

»M

r. Q

ihui

Yu1 , M

r. X

ing

An2 , M

r. H

enk-

Will

em V

eltk

amp1 , M

r. M

eint

de

Boer

1 , Dr.

Rem

co W

iege

rink

1 , Pro

f. Jo

ost L

ötte

rs3 (1

. MES

A+ In

stitu

te fo

rN

anot

echn

olog

y / U

nive

rsity

of T

wen

te, 2

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A+ In

stitu

te fo

rN

anot

echn

olog

y, E

nsch

ede,

The

Net

herl

ands

, 3. M

ESA+

Inst

itute

for

Nan

otec

hnol

ogy

/ Uni

vers

ity o

f Tw

ente

/ Br

onkh

orst

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h-Te

ch B

V)

11:1

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Lase

r-in

duce

d fo

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er o

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nal S

U-8

mic

ropa

rts

»M

r. Z

hiw

ei Y

ang1 , D

r. G

iova

nni B

oero

1 , Pro

f. Jü

rgen

Bru

gger

1 (1. E

cole

Poly

tech

niqu

e Fé

déra

le d

e La

usan

ne (E

PFL)

)

11:3

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Tria

ngul

ar S

prin

gs fo

r La

rge

Dis

plac

emen

ts o

f Com

b-D

rive

Act

uato

rs»

Mrs

. Lis

a Sc

hmitt

1 , Mr.

Phi

lip S

chm

itt2 , P

rof.

Mar

tin H

offm

ann1 (1

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air

of M

icro

syst

ems

Tech

nolo

gy, R

uhr

Uni

vers

ity B

ochu

m, 2

. Ruh

r-U

nive

rstit

ät B

ochu

m)

11:4

5am

Win

egla

ss m

ode

MEM

S gy

rosc

opes

wit

h si

ngle

cry

stal

mat

eria

ls»

Prof

. Tos

hiyu

ki T

such

iya1 (1

. Kyo

to U

nive

rsity

)

12:1

5pm

Spec

tral

cha

ract

eris

atio

n an

d tu

ning

eff

ect

of p

icom

etre

-sca

leth

erm

omec

hani

cal m

otio

n fo

r si

licon

NEM

S re

sona

tors

»M

r. Ja

mes

Fer

nand

o1 , Mr.

Fan

g Be

n1 , Dr.

Jun-

Yu O

u1 , Dr.

Yos

hish

ige

Tsuc

hiya

1 (1. U

nive

rsity

of S

outh

ampt

on)

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icro

and

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o E

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rans

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ion

from

MEM

S to

NEM

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n Ru

les,

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abili

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, and

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sibi

litie

s»

Mr.

Kon

stan

tinos

Tso

ukal

as1 , P

rof.

Søre

n St

obbe

2 (1. D

TU F

oton

ik,

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artm

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cs E

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gs. L

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mar

k, 2

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nik,

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hnic

al U

nive

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enm

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h Br

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2pm

A2

-Se

ssio

n A

2: 3

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mCh

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Tiz

iana

Sto

meo

and

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Anp

an H

an

2pm

Ult

ra-t

hick

pos

itiv

e ph

otor

esis

t la

yers

for

mas

kles

s gr

aysc

ale

litho

grap

hy»

Mr.

Dom

iniq

ue C

ollé

1 , Ms.

Ger

da E

kind

orf1 , D

r. P

eter

Hey

l1 (1.

Hei

delb

erg

Inst

rum

ents

)

2:15

pmFa

bric

atio

n of

3D

clo

sed-

wal

l sha

pes

usin

g Fo

cuse

d El

ectr

on B

eam

Indu

ced

Dep

osit

ion:

a n

ano-

cone

stu

dy»

Ms.

Aya

Mah

goub

1 , Mr.

Ric

hard

de

Jong

1 , Mr.

Luc

van

Kes

sel1 , D

r.Co

rnel

is W

Hag

en1 (1

. Del

ft U

nive

rsity

of t

echn

olog

y)

2:30

pmRe

fere

nce

Elec

trod

es w

ith

2PP

stru

ctur

ed H

ydro

gel f

or B

iom

ass

Det

ecti

on in

a M

icro

-Bio

reac

tor

»M

r. S

ven

Mei

nen1 , M

r. S

teff

en B

rink

man

n2 , Mrs

. Bas

sant

Elb

ardi

sy3 ,

Mr.

Kev

in V

iebr

ock4 , P

rof.

Rain

er K

rull4 , P

rof.

Hen

ning

Men

zel3 , P

rof.

Andr

eas

Die

tzel

2 (1. I

nstit

ute

of M

icro

tech

nolo

gy, T

echn

isch

eU

nive

rsitä

t Bra

unsc

hwei

g, 2

. Ins

titut

e of

Mic

rote

chno

logy

at T

UBr

auns

chw

eig,

3. I

nstit

ute

for

Tech

nica

l Che

mis

try

at T

echn

isch

eU

nive

rsitä

t Bra

unsc

hwei

g, 4

. Ins

titut

e of

Bio

chem

ical

Eng

inee

ring

at

Tech

nisc

he U

nive

rsitä

t Bra

unsc

hwei

g)

2:45

pmN

on-p

lana

r tw

o-ph

oton

lith

ogra

phy

on t

aper

ed fi

bers

to

real

ize

impl

anta

ble

neur

al in

terf

aces

for

sim

ulta

neou

s m

ulti

poin

t op

tica

lco

ntro

l and

ele

ctri

cal r

ecor

ding

»D

r. A

nton

io B

alen

a1 , Dr.

Bar

bara

Spa

gnol

o1 , Mr.

Mar

co B

ianc

o1 , Dr.

Mar

co P

isan

ello

2 , Dr.

Fili

ppo

Pisa

no1 , D

r. A

less

andr

o Ri

zzo3 , D

r.Le

onar

do S

ileo1 , D

r. F

ranc

esco

De

Nuc

cio4 , P

rof.

Dom

enic

oLo

frum

ento

4 , Dr.

Fer

rucc

io P

isan

ello

1 , Pro

f. M

assi

mo

De

Vitt

orio

3 , Pro

f.Be

rnar

do L

. Sab

atin

i5 (1. I

stitu

to It

alia

no d

i Tec

nolo

gia,

Cen

ter

for

Biom

olec

ular

Nan

otec

hnol

ogie

s, 2

. Ist

ituto

Ital

iano

di T

ecno

logi

a, 3

.Is

titut

o Ita

liano

di T

ecno

logi

a, C

ente

r fo

r Bi

omol

ecul

arN

anot

echn

olog

ies

- Uni

vers

ità d

el S

alen

to, 4

. Uni

vers

ità d

el S

alen

to, 5

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assa

chus

etts

Gen

eral

Hos

pita

l and

Har

vard

Med

ical

Sch

ool)

3pm

3D L

aser

Nan

opri

ntin

g: R

ecen

t Pr

ogre

ss»

Prof

. Mar

tin W

egen

er1 (1

. Ins

titut

e of

App

lied

Phys

ics,

Kar

lsru

heIn

stitu

te o

f Tec

hnol

ogy

(KIT

), 76

128

Karl

sruh

e, G

erm

any)

2pm

B2 -

Sess

ion

B2: M

icro

-Nan

ofab

for

elec

tron

ics

Sala

500

Chai

red

by: P

rof.

Mat

teo

Cocu

zza

and

Prof

. Mic

hael

Kra

ft

2pm

Fast

-res

pons

e, t

rans

ient

NO

2 se

nsin

g w

ith

ultr

a-lo

w-p

ower

, sel

f-he

ated

car

bon

nano

tube

fiel

d-ef

fect

tra

nsis

tors

»M

r. S

eoho

Jung

1 , Dr.

Cos

min

Rom

an1 , P

rof.

Chri

stof

er H

iero

ld1 (1

. ETH

Zuri

ch)

2:15

pmPl

asm

a at

omic

laye

r et

chin

g of

hig

h-k

laye

rs o

n W

S2»

Dr.

Jean

-Fra

ncoi

s de

Mar

neff

e1 , Dr.

Dan

iil M

arin

ov1 , D

r. A

ndy

Goo

dyea

r2 , Mr.

Pie

ter-

Jan

Wyn

dael

e3 , Dr.

Ben

jam

in G

rove

n1 , Dr.

Sou

vik

Kund

u1 , Dr.

Mik

e Co

oke4 , P

rof.

Stef

an D

e G

endt

3 (1. i

mec

v.z

.w.,

2.O

xfor

d In

stru

men

ts P

lasm

a Te

chno

logy

, 3. K

U L

euve

n, 4

. Oxf

ord

Inst

rum

ents

)

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by

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Ord

o, e

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thin

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ed t

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n a

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nce.

MN

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21 -

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h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

35

Cont

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om T

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ay, 2

1 Se

ptem

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2:30

pm

Nan

osca

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ffec

ts in

org

anic

tra

nsis

tors

for

bio-

and

neur

oele

ctro

nics

via

thi

n fi

lm g

row

th, i

nter

faci

al c

hem

istr

y an

dpa

tter

ning

»Pr

of. F

abio

Bis

cari

ni1 , D

r. S

ofia

Dra

kopo

ulou

2 , Dr.

Mau

ro M

urgi

a3 , Dr.

Cris

tiano

Alb

onet

ti4 , Dr.

Mic

hele

Di L

auro

5 , Dr.

Mic

hele

Bia

nchi

5 , Dr.

Stef

ano

Carl

i5 , Dr.

Dav

id P

apo6 , D

r. A

nna

De

Salv

o7 , Dr.

Alic

e Lu

nghi

7 ,D

r. G

ioac

chin

o Ca

land

ra5 , D

r. D

eniz

Gul

sen

Sayg

in5 , D

r. M

eenu

Selv

araj

8 , Dr.

Mar

cello

Ber

to8 , D

r. M

atte

o Se

nsi8 , D

r. P

ierp

aolo

Gre

co8 ,

Dr.

Car

lo B

orto

lott

i8 , Dr.

Luc

iano

Fad

iga7 (1

. Cen

ter

for

Tran

slat

iona

lN

euro

phys

iolo

gy, I

stitu

to It

alia

no d

i Tec

nolo

gia,

Fer

rara

, Ita

ly &

Dep

t.of

Life

Sci

ence

s-U

nive

rsità

di M

oden

a e

Regg

io E

mili

a Vi

a Ca

mpi

103

,41

125

Mod

ena,

Ital

y, 2

. Dep

t. of

Life

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ence

s-U

nive

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di M

oden

a e

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io E

mili

a Vi

a Ca

mpi

103

, 411

25 M

oden

a, It

aly

& D

ept.

of P

hysi

cs,

Info

rmat

ics

and

Mat

hem

atic

s - U

nive

rsità

di M

oden

a e

Regg

io E

mili

a,Vi

a Ca

mpi

213

/a, 4

1125

Mod

ena,

Ital

y, 3

. Cen

ter

for

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lN

euro

phys

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gy -

Istit

uto

Italia

no d

i Tec

nolo

gia,

Via

Fos

sato

di

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tara

17-

19, 4

4121

Fer

rara

, Ita

ly &

CN

R–IS

MN

, Ins

titut

e fo

rN

anos

truc

ture

d M

ater

ials

, Via

P. G

obet

ti 10

1, I-

4012

9 Bo

logn

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aly,

4.

CNR–

ISM

N, I

nstit

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for

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ls, V

ia P

. Gob

etti

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. Cen

ter

for

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logy

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titut

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taly

, 6. C

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, Ist

ituto

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erra

ra, I

taly

Dep

t. of

Chem

istr

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nive

rsità

di C

atan

ia, V

.le A

. Dor

ia 6

, 951

25 C

atan

ia, I

taly

, 7.

Cent

er fo

r Tr

ansl

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nal N

euro

phys

iolo

gy, I

stitu

to It

alia

no d

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cnol

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, Fer

rara

, Ita

ly N

euro

scie

nces

and

Reh

abili

tatio

n D

ept-

Uni

vers

ità d

i Fer

rara

, Via

Fos

sato

di M

orta

ra 1

7-19

, 441

21 F

erra

ra, I

taly

,8.

Dep

t. of

Life

Sci

ence

s-U

nive

rsità

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oden

a e

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io E

mili

a Vi

aC a

mpi

103

, 411

25 M

oden

a, It

aly)

3pm

Vert

ical

CN

T ba

sed

Sup

erca

paci

tors

for

3D In

tegr

atio

n of

On-

Chip

Ener

gy S

tora

ge»

Mr.

Hun

g-W

ei L

i1 , Dr.

Vic

tori

a M

anzi

1 , Mr.

Sad

egh

Kam

aei B

ahm

aei1 ,

Mr.

Poo

ya D

ehgh

an2 , D

r. A

li Sa

eidi

1 , Dr.

Cla

ra F

. Mol

dova

n1 , Pro

f.Ad

rian

M. I

ones

cu1 (1

. Eco

le P

olyt

echi

que

Fédé

rale

de

Laus

anne

, 2.

Ecol

e Po

lyte

chni

que

Fédé

rale

de

Laus

anne

(EPF

L))

3:15

pmCo

mpa

tibi

lity

of C

MO

S te

chno

logy

wit

h Q

D-b

ased

dev

ices

»M

r. A

lber

to d

el M

oral

1 , Dr.

Est

eve

Amat

2 , Dr.

Dav

id Q

uiri

on1 , D

r. N

uria

Torr

es1 , D

r. H

ans-

Juer

gen

Enge

lman

n3 , Dr.

Joha

nnes

von

Bor

any3 , D

r.Ka

rl-H

einz

Hei

nig3 , D

r. G

uido

Rad

emak

er4 , D

r. M

arie

-Lin

e Po

urte

au4 ,

Dr.

Ral

uca

Tiro

n4 , Pro

f. Jo

an B

ause

lls5 , D

r. F

ranc

esc

Pere

z-M

uran

o5 (1.

Inst

itute

of M

icro

elec

tron

ics

of B

arce

lona

(IM

B-CN

M, C

SIC)

, 2. I

MB

CNM

CSIC

, 3. I

nstit

ute

of Io

n Be

am P

hysi

cs a

nd M

ater

ials

Res

earc

h,H

elm

holtz

-Zen

trum

Dre

sden

-Ros

send

orf (

HZD

R), D

resd

en, 0

1328

,G

erm

any,

4. U

niv.

Gre

nobl

e Al

pes,

CEA

, LET

I, F-

3800

0 G

reno

ble,

Fra

nce,

5.IM

B-CN

M (C

SIC)

)

2pm

C2 -

Sess

ion

C2: F

luid

ic T

echn

olog

ies

Sala

Lon

dra

Chai

red

by: D

r. L

ara

Nat

ta a

nd A

nnam

aria

Ger

ardi

no

2pm

Liqu

id b

iops

y in

can

cer:

Tec

hnic

al c

halle

nges

and

clin

ical

appl

icat

ions

»Pr

of. C

athe

rine

Alix

-Pan

abiè

res1 (1

. Lab

orat

ory

of R

are

Hum

anCi

rcul

atin

g Ce

lls (L

CCRH

), U

nive

rsity

Med

ical

Cen

tre

of M

ontp

ellie

r,M

ontp

ellie

r, Fr

ance

& C

REEC

/CAN

ECEV

, MIV

EGEC

(CRE

ES) U

nive

rsity

of

Mon

tpel

lier,

CNRS

, IRD

, Mon

tpel

lier,

Fran

ce)

2:30

pmN

euro

Exam

iner

: a m

icro

flui

dic

devi

ce fo

r w

hole

-bra

in in

viv

oim

agin

g»

Ms.

Dom

inik

a Sc

hröd

ter1 , M

r. Ja

kob

von

Trot

ha2 , P

rof.

Rein

hard

Köst

er2 , P

rof.

Andr

eas

Die

tzel

3 (1. I

nstit

ute

of M

icro

tech

nolo

gy,

Tech

nisc

he U

nive

rsitä

t Bra

unsc

hwei

g, 2

. Tec

hnis

che

Uni

vers

ität

Brau

nsch

wei

g, 3

. Ins

titut

e of

Mic

rote

chno

logy

at T

U B

raun

schw

eig)

2:45

pmLa

bel f

ree

capt

ure

and

rele

ase

of c

ells

by

usin

g a

mic

rofl

uidi

csy

stem

, con

ical

-hol

e fi

lter

and

mic

ro-p

arti

cles

»M

r. F

eng

Lian

g1 , Dr.

Juan

Pen

g1 , Dr.

Jian

Shi

2 , Dr.

Li W

ang2 , D

r. C

arol

eAi

mé1 , P

rof.

Yong

Che

n1 (1. E

cole

Nor

mal

e Su

péri

eure

, 2. M

esoB

ioTe

ch)

3pm

Char

acte

rizi

ng s

ize

and

zeta

pot

enti

al o

f bio

collo

ids

wit

h a

salin

ity

grad

ient

»M

r. R

odol

phe

Mar

ie1 , M

r. Jo

nas

Nyv

old

Pede

rsen

2 , Mr.

Mar

tin K

jæru

lfRa

smus

sen2 (1

. DTU

Nan

otec

h, 2

. Tec

hnic

al U

nive

rsity

of D

enm

ark)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

36

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

3:15

pmPi

llar

Supp

orte

d So

ft X

-Ray

Com

pati

ble

Liqu

id C

ells

»D

r. A

loki

k Ka

nwal

1 , Dr.

Rob

ert I

lic1 , D

r. G

lenn

Hol

land

1 , Dr.

Subh

rang

su M

ukhe

rjee

1 , Dr.

Elio

t Gan

n1 , Dr.

Dea

n D

eLon

gcha

mp1 , D

r.J.

Alex

ande

r Li

ddle

1 (1. N

atio

nal I

nstit

ute

of S

tand

ards

and

Tec

hnol

ogy)

3:30

pmPo

ster

Ses

sion

- O

dd n

umbe

rs -

Adv

ance

d Pa

tter

ning

PA1-

Hig

h th

roug

hput

fabr

icat

ion

of p

lasm

onic

col

ors

on fl

exib

lesu

bstr

ates

»M

s. C

hris

tine

Prie

tl1 , Mr.

Ste

phan

Rut

tloff

1 , Dr.

Sus

anne

Sch

wei

tzer

1 ,M

r. F

lori

an K

olb1 , D

r. A

nja

Haa

se1 (1

. JO

ANN

EUM

RES

EARC

HFo

rsch

ungs

gese

llsch

aft m

bH)

PA3-

Impa

ct o

f ele

ctro

n sc

atte

ring

in E

UV

mas

k ab

sorb

er m

ater

ials

»Pr

of. C

hun-

Hun

g (Ji

mm

y) L

iu1 , M

r. H

sian

g-Yi

Hsi

eh2 , P

rof.

Kuen

-Yu

Tsai

3 , Mr.

Shu

en-P

ing

Wan

g1 , Mr.

Kua

n-Fu

Hua

ng1 , M

r. W

ei-Y

ung

Hsu

1 ,M

r. F

ei-M

ing

Hua

ng1 , M

r. C

hih-

Chia

ng W

u1 , Ms.

Yun

-Chi

n Li

1 , Mr.

Chi

eh-

Shen

g Le

e1 (1. I

nter

disc

iplin

ary

Prog

ram

of G

reen

and

Info

rmat

ion

Tech

nolo

gy, N

atio

nal T

aitu

ng U

nive

rsity

, 2. D

epar

tmen

t of A

pplie

dSc

ienc

e, N

atio

nal T

aitu

ng U

nive

rsity

, 3. D

epar

tmen

t of E

lect

rica

lEn

gine

erin

g, N

atio

nal T

aiw

an U

nive

rsity

)

PA5-

Dir

ect

Mic

ro\N

ano-

impr

int

on C

halc

ogen

ide

Gla

ss S

ubst

rate

for

Opt

ical

App

licat

ions

»Pr

of. M

ark

Schv

artz

man

1 , Ms.

Siv

an T

zadk

a1 , Mrs

. Nat

ali O

stro

vsky

1 ,M

rs. E

sti T

oled

o1 , Dr.

Gui

llaum

e Le

Sau

x1 , Mr.

Evy

atar

Kas

sis2 , D

r. S

hay

Jose

ph2 (1

. Ben

Gur

ion

Uni

vers

ity in

the

Neg

ev, 2

. Opt

ical

Com

pone

ntCe

nter

, Raf

ael A

dvan

ced

Def

ense

Sys

tem

s)

PA7-

A s

tudy

of g

ate

rece

ss-w

idth

eff

ect

on t

he D

C/RF

per

form

ance

of In

P-ba

sed

InA

lAs/

InG

aAs

HEM

Ts»

Dr.

Yuy

ing

Xie1 , D

r. M

ings

ai Z

hu1 , P

rof.

Yifa

ng C

hen1 (1

. Fud

anU

nive

rsity

)

PA9-

Etch

beh

avio

ur o

f an

Al2

O3

hard

mas

k in

Sili

con

Dee

pRe

acti

ve Io

n Et

chin

g»

Dr.

Mar

tin D

rost

1 , Dr.

Ste

ffen

Mar

schm

eyer

1 , Mr.

Mir

ko F

rasc

hke1 , D

r.O

ksan

a Fu

rsen

ko1 , M

r. F

lori

an B

aerw

olf1 , D

r. Io

an C

ostin

a1 , Dr.

Mar

coLi

sker

1 (1. I

HP

- Lei

bniz

-Inst

itut f

ür in

nova

tive

Mik

roel

ektr

onik

)

PA11

-Hig

h-re

solu

tion

etc

hing

of n

anop

hoto

nic

cavi

ties

usi

ng a

chro

miu

m h

ard

mas

k»

Mr.

Ali

Naw

az B

abar

1 , Mr.

Mar

cus

Albr

echt

sen1 , D

r. B

abak

Vos

ough

iLa

hija

ni1 , P

rof.

Rasm

us E

llebæ

k Ch

rist

ians

en2 , P

rof.

Jesp

er M

ørk1 , P

rof.

Hen

ri Ja

nsen

3 , Pro

f. Sø

ren

Stob

be1 (1

. DTU

Fot

onik

, Tec

hnic

al U

nive

rsity

of D

enm

ark,

2. D

epar

tmen

t of M

echa

nica

l Eng

inee

ring

, Tec

hnic

alU

nive

rsity

of D

enm

ark.

, 3. D

TU N

anol

ab -

Nat

iona

l Cen

tre

for

Nan

oFa

bric

atio

n an

d Ch

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

f Den

mar

k)

PA13

-3D

pri

ntin

g of

bio

insp

ired

sup

er b

lack

mic

rost

ruct

ures

»M

r. A

lexa

ndre

Wet

zel1 , M

s. N

uria

del

Cas

tillo

Inie

sta1 , D

r. E

inst

omEn

gay1 , D

r. K

irst

ine

Berg

-Sør

ense

n2 , Dr.

Ada

-Ioan

a Bu

nea1 , P

rof.

Rafa

elTa

bory

ski3 (1

. DTU

Nan

olab

- N

atio

nal C

entr

e fo

r N

ano

Fabr

icat

ion

and

Char

acte

riza

tion

Tec

hnic

al U

nive

rsity

of D

enm

ark,

2. D

TU H

ealth

Tec

h-D

epar

tmen

t of H

ealth

Tec

hnol

ogy

Tech

nica

l Uni

vers

ity o

f Den

mar

k, 3

.D

TU N

anol

ab)

PA15

-Impl

emen

tati

on o

f con

cave

vac

uum

chu

ck in

lase

rin

terf

eren

ce li

thog

raph

y to

red

uce

peri

od v

aria

tion

on

larg

e ar

eagr

atin

gs»

Mr.

Rat

ish

Rao

Nag

araj

Rao

1 (1. U

nive

rsity

of L

yon,

UJM

sai

nt e

tienn

e,La

bora

toire

Hub

ert C

urie

n U

MR

5516

)

PA17

-The

eff

ects

of f

lam

e-tr

eate

d PD

MS

robu

st m

icro

-str

uctu

re o

nth

e en

hanc

emen

t of

hyd

roph

obic

ity

and

bact

eria

l ant

i-adh

esio

npr

oper

ties

»D

r. N

ithi A

tthi

1 , Ms.

Pem

ika

Eiam

wor

asin

2 , Ms.

Api

tsar

a H

orbu

d2 , Dr.

Suth

icha

i Sam

art2 , P

rof.

Sute

e Ch

utip

aijit

2 , Mr.

Wits

aroo

t Sri

pum

khai

1 ,M

s. P

atta

ralu

ck P

atta

man

g1 , Dr.

Paw

asut

h Sa

engd

ee1 , M

rs. S

uphi

chay

aRa

dom

yos1 , M

rs. O

raph

an T

hong

sook

1 , Dr.

Wut

thin

an Je

amsa

ksir

i1 , Dr.

Non

gluc

k H

oung

kam

hang

2 (1. N

atio

nal E

lect

roni

cs a

nd C

ompu

ter

Tech

nolo

gy C

ente

r, 2.

Kin

g M

ongk

ut’s

Inst

itute

of T

echn

olog

yLa

dkra

bang

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

37

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PA19

-A P

rogr

amm

able

Gas

Inje

ctio

n Sy

stem

for

3D Ic

eLi

thog

raph

y»

Mr.

Aff

an W

aafi1 , D

r. R

ubai

yet H

aque

1 , Dr.

Giu

liano

Bis

sacc

o1 , Dr.

Anpa

n H

an1 (1

. Tec

hnic

al U

nive

rsity

of D

enm

ark)

PA21

-The

rmal

and

sof

t na

noim

prin

t lit

hogr

aphy

wit

h ul

tra-

high

reso

luti

on a

nd fe

atur

e si

ze o

f 10

nm»

Mr.

ASH

ISH

PAN

DEY

1 , Ms.

Siv

an T

zadk

a2 , Mr.

Dor

Yeh

uda3 , P

rof.

Mar

kSc

hvar

tzm

an4 (1

. Dep

artm

ent o

f Mat

eria

ls E

ngin

eeri

ng, I

lse

Katz

Inst

itute

for

the

Nan

osca

le S

cien

ce a

nd T

echn

olog

y, B

en-G

urio

nU

nive

rsity

of t

he N

egev

, 2. B

en G

urio

n U

nive

rsity

of t

he N

egev

, 3. B

ENG

URI

ION

UN

IVER

STIY

OF

NEG

EV, 4

. Ben

Gur

ion

Uni

vers

ity in

the

Neg

ev)

PA23

-Fle

xibl

e an

d re

usab

le p

aryl

ene

C m

asks

tec

hnol

ogy

for

appl

icat

ions

in c

asca

de im

pact

or a

ir q

ualit

y m

onit

orin

g sy

stem

s»

Dr.

Lor

enzo

Vig

na1 , D

r. M

artin

Got

tsch

alk2 , D

r. A

less

io V

erna

1 , Dr.

Sim

one

Luig

i Mar

asso

1 , Pro

f. St

efan

See

ger2 , P

rof.

Fabr

izio

Pir

ri1 , P

rof.

Mat

teo

Cocu

zza1 (1

. Pol

itecn

ico

di T

orin

o, 2

. Bun

desa

nsta

lt fü

rM

ater

ialfo

rsch

ung

und

-prü

fung

)

PA25

-GaA

s/A

lGaA

s co

resh

ell w

ires

inte

grat

ed o

n de

wet

ted

SiG

eM

ie r

eson

ator

s»

Mr.

Luc

a Fa

gian

i1 , Ms.

Chi

ara

Barr

i2 , Dr.

Erf

an M

afak

heri

3 , Dr.

Mon

ica

Bolla

ni3 , D

r. A

lexe

y Fe

doro

v4 , Dr.

Mar

co A

bbar

chi5 , M

r. M

oham

med

Boua

bdel

laou

i5 , Dr.

Fra

nces

ca In

tont

i6 , Ms.

Nic

olet

ta G

ranc

hi6 , D

r.An

drea

Ris

tori

6 , Dr.

Fra

nces

co B

icca

ri6 , D

r. M

iche

le M

onta

nari

6 , Dr.

Stef

ano

Sang

uine

tti6 (1

. Pol

itecn

ico

di M

ilano

, IFN

-CN

R, 2

. Pol

itecn

ico

diM

ilano

, 3. I

FN-C

NR,

L-N

ESS,

4. I

FN-C

NR

LNES

S La

bora

tory

, 5. A

ixM

arse

ille

Uni

vers

ity, 6

. LEN

S, U

nive

rsity

of F

lore

nce)

PA27

-Cry

stal

ori

enta

tion

alig

nmen

t m

arks

for

(100

) sili

con

waf

ers

»M

r. M

ichi

el G

idts

1 , Dr.

Che

n W

ang1 , P

rof.

Jean

-Pie

rre

Locq

uet1 , P

rof.

Mic

hael

Kra

ft1 (1

. Uni

vers

ity o

f Leu

ven)

PA29

-Con

trol

ling

unde

rcut

s an

d si

de-w

all a

ngle

s in

e-b

eam

litho

grap

hy (E

BL)

»D

r. S

ilvia

Die

wal

d1 , Pro

f. G

erno

t Gol

l1 (1. K

arls

ruhe

Inst

itute

of

Tech

nolo

gy (K

IT))

PA31

-Hie

rarc

hica

l mas

ter

copi

es fo

r ro

ll to

rol

l UV-

NIL

by

com

bini

ng p

hoto

litho

grap

hy a

nd la

ser-

indu

ced

self

-org

aniz

ing

proc

esse

s»

Dr.

Joac

him

Zaj

adac

z1 , Dr.

Pie

rre

Lore

nz1 , D

r. M

artin

Ehr

hard

t1 , Dr.

Klau

s Zi

mm

er1 (1

. Lei

bniz

Inst

itute

of S

urfa

ce E

ngin

eeri

ng (I

OM

))

PA33

-Pla

smon

ic N

anog

ap P

atte

rns

by C

ompu

tati

onal

Blo

ckCo

poly

mer

Sel

f-A

ssem

bly

»Pr

of. s

ang-

kon

kim

1 (1. h

ongi

k un

iver

sity

)

PA35

-Sm

ooth

enin

g of

Si w

aveg

uide

sid

ewal

ls t

hrou

ghco

mbi

nati

ons

of H

2 an

neal

ing

and

Si e

pita

xial

reg

row

th fo

rph

oton

ics

appl

icat

ions

»D

r. L

aurè

ne Y

ouss

ef1 , D

r. C

amill

e Pe

tit-E

tienn

e1 , Dr.

Jean

-Mic

hel

Har

tman

n2 , Dr.

Erw

ine

Parg

on1 (1

. Uni

v. G

reno

ble

Alpe

s, C

NRS

,CE

A/LE

TI-M

inat

ec, G

reno

ble

INP,

LTM

, F-3

8054

Gre

nobl

e, F

ranc

e, 2

.U

niv.

Gre

nobl

e Al

pes,

CEA

-LET

I, M

inat

ec, 3

8054

Gre

nobl

e, F

ranc

e)

PA37

-Neg

ativ

e-to

ne p

lasm

a-de

velo

pmen

t of

pol

y(m

ethy

lm

etha

cryl

ate)

for

gray

scal

e e-

beam

lith

ogra

phy

»M

r. F

urka

n Ay

han1 , M

r. T

hom

as M

orte

lman

s2 , Dr.

DIM

ITRI

OS

KAZA

ZIS2 , D

r. Y

asin

Eki

nci2 (1

. Cen

tre

Suis

se d

’Éle

ctro

niqu

e et

de

Mic

rote

chni

que,

2. P

aul S

cher

rer

Inst

itute

)

PA39

-Lar

ge a

rea

nano

patt

erni

ng a

nd in

dust

rial

res

ist

test

ing

wit

han

in-la

b EU

V D

ual B

eam

line

»M

r. B

ernh

ard

Lütt

gena

u1 , Dr.

Sas

cha

Bros

e1 , Dr.

Ser

hiy

Dan

ylyu

k2 , Dr.

Joch

en S

tolle

nwer

k1 , Pro

f. Pe

ter

Loos

en2 , P

rof.

Carl

o H

olly

1 (1. R

WTH

Aach

en U

nive

rsity

, Cha

ir fo

r Te

chno

logy

of O

ptic

al S

yste

ms,

Aac

hen,

5207

4, G

erm

any,

2. F

raun

hofe

r In

stitu

te fo

r La

ser

Tech

nolo

gy, A

ache

n,52

074,

Ger

man

y)

PA41

-Com

pact

met

rolo

gy t

ool f

or n

anol

ayer

cha

ract

eriz

atio

n an

dm

ater

ials

ana

lysi

s in

the

ext

rem

e ul

trav

iole

t»

Ms.

Sop

hia

Schr

öder

1 , Mr.

Hen

ning

Hei

min

g1 , Mr.

Luk

as B

ahre

nber

g1 ,D

r. S

asch

a Br

ose1 , D

r. S

erhi

y D

anyl

yuk2 , D

r. Jo

chen

Sto

llenw

erk1 , P

rof.

Pete

r Lo

osen

2 , Pro

f. Ca

rlo

Hol

ly1 (1

. RW

TH A

ache

n U

nive

rsity

, Cha

ir fo

rTe

chno

logy

of O

ptic

al S

yste

ms,

Aac

hen,

520

74, G

erm

any,

2.

Frau

nhof

er In

stitu

te fo

r La

ser

Tech

nolo

gy, A

ache

n, 5

2074

, Ger

man

y)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

38

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PA43

-A s

tudy

of o

ptic

al fi

eld

man

ipul

atio

n by

a b

urie

dm

etas

urfa

ce in

InG

aAs/

InA

lAs

hete

roju

ncti

on in

NIR

»M

s. X

iaoh

ang

Pan1 , M

r. B

o Fe

ng1 , P

rof.

Yifa

ng C

hen2 (1

. Sch

ool o

fIn

form

atio

n Sc

ienc

e an

d Te

chno

logy

, Fud

an U

nive

rsity

, 2. F

udan

Uni

vers

ity)

PA45

-Nan

ofab

rica

tion

of f

ree-

stan

ding

Si m

embr

anes

wit

hco

ntro

llabl

e th

ickn

esse

s»

Ms.

Yiji

e Li

1 , Mr.

Che

ngya

ng M

u1 , Mr.

Xuj

ie T

ong1 , P

rof.

Yifa

ng C

hen2

(1. S

choo

l of I

nfor

mat

ion

Scie

nce

and

Tech

nolo

gy, F

udan

Uni

vers

ity, 2

.Fu

dan

Uni

vers

ity)

PA47

-Tw

o-st

ep r

eplic

ated

Nan

o O

ptic

al P

atte

rn o

n cu

rved

Surf

aces

for

Spec

trom

eter

Com

pone

nts

»M

r. Jo

hann

es W

olf1 , D

r. S

usan

ne G

rütz

ner1 , D

r. R

olón

Dan

iel A

.2 , Dr.

Kühn

e St

efan

3 , Dr.

Kas

tl Pa

ul4 , D

r. O

bers

chm

idt D

irk2 , D

r. B

ernd

Löch

el5 , D

r. A

rne

Schl

euni

tz6 , D

r. G

rütz

ner

Gab

i7 (1. m

icro

resi

stte

chno

logy

Gm

bH, K

öpen

icke

r St

raße

325

, D-1

2555

Ber

lin, G

erm

any,

2.

Berl

in In

stitu

te o

f Tec

hnol

ogy,

Dep

artm

ent M

icro

and

Pre

cisi

onD

evic

es, P

asca

lstr

asse

8-9

, D-1

0587

Ber

lin, G

erm

any,

3. B

erlin

Inst

itute

of T

echn

olog

y, D

epar

tmen

t Mic

ro &

Pre

cisi

on D

evic

es, P

asca

lstr

asse

8-

9, D

-105

87 B

erlin

, Ger

man

y, 4

. Ber

lin In

stitu

te o

f Tec

hnol

ogy,

Dep

artm

ent M

icro

& P

reci

sion

Dev

ices

, Pas

cals

traß

e 8-

9, D

-105

87Be

rlin

, Ger

man

y, 5

. mic

ro re

sit t

echn

olog

y G

mbH

, 6. m

icro

resi

stte

chno

logy

Gm

bHKö

peni

cker

Str

aße

325,

D-1

2555

Ber

lin, G

erm

any,

7.

mic

ro re

sist

tech

nolo

gy G

mbH

, Köp

enic

ker

Stra

sse

325,

D-1

2555

Berl

in, G

erm

any)

PA49

-Sha

ping

org

anic

pri

nted

film

s w

ith

surf

ace

ener

gyen

gine

erin

g»

Ms.

Sar

a Se

quei

ra1 , D

r. V

erón

ica

Rom

ão1 , D

r. R

ui V

ilari

nho2 , D

r.Jo

aqui

m M

orei

ra2 , D

r. S

usan

a Ca

rdos

o de

Fre

itas1 , D

r. H

elen

a Al

ves3 ,

Dr.

Dia

na L

eitã

o1 (1. I

nstit

uto

de E

ngen

hari

a de

Sis

tem

as e

Com

puta

dore

s –

Mic

rosi

stem

as e

Nan

otec

nolo

gias

(IN

ESC

MN

), 2.

IFIM

UP

and

Phys

ics

and

Astr

onom

y D

epar

tmen

t. Fa

culty

of S

cien

ces

ofU

nive

rsity

of P

orto

, 3. C

ICEC

O, U

nive

risd

ade

de A

veiro

)

PA51

-Wea

rabl

e en

zym

atic

sen

sor

for

gluc

ose

mon

itor

ing

onfl

exib

le p

olym

er fo

il»

Ms.

Ann

ika

Müs

se1 , M

r. F

ranc

esco

La

Mal

fa1 , D

r. V

irgili

o Br

unet

ti2 , Dr.

Anto

nio

Qua

ltier

i2 , Dr.

Fra

nces

co R

izzi

2 , Pro

f. M

assi

mo

De

Vitt

orio

2 (1.

Uni

vers

ità d

el S

alen

to, 2

. Ist

ituto

Ital

iano

di T

ecno

logi

a)

PA53

-Lar

ge-S

cale

Nan

opill

ar A

rray

s in

Sin

gle

Crys

tal D

iam

ond

wit

h In

tegr

ated

Gol

d M

icro

elec

trod

es fo

r Bi

osen

sing

App

licat

ions

»M

s. E

lena

Los

ero1 , D

r. C

hris

toph

e G

alla

nd1 , D

r. H

osse

in B

abas

hah1 ,

Prof

. Nie

ls Q

uack

1 (1. E

PFL)

PA55

-Mic

ro o

rgan

ic li

ght-

emit

ting

dio

de a

rray

s gr

own

by s

olut

ion

proc

esse

d ar

ea-s

elec

tive

gro

wth

»M

s. X

iaoj

ie Z

hou1 , M

s. Y

iche

n Ca

i1 , Mr.

Min

gshe

ng X

u1 , Dr.

Lai

gui H

u1 ,Pr

of. R

an L

iu1 , D

r. W

ench

ong

Wan

g2 (1. F

udan

Uni

vers

ity, 2

. Uni

vers

ityof

Mue

nste

r)

PA57

-Nan

ofab

rica

tion

of 3

0 nm

res

olut

ion

test

ing

card

s by

e-

beam

lith

ogra

phy

and

elec

trop

lati

ng fo

r ha

rd x

-ray

imag

ing

»M

r. C

heng

yang

Mu1 , M

r. X

ujie

Ton

g2 , Ms.

Yiji

e Li

1 , Pro

f. Yi

fang

Che

n1

(1. F

udan

Uni

vers

ity, 2

. Sch

ool o

f Inf

orm

atio

n Sc

ienc

e an

d Te

chno

logy

,Fu

dan

Uni

vers

ity)

PA59

-Wat

er W

etta

bilit

y an

d M

icro

flui

dics

of M

icro

stru

ctur

edSu

rfac

es»

Mr.

Mar

c Se

rra-

Pera

lta1 , M

r. G

erar

d M

artí2 , D

r. G

emm

a Ri

us1 (1

.In

stitu

te o

f Mic

roel

ectr

onic

s of

Bar

celo

na IM

B-CN

M-C

SIC,

2. U

nive

rsita

tAu

tòno

ma

de B

arce

lona

UAB

)

PA61

-Nan

oim

prin

ting

of M

icro

opti

cal E

lem

ents

sta

rtin

g fr

om a

3D-P

rint

ed M

aste

r Te

mpl

ate

»M

s. S

onja

Kop

p1 , Dr.

Mic

hael

Müh

lber

ger1 , D

r. Jo

nas

Wie

denm

ann2 ,

Dr.

Ben

edik

t Ste

nder

2 (1. P

rofa

ctor

Gm

bH, 2

. Mul

tipho

ton

Opt

ics)

PA63

-Dev

elop

ing

a H

all B

ar C

onfi

gura

tion

for

sem

icon

duct

ing

Nan

owir

es»

Mr.

Ahm

ad E

chre

sh1 , D

r. H

iman

i Aro

ra1 , D

r. S

law

omir

Pru

ncal

1 , Dr.

Lars

Reb

ohle

1 , Dr.

Yor

dan

M. G

eorg

iev1 (1

. Ins

titut

e of

Ion

Beam

Phys

ics

and

Mat

eria

ls R

esea

rch,

Hel

mho

ltz-Z

entr

um D

resd

en-

Ross

endo

rf (H

ZDR)

, Dre

sden

, 013

28, G

erm

any)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

39

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PA65

-pH

dep

ende

nce

of X

-ray

-rad

ioly

sis-

indu

ced

synt

hesi

s an

dim

mob

iliza

tion

of n

icke

l nan

o/m

icro

part

icle

s»

Mr.

Shu

nya

Saeg

usa1 , D

r. Ik

uya

Saku

rai2 , P

rof.

Ikuo

Oka

da2 , D

r. M

ari

Ishi

hara

3 , Pro

f. Yu

ichi

Uts

umi1 , D

r. A

kino

bu Y

amag

uchi

4 (1. U

nive

rsity

of

Hyo

go, 2

. Nag

oya

Uni

vers

ity, 3

. Hyo

go P

refe

ctur

al In

stitu

te o

fTe

chno

logy

, 4. u

)

PA67

-Sim

ulat

ion,

man

ufac

turi

ng a

nd c

hara

cter

izat

ion

of P

t/A

ust

ruct

ures

for

dire

ct h

eati

ng a

nd t

empe

ratu

re m

easu

rem

ents

of

flui

ds in

min

i/m

icro

chan

nels

»M

r. M

ark

Sche

pper

le1 , P

rof.

Pete

r W

oias

1 (1. A

lber

t-Lu

dwig

s-U

nive

rsitä

t Fre

ibur

g)

PA69

-Man

ipul

atin

g th

e m

agne

tic

beha

viou

r in

thi

n fi

lmm

icro

stru

ctur

es v

ia n

anos

ized

ord

ered

def

ects

»M

r. P

edro

Ara

újo1 , D

r. R

ita M

aced

o1 , Dr.

Sus

ana

Card

oso

de F

reita

s1 ,D

r. D

iana

Lei

tão1 (1

. IN

ESC

MN

)

PA71

-Dir

ect

sub-

100

nm M

etas

urfa

ces

Nan

oim

prin

ting

via

Wat

er-

base

d H

ydro

gel r

esin

»M

r. B

youn

gsu

Ko1 , M

r. Y

oung

hwan

yan

g1 , Mr.

Tre

von

Badl

oe1 , P

rof.

Juns

uk R

ho1 (1

. Poh

ang

Uni

vers

ity o

f Sci

ence

and

Tec

hnol

ogy

(PO

STEC

H))

PA73

-Sup

pres

sing

opt

ical

loss

es o

f hyd

roge

nate

d am

orph

ous

silic

on t

o fa

bric

ate

func

tion

al d

iele

ctri

c m

etas

urfa

ces

wor

king

at

the

visi

ble

»M

r. Y

oung

hwan

yan

g1 , Pro

f. G

wan

ho Y

oon2 , M

r. T

revo

n Ba

dloe

1 , Dr.

Sung

hak

Park

3 , Pro

f. Ki

Tae

Nam

3 , Pro

f. Ju

nsuk

Rho

1 (1. P

ohan

gU

nive

rsity

of S

cien

ce a

nd T

echn

olog

y (P

OST

ECH

), 2.

Seo

ul N

atio

nal

Uni

vers

ity o

f Sci

ence

and

Tec

hnol

ogy,

3. S

eoul

Nat

iona

l Uni

vers

ity)

PA75

-Ana

lysi

s of

res

ist

char

ging

in e

lect

ron

beam

lith

ogra

phy

»M

r. Y

oshi

nobu

Kon

o1 , Mr.

Ken

taro

Koj

ima1 , P

rof.

Mas

atos

hi K

oter

a1

(1. O

saka

Inst

itute

of T

echn

olog

y)

PA77

-Ato

mic

laye

r et

chin

g of

SiG

e na

now

ires

»M

r. M

uham

mad

Bila

l Kha

n1 , Mr.

Sha

hruk

h Sh

akee

l2 , Dr.

Kar

ola

Rich

ter2 , M

r. S

ayan

tan

Gho

sh1 , P

rof.

Thom

as M

ikol

ajic

k2 , Dr.

Art

urEr

be1 , D

r. Y

orda

n M

. Geo

rgie

v1 (1. I

nstit

ute

of Io

n Be

am P

hysi

cs a

ndM

ater

ials

Res

earc

h, H

ZDR,

Dre

sden

, 013

28, G

erm

any,

2. T

echn

isch

eU

nive

rsitä

t Dre

sden

, Ins

titut

für

Hal

blei

ter

und

Mik

rosy

stem

e,D

resd

en, 0

1069

, Ger

man

y)

PA79

-3D

top

ogra

phy

opti

miz

atio

n in

dir

ect

wri

ting

lith

ogra

phy

byco

mpa

rati

ve a

naly

sis

of d

esig

n an

d co

nfoc

al m

icro

scop

y sh

ape

»M

r. Ja

n Er

jaw

etz1 , D

r. H

elm

ut S

chift

1 , Mr.

Dom

iniq

ue C

ollé

2 , Ms.

Ger

da E

kind

orf2 , D

r. P

eter

Hey

l2 , Mr.

Dan

iel R

itter

3 , Dr.

Adi

tya

Redd

y3

(1. P

aul S

cher

rer

Inst

itute

, 2. H

eide

lber

g In

stru

men

ts, 3

. Gen

ISYS

Gm

bH)

PA81

-Inve

stig

atio

n of

cry

ogen

ic a

tom

ic-la

yer

etch

ing

for

nano

poro

us d

iele

ctri

cs w

ith

low

die

lect

ric

cons

tant

»D

r. A

ndre

y M

iako

nkik

h1 , Mr.

Vita

ly K

uzm

enko

2 (1. V

alie

v In

stitu

te o

fPh

ysic

s an

d Te

chno

logy

RAS

, 2. V

alie

v In

stitu

te o

f Phy

sics

and

Tech

nolo

gy,

Russ

ian

Acad

emy

of S

cien

ces)

PA83

-App

licat

ion

of e

lect

ron-

beam

lith

ogra

phy

tow

ard

high

lysh

arp

nano

stru

ctur

es a

nd e

xtre

me

elec

trom

agne

tic

fiel

den

hanc

emen

t»

Mr.

Don

g Ky

o O

h1 , Dr.

Inki

Kim

1 , Mr.

Jooh

oon

Kim

1 , Mr.

Heo

nyeo

ngJe

ong1 , M

s. Y

eseu

l Kim

1 , Pro

f. Ju

nsuk

Rho

1 (1. P

ohan

g U

nive

rsity

of

Scie

nce

and

Tech

nolo

gy (P

OST

ECH

))

PA85

-Silv

er 2

D n

anog

rati

ng p

rodu

ctio

n by

Ele

ctro

n Be

amLi

thog

raph

y to

enh

ance

ligh

t de

tect

ion

in N

ear

Infr

a-re

d»

Mr.

Elia

Sca

ttol

o1 , Mr.

Ale

ssan

dro

Cian

1 , Mr.

Dam

iano

Giu

bert

oni1 , M

r.G

iova

nni P

ater

nost

er1 , M

r. Jiří

Fia

la2 , M

r. M

ilos

Hra

bovs

ky2 , M

r. Jiří

Babo

cký2 , D

r. P

ierl

uigi

Bel

lutt

i1 (1. F

BK, B

runo

Kes

sler

Fou

ndat

ion,

2.

TESC

AN B

rno

s.r.

o.)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

40

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PA87

-An

emer

ging

met

hod

for

rapi

d na

no-m

anuf

actu

ring

»M

s. K

onst

antin

a To

urlo

uki1 , M

r. P

anag

iotis

Man

dyla

s2 , Dr.

Efs

trat

ios

Svin

teri

kos1 , D

r. P

anag

iotis

Dim

itrak

is3 , D

r. N

ikol

aos

Keha

gias

4 (1.

Nan

otyp

os, T

echn

opol

i ICT

Bus

ines

s Pa

rk T

hess

alon

iki,

Build

ing

C2,

5553

5 Py

lea,

2. I

nstit

ute

of N

anos

cien

ce &

Nan

otec

hnol

ogy

NCS

R“D

emok

rito

s" P

. Gri

gori

ou 2

7 &

Nea

pole

os S

tr (P

.O.B

ox 6

0037

) 153

41Ag

. Par

aske

vi, 3

. Ins

titut

e of

Nan

osci

ence

and

Nan

otec

hnol

ogy,

NCS

RD

emok

rito

s, 4

. Ins

titut

e of

Nan

osci

ence

& N

anot

echn

olog

y N

CSR

“Dem

okri

tos"

P. G

rigo

riou

27

& N

eapo

leos

Str

(P.O

.Box

600

37) 1

5341

Ag. P

aras

kevi

, Gre

ece)

PA89

-MED

USA

82

as S

iO2-

like

thin

-film

gen

erat

or t

hrou

gh t

herm

alcu

ring

»M

r. D

avid

Bri

cio1 , D

r. E

stev

e Am

at2 , D

r. M

arta

Fer

nánd

ez-R

egúl

ez1 , D

r.Jo

rdi L

lobe

t1 , Mr.

Alb

ert A

lcàc

er1 , M

s. O

lga

Mun

tada

-Lóp

ez3 , M

r. A

lber

tode

l Mor

al1 , P

rof.

Joan

Bau

sells

3 , Dr.

Fra

nces

c Pe

rez-

Mur

ano3 (1

.In

stitu

te o

f Mic

roel

ectr

onic

s of

Bar

celo

na (I

MB-

CNM

, CSI

C), 2

. Ins

titut

eof

Mic

roel

ctro

nics

of B

arce

lona

, 3. I

MB-

CNM

(CSI

C))

PA91

-Con

trol

led

SOI n

anop

atte

rnin

g fo

r G

aN p

ende

o-ep

itax

y»

Dr.

Mra

d M

rad1 , M

r. K

ilian

Bar

il2 , Dr.

Seb

astie

n La

bau1 , D

r. M

arie

Pana

bier

e1 , Dr.

Cam

ille

Petit

-Etie

nne1 , D

r. B

land

ine

Allo

ing2 , D

r. Je

sus

Zuni

ga P

erez

2 , Dr.

Gau

thie

r Le

fevr

e1 , Dr.

Mat

thew

Cha

rles

3 , Dr.

Guy

Feui

llet3 , D

r. C

ecile

Gou

rgon

1 (1. U

nive

rsité

Gre

nobl

e Al

pes,

CN

RS,

CEA/

LETI

-Min

atec

, LTM

, Gre

nobl

e IN

P, 3

8054

, 2. U

nive

rsité

Côt

e d’

Azur

,CR

HEA

-CN

RS, R

ue B

erna

rd G

rego

ry, V

albo

nne,

065

60, 3

. Uni

vers

itéG

reno

ble

Alpe

s, C

EA-L

ETI,

17 R

ue D

es M

arty

rs, G

reno

ble,

380

54)

PA93

-Spo

ntan

eous

form

atio

n of

ord

ered

mic

ro-w

rink

les

on a

ther

mos

ensi

tive

res

ist

»D

r. X

ia L

iu1 , M

r. M

oham

mad

reza

Ros

tam

i2 , Dr.

Ana

Con

de-R

ubio

2 , Dr.

Gio

vann

i Boe

ro1 , P

rof.

Jürg

en B

rugg

er2 (1

. Eco

le P

olyt

echn

ique

Fédé

rale

de

Laus

anne

(EPF

L), 2

. Eco

le P

olyt

echn

ique

Féd

éral

e de

Laus

anne

)

PA95

-Mar

kerl

ess

chip

-sca

le fa

bric

atio

n of

FET

s by

mix

and

mat

chof

the

rmal

sca

nnin

g pr

obe

litho

grap

hy a

nd d

irec

t la

ser

wri

ting

»D

r. Ja

na C

haab

an1 , D

r. T

ero

Kulm

ala1 , D

r. E

min

e Çaği

n1 , Mr.

Sam

uel

Bisi

g1 , Dr.

Hei

ko W

olf2 , M

r. D

anie

l Wid

mer

2 , Ms.

Ute

Dre

chsl

er2 , M

r.Ph

ilipp

e N

icol

lier2 , D

r. F

ranc

esca

Rug

geri

2 , Dr.

Arm

in K

noll2 (1

.H

eide

lber

g In

stru

men

ts N

ano,

2. I

BM R

esea

rch

Euro

pe -

Zuri

ch)

PA97

-Tai

lore

d ca

rbox

ymet

hyl-d

extr

an fu

ncti

onal

izat

ion

usin

gor

gani

c m

ixed

mon

olay

ers

for

bioa

ssay

app

licat

ions

»D

r. E

lena

Am

bros

etti1 , M

s. M

artin

a Co

nti2 , D

r. A

na T

eixe

ira1 , D

r.Si

mon

e D

al Z

ilio2 (1

. Kar

olin

ska

inst

itute

t, 2.

CN

R-IO

M)

PA99

-Ru

plas

ma

etch

ing

proc

ess

for

ther

mal

ly s

tabl

e an

d lo

wre

sist

ivit

y co

ntac

ts»

Mr.

Moh

amed

Naj

ah1 , M

r. M

ark

Ferg

uson

1 , Dr.

Moh

amed

Bou

cher

it2 ,M

r. M

arc

Gui

lmai

n2 , Dr.

Jacq

ues

Rena

ud2 , P

rof.

Luc

Fréc

hett

e1 , Pro

f.Se

rge

Char

lebo

is1 , P

rof.

Fran

çois

Boo

ne1 , D

r. S

erge

Eco

ffey

1 (1. I

nstit

utIn

terd

isci

plin

aire

d’In

nova

tion

Tech

nolo

giqu

e (3

IT),

Uni

vers

ité d

eSh

erbr

ooke

, She

rbro

oke,

J1K

2R1

, Can

ada,

2. T

eled

yne

DAL

SASe

mic

ondu

ctor

, 18

Boul

evar

d de

l’Aér

opor

t, Br

omon

t, J2

L 1S

7, C

anad

a)

PA10

1-Ca

rbon

nan

ogra

ss e

lect

rode

s fo

r m

inia

turi

zed

mic

robi

also

lar

cells

»M

rs. J

itka

Urb

anko

va1 , P

rof.

Step

han

Sylv

est K

elle

r2 , Ms.

Gal

ina

Pank

rato

va1 , P

rof.

Jenn

y Em

néus

3 (1. D

TU N

anol

ab -

Nat

iona

l Cen

tre

for

Nan

o Fa

bric

atio

n an

d Ch

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

fD

enm

ark,

2. D

TU N

anol

ab, T

echn

ical

Uni

vers

ity o

f Den

mar

k, 3

. DTU

Bioe

ngin

eeri

ng, D

epar

tmen

t of B

iote

chno

logy

and

Bio

med

icin

e,Te

chni

cal U

nive

rsity

of D

enm

ark)

3:30

pmPo

ster

Ses

sion

- O

dd N

umbe

rs -

Mic

ro a

nd N

ano

Dev

ices

for

Life

Scie

nces

and

Che

mis

try

PB1-

Des

ign,

fabr

icat

ion

and

test

ing

of h

oriz

onta

l, pl

asti

c, s

oft

mic

ro-c

anti

leve

r fo

r pr

obin

g fo

rces

at

cells

-to-

cell

junc

tion

»D

r. G

ianl

uca

Gre

nci1 , M

r. A

dity

a Ar

ora1 , M

rs. A

biga

il Th

omso

n1 , Ms.

Sree

Sun

dara

raja

n1 , Pro

f. Vi

rgile

Via

snof

f1 (1. M

echa

nobi

olog

y In

stitu

te,

Nat

iona

l Uni

vers

ity o

f Sin

gapo

re)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

41

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PB3-

Gen

erat

e D

NA

fila

men

ts w

ith

cont

rol u

sing

dro

p im

pact

met

hod

»M

r. Z

IQIA

NG

YAN

G1 , D

r. P

eng

Zhan

g2 , Dr.

MEN

G S

HI2 , M

r. A

li Al

Jula

ih1 , D

r. Y

uans

i Tia

n3 , Pro

f. H

IMAN

SHU

MIS

HRA

2 , Pro

f. EN

ZO D

i Fab

rizi

o4 ,Pr

of. S

IGU

RDU

R TH

ORO

DD

SEN

1 (1. H

igh-

Spee

d Fl

uids

Imag

ing

Lab,

Phys

ical

Sci

ence

and

Eng

inee

ring

(PSE

) Div

isio

n, K

ing

Abdu

llah

Uni

vers

ity o

f Sci

ence

and

Tec

hnol

ogy

(KAU

ST),

Thuw

al, 2

3955

-690

0,Sa

udi A

rabi

a, 2

. Int

erfa

cial

Lab

, Wat

er D

esal

inat

ion

and

Reus

e Ce

nter

(WD

RC),

Biol

ogic

al a

nd E

nviro

nmen

tal S

cien

ces

and

Engi

neer

ing

(BES

E)D

ivis

ion,

Kin

g Ab

dulla

h U

nive

rsity

of S

cien

ce a

nd T

echn

olog

y (K

AUST

),Th

uwal

, 239

55–6

900,

Sau

di A

rabi

a, 3

. Key

Lab

orat

ory

of R

oad

Cons

truc

tion

Tech

nolo

gy a

nd E

quip

men

t of M

inis

try

of E

duca

tion,

Scho

ol o

f Con

stru

ctio

n M

achi

nery

, Cha

ng’a

n U

nive

rsity

, Xi’a

n 71

0064

,Ch

ina,

4. M

ater

ials

and

Mic

rosy

stem

s La

bora

tory

, Dep

artm

ent o

fAp

plie

d Sc

ienc

e an

d Te

chno

logy

, Pol

itecn

ico

di T

orin

o, 1

0129

, Tor

ino,

Italy

)

PB5-

A M

icro

flui

dic

Dev

ice

for

Food

Alle

rgy

Dia

gnos

tics

Fab

rica

ted

Thro

ugh

a W

ax R

eflo

w P

roce

ss t

o Im

prov

e th

e Re

liabi

lity

ofA

uton

omou

s Sa

mpl

e D

ispe

nsin

g»

Mr.

Dai

go N

atsu

hara

1 , Ms.

Sae

Mis

awa2 , M

r. R

yogo

Sai

to1 , M

r. K

isuk

eTa

naka

1 , Pro

f. Sh

unya

Oka

mot

o1 , Pro

f. M

oeto

Nag

ai1 , P

rof.

Mas

ashi

Kita

mur

a2 , Pro

f. Ta

kayu

ki S

hiba

ta1 (1

. Toy

ohas

hi U

nive

rsity

of

Tech

nolo

gy, 2

. Jos

ai U

nive

rsity

)

PB7-

HA

RC L

ine

wit

hin

Iner

tial

Foc

usin

g Sy

stem

s - S

epar

atio

n of

Sub-

Mic

ron

Part

icle

s w

ith

Nan

omet

er R

esol

utio

n»

Dr.

Javi

er C

ruz1 , P

rof.

Klas

Hjo

rt1 (1

. Upp

sala

Uni

vers

ity)

PB9-

A H

ighl

y Ef

fici

ent

Pass

ive

Mic

rom

ixer

Inte

grat

ed w

ith

Asy

mm

etri

c Ve

rtic

al O

bsta

cle

Stru

ctur

es fo

r a

Mic

rofl

uidi

cD

iagn

osti

c D

evic

e»

Mr.

Ryo

go S

aito

1 , Mr.

Dai

go N

atsu

hara

1 , Mr.

Kis

uke

Tana

ka1 , P

rof.

Hiro

ka A

onum

a2 , Pro

f. Ta

tsuy

a Sa

kura

i2 , Pro

f. Sh

unya

Oka

mot

o1 , Pro

f.M

oeto

Nag

ai1 , P

rof.

Hiro

taka

Kan

uka2 , P

rof.

Taka

yuki

Shi

bata

1 (1.

Toyo

hash

i Uni

vers

ity o

f Tec

hnol

ogy,

2. T

he Ji

kei U

nive

rsity

Sch

ool o

fM

edic

ine)

PB11

-Des

ign

Aut

omat

ion

for

Mic

rofl

uidi

c Co

ncen

trat

ion

Gra

dien

tG

ener

ator

s»

Ms.

Tin

a M

itter

amsk

ogle

r1 , Mr.

Ger

old

Fink

1 , Dr.

Mar

cus

Hin

term

ülle

r1 , Pro

f. Be

rnha

rd Ja

koby

1 , Pro

f. Ro

bert

Will

e1 (1. J

ohan

nes

Kepl

er U

nive

rsity

Lin

z)

PB13

-Spo

ntan

eous

Cap

illar

y Fi

lling

of O

pen

Mic

rogr

oove

s»

Ms.

Tin

a M

itter

amsk

ogle

r1 , Pro

f. Be

rnha

rd Ja

koby

1 , Pro

f. Ku

rt H

inge

rl1

(1. J

ohan

nes

Kepl

er U

nive

rsity

Lin

z)

PB15

-Des

ign

and

Fabr

icat

ion

of a

Com

part

men

taliz

ed N

euro

nal

Cell

Co-C

ultu

re P

latf

orm

Com

pati

ble

wit

h H

igh-

pres

sure

Fre

ezin

gfo

r U

ltra

stru

ctur

al Im

agin

g»

Mr.

Hun

g Tr

i Tra

n1 , Dr.

Sar

ah S

hahm

orad

ian1 , D

r. C

eles

tino

Pade

ste1

(1. P

aul S

cher

rer

Inst

itut)

PB17

-Tow

ards

Mic

ro-c

oil P

robe

s fo

r In

trac

orti

cal M

agne

tic

Stim

ulat

ion

»M

r. X

iyua

n Li

u1 , Dr.

Anp

an H

an1 , D

r. S

eung

Woo

Lee

2 , Dr.

She

lley

Frie

d2 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k, 2

. Mas

sach

uset

ts G

ener

alH

ospi

tal a

nd H

arva

rd M

edic

al S

choo

l)

PB19

-Clu

ster

ing

of M

ajor

His

toco

mpa

tibi

lity

Com

plex

-Cla

ss I

Mol

ecul

es in

Hea

lthy

and

Can

cer

Colo

n Ce

lls R

evea

led

from

The

irN

anom

echa

nica

l Pro

pert

ies

»D

r. M

anol

a M

oret

ti1 , Dr.

Bru

no T

orre

2 , Pro

f. Cl

audi

o Ca

nale

3 , Pro

f.EN

ZO D

i Fab

rizi

o2 (1. K

ing

Abdu

llah

Uni

vers

ity o

f Sci

ence

and

Tech

nolo

gy, 2

. Dep

artm

ent o

f App

lied

Phys

ics,

Pol

ytec

hnic

Uni

vers

ityof

Tur

in, C

orso

Duc

a de

gli A

bruz

zi, 2

4, 1

0129

Tor

ino,

ITAL

Y, 3

.D

epar

tmen

t of P

hysi

cs, U

nive

rsity

of G

enov

a, V

ia D

odec

anes

o 33

,16

146,

Gen

ova,

Ital

y)

PB21

-Sim

ulta

neou

s de

term

inat

ion

of fa

t co

nten

t an

d Pe

nici

llin

Gan

tibi

otic

res

idue

in r

aw m

ilk b

y us

ing

Lab-

on-a

-Dis

c»

Dr.

Paw

asut

h Sa

engd

ee1 , D

r. N

ithi A

tthi

1 , Ms.

Por

ntip

Cha

mna

n2 , Mr.

nora

bade

e Ra

nron

1 , Mrs

. Sup

hich

aya

Rado

myo

s1 , Mr.

Wits

aroo

tSr

ipum

khai

1 , Ms.

Pat

tara

luck

Pat

tam

ang1 , M

s. R

atta

naw

anM

eana

neat

ra1 , D

r. W

utth

inan

Jeam

saks

iri1 , D

r. K

itiya

Von

gkam

jan3 (1

.N

atio

nal E

lect

roni

cs a

nd C

ompu

ter

Tech

nolo

gy C

ente

r, 2.

Pri

nce

ofSo

ngkl

a U

nive

rsity

, 3. K

aset

sart

Uni

vers

ity)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

42

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PB23

-Mec

hani

cal F

inge

rpri

nt o

f Sen

esce

nce

in E

ndot

helia

l Cel

ls»

Ms.

Naf

sika

Cha

la1 , D

r. S

ilvia

Moi

mas

1 , Dr.

Cos

tanz

a G

iam

piet

ro2 , M

s.Xi

nyu

Zhan

g1 , Pro

f. To

mas

o Za

mbe

lli1 , M

r. V

asile

ios

Exar

chos

3 , Dr.

Tim

oZ.

Naz

ari-S

haft

i4 , Dr.

Ald

o Fe

rrar

i5 , Pro

f. D

imos

Pou

likak

os1 (1

. ETH

Zuri

ch, 2

. EM

PA D

üben

dorf

, ETH

Zur

ich,

3. G

erm

an H

eart

Cen

ter

Berl

in,

4.G

erm

an H

eart

Cen

ter

Berl

in, B

erlin

Inst

itute

of H

ealth

at C

hari

té –

Uni

vers

itäts

med

izin

Ber

lin, 5

. ETH

Zur

ich,

EM

PA D

üben

dorf

)

PB25

-Por

tabl

e el

ectr

onic

nos

e ba

sed

on in

divi

dual

sen

sor

for

envi

ronm

enta

l mon

itor

ing

in m

useu

ms

»D

r. G

uille

m D

omèn

ech-

Gil1 , D

r. D

onat

ella

Pug

lisi1 (1

. Lin

köpi

ngU

nive

rsity

)

PB27

-Fab

rica

tion

of i

nter

digi

tal e

lect

rode

s w

ith

barr

iers

and

nano

fibe

rs fo

r en

hanc

ed im

peda

nce

bio-

sens

ing

in a

mic

rofl

uidi

cde

vice

»D

r. H

aoyu

e LU

O1 , M

r. F

eng

Lian

g1 , Dr.

Box

in H

uang

1 , Dr.

Juan

Pen

g1 ,D

r. X

iaoc

hen

Hua

ng1 , D

r. L

i Wan

g2 , Dr.

Jian

Shi

2 , Pro

f. Yo

ng C

hen1 (1

.PA

STEU

R, D

épar

tem

ent d

e ch

imie

, Éco

le n

orm

ale

supé

rieu

re,

PSL

Uni

vers

ity, S

orbo

nne

Uni

vers

ité, C

NRS

, 2. M

esoB

ioTe

ch)

PB29

-Whe

y Pr

otei

ns/Z

inc

Oxi

de b

iona

noco

mpo

site

hyd

roge

ls a

ssu

stai

nabl

e an

tim

icro

bial

pla

tfor

ms

»M

r. P

aolo

Pin

o1 , Pro

f. Ba

rbar

a O

nida

1 , Pro

f. Fr

ance

sca

Bosc

o2 (1.

Polit

ecni

co d

i Tor

ino,

2. A

pplie

d Sc

ienc

e an

d Te

chno

logy

Dep

artm

ent,

Polit

ecni

co d

i Tor

ino,

Tor

ino,

101

29, I

taly

)

PB31

-Man

ipul

atin

g an

d ch

arac

teri

zing

indi

vidu

al b

io-p

arti

cles

inna

noch

anne

ls»

Dr.

Chr

istia

n H

ölle

r1 , Dr.

Gab

riel

Sch

noer

ing2 , D

r. H

adi E

ghlid

i1 , Pro

f.D

imos

Pou

likak

os2 , D

r. M

aari

t Suo

mal

aine

n3 , Pro

f. U

rs G

rebe

r3 (1.

Labo

rato

ry o

f The

rmod

ynam

ics

in E

mer

ging

Tec

hnol

ogie

s, E

TH Z

uric

h,So

nneg

gstr

asse

3, Z

uric

h, S

witz

erla

nd, 2

. ETH

Zur

ich,

3. I

nstit

ute

ofM

olec

ular

Life

Sci

ence

s, U

nive

rsity

of Z

uric

h, Z

uric

h, S

witz

erla

nd)

PB33

-Fab

rica

tion

and

Rep

licat

ion

of D

ense

Hig

h A

spec

t Ra

tio

Nan

ostr

uctu

res

for

Cell

Chip

App

licat

ions

»M

r. M

arku

s Pr

ibyl

1 , Mr.

Phi

lipp

Taus

1 , Dr.

Sam

uele

Mar

ia D

ozio

1 , Dr.

Soni

a Pr

ado-

Lópe

z1 , Mr.

Seb

astia

n Kn

afl1 , D

r. M

icha

el H

aslin

ger2 , M

s.So

nja

Kopp

2 , Dr.

Mic

hael

Müh

lber

ger2 , M

s. A

lison

Dey

ett3 , D

r. S

asha

Men

djan

3 , Pro

f. H

einz

Wan

zenb

oeck

1 (1. T

U W

ien,

2. P

rofa

ctor

Gm

bH,

3.IM

BA o

f the

Aus

tria

n Ac

adem

y of

Sci

ence

s)

PB35

-Eff

ect

of M

icro

/Nan

ostr

uctu

red

Poly

styr

ene

Subs

trat

es o

nto

Adh

esio

n, V

iabi

lity

and

Dif

fere

ntia

tion

of A

dipo

se T

issu

e D

eriv

edM

esen

chym

al S

tem

Cel

ls»

Dr.

Ana

stas

ia K

anio

ura1 , D

r. A

ngel

os Z

enio

u2 , Dr.

Pan

agio

ta P

etro

u3 ,D

r. A

dam

antia

Pap

adop

oulo

u4 , Dr.

Ele

ni M

avro

gona

tou4 , D

r. D

imitr

isKl

etsa

s4 , Dr.

Ang

elik

i Tse

repi

5 , Dr.

Eva

ngel

os G

ogol

ides

3 , Dr.

Sot

irio

sKa

kaba

kos6 (1

. Ins

titut

e of

Nuc

lear

& R

adio

logi

cal S

cien

ces

&Te

chno

logy

, Ene

rgy

& S

afet

y, N

CSR

“Dem

okri

tos”

, Agh

ia P

aras

kevi

,15

341,

Gre

ece,

2. I

nstit

ute

of N

anos

cien

ce a

nd N

anot

echn

olog

y, N

CSR

Dem

okri

tos,

3. N

CSR

Dem

okri

tos,

4. I

nstit

ute

of B

iosc

ienc

es a

ndAp

plic

atio

ns, N

CSR

“Dem

okri

tos”

, Agh

ia P

aras

kevi

, 153

41, G

reec

e, 5

.In

stitu

te o

f Nan

osci

ence

& N

anot

echn

olog

y, N

CSR

“Dem

okri

tos”

, Agh

iaPa

rask

evi,

1534

1, G

reec

e, 6

. NSC

R "D

emok

rito

s")

PB37

-Was

te li

quid

ass

iste

d fl

ow-s

wit

chin

g on

a c

entr

ifug

alm

icro

flui

dic

plat

form

»M

r. E

hsan

Mah

mod

iarj

man

d1 , Mr.

Gus

tav

Gre

ther

1 , Pro

f. Ro

land

Zeng

erle

1 , Dr.

Nils

Pau

st1 , D

r. Ja

n Lü

ddec

ke1 (1

. Hah

n-Sc

hick

ard)

PB39

-Mul

ti T

echn

olog

y A

ppro

ach

for

Biom

edic

al D

evic

es -

Vat

Phot

opol

ymer

izat

ion

and

Mic

rofa

bric

atio

n H

and

in H

and

»M

s. Ju

lia L

iner

t1 , Mr.

Phi

lipp

Taus

1 , Dr.

Son

ia P

rado

-Lóp

ez1 , M

r.M

arku

s Pr

ibyl

1 , Dr.

Sam

uele

Mar

ia D

ozio

1 , Dr.

Mic

hael

Has

linge

r2 , Dr.

Mic

hael

Müh

lber

ger2 , P

rof.

Hei

nz W

anze

nboe

ck1 (1

. TU

Wie

n, 2

.Pr

ofac

tor

Gm

bH)

3:30

pmPo

ster

Ses

sion

- O

dd N

umbe

rs -

Mic

ro a

nd N

ano

Dev

ices

for

Elec

tron

ics,

Pho

toni

cs, P

hysi

cal A

pplic

aton

s &

Ene

rgy

PC1-

Sim

ulat

e th

e ef

fect

of v

ario

us N

ano-

flui

ds t

o im

prov

e th

epe

rfor

man

ce o

f ind

ustr

ial h

eat

exch

ange

rs»

Mr.

mila

d D

arbo

ui1 , M

r. re

za fe

rido

ni2 , M

r. E

brah

im T

aied

inej

ad3 (1

.M

icro

& N

ano

Elec

trom

echa

nic,

2. c

hem

ical

eng

enee

r, 3.

Nan

ote

chno

logy

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

43

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PC3-

Mic

ro-M

echa

nica

l Cha

ract

eriz

atio

n of

Ele

ctro

depo

site

d N

i-Co

Allo

ys t

owar

d D

esig

n of

MEM

S Co

mpo

nent

s»

Mr.

Yim

ing

Jiang

1 , Pro

f. Ch

un-Y

i Che

n1 , Pro

f. Ts

o-Fu

Mar

k Ch

ang1 ,

Prof

. Xun

Luo

2 , Pro

f. D

aisu

ke Y

aman

e3 , Pro

f. M

asat

o So

ne1 (1

. Tok

yoIn

stitu

te o

f Tec

hnol

ogy,

2. G

uizh

ou In

stitu

te o

f Tec

hnol

ogy,

3.

Rits

umei

kan

Uni

vers

ity)

PC5-

Waf

er M

ap D

efec

t Pa

tter

ns C

lass

ific

atio

n U

sing

Sem

i-Su

perv

ised

Lea

rnin

g w

ith

Gen

erat

ive

Adv

ersa

rial

Net

wor

ks»

Mrs

. Jin

a PA

RK1 , P

rof.

Jee-

Hyo

ng L

ee2 (1

. 1) D

epar

tmen

t of

Sem

icon

duct

or a

nd D

ispl

ay E

ngin

eeri

ng, S

ungk

yunk

wan

Uni

v, S

uwon

,G

yeon

ggi-d

o, 4

40-7

46, R

epub

lic o

f Kor

ea, 2

) Sam

sung

Ele

ctro

nics

Co.

Ltd,

Hw

aseo

ng-s

i, G

yeon

ggi-d

o, 4

45-3

30, R

epub

lic o

f Kor

ea, 2

.Su

ngky

unkw

an U

niv,

Suw

on, G

yeon

ggi-d

o, 4

40-7

46, R

epub

lic o

f Kor

ea)

PC7-

A m

icro

-opt

ical

gyr

osco

pe p

roto

type

on

basi

s of

mon

olit

hic

silic

on d

oubl

e m

icro

mir

rors

»D

r. Is

mai

l Fira

t Ari

kan1 , M

r. In

gmar

Leb

er1 , M

r. C

hris

tian

Wer

ner2 , M

r.Li

ang

Yu2 , D

r. Je

ns F

lügg

e2 , Pro

f. An

drea

s D

ietz

el1 (1

. Tec

hnis

che

Uni

vers

ität B

raun

schw

eig,

2. P

hysi

kalis

ch-T

echn

isch

e Bu

ndes

anst

alt)

PC9-

Silic

on m

icro

tech

nolo

gies

dri

ven

bios

ensi

ng s

yste

ms

»D

r. V

USL

AT JU

SKA1 , D

r. A

LAN

O'R

IORD

AN2 (1

. Mic

ro &

Nan

o Sy

stem

sCe

ntre

, Tyn

dall

Nat

iona

l Ins

titut

e, U

nive

rsity

Col

lege

Cor

k, C

ork,

T12

R5CP

, Ire

land

, 2. T

ynda

ll N

atio

nal I

nstit

ute,

Uni

vers

ity C

olle

ge C

ork)

PC11

-Mic

rofl

uidi

c de

vice

for

all e

lect

ric

sing

le m

icro

bead

capt

urin

g an

d re

leas

ing

by p

osit

ive

diel

ectr

opho

resi

s»

Mr.

Rub

en V

an d

en E

eckh

oudt

1 , Ms.

Yut

ing

Guo

2 , Pro

f. Fi

lip T

aver

nier

1 , Pro

f. Ir

ene

Taur

ino1 , P

rof.

Nic

o Bo

on2 , P

rof.

Mic

hael

Kra

ft1 (1

.U

nive

rsity

of L

euve

n, 2

. UG

ent)

PC13

-MEM

S U

ltra

soun

d Se

nsor

wit

h Fu

ncti

onal

Com

plia

nce

for

SHM

in F

iber

Met

al L

amin

ates

»M

r. Ja

n N

ikla

s H

aus1 , M

rs. L

iv R

ittm

eier

2 , Mr.

Tho

mas

Rol

off2 , M

rs.

Sara

h W

ende

lken

3 , Mr.

And

rey

Mik

hayl

enko

4 , Dr.

Nat

alie

Rau

ter4 , P

rof.

Mic

hael

Sin

apiu

s2 , Pro

f. W

alte

r La

ng3 , P

rof.

Andr

eas

Die

tzel

5 (1.

Inst

itute

of M

icro

tech

nolo

gy, T

echn

isch

e U

nive

rsitä

t Bra

unsc

hwei

g, 2

.In

stitu

te o

f Mec

hani

cs a

nd A

dapt

roni

cs, T

echn

isch

e U

nive

rsitä

tBr

auns

chw

eig,

3. I

nstit

ute

for

Mic

rose

nsor

s, -a

ctua

tors

and

–sy

stem

s,U

nive

rsitä

t Bre

men

, 4. I

nstit

ute

of M

echa

nics

, Hel

mut

-Sch

mid

t-U

nive

rsitä

t, 5.

Inst

itute

for

Mic

rote

chno

logy

, Tec

hnis

che

Uni

vers

ität

Brau

nsch

wei

g)

PC15

-Exp

lori

ng t

he a

dvan

tage

s of

har

vest

ing

acou

stic

pow

erth

roug

h a

met

al w

all u

sing

1-3

com

posi

te t

rans

duce

rs»

Mr.

Bib

hu K

ar1 , P

rof.

Ulr

ike

Wal

lrabe

1 (1. L

abor

ator

y fo

rM

icro

actu

ator

s, IM

TEK

- Dep

artm

ent o

f Mic

rosy

stem

s En

gine

erin

g,U

nive

rsity

of F

reib

urg)

PC17

-Mea

suri

ng p

ropa

gati

on lo

sses

of e

dge

mod

es in

pho

toni

cto

polo

gica

l ins

ulat

ors

»M

r. C

hris

tian

Anke

r Ro

siek

1 , Mr.

Mar

cus

Albr

echt

sen1 , M

s. A

nast

asiia

Vlad

imiro

va1 , P

rof.

Hen

ri Ja

nsen

2 , Pro

f. Sø

ren

Stob

be1 (1

. DTU

Fot

onik

,Te

chni

cal U

nive

rsity

of D

enm

ark,

2. D

TU N

anol

ab, T

echn

ical

Uni

vers

ityof

Den

mar

k)

PC19

-Mic

ro-f

abri

cate

d ta

ctile

sen

sors

for

mon

itor

ing

of a

mou

sepa

w»

Ms.

Val

eria

Car

lucc

io1 , D

r. L

ara

Nat

ta2 , D

r. V

ince

nzo

Mas

tron

ardi

2 , Dr.

Luci

ana

Algi

eri2 , D

r. L

uca

Fach

echi

2 , Dr.

Fra

nces

co R

izzi

2 , Pro

f. M

assi

mo

De

Vitt

orio

2 (1. U

nive

rsità

del

Sal

ento

, 2. I

stitu

to It

alia

no d

i Tec

nolo

gia)

PC21

-Gra

phen

e su

spen

ded

on G

e m

icro

-cry

stal

s fo

rph

otod

etec

tion

app

licat

ions

»M

rs. V

irgin

ia F

alco

ne1 , M

r. A

ndre

a Ba

rzag

hi1 , P

rof.

Gio

vann

i Ise

lla1 ,

Dr.

Fed

eric

o Bo

tteg

oni1 , D

r. A

ndre

a Ba

llabi

o1 , Dr.

Jaco

po F

rige

rio1 , D

r.Ca

rlo

Zucc

hett

i1 , Pro

f. Pa

olo

Biag

ioni

1 , Pro

f. Ro

man

Sor

dan1 , D

r. L

uca

Anzi

1 (1. P

olite

cnic

o di

Mila

no)

PC23

-A N

ovel

Gla

re P

reve

ntio

n M

etho

d fo

r H

igh

Pow

er L

ED L

ight

s»

Mr.

Kar

lhei

nz K

elln

er1 (1

. Dan

ube

Uni

vers

ity K

rem

s)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

44

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PC25

-Hig

h se

lect

ive

dopi

ng t

reat

men

t vi

a sp

in-o

n do

pant

on

patt

erne

d se

mic

ondu

ctor

sam

ples

»M

s. C

hiar

a Ba

rri1 , D

r. E

rfan

Maf

akhe

ri2 , M

r. L

uca

Fagi

ani1 , M

r. G

iulio

Tava

ni3 , M

r. P

aolo

Gra

ssi3 , D

r. A

lexe

y Fe

doro

v2 , Dr.

Mon

ica

Bolla

ni2 (1

.Po

litec

nico

di M

ilano

, IFN

-CN

R, 2

. IFN

-CN

R, L

-NES

S, 3

. Pol

itecn

ico

diM

ilano

)

PC27

-Dyn

amic

ally

ada

ptab

le a

cous

tic

sens

or w

ith

nonl

inea

rfi

lter

ing

func

tion

alit

y»

Dr.

Cla

udia

Len

k1 , Mr.

Kal

pan

Ved1 , D

r. S

tefa

nie

Gut

schm

idt2 , D

r.Tz

veta

n Iv

anov

1 , Dr.

Phi

lipp

Höv

el3 , P

rof.

Thom

as M

eure

r4 , Pro

f. M

artin

Zieg

ler1 (1

. Tec

hnis

che

Uni

vers

ität I

lmen

au, 2

. Uni

vers

ity o

f Can

terb

ury,

3.U

nive

rsity

Col

lege

Cor

k, 4

. Kie

l Uni

vers

ity)

PC29

-A m

icro

cant

ileve

r dr

iven

by

a w

irel

ess

pow

er t

rans

fer

syst

em»

Mr.

raul

rui

z1 , Dr.

Gab

riel

Aba

dal2 (1

. stu

dent

, 2. A

ssoc

iate

Pro

fess

or)

PC31

-A P

assi

ve A

ccel

erat

ion

Sens

or w

ith

5 Bi

t m

echa

nica

l Mem

ory

and

Ana

log-

to-D

igit

al C

onve

rter

»M

r. P

hilip

Sch

mitt

1 , Pro

f. M

artin

Hof

fman

n1 (1. C

hair

of M

icro

syst

ems

Tech

nolo

gy, R

uhr

Uni

vers

ity B

ochu

m)

PC33

-Lay

er b

y la

yer

asse

mbl

y on

opt

ical

fibe

rs: a

pow

erfu

lna

nofa

bric

atio

n to

ol fo

r ne

xt g

ener

atio

n “l

ab-o

n-fi

ber”

bas

edbi

osen

sors

»D

r. M

aria

Sal

bini

1 , Dr.

Tiz

iana

Sto

meo

2 , Dr.

Fili

ppo

Pisa

no3 , D

r.An

toni

o Ba

lena

3 , Dr.

Fer

rucc

io P

isan

ello

4 , Pro

f. M

assi

mo

De

Vitt

orio

3 (1.

UN

IVER

ISTA

' DEL

SAL

ENTO

, 2. I

talia

n In

stitu

te o

f tec

hnol

ogy,

3. I

stitu

toIta

liano

di T

ecno

logi

a, 4

. Uni

vers

ità d

el S

alen

to)

PC35

-Add

itiv

e M

anuf

actu

ring

Tec

hnol

ogy

for

Embe

ddin

gM

inia

turi

zed

pMU

T-ba

sed

Ult

raso

und

Prob

es»

Dr.

Vin

cenz

o M

astr

onar

di1 , D

r. A

nton

io Q

ualti

eri1 , D

r. E

nric

o Bo

ni2 ,

Dr.

Fra

nces

co G

uido

3 , Pro

f. Pi

ero

Tort

oli2 , P

rof.

Mas

sim

o D

e Vi

ttor

io4 (1

.Is

titut

o Ita

liano

di T

ecno

logi

a, 2

. Dip

artim

ento

di I

ngeg

neri

ade

ll'In

form

azio

ne, 3

. Pie

zosk

in, 4

. Ist

ituto

)

PC37

-Roo

m-t

empe

ratu

re d

oubl

e qu

antu

m d

ot fo

r in

vest

igat

ing

Max

wel

l’s D

emon

»M

r. F

aris

Abu

alna

ja1 , M

r. W

enku

n H

e1 , Dr.

Zah

id D

urra

ni1 , D

r. M

ervy

nJo

nes1 (1

. Im

peri

al C

olle

ge L

ondo

n)

PC39

-Mic

ro-M

echa

nica

l Pro

pert

y Ev

alua

tion

of G

old-

Nic

kel A

lloys

tow

ard

Des

ign

of M

EMS

Com

pone

nts

»M

r. T

akum

i Aki

yam

a1 , Pro

f. Ch

un-Y

i Che

n1 , Pro

f. Ts

o-Fu

Mar

k Ch

ang1 ,

Prof

. Dai

suke

Yam

ane2 , P

rof.

Hiro

yuki

Ito1 , P

rof.

Kats

uyuk

i Mac

hida

1 ,Pr

of. K

azuy

a M

asu1 , P

rof.

Mas

ato

Sone

1 (1. T

okyo

Inst

itute

of

Tech

nolo

gy, 2

. Rits

umei

kan

Uni

vers

ity)

PC41

-Ult

ra-s

ensi

tive

ioni

c ca

paci

tive

pre

ssur

e se

nsor

s ba

sed

onw

rink

led

mic

rost

ruct

ures

on

conv

ex p

atte

rns

»M

r. C

hang

woo

Cho

1 , Dr.

Yeo

ngju

n Ki

m1 , P

rof.

Je H

oon

Oh1 (1

.H

anya

ng U

nive

rsity

)

PC43

-Gra

phen

e m

onol

ayer

tre

ated

wit

h U

V ir

radi

atio

n fo

r la

rge

area

gra

phen

e fi

eld-

effe

ct t

rans

isto

rs b

y el

ectr

on b

eam

litho

grap

hy»

Dr.

Pan

agio

tis D

imitr

akis

1 (1. I

nstit

ute

of N

anos

cien

ce a

ndN

anot

echn

olog

y, N

CSR

Dem

okri

tos)

PC45

-Mul

tifr

eque

ncy

piez

oele

ctri

c en

ergy

har

vest

ing

usin

g a

doub

le-m

ass

MEM

S ca

ntile

ver

»M

r. M

arco

s D

uque

1 , Dr.

Edg

ardo

Leo

n2 , Dr.

Gon

zalo

Mur

illo1 (1

. IM

B-CN

M (C

SIC)

, 2. U

nive

rsid

ad d

e So

nora

)

PC47

-Des

ign

and

sim

ulat

ion

of a

MEM

S de

vice

to

inve

stig

ate

the

stra

in e

ngin

eeri

ng p

rope

rtie

s of

2D

nan

omat

eria

ls»

Mr.

Nag

a M

anik

anta

Kom

man

aboi

na1 , M

r. A

lvis

e Ba

golin

i2 , Dr.

Mar

iaF

Pant

ano1 (1

. uni

vers

ity o

f tre

nto,

2. F

onda

zion

e Br

uno

Kess

ler)

PC49

-Com

plex

bio

logi

cal m

atri

x re

solv

ed o

n fu

ncti

onal

ized

gol

dna

nose

nsor

s by

sel

ecti

ve R

aman

spe

ctro

scop

y in

mic

rofl

uid

chip

»Pr

of. M

aria

Laur

a Co

lucc

io1 (1

. Uni

vers

ity M

agna

Gra

ecia

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

45

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PC51

-Bac

k-en

d pr

oces

sing

of o

ptoe

lect

roni

c de

vice

s fo

r ne

ural

inte

rfac

es b

ased

on

tape

red

opti

cal f

iber

s»

Dr.

Mar

co P

isan

ello

1 , Dr.

Ant

onio

Bal

ena1 , D

r. F

ilipp

o Pi

sano

1 , Dr.

Barb

ara

Spag

nolo

1 , Mr.

Mar

co B

ianc

o1 , Dr.

Leo

nard

o Si

leo1 , D

r.Fe

rruc

cio

Pisa

nello

1 , Pro

f. M

assi

mo

De

Vitt

orio

1 (1. I

stitu

to It

alia

no d

iTe

cnol

ogia

, Cen

ter

for

Biom

olec

ular

Nan

otec

hnol

ogie

s)

PC53

-Nan

omat

eria

l bas

ed fl

ow-s

ensi

ng d

evic

e fo

r m

icro

flui

dic

syst

ems

»D

r. E

vang

elos

Sko

tadi

s1 , Dr.

Eva

ngel

os A

slan

idis

1 , Dr.

Ang

elik

i Tse

repi

2 , Dr.

Eva

ngel

os G

ogol

ides

3 , Dr.

Sta

vros

Cha

tzan

drou

lis2 , P

rof.

Dim

itris

Tsou

kala

s1 (1. N

ATIO

NAL

TEC

HN

ICAL

UN

IVER

SITY

OF

ATH

ENS,

2. N

CSR-

Dem

okri

tos,

3. N

CSR

Dem

okri

tos)

PC55

-The

rmal

con

trol

for

in-s

itu

TEM

nan

omec

hani

cal t

esti

ngde

vice

s»

Mr.

Ale

x Pi

p1 , Pro

f. Je

an-P

ierr

e Ra

skin

1 , Pro

f. H

osni

Idri

ssi1 (1

.U

nive

rsité

cat

holiq

ue d

e Lo

uvai

n)

PC57

-Enh

anci

ng P

arti

al D

isch

arge

Det

ecti

on b

y Tu

ning

Res

idua

lSt

ress

es in

Ult

rath

in C

MO

S-co

mpa

tibl

e M

ulti

laye

r M

embr

anes

for

Reso

nant

Fre

quen

cy C

ontr

ol»

Ms.

Elé

onor

e M

asar

weh

1 , Dr.

Nic

olas

And

ré1 , M

r. T

hiba

ult D

elha

ye1 ,

Prof

. Lau

rent

Fra

ncis

2 , Pro

f. D

enis

Fla

ndre

1 (1. I

nstit

ute

of In

form

atio

nan

d Co

mm

unic

atio

n Te

chno

logi

es, E

lect

roni

cs a

nd A

pplie

dM

athe

mat

ics,

UCL

ouva

in, 2

. Uni

vers

ité c

atho

lique

de

Louv

ain)

PC59

-Spr

ayab

le T

ribo

elec

tric

Nan

ocom

posi

te t

o En

hanc

e bo

thEn

ergy

Har

vest

ing

and

Sens

ing

Capa

bilit

ies

of C

omm

erci

alPi

ezoe

lect

ric

Film

s»

Ms.

Car

men

Sal

vado

res

Fern

ande

z1 , Dr.

Bis

waj

oy B

agch

i1 , Dr.

Priy

anka

n D

atta

1 , Pro

f. M

anis

h Ku

mar

Tiw

ari1 (1

. Uni

vers

ity C

olle

geLo

ndon

)

PC61

-Pol

yeth

erim

ide

rein

forc

ed s

mar

t in

lays

for

bond

line

surv

eilla

nce

in c

ompo

site

s»

Mr.

Chr

este

n vo

n de

r H

eide

1 , Mr.

Julia

n St

einm

etz2 , P

rof.

Chri

stia

nH

ühne

2 , Pro

f. M

icha

el S

inap

ius2 , P

rof.

Andr

eas

Die

tzel

1 (1. I

nstit

ute

ofM

icro

tech

nolo

gy, T

echn

isch

e U

nive

rsitä

t Bra

unsc

hwei

g, 2

. Ins

titut

e of

Mec

hani

cs a

nd A

dapt

roni

cs, T

echn

isch

e U

nive

rsitä

t Bra

unsc

hwei

g)

PC63

-Impr

ovin

g el

ectr

ical

per

form

ance

of P

EALD

ZnO

TFT

s us

ing

high

ly-s

elec

tive

TM

AH

wet

-etc

hing

of A

l2O

3 fo

r co

ntac

t vi

as»

Mr.

Ben

Row

linso

n1 , Mr.

Josh

ua A

krof

i1 , Dr.

Mar

tin E

bert

1 , Pro

f.H

arol

d Ch

ong1 (1

. Uni

vers

ity o

f Sou

tham

pton

)

PC65

-Ele

ctro

n Be

am In

duce

d Cu

rren

t (E

BIC)

of p

olyc

ryst

allin

em

ater

ials

for

thin

-film

sol

ar c

ell a

pplic

atio

ns»

Dr.

Ain

a Q

uint

illa1 (1

. KIT

)

PC67

-Sili

con

nitr

ide

drum

res

onat

ors

wit

h a

top-

gate

cap

acit

ive

coup

ling

sche

me

»D

r. X

in Z

hou1 (1

. CN

RS-IE

MN

)

PC69

-Sel

ecti

ve U

nder

-Etc

hing

of F

ree-

Stan

ding

Tan

talu

mPe

ntox

ide

Wav

egui

des

for

MIR

Gas

Spe

ctro

scop

y»

Dr.

Mar

ek V

lk1 , D

r. A

nuru

p D

atta

1 , Dr.

Seb

astia

n Al

bert

i1 , Pro

f. As

trid

Aksn

es2 , P

rof.

Gan

apat

hy S

enth

il M

urug

an3 , P

rof.

Jana

Jáge

rská

1 (1. T

hear

ctic

Uni

vers

ity o

f Tro

msø

, UiT

, 2. N

TNU

, 3. U

nive

rsity

of

Sout

ham

pton

)

3:30

pmPo

ster

Ses

sion

- O

dd N

umbe

rs -

Nan

ofab

rica

tion

and

Man

ufac

turi

ngfo

r Fu

ncti

onal

Str

uctu

res/

Surf

aces

PD1-

3D p

rint

ing

of S

hape

-mor

phin

g Ca

rbon

Arc

hite

ctur

es»

Dr.

Mon

sur

Isla

m1 , D

r. D

ario

Mag

er1 , P

rof.

Jan

G. K

orvi

nk1 , P

rof.

Andr

és D

íaz

Lant

ada2 (1

. Kar

lsru

he In

stitu

te o

f Tec

hnol

ogy,

2.

Uni

vers

idad

Pol

itécn

ica

de M

adri

d)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

46

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PD3-

Mic

ro fa

bric

atio

n of

pol

ymer

pat

tern

ed s

urfa

ces

for

the

enha

ncem

ent

of m

arin

e ba

cter

ia b

iofi

lm»

Ms.

Ari

adni

Dro

umpa

li1 , Pro

f. Jö

rg H

übne

r1 , Pro

f. Lo

ne G

ram

2 , Pro

f.Ra

fael

Tab

orys

ki1 (1

. DTU

Nan

olab

- N

atio

nal C

entr

e fo

r N

ano

Fabr

icat

ion

and

Char

acte

riza

tion

Tec

hnic

al U

nive

rsity

of D

enm

ark,

2.

DTU

Bio

engi

neer

ing,

Dep

artm

ent o

f Bio

tech

nolo

gy a

nd B

iom

edic

ine,

Tech

nica

l Uni

vers

ity o

f Den

mar

k)

PD5-

Nan

ohol

e A

rray

s in

a M

ulti

laye

r H

yper

bolic

Met

amat

eria

l for

Bios

ensi

ng A

pplic

atio

ns»

Ms.

Mar

zia

Iaro

ssi1 , D

r. D

anie

l Dar

vill

Pric

e1 , Dr.

Nic

olò

Mac

cafe

rri2 ,

Dr.

Yin

gqi Z

hao1 , D

r. F

ranc

esco

De

Ange

lis1 (1

. Ist

ituto

Ital

iano

di

Tecn

olog

ia, G

enov

a, It

aly,

2. D

epar

tmen

t of P

hysi

cs a

nd M

ater

ials

Scie

nce,

Uni

vers

ity o

f Lux

embo

urg)

PD7-

A fl

exib

le t

hin

ZnO

-bas

ed p

ress

ure

sens

or u

sing

see

dles

shy

drot

herm

al g

row

th»

Ms.

Kar

ina

Jero

nim

o1 , Dr.

Gra

ham

Woo

d1 , Dr.

Reb

ecca

Che

ung1 , D

r.En

rico

Mas

trop

aolo

1 (1. U

nive

rsity

of E

dinb

urgh

)

PD9-

Ano

diza

tion

spe

ctro

scop

y fo

r su

perc

ondu

ctin

g de

vice

s»

Ms.

Mira

Kre

ßler

1 , Mr.

Eri

k Bo

rk1 , D

r. Jö

rn B

eyer

1 , Dr.

Pat

ryk

Krzy

stec

zko1 (1

. Cry

osen

sor

Tech

nolg

y, P

TB B

erlin

)

PD11

-Aer

osol

Dir

ect

Wri

ting

of C

u an

d A

u N

anop

arti

cle

Patt

erns

for

SERS

-act

ive

Subs

trat

es»

Mr.

Sal

eh A

ghaj

ani1 , D

r. A

ngel

o Ac

card

o1 , Dr.

Mar

cel T

iche

m1 (1

. Del

ftU

nive

rsity

of t

echn

olog

y)

PD13

-Pla

sma

enha

nced

inkj

et p

rint

ing

of p

arti

cle-

free

silv

er in

kth

in fi

lms

on p

olye

ster

fabr

ic»

Dr.

Tho

mas

Jone

s1 , Dr.

And

rew

Hou

rd1 , M

r. T

ang

Chun

g Li

u2 , Mr.

Lu-

Chia

ng Ji

a3 , Mr.

Chi

a-M

ei L

ung3 , D

r. S

vetla

na Z

olot

ovsk

aya1 , P

rof.

Amin

Abdo

lvan

d1 , Pro

f. Ch

ao-Y

i Tai

2 (1. U

nive

rsity

of D

unde

e, 2

. Nat

iona

lCe

ntra

l Uni

vers

ity, 3

. Sou

svei

llanc

e Te

chno

logy

Ltd

.)

PD15

-Fol

ding

of l

aser

-cut

tem

plat

es w

ith

plas

mon

icfu

ncti

onal

ized

sur

face

s in

to m

icro

cub

es»

Dr.

Pie

rre

Lore

nz1 , M

s. Y

e Yu

2 , Dr.

Joac

him

Zaj

adac

z1 , Mr.

Cle

men

sPe

ters

en3 , D

r. M

artin

Ehr

hard

t1 , Pro

f. Ro

bert

Kirc

hner

4 , Dr.

Kla

usZi

mm

er1 (1

. Lei

bniz

Inst

itute

of S

urfa

ce E

ngin

eeri

ng (I

OM

), 2.

Tech

nisc

he U

nive

rsitä

t Dre

sden

, 3. L

eibn

iz In

stitu

te o

f Sur

face

Engi

neer

ing,

4. T

U D

resd

en)

PD17

-Lar

ge s

cale

, sur

face

tex

turi

ng b

y la

ser

indu

ced

mic

ro- a

ndna

no-m

orph

olog

ies

»D

r. g

irola

mo

min

cuzz

i1 , Dr.

Aur

elie

n Si

kora

2 , Mr.

Mar

c Fa

ucon

1 , Dr.

Laur

a G

emin

i1 , Ms.

Ale

xand

ra B

ourt

erea

u1 , Dr.

Rai

ner

Klin

g1 (1.

Alph

anov

, 2. A

phan

ov)

PD19

-Sur

face

ten

sion

-ass

iste

d dr

op c

asti

ng fo

r fl

exib

le m

olec

ular

ferr

oele

ctri

c m

emor

y de

vice

s»

Ms.

Yic

hen

Cai1 , M

s. X

iaoj

ie Z

hou1 , M

r. M

ings

heng

Xu1 , D

r. L

aigu

i Hu1 ,

Prof

. Ran

Liu

1 , Dr.

Wen

chon

g W

ang2 (1

. Fud

an U

nive

rsity

, 2. U

nive

rsity

of M

uens

ter)

PD21

-Nan

ofab

rica

tion

of p

olar

izer

s in

hig

h as

pect

rat

io t

ungs

ten

grat

ings

wit

h hi

gh e

xtin

ctio

n ra

tio

»M

r. S

huoq

iu T

ian1 , P

rof.

Yifa

ng C

hen1 (1

. Fud

an U

nive

rsity

)

PD23

-Fab

rica

tion

and

Cha

ract

eriz

atio

n of

a 3

D p

rint

ed fl

exib

ledu

al-b

and

PIFA

ant

enna

for

5G a

pplic

atio

ns»

Ms.

Ilar

ia M

aras

co1 , M

r. G

IOVA

NN

I NIR

O1 , D

r. V

ince

nzo

Mas

tron

ardi

2 ,D

r. F

ranc

esco

Riz

zi2 , P

rof.

Anto

nella

D'O

razi

o1 , Pro

f. M

assi

mo

De

Vitt

orio

2 , Dr.

Mar

co G

rand

e1 (1. P

olite

cnic

o di

Bar

i, 2.

Istit

uto

Italia

no d

iTe

cnol

ogia

)

PD25

-Sin

gle-

step

add

itiv

e m

anuf

actu

ring

of 3

D p

olym

er p

recu

rsor

stru

ctur

es fo

r on

-chi

p py

roly

tic

carb

on m

icro

elec

trod

es»

Mr.

Jesp

er P

an1 , D

r. T

hom

as A

arøe

Anh

øj1 , P

rof.

Nie

ls B

ent L

arse

n2 ,Pr

of. S

teph

an S

ylve

st K

elle

r3 (1. D

TU N

anol

ab -

Nat

iona

l Cen

tre

for

Nan

o Fa

bric

atio

n an

d Ch

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

fD

enm

ark,

2. D

TU H

ealth

Tec

h - D

epar

tmen

t of H

ealth

Tec

hnol

ogy

Tech

nica

l Uni

vers

ity o

f Den

mar

k, 3

. DTU

Nan

olab

, Tec

hnic

al U

nive

rsity

of D

enm

ark)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

47

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PD27

-Com

posi

te c

ondu

ctiv

e re

sin

for

3D m

icro

fabr

icat

ion

of g

asse

nsor

s vi

a tw

o ph

oton

ligh

t in

duce

d po

lym

eriz

atio

n»

Dr.

Lor

enzo

Vig

na1 , D

r. V

alen

tina

Bert

ana1 , D

r. S

imon

e Lu

igi M

aras

so1 , P

rof.

Mat

teo

Cocu

zza1 , D

r. Ig

nazi

o Ro

ppol

o1 , Dr.

Ann

alis

a Ch

iapp

one

1 , Dr.

Mat

teo

Man

achi

no1 , P

rof.

Mar

co S

ange

rman

o1 , Dr.

Ale

ssio

Ver

na1 , P

rof.

Luci

ano

Scal

trito

1 , Pro

f. Fa

briz

io P

irri

1 , Pro

f. Se

rgio

Fer

rero

1 (1.

Polit

ecni

co d

i Tor

ino)

PD29

-Gra

phen

e/Ti

tani

um G

olay

mic

ro-c

ell a

rray

s fo

r a

colo

r-se

nsit

ive

tera

hert

z im

agin

g se

nsor

»M

r. E

rik

Betz

-Gut

tner

1 , Dr.

Sim

one

Dal

Zili

o2 , Dr.

Nic

ola

Cefa

rin2 , D

r.M

arco

Laz

zari

no2 (1

. Uni

vers

ità d

i Tri

este

, 2. C

NR-

IOM

)

PD31

-Fab

rica

tion

of a

nov

el F

BAR

stac

k us

able

as

grav

imet

ric

sens

or»

Mr.

GIO

VAN

NI N

IRO

1 , Ms.

Ilar

ia M

aras

co1 , P

rof.

Anto

nella

D'O

razi

o1 ,Pr

of. M

assi

mo

De

Vitt

orio

2 , Dr.

Lar

a N

atta

2 , Dr.

Mar

co G

rand

e1 , Dr.

Fran

cesc

o Ri

zzi2 (1

. Pol

itecn

ico

di B

ari,

2. Is

titut

o Ita

liano

di T

ecno

logi

a)

PD33

-Sol

vent

-fre

e fa

bric

atio

n of

ZIF

-8-c

oate

d co

uple

d re

sona

tors

for

mas

s-ba

sed

gas

dete

ctio

n»

Ms.

Che

nxi W

ang1 , D

r. C

hen

Wan

g1 , Mr.

Ben

zhen

g Xi

a1 , Mr.

Aoj

ieQ

uan1 , D

r. A

leks

ande

r M

atavž1 , D

r. M

in T

u1 , Ms.

Lin

lin W

ang1 , P

rof.

Rob

Amel

oot1 , P

rof.

Mic

hael

Kra

ft1 (1

. KU

Leu

ven)

PD35

-Tra

mpo

linin

g Li

quid

Mar

bles

»D

r. P

eng

Zhan

g1 , Mr.

Nis

chal

Mah

arja

n1 , Mr.

Ada

ir G

allo

Juni

or1 , M

r.Sa

nkar

a Ar

unac

hala

m1 , D

r. M

ENG

SH

I1 , Pro

f. H

IMAN

SHU

MIS

HRA

1 (1.

Inte

rfac

ial L

ab, W

ater

Des

alin

atio

n an

d Re

use

Cent

er (W

DRC

),Bi

olog

ical

and

Env

ironm

enta

l Sci

ence

s an

d En

gine

erin

g (B

ESE)

Div

isio

n,Ki

ng A

bdul

lah

Uni

vers

ity o

f Sci

ence

and

Tec

hnol

ogy

(KAU

ST),

Thuw

al,

2395

5–69

00, S

audi

Ara

bia)

PD37

-Ele

ctri

cal T

rans

port

thr

ough

an

oxid

e-m

edia

ted

hybr

id In

Pon

Si i

nter

face

: the

opt

imal

cho

ice

for

the

oxid

e m

ater

ial

»D

r. A

nne

Taln

eau1 , D

r. G

rego

ire B

eaud

oin1 , D

r. F

rede

riqu

eD

ucro

quet

2 , Dr.

Gill

es P

atri

arch

e1 (1. C

NRS

C2N

, 2. I

MEP

- LAH

C U

niv.

Gre

nobl

e Al

pes)

PD39

-Dew

wat

er h

arve

stin

g an

d fo

g co

llect

ion

on b

iphi

lic,

nano

text

ured

sur

face

s»

Mr.

Dim

itris

Nio

ras1 (1

. Ins

titut

e of

Nan

osci

ence

and

Nan

otec

hnol

ogy,

NCS

R D

emok

rito

s, A

ghia

Par

aske

vi, 1

5341

, Att

iki,

Gre

ece)

PD41

-Hie

rarc

hica

l sur

face

s w

ith

reve

rsib

le p

hoto

indu

ced

and

heat

-indu

ced

wet

tabi

lity:

ZnO

nan

orod

s on

lase

r-m

icro

stru

ctur

edsi

licon

»D

r. M

aria

Kan

idi1 , M

r. A

chill

eas

Bard

akas

2 , Dr.

Ari

adni

Ker

asid

ou2 , M

r.An

drea

s An

asta

sopo

ulos

1 , Dr.

Chr

isto

s Ts

amis

2 , Dr.

Mar

ia K

andy

la1 (1

.Th

eore

tical

and

Phy

sica

l Che

mis

try

Inst

itute

, Nat

iona

l Hel

leni

cRe

sear

ch F

ound

atio

n, 4

8 Va

sile

os C

onst

antin

ou A

venu

e, 1

1635

Ath

ens,

Gre

ece,

2. I

nstit

ute

of N

anos

cien

ce a

nd N

anot

echn

olog

y, N

atio

nal

Cent

er fo

r Sc

ient

ific

Rese

arch

‘Dem

okri

tos’,

153

10 A

then

s, G

reec

e.)

PD43

-Per

form

ance

Com

pari

son

of D

iffe

rent

Gat

e D

iele

ctri

cs in

Reco

nfig

urab

le F

ield

Eff

ect

Tran

sist

ors

»M

r. M

uham

mad

Bila

l Kha

n1 , Mr.

Say

anta

n G

hosh

1 , Dr.

Sla

wom

irPr

unca

l2 , Mr.

Tom

Mau

ersb

erge

r3 , Pro

f. Th

omas

Mik

olaj

ick4 , D

r. A

rtur

Erbe

2 , Dr.

Yor

dan

M. G

eorg

iev2 (1

. Ins

titut

e of

Ion

Beam

Phy

sics

and

Mat

eria

ls R

esea

rch,

HZD

R, D

resd

en, 0

1328

, Ger

man

y, 2

. Ins

titut

e of

Ion

Beam

Phy

sics

and

Mat

eria

ls R

esea

rch,

Hel

mho

ltz-Z

entr

umD

resd

en-R

osse

ndor

f (H

ZDR)

, Dre

sden

, 013

28, G

erm

any,

3. N

amla

bgG

mbH

, Dre

sden

, 011

87, G

erm

any,

4. T

echn

isch

e U

nive

rsitä

t Dre

sden

,In

stitu

t für

Hal

blei

ter

und

Mik

rosy

stem

e, D

resd

en, 0

1069

, Ger

man

y)

PD45

-NIR

Res

pons

ive

Capa

citi

ve P

hoto

cath

odes

bas

ed o

n Pb

SN

anoc

ryst

als

Dec

orat

ed R

educ

ed G

raph

ene

Oxi

de»

Dr.

Chi

ara

Ingr

osso

1 , Dr.

Vita

nton

io V

alen

zano

2 , Dr.

Mic

hela

Cor

rice

lli3 , D

r. A

nna

Test

olin

4 , Dr.

Val

entin

a Pi

ffer

i4 , Dr.

Giu

sepp

e Va

leri

o Bi

anco

5 , Dr.

Rob

erto

Com

pare

lli1 , D

r. N

icol

etta

Dep

alo1 , P

rof.

Elis

abet

taFa

nizz

a2 , Dr.

Mar

inel

la S

tric

coli1 , P

rof.

Ange

la A

gost

iano

3 , Pro

f. Ila

ria

Palc

hett

i6 , Pro

f. Lu

igi F

alci

ola4 , P

rof.

Mar

ia L

ucia

Cur

ri3 (1

. CN

R-IP

CF S

.S.

Bari

, 2. D

ipar

timen

to d

i Chi

mic

a, U

nive

rsità

di B

ari,

3. D

ip. d

i Chi

mic

a,U

nive

rsità

di B

ari,,

4. D

ipar

timen

to d

i Chi

mic

a, U

nive

rsità

di M

ilano

, 5.

CNR-

NAN

OTE

C S.

S. B

ari,

6. D

ept.

of C

hem

istr

y U

go S

chiff

, Uni

vers

ity o

fFi

renz

e)

PD47

-Sol

id-s

tate

dew

etti

ng fo

r se

nsin

g w

ith

plas

mon

ic o

ptic

alfi

ber

»D

r. D

i Zhe

ng1 , D

r. F

ilipp

o Pi

sano

2 , Dr.

Mar

co P

isan

ello

1 , Dr.

Lia

mCo

llard

3 , Pro

f. M

assi

mo

De

Vitt

orio

4 , Dr.

Fer

rucc

io P

isan

ello

5 (1. I

stitu

toIta

liano

di T

ecno

logi

a, 2

. I, 3

. Ist

i, 4.

Istit

uto,

5. U

nive

rsità

del

Sal

ento

)

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o, e

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g yo

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ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

48

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PD49

-Sha

pe s

tabl

e na

nofi

brou

s m

ater

ials

by

elec

tros

pinn

ing

and

phot

o-in

duce

d cr

ossl

inki

ng»

Ms.

Par

nian

Kia

nfar

1 , Pro

f. Ro

bert

a Bo

ngio

vann

i1 , Dr.

Ale

ssan

dra

Vita

le1 (1

. Pol

itecn

ico

di T

orin

o)

PD51

-Pic

olit

er d

ispe

nsin

g te

chno

logy

for

mic

ro-o

ptic

alco

mpo

nent

s an

d ph

oton

ic p

acka

ging

usi

ng h

ighl

y vi

scou

s liq

uid

poly

mer

s»

Mr.

Phi

lipp

Wac

hhol

z1 , Dr.

Mar

ia R

usse

w2 , M

r. Jo

hann

es W

olf2 , D

r. Ja

nJa

sper

Kle

in2 , D

r. H

enni

ng S

chrö

der1 (1

. Fra

unho

fer

IZM

, 2. m

icro

resi

stte

chno

logy

Gm

bH)

PD53

-Pie

zo/T

ribo

elec

tric

Fle

xibl

e Tr

ansd

ucer

s an

dN

anog

ener

ator

s fo

r En

ergy

Har

vest

ing

and

Bios

ensi

ng»

Dr.

Mas

sim

o M

arie

llo1 , P

rof.

Mas

sim

o D

e Vi

ttor

io2 (1

. Eco

lePo

lyte

chni

que

Fédé

rale

de

Laus

anne

(EPF

L), 2

. Ist

ituto

)

PD55

-Opt

imiz

atio

n of

lase

r-in

duce

d gr

aphe

ne e

lect

rode

s fo

rfl

exib

le m

icro

-sup

erca

paci

tors

»D

r. P

ietr

o Za

ccag

nini

1 , Mr.

Mar

co R

eina

2 , Dr.

Dav

ide

Arco

raci

3 , Dr.

Mar

co F

onta

na2 , D

r. S

tefa

no S

tass

i3 , Dr.

Mar

a Se

rrap

ede2 , D

r. S

tefa

noBi

anco

3 , Pro

f. Se

rgio

Fer

rero

1 , Pro

f. Lu

cian

o Sc

altr

ito1 , P

rof.

Andr

eaLa

mbe

rti1 (1

. Pol

itecn

ico

di T

orin

o, 2

. Ist

ituto

Ital

iano

di T

ecno

logi

a, 3

.Ap

plie

d Sc

ienc

e an

d Te

chno

logy

Dep

artm

ent,

Polit

ecni

co d

i Tor

ino,

Tori

no, 1

0129

, Ita

ly)

PD57

-AFM

-Dri

ven

Glo

bal C

ompr

essi

on o

f 3D

Car

diac

Sph

eroi

ds»

Mr.

Mic

hele

Zan

etti1 , D

r. L

aura

And

olfi1 , D

r. M

arco

Laz

zari

no1 (1

. CN

R-IO

M)

PD59

-Nan

o-fa

bric

atio

n an

d SE

M in

tegr

atio

n of

the

Nan

o A

pert

ure

Ion

Sour

ce»

Mr.

Mik

e Si

mon

s1 , Mr.

Car

el H

eerk

ens1 , M

r. D

ustin

Lau

r1 , Pro

f. Pi

eter

Krui

t1 , Ms.

Aya

Mah

goub

1 (1. D

elft

Uni

vers

ity o

f tec

hnol

ogy)

PD61

-Nan

oreg

ion:

whe

re n

anot

echn

olog

y m

eets

bus

ines

s.»

Dr.

Sim

one

Dal

Zili

o1 , Dr.

Mar

co L

azza

rino

1 , Dr.

Mat

tia F

anet

ti2 , Pro

f.Lu

cia

Pasq

uato

3 , Pro

f. D

raga

n m

ihai

lovi

c4 , Pro

f. Al

vise

Ben

edet

ti5 , Dr.

Gio

vann

i De

Nin

no6 , P

rof.

Carl

o Ba

gnol

i7 , Ms.

Dun

ia M

anhe

8 , Dr.

Gas

per

juva

ncic

9 , Ms.

Boj

ana

Cipo

t10 (1

. CN

R-IO

M, 2

. Uni

vers

ity o

f Nov

aG

oric

a, 3

. Uni

vers

ità d

i Tri

este

, 4. J

ozef

Ste

fan

Inst

itute

, 5. U

nive

rsità

Ca'

Fosc

ari,

6. E

lett

ra-S

incr

otro

ne T

ries

te S

.C.p

.A.,

7. fo

sc, 8

. RRA

Zel

eni k

ras

d.o.

o., 9

. Teh

nološk

i par

k Lj

ublja

na, 1

0. P

rim

orsk

i teh

nološk

i par

k)

PD63

-3D

pri

nted

NEM

S to

ove

rcom

e in

tern

al d

ampi

ng li

mit

inna

nom

echa

nica

l res

onat

ors

»D

r. S

tefa

no S

tass

i1 , Dr.

Ido

Coop

erst

ein2 , P

rof.

Fabr

izio

Pir

ri3 , P

rof.

Shlo

mo

Mag

dass

i2 , Pro

f. Ca

rlo

Ricc

iard

i1 (1. A

pplie

d Sc

ienc

e an

dTe

chno

logy

Dep

artm

ent,

Polit

ecni

co d

i Tor

ino,

Tor

ino,

101

29, I

taly

, 2.

Casa

li Ce

nter

for

Appl

ied

Chem

istr

y, In

stitu

te o

f Che

mis

try,T

he H

ebre

wU

nive

rsity

of J

erus

alem

, 3. P

olite

cnic

o di

Tor

ino)

PD65

-Man

ufac

ture

pro

cess

of v

ibra

ting

mic

ro-w

ire

reso

nato

rs fo

rch

arac

teri

zati

on o

f qua

ntum

tur

bule

nce

in s

uper

flui

d 4H

e»

Mr.

Ši m

on M

idlik

1 (1. C

harl

es U

nive

rsity

, Pra

gue,

Ke

Karl

ovu

3, 1

21 1

6,Cz

ech

Repu

blic

)

PD67

-Qua

ntif

ying

the

info

rmat

ion

cont

ent

of m

ulti

scal

ena

nost

ruct

ured

sur

face

s: a

n en

trop

y-ba

sed

scal

ing

anal

ysis

»M

r. A

than

asio

s Ar

apis

1 , Dr.

Vas

silio

s Co

nsta

ntou

dis2 , D

r. D

imitr

ios

Kont

ziam

pasi

s3 , Dr.

Ath

anas

ios

Mili

onis

4 , Mr.

Che

uk W

ing

Edm

ond

Lam

4 , Dr.

Abi

nash

Tri

path

y4 , Pro

f. D

imos

Pou

likak

os4 , D

r. E

vang

elos

Gog

olid

es5 (1

. Ins

titut

e of

Nan

osci

ence

and

Nan

otec

hnol

ogy,

NCS

RD

emok

rito

s, A

ghia

Par

aske

vi, 1

5341

, Att

iki,

Gre

ece,

2. I

nstit

ute

ofN

anos

cien

ce a

nd N

anot

echn

olog

y, N

CSR

Dem

okri

tos,

3. S

choo

l of

Biom

edic

al S

cien

ces,

Fac

ulty

of B

iolo

gica

l Sci

ence

s, U

nive

rsity

of L

eeds

,4.

ETH

Zur

ich,

5. N

CSR

Dem

okri

tos)

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Ord

o, e

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thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

49

Cont

inue

d fr

om T

uesd

ay, 2

1 Se

ptem

ber

PD69

-Nan

ofab

rica

tion

of p

erio

dica

lly c

orru

gate

d an

d la

rge-

area

2D-M

oS2

film

s fe

atur

ing

enha

nced

opt

ical

abs

orpt

ion

in t

he fe

wla

yer

regi

me

»M

r. M

atte

o G

arde

lla1 , D

r. M

Bha

tnag

ar1 , D

r. M

C G

iord

ano1 , D

r. D

Chow

dhur

y1 , Dr.

Car

lo M

ennu

cci1 , D

r. A

ndre

a M

ezza

nti2 , D

r. G

iuse

ppe

Del

la V

alle

2 , Dr.

Chr

istia

n M

arte

lla3 , D

r. P

Tum

mal

a3 , Dr.

Ale

ssio

Lam

pert

i3 , Dr.

Ale

ssan

dro

Mol

le3 , D

r. F

Bua

tier

de M

onge

ot1 (1

. Dip

. di

Fisi

ca, U

nive

rsità

di G

enov

a, V

ia D

odec

anes

o 33

, 161

46 G

enov

a, It

aly,

2.

Dip

. di F

isic

a an

d IF

N-C

NR,

Pol

itecn

ico

di M

ilano

, Pia

zza

Leon

ardo

da

Vinc

i 32,

201

33 M

ilano

, Ita

ly, 3

. CN

R-IM

M U

nit o

f Agr

ate

Bria

nza,

via

C.

Oliv

etti

2, A

grat

e Br

ianz

a, I-

2086

4, It

aly)

PD71

-Noi

se d

ata

as a

sou

rce

of in

form

atio

n in

CO

2 se

nsor

s ba

sed

on li

quid

-pha

se e

xfol

iate

d gr

aphe

ne»

Mr.

Ste

van

Andr

ic1 , D

r. Iv

ana

Jokić1 , D

r. M

iloš

Fran

tlović1 , M

s. Je

lena

Stev

anov

ić1 , D

r. M

arko

Spa

seno

vić1 (1

. Uni

vers

ity o

f Bel

grad

e, In

stitu

teof

Che

mis

try,

Tec

hnol

ogy

and

Met

allu

rgy

- Nat

iona

l Ins

titut

e of

the

Repu

blic

of S

erbi

a, B

elgr

ade,

Ser

bia)

3:30

pmIn

dust

rial

Ses

sion

Prin

ted

vers

ion

of t

he d

etai

led

sche

dule

on

page

11

of t

hepr

ogra

m g

uide

Wed

nesd

ay, 2

2 Se

ptem

ber

8:45

amPl

enar

y 3:

Bor

is C

hich

kov

Audi

toriu

mCh

aire

d by

: Urs

Sta

ufer

and

Dr.

Eva

ngel

os G

ogol

ides

Lase

r bi

opri

ntin

g»

Bori

s N

. Chi

chko

v (L

eibn

iz U

nive

sity

Han

nove

r, In

stitu

te o

f Qua

ntum

Opt

ics)

9:30

amPl

enar

y 4:

Anj

a Bo

isen

Audi

toriu

mCh

aire

d by

: Urs

Sta

ufer

and

Dr.

Eva

ngel

os G

ogol

ides

Mic

ro/n

ano

engi

neer

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and

drug

del

iver

y - M

NE

Fello

w A

war

d20

21»

Anja

Boi

sen

(Tec

hnic

al U

nive

rsity

of D

enm

ark,

DEN

MAR

K)

10:1

5am

Coff

ee B

reak

10:4

5am

A3

-Se

ssio

n A

3: F

unct

iona

l Str

uctu

res

& M

ater

ials

Audi

toriu

mCh

aire

d by

: Pro

f. M

iche

le S

cara

ggi a

nd P

rof.

Step

han

Sylv

est K

elle

r

10:4

5am

Dev

elop

men

t an

d En

gine

erin

g of

Bio

com

posi

tes

for

appl

icat

ions

in W

ound

Man

agem

ent

and

Wat

er T

reat

men

t»

Dr.

Mar

co C

onta

rdi1 , D

r. G

iulia

Sua

rato

1 , Dr.

Gio

vann

i Per

otto

1 , Dr.

Ilker

Bay

er1 , D

r. D

espi

na F

rago

uli1 , D

r. A

than

assi

a At

hana

ssio

u1 (1.

Smar

t Mat

eria

ls G

roup

, Ist

ituto

Ital

iano

di T

ecno

logi

a, V

ia M

oreg

o 30

,G

enoa

, 160

14, I

taly

)

11:1

5am

PDM

S cu

ring

inhi

biti

on a

nd t

oxic

ity

of le

ache

d co

mpo

unds

from

3D-p

rint

ed m

olds

for

fabr

icat

ing

PDM

S-ba

sed

devi

ces.

»D

r. B

astie

n Ve

nzac

1 , Dr.

Mar

cia

de A

lmei

da M

onte

iro M

elo

Ferr

az2 ,

Mr.

Sha

nlia

ng D

eng3 , D

r. Z

iad

Mah

mou

d4 , Mr.

Auf

ried

Len

feri

nk5 , M

s.Au

rélie

Cos

ta4 , M

r. F

abri

ce B

ray4 , D

r. Je

nnife

r N

agas

him

a6 , Pro

f. Ce

esO

tto5 , P

rof.

Nuc

hari

n So

ngsa

sen6 , P

rof.

Séve

rine

Le

Gac

3 (1. L

AAS-

CNRS

, 2. M

olec

ular

Ani

mal

Bre

edin

g an

d Bi

otec

hnol

ogy,

Gen

e Ce

nter

Ludw

ig-M

axim

ilian

s U

nive

rsity

of M

unic

h, 3

. AM

BER,

MES

A+ a

ndTe

chm

ed C

entr

e, U

nive

rsity

of T

wen

te, 4

. MSA

P, U

nive

rsité

de

Lille

,CN

RS, 5

. Med

ical

Cel

l Bio

phys

ics,

Tec

hMed

Cen

tre,

Uni

vers

ity o

fTw

ente

, 6. C

ente

r fo

r Sp

ecie

s Su

rviv

al, S

mith

soni

an N

atio

nal Z

oo a

ndCo

nser

vatio

n Bi

olog

y In

stitu

te)

Pow

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Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

50

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

11:3

0am

Cont

ribu

tion

to

the

clea

n w

ater

pro

duct

ion

via

supe

rhyd

roph

obic

,pl

asm

a na

note

xtur

ed m

embr

ane

dist

illat

ion

»M

r. D

imos

then

is Io

anno

u1 , Dr.

You

min

Hou

2 , Ms.

Pre

xa S

hah2 , D

r.Ko

smas

Elli

nas3 , D

r. M

icha

el K

appl

2 , Dr.

Eva

ngel

os G

ogol

ides

3 (1.

Scho

ol o

f Mec

hani

cal E

ngin

eeri

ng, N

atio

nal T

echn

ical

Uni

vers

ity o

fAt

hens

, 2. M

ax P

lanc

k In

stitu

te fo

r Po

lym

er R

esea

rch,

3. I

nstit

ute

ofN

anos

cien

ce a

nd N

anot

echn

olog

y, N

CSR

Dem

okri

tos)

11:4

5am

Cont

rolle

d Co

ncen

trat

ion

of t

race

s us

ing

a hi

erar

chic

alsu

perh

ydro

phob

ic d

evic

e fo

r an

alyt

ical

pur

pose

s»

Mr.

Vic

tor

Fabr

e1 , Mr.

Fra

nck

Carc

enac

2 , Mr.

Adr

ian

Labo

rde2 , M

r.La

uren

t Maz

enq2 , P

rof.

Chri

stop

he V

ieu3 , D

r. E

mm

anue

lle T

revi

siol

4 , Dr.

Phili

ppe

Loua

rn5 (1

. LAA

S-CN

RS, I

RAP,

2. L

AAS-

CNRS

, 3. U

nive

sité

de

Toul

ouse

, 4. T

BI, 5

. IRA

P)

12pm

Free

form

Mic

ro S

truc

turi

ng o

f Cas

t Po

lym

er-D

eriv

ed C

eram

ics

bySa

crif

icia

l Dir

ect

Lase

r W

riti

ng»

Mr.

Lor

enz

Hag

elük

en1 , M

rs. H

o-Yu

n Le

e1 , Mr.

Dav

id D

i Sta

dio1 , P

rof.

Jürg

en B

rugg

er1 (1

. Eco

le P

olyt

echn

ique

Féd

éral

e de

Lau

sann

e (E

PFL)

)

12:1

5pm

Sequ

enti

al D

rug

Rele

ase

in t

he G

ut A

chie

ved

wit

h D

ual-

com

part

men

t M

icro

cont

aine

rs: T

owar

ds C

ombi

nati

onal

Dru

gTh

erap

y»

Ms.

Julia

ne F

jelra

d Ch

rist

fort

1 , Ms.

Car

men

Mili

an G

uim

era1 , M

s.Kh

orsh

id K

hors

hid

Kam

guya

n1 , Dr.

Mor

ten

Borr

e H

anse

n1 , Dr.

Lin

eH

agne

r N

iels

en1 , D

r. L

asse

Høj

lund

Ekl

und

Tham

drup

1 , Dr.

Kin

ga Z

ór1 ,

Prof

. Anj

a Bo

isen

1 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k)

12:3

0pm

Nuc

leic

Aci

d N

anof

abri

cati

on:

Coop

erat

ive

Effe

cts

in S

elf-

Ass

embl

y an

d Pr

ogre

ss T

owar

ds F

unct

iona

l Sys

tem

s»

Dr.

Jaco

b M

ajik

es1 , D

r. P

aul P

atro

ne1 , D

r. A

ntho

ny K

ears

ley1 , D

r.M

icha

el Z

woa

lk1 , D

r. Ja

mes

Lid

dle2 (1

. Nat

iona

l Ins

titut

e of

Sta

ndar

dsan

d Te

chno

logy

(NIS

T), 2

. Nat

iona

l Ins

titut

e of

Sta

ndar

ds a

ndTe

chno

logy

)

10:4

5am

B3 -

Sess

ion

B3: M

icro

& N

ano

stru

ctur

es a

nd d

evic

esSa

la 5

00Ch

aire

d by

: Dr.

Fra

nces

co R

izzi

and

Pro

f. Fa

bio

Bisc

arin

i

10:4

5am

Surf

ace

and

plas

ma

char

acte

riza

tion

of a

sel

f-lim

ited

tw

o st

epet

ch p

roce

ss fo

r Si

N s

pace

r et

chin

g ap

plic

atio

ns.

»M

r. N

icol

as L

oube

t1 , Dr.

Cam

ille

Petit

-Etie

nne2 , D

r. C

écile

Jenn

y1 , Dr.

Gill

es C

unge

2 , Dr.

Erw

ine

Parg

on2 (1

. STM

icro

elec

tron

ics,

2. U

niv.

Gre

nobl

e Al

pes,

CN

RS, C

EA/L

ETI-M

inat

ec, G

reno

ble

INP,

LTM

, F-3

8054

Gre

nobl

e, F

ranc

e)

11am

Hig

h th

roug

hput

met

rolo

gy o

f ene

rgy

harv

esti

ng d

evic

es b

ased

on

nano

wir

es»

Dr.

Zhi

Li1 , D

r. F

ranç

ois

Piqu

emal

2 , Dr.

Ric

hard

Koo

ps3 , D

r. P

etr

Klap

etek

4 , Dr.

Luc

a Bo

arin

o5 , Dr.

Uw

e Br

and1 , D

r. N

oelle

Gog

neau

6 , Dr.

Jaco

b La

rsen

7 , Dr.

Janu

sz F

idel

us8 , D

r. H

ele

Savi

n9 , Dr.

Mar

kys

Cain

10,

Dr.

Gra

ham

Cro

ss11

, Dr.

Chr

is S

chw

alb12

, Dr.

Erw

in P

eine

r13, P

rof.

Teod

or G

otsz

alk14

, Dr.

Javi

er R

odrí

guez

Vie

jo15

, Dr.

Did

ier

Pelle

rin16

(1.

Phys

ikal

isch

-Tec

hnis

che

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esan

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t, Bu

ndes

alle

e 10

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Pow

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Ex

Ord

o, e

very

thin

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o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

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ng 2

0 - 2

3 Se

p 2

021

51

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

11:1

5am

Eval

uati

on o

f cur

ing

effi

cien

cy o

f OSG

low

-k fi

lms

usin

g t

ime-

dom

ain

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ouin

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ing

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of. M

ikha

il Ba

klan

ov1 (1

. Pro

fess

or a

t Nor

th C

hina

Uni

vers

ity o

fTe

chno

logy

)

11:3

0am

A t

herm

al-m

echa

nica

l inv

esti

gati

on fo

r th

e op

tim

izat

ion

of s

ilico

nm

icro

heat

ers

for

gas

sens

ing

appl

icat

ions

»D

r. A

ndre

a G

aiar

do1 , D

r. D

avid

Nov

el1 , M

r. E

lia S

catt

olo2 , D

r. A

less

ioBu

ccia

relli

3 , Dr.

Pie

rlui

gi B

ellu

tti1 (1

. Fon

dazi

one

Brun

o Ke

ssle

r, 2.

FBK

,Br

uno

Kess

ler

Foun

datio

n, 3

. CN

R-N

ANO

TEC

S.S.

Bar

i)

11:4

5am

Secu

rity

Vul

nera

bilit

y of

Met

al-O

xide

RRA

M u

nder

SEM

Imag

ing

»M

s. N

hu H

uynh

1 , Mr.

Heb

in C

heri

an1 , P

rof.

Etha

n Ah

n1 (1. T

heU

nive

rsity

of T

exas

at S

an A

nton

io)

12pm

App

licat

ion

of C

2F4B

r2 p

lasm

a to

low

dam

age

etch

ing

ofna

nopo

rous

low

-k d

iele

ctri

c»

Dr.

And

rey

Mia

konk

ikh1 , D

r. A

skar

Rez

vano

v2 , Dr.

Ale

xey

Vish

nevs

ky3 ,

Mr.

And

rey

Orl

ov2 , D

r. K

onst

antin

Rud

enko

4 (1. V

alie

v In

stitu

te o

fPh

ysic

s an

d Te

chno

logy

RAS

, 2. M

olec

ular

Ele

ctro

nics

Res

earc

hIn

stitu

te, 3

. Res

earc

h an

d Ed

ucat

ion

Cent

er “T

echn

olog

ical

Cen

ter,”

RTU

MIR

EA, 4

. Val

iev

Inst

itute

of P

hysi

cs a

nd T

echn

olog

y, R

ussi

anAc

adem

y of

Sci

ence

s)

12:1

5pm

HSQ

-bas

ed p

roce

ss t

o in

tegr

ate

vert

ical

nan

osca

le d

evic

es»

Dr.

Est

eve

Amat

1 , Mr.

Alb

erto

del

Mor

al2 , D

r. H

ans-

Juer

gen

Enge

lman

n3 , Dr.

Joha

nnes

von

Bor

any3 , D

r. K

arl-H

einz

Hei

nig3 , D

r.M

arie

-Lin

e Po

urte

au4 , D

r. G

uido

Rad

emak

er4 , D

r. R

aluc

a Ti

ron4 , P

rof.

Joan

Bau

sells

5 , Pro

f. Fr

ance

sc P

erez

-Mur

ano6 (1

. Ins

titut

e of

Mic

roel

ctro

nics

of B

arce

lona

, 2. I

nstit

ute

of M

icro

elec

tron

ics

ofBa

rcel

ona

(IMB-

CNM

, CSI

C), 3

. Ins

titut

e of

Ion

Beam

Phy

sics

and

Mat

eria

ls R

esea

rch,

Hel

mho

ltz-Z

entr

um D

resd

en-R

osse

ndor

f (H

ZDR)

,D

resd

en, 0

1328

, Ger

man

y, 4

. Uni

v. G

reno

ble

Alpe

s, C

EA, L

ETI,

F-38

000

Gre

nobl

e, F

ranc

e, 5

. IM

B-CN

M (C

SIC)

, 6. I

nstit

ute

of M

icro

elec

tron

ics)

12:3

0pm

Dis

posa

ble

C_Sp

acer

Flo

w fo

r bu

ildin

g M

IM C

apac

itor

s»

Dr.

mar

cello

rava

sio1 (1

. STM

icro

elec

tron

ics)

10:4

5am

C3 -

Sess

ion

C3: B

iose

nsor

s te

chno

logi

esSa

la L

ondr

aCh

aire

d by

: Dr.

Bar

bara

Spa

gnol

o an

d D

r. A

nton

io Q

ualti

eri

10:4

5am

Mir

rori

ng A

ctio

n Po

tent

ials

: A N

ew M

etho

dolo

gy fo

r La

bel-F

ree,

Acc

urat

e, a

nd N

onin

vasi

ve E

lect

roph

ysio

logi

cal R

ecor

ding

»D

r. A

ndre

a Ba

rbag

lia1 , D

r. M

iche

le D

ipal

o1 , Dr.

Gio

vann

i Mel

le1 , D

r.G

iuse

ppin

a Ia

chet

ta1 , D

r. L

iese

lot D

eley

e1 , Dr.

Alia

ksan

dr H

ubar

evic

h1 ,D

r. A

ndre

a To

ma1 , D

r. F

ranc

esco

Tan

tuss

i1 , Dr.

Fra

nces

co D

e An

gelis

1

(1. I

stitu

to It

alia

no d

i Tec

nolo

gia)

11am

3D h

igh-

reso

luti

on L

aser

Pri

ntin

g of

mon

olit

hic

glas

s Su

spen

ded

Mic

roch

anne

l Res

onat

ors

for

enha

nced

Bio

sens

ing

»D

r. R

osan

na T

osca

no1 , D

r. A

ndre

a Lo

vera

1 , Dr.

Rob

erta

Cal

mo2 , D

r.St

efan

o St

assi

2 , Dr.

Ale

ssan

dro

Chia

dò2 , D

r. D

avid

e Sc

aiol

a2 , Pro

f.Fr

ance

sca

Bosc

o2 , Pro

f. Ca

rlo

Ricc

iard

i2 (1. F

emto

prin

t SA,

Muz

zano

,69

33, S

witz

erla

nd, 2

. App

lied

Scie

nce

and

Tech

nolo

gy D

epar

tmen

t,Po

litec

nico

di T

orin

o, T

orin

o, 1

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, Ita

ly)

11:1

5am

Copp

er-b

ased

, on-

chip

pur

ific

atio

n of

tet

racy

clin

es»

Dr.

Lor

enzo

Lun

elli1 , D

r. M

artin

a G

erm

anis

1 , Dr.

Lia

Van

zett

i1 , Dr.

Cris

tina

Potr

ich1 , D

r. C

ecili

a Pe

derz

olli1 (1

. FBK

)

11:3

0am

Sym

met

ric

and

Asy

mm

etri

c Cl

addi

ng A

rchi

tect

ures

of H

igh

Q-

Fact

or 1

D P

hoto

nic

Crys

tal C

avit

ies

on S

ilico

n N

itri

de P

latf

orm

for

Sens

ing

App

licat

ions

in b

oth

Gas

eous

and

Liq

uid

Solu

tion

s»

Dr.

Sim

one

Iada

nza1 , M

r. A

less

io T

edes

co2 , M

r. G

iuse

ppe

Gia

nnin

o3 ,D

r. M

arco

Gra

nde3 , D

r. L

iam

O'F

aola

in1 (1

. Mun

ster

Tec

nolo

gica

lU

nive

rsity

- Ty

ndal

l Nat

iona

l Ins

titut

e, 2

. Pol

itecn

ico

di B

ari,

3.Po

litec

nico

)

11:4

5am

Fron

tier

s in

Nan

opho

toni

cs:

Enab

ling

Tech

nolo

gy fo

r N

ext-

Gen

erat

ion

Bios

enso

rs»

Prof

. Hat

ice

Altu

g1 (1. L

abor

ator

y of

Bio

nano

phot

onic

Sys

tem

s, E

cole

Poly

tech

niqu

e Fe

dera

le d

e La

usan

ne, L

ausa

nne,

101

5, S

witz

erla

nd)

Pow

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by

Ex

Ord

o, e

very

thin

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u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

52

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

12:1

5pm

Chit

osan

film

: a b

iode

grad

able

and

tra

nspa

rent

pie

zoel

ectr

icin

nova

tive

mat

eria

l for

the

dev

elop

men

t of

flex

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and

bioc

ompa

tibl

e th

in d

evic

es fo

r bi

omed

ical

app

licat

ions

»M

s. G

aia

de M

arzo

1 , Ms.

Fed

eric

a Ve

rgar

i2 , Dr.

Vin

cenz

o M

astr

onar

di2 ,

Dr.

Luc

iana

Alg

ieri

2 , Dr.

Lar

a N

atta

2 , Dr.

Fra

nces

co R

izzi

2 , Dr.

Fer

rucc

ioPi

sane

llo3 , P

rof.

Mas

sim

o D

e Vi

ttor

io2 (1

. I, 2

. Ist

ituto

Ital

iano

di

Tecn

olog

ia, 3

. Uni

vers

ità d

el S

alen

to)

12:3

0pm

Det

erm

inis

tic

nano

pore

mem

bran

e en

caps

ulat

ed in

an

iner

tm

icro

flui

dic

syst

em fo

r ce

ll cu

ltiv

atio

n ex

peri

men

ts»

Mr.

Bo

Tang

1 , Ms.

Han

Fan

2 , Mr.

Bus

che

Jan1 , P

rof.

Pu C

hen2 , P

rof.

Andr

eas

Die

tzel

1 (1. I

nstit

ute

for

Mic

rote

chno

logy

at T

U B

raun

schw

eig,

2.D

epar

tmen

t of B

iom

edic

al E

ngin

eeri

ng, W

uhan

Uni

vers

ity S

choo

l of

B asi

c M

edic

al S

cien

ces)

12:4

5pm

Lunc

h Br

eak

2pm

A4

-Se

ssio

n A

4: N

anos

truc

ture

s an

d ap

plic

atio

nsAu

dito

rium

Chai

red

by: D

r. M

onic

a Bo

llani

and

Pro

f. M

anfr

ed K

ohl

2pm

Elec

tros

pun

Poly

acry

loni

trile

-pol

ydim

ethy

lsilo

xane

com

posi

tena

nofi

bers

for

enha

ncin

g m

iRN

As

capt

ure

»D

r. G

iulia

Mas

sagl

ia1 , D

r. C

rist

ina

Potr

ich2 , D

r. L

oren

zo L

unel

li2 , Dr.

Lia

Vanz

etti2 , D

r. C

ecili

a Pe

derz

olli2 , P

rof.

Fabr

izio

Pir

ri3 , D

r. M

arzi

aQ

uagl

io4 (1

. Pol

itecn

ico

di T

orin

o; C

ente

r fo

r su

stai

nabl

e fu

ture

tech

nolo

gies

(IIT

, CSF

T@To

rino

), 2.

FBK

, 3. P

olite

cnic

o di

Tor

ino,

Cen

ter

for

sust

aina

ble

futu

re T

echn

olog

ies

(IIT,

CFS

T@Po

lito)

, 4. P

olite

cnic

o di

Tori

no)

2:15

pmG

raph

ene

func

tion

aliz

atio

n as

a s

eed

for

diel

ectr

ic g

row

th o

nm

onol

ayer

WS2

»M

r. P

iete

r-Ja

n W

ynda

ele1 , D

r. Je

an-F

ranc

ois

de M

arne

ffe2 , D

r. D

aire

Cott

2 , Ms.

Ste

fani

e Se

rgea

nt2 , D

r. A

rant

xa M

aest

re C

aro3 , P

rof.

Stef

anD

e G

endt

1 (1. K

U L

euve

n, 2

. im

ec, 3

. Gra

phen

ea)

2:30

pmCo

-dep

osit

ion

of B

and

P o

n Si

(001

):H fo

r U

ltra

prec

ise

Bipo

lar

devi

ces

»D

r. Ja

mes

Ow

en1 , M

r. R

obin

San

tini2 , D

r. E

hud

Fuch

s2 , Dr.

John

Rand

all2 , M

r. H

amed

Ale

man

sour

3 , Pro

f. S.

O. R

eza

Moh

eim

ani4 (1

.In

dust

ry, 2

. Zyv

ex L

abs,

3. U

T D

allla

s, 4

. UT

Dal

las)

2:45

pmM

athe

mat

ical

and

com

puta

tion

al m

etro

logy

of m

ulti

scal

e an

dhi

erar

chic

al s

urfa

ces

»M

r. G

eorg

e Pa

pavi

eros

1 , Ms.

The

odor

a Ky

ttar

i2 , Dr.

Vas

silio

sCo

nsta

ntou

dis1 , D

r. E

vang

elos

Gog

olid

es3 (1

. Ins

titut

e of

Nan

osci

ence

and

Nan

otec

hnol

ogy,

NCS

R D

emok

rito

s, 2

. Ins

titut

e of

Nan

osci

ence

and

Nan

otec

hnol

ogy

NCS

R D

emok

rito

s, 3

. NCS

R D

emok

rito

s)

3pm

π-π

Inte

ract

ions

Med

iate

d Py

rene

bas

ed L

igan

d En

hanc

edPh

otor

espo

nse

in H

ybri

d G

raph

ene/

PbS

Qua

ntum

Dot

sPh

otod

etec

tors

»D

r. C

hiar

a In

gros

so1 , D

r. A

hn S

eung

bae2 , D

r. A

nna

Pann

iello

1 , Dr.

Mar

inel

la S

tric

coli1 , D

r. G

iuse

ppe

Vale

rio

Bian

co3 , P

rof.

Ange

laAg

ostia

no4 , P

rof.

Mar

ia L

ucia

Cur

ri4 , P

rof.

Osc

ar V

azqu

ez M

ena2 (1

.CN

R-IP

CF S

.S. B

ari,

2. N

anoE

ngin

eeri

ng D

epar

tmen

t Uni

vers

ity o

fCa

lifor

nia,

San

Die

go, 3

. CN

R-N

ANO

TEC

S.S.

Bar

i, 4.

Dip

. di C

him

ica,

Uni

vers

ità d

i Bar

i,)

3:15

pmG

as p

hase

Mac

Etch

: unp

aral

lele

d hi

gh a

spec

t ra

tio

(10’

000:

1)si

licon

nan

ostr

uctu

res

»D

r. L

ucia

Rom

ano1 , M

r. Z

hitia

n Sh

i2 , Dr.

Kon

stan

tins

Jefim

ovs2 , D

r.Jo

an V

ila-C

omam

ala2 , P

rof.

Mar

co S

tam

pano

ni1 (1

. ETH

Zur

ich

and

Paul

Sche

rrer

Inst

itute

, 2. P

aul S

cher

rer

Inst

itute

)

2pm

B4 -

Sess

ion

B4: T

echn

olog

ies

for

mic

ro a

nd n

ano

phot

onic

s I

Sala

500

Chai

red

by: P

rof.

Liam

O'F

aola

in a

nd P

rof.

Serg

io F

erre

ro

2pm

Enha

ncin

g th

e se

cond

har

mon

ic g

ener

atio

n fr

om n

onlin

ear

crys

tals

by

plas

mon

ic n

anos

truc

ture

s»

Dr.

Em

re G

ürda

l1 , Dr.

Ank

e H

orne

ber1 , P

rof.

Alfr

ed J.

Mei

xner

1 , Pro

f.D

iete

r P.

Ker

n1 , Dr.

Dai

Zha

ng1 , P

rof.

Mon

ika

Flei

sche

r1 (1. U

nive

rsity

of

Tübi

ngen

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

53

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

2:15

pmLS

PR s

ensi

ng o

f pes

tici

des

usin

g 2D

pla

smon

ic n

anos

truc

ture

s»

Dr.

Mas

sim

o Ri

ppa1 , D

r. A

mbr

a Ve

stri

1 , Dr.

Val

entin

a M

arch

esan

o1 ,D

r. R

ados

law

Kol

kow

ski2 , P

rof.

Jose

ph Z

yss3 , P

rof.

Jun

Zhou

4 , Dr.

Dom

enic

o Sa

gnel

li1 , Dr.

Luc

ia P

etti1 (1

. Ins

titut

e of

App

lied

Scie

nces

and

Inte

llige

nt S

yste

ms

“E. C

aian

iello

” of C

NR,

Poz

zuol

i (N

a), 8

0078

,Ita

ly, 2

. Cen

ter

for

Nan

opho

toni

cs, A

MO

LF, A

mst

erda

m, N

ethe

rlan

ds,

3.In

stitu

t d’A

lem

bert

, Uni

vers

ité P

aris

Sac

lay,

Gif

sur

Yvet

te, F

ranc

e, 4

.I n

stitu

te o

f Pho

toni

cs, F

acul

ty o

f Sci

ence

, Nin

gbo

Uni

vers

ity, N

ingb

o,Ch

ina)

2:30

pmN

ano-

engi

neer

ing

unlo

cks

the

pote

ntia

l of S

iC fo

r ph

oton

ics

»Pr

of. H

aiya

n O

u1 (1. D

TU F

oton

ik, T

echn

ical

Uni

vers

ity o

f Den

mar

k)

3pm

Thre

e-di

men

sion

al b

ilaye

r ca

ntile

ver

wav

egui

des

enab

ling

broa

dban

d ch

ip-t

o-fi

ber

coup

ling

»M

s. C

eles

te Q

votr

up1 , M

r. Z

he L

iu1 , M

s. C

amill

e Pa

pon1 , P

rof.

Leon

ardo

Mid

olo1 , M

x. A

ndre

as W

ieck

2 , Dr.

Arn

e Lu

dwic

k2 , Pro

f. Pe

ter

Lohd

ahl1 (1

. Nie

ls B

ohr

Inst

itute

, Cop

enha

gen

Uni

vers

ity, D

enm

ark,

2.

Lehr

stuh

l fur

Ang

ewan

dte

Fest

korp

erph

ysik

, Ruh

r-U

nive

rsita

t Boc

hum

,U

nive

rsita

tsst

rass

e, B

ochu

m, G

erm

any)

3:15

pmA

nder

son

loca

lizat

ion

of li

ght

in s

lott

ed p

hoto

nic

crys

tal

wav

egui

des

»D

r. G

uille

rmo

Arre

gui B

ravo

1 , Dr.

Rya

n Ce

cil N

g2 , Mr.

Mar

cus

Albr

echt

sen1 , P

rof.

Cliv

ia M

arfa

Sot

omay

or T

orre

s2 , Pro

f. Sø

ren

Stob

be1 , D

r. P

edro

Dav

id G

arcí

a Fe

rnán

dez2 (1

. DTU

Fot

onik

, Tec

hnic

alU

nive

rsity

of D

enm

ark,

2. C

atal

an In

stitu

te o

f Nan

osci

ence

and

Nan

otec

hnol

ogy

(ICN

2))

2pm

C4 -

Sess

ion

C4: I

nter

acti

ons

wit

h bi

osys

tem

sSa

la L

ondr

aCh

aire

d by

: Pro

f. An

drea

Lam

bert

i and

Dr.

Mar

co L

azza

rino

2pm

Bioc

ompa

tibl

e pr

essu

re s

ensi

ng d

iaph

ragm

s fo

r lo

ng-t

erm

med

ical

impl

ants

»M

s. A

nn-K

athr

in K

lein

1 , Dr.

Cla

us B

urkh

ardt

2 , Dr.

Bor

is S

tam

m3 , D

r.Al

exan

der

Kaya

3 , Pro

f. An

drea

s D

ietz

el1 (1

. Ins

titut

e fo

rM

icro

tech

nolo

gy, T

echn

isch

e U

nive

rsitä

t Bra

unsc

hwei

g, 2

. NM

I Nat

ural

and

Med

ical

Sci

ence

s In

stitu

te a

t the

Uni

vers

ity o

f Tüb

inge

n, 3

.N

anoS

cale

Sys

tem

s, N

anos

s G

mbH

)

2:15

pmM

echa

nica

l Sta

bilit

y an

d Sk

in P

enet

rati

on o

f In-

Plan

e Si

licon

Mic

rone

edle

s»

Ms.

Ste

phan

ie In

gem

ann

Bisg

aard

1 , Dr.

Lon

g Q

uang

Ngu

yen1 , D

r.Ka

trin

e Li

ndho

lm B

øgh2 , P

rof.

Step

han

Sylv

est K

elle

r1 (1. D

TU N

anol

ab -

Nat

iona

l Cen

tre

for

Nan

o Fa

bric

atio

n an

d Ch

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

f Den

mar

k, 2

. DTU

Foo

d - T

he N

atio

nal F

ood

Inst

itute

Tech

nica

l Uni

vers

ity o

f Den

mar

k)

2:30

pmH

ybri

d 2-

phot

on li

thog

raph

y fo

r w

afer

-sca

le n

anof

luid

ic c

hip

fabr

icat

ion

»M

r. O

liver

Van

derp

oort

en1 , M

r. Q

uent

in P

eter

2 , Dr.

Pav

an C

halla

2 , Mr.

Ali N

awaz

Bab

ar2 , P

rof.

Balp

reet

Ahl

uwal

ia1 , P

rof.

Ulr

ich

Keys

er2 , P

rof.

Jere

my

Baum

berg

2 , Pro

f. Cl

emen

s Ka

min

ski2 , P

rof.

Tuom

as K

now

les2

(1. T

he a

rctic

Uni

vers

ity o

f Tro

msø

, UiT

, 2. U

nive

rsity

of C

ambr

idge

)

2:45

pmSe

quen

tial

cyc

lic c

ompr

essi

on p

rofi

les

appl

ied

on c

ance

r ce

lls in

afl

exib

le m

icro

devi

ce»

Ms.

Sev

gi O

nal1 , P

rof.

Maa

n M

. Alk

aisi

1 , Dr.

Vol

ker

Noc

k1 (1. U

nive

rsity

of C

ante

rbur

y)

3pm

Aco

usti

c is

olat

ion

of e

xtra

cellu

lar

vesi

cles

- Fr

om u

L/m

in t

om

L/m

in»

Dr.

Ale

x Br

oman

1 , Dr.

And

reas

Len

shof

1 , Dr.

Mik

ael E

vand

er2 , D

r.Lo

tta

Hap

pone

n1 , Dr.

Ans

on K

u1 , Dr.

Joha

n m

alm

stro

m1 , P

rof.

Thom

asLa

urel

l1 (1. L

und

Uni

vers

ity, 2

21 0

0, L

und,

Sw

eden

, 2. A

couS

ort A

B, 2

2381

Lun

d, S

wed

en)

3:30

pmPo

ster

Ses

sion

- Ev

en n

umbe

rs -

Adv

ance

d Pa

tter

ning

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

54

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PA2-

Inco

rpor

atio

n of

X-r

ay C

ontr

ast

Age

nt in

to M

icro

cont

aine

rsU

sed

for

Ora

l Dru

g D

eliv

ery

»M

r. R

olf B

ech

Kjel

dsen

1 , Dr.

Las

se H

øjlu

nd E

klun

d Th

amdr

up1 , D

r.M

ahdi

Gha

vam

i1 , Dr.

Lin

e H

agne

r N

iels

en1 , D

r. K

inga

Zór

1 , Pro

f. An

jaBo

isen

1 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k)

PA4-

Dev

elop

men

t of

STI

etc

hing

pro

cess

to

redu

ce t

he c

arbo

nfo

otpr

int

»D

r. A

niel

lo G

audi

no1 , D

r. L

uigi

Cal

abre

se2 (1

. STM

icro

elec

tron

ics,

2.

Polit

ecni

co d

i Tor

ino)

PA6-

Adv

ance

d N

anol

itho

grap

hy fo

r Lo

w-n

oise

Jose

phso

nPa

ram

etri

c A

mpl

ifie

rs»

Ms.

Dar

ia E

zenk

ova1 , M

s. A

nast

asiy

a Pi

shch

imov

a1 , Mr.

Dm

itriy

Mos

kale

v1 , Mr.

Nik

ita S

mir

nov1 , M

r. A

nton

Ivan

ov1 , M

s. T

atia

naKo

nsta

ntin

ova2 , D

r. Il

ya R

odio

nov1 (1

. FM

N L

abor

ator

y, B

aum

anM

osco

w S

tate

Tec

hnic

al U

nive

rsity

and

Duk

hov

Auto

mat

ics

Rese

arch

Inst

itute

(VN

IIA),

2. F

MN

Lab

orat

ory,

Bau

man

Mos

cow

Sta

te T

echn

ical

Uni

vers

ity)

PA8-

PREC

ISE

CAPI

LLA

RY-A

SSIS

TED

NA

NO

PART

ICLE

ASS

EMBL

Y IN

REU

SABL

E TE

MPL

ATES

»M

r. H

enry

S.C

. Yu1 , D

r. A

na C

onde

-Rub

io1 , D

r. G

iova

nni B

oero

1 , Pro

f.Jü

rgen

Bru

gger

1 (1. E

cole

Pol

ytec

hniq

ue F

édér

ale

de L

ausa

nne

(EPF

L))

PA10

-Fab

rica

tion

of f

lexi

ble

two-

stag

e th

roug

h-ho

le e

lect

rode

sus

ing

the

tran

sfer

met

hod

»M

r. F

urut

a At

suhi

ro1 , P

rof.

Jun

Tani

guch

i1 (1. T

okyo

Uni

vers

ity o

fSc

ienc

e)

PA12

-Tw

o-st

ep li

thog

raph

y pr

oces

s vi

a U

V-N

anoi

mpr

int

Lith

ogra

phy

and

Elec

tron

bea

m li

thog

raph

y fo

r O

ptic

al d

evic

es»

Ms.

Saa

ya S

ennz

aki1 , D

r. T

akao

Oka

be1 , P

rof.

Jun

Tani

guch

i2 (1.

Dep

artm

ent o

f App

lied

Elec

tron

ics,

Fac

ulty

of A

dvan

ced

Engi

neer

ing,

Toky

o U

nive

rsity

of S

cien

ce, 2

. Tok

yo U

nive

rsity

of S

cien

ce)

PA14

-Fab

rica

tion

of v

erti

cal m

icro

- and

nan

o-pi

llar

arra

ys u

sing

plas

ma

etch

ing

for

bios

enso

r an

d op

tica

l app

licat

ions

»M

s. Jo

ana

Mar

ques

Cer

deira

1 , Dr.

Zho

ng R

en1 (1

. Oxf

ord

Inst

rum

ents

Plas

ma

Tech

nolo

gy)

PA16

-Mic

rofl

uidi

c ch

ip fo

r ef

fici

ent

bact

eria

cap

ture

and

enri

chm

ent

»M

s. D

anya

ng L

i1 , Mr.

Li C

hen2 , M

s. W

enw

en Ji

a3 (1.

1309

3770

060@

163.

com

, 2. C

L200

9@cq

u.ed

u.cn

, 3.

jww

_199

7@16

3.co

m)

PA18

-Mic

rofl

uidi

c Sy

stem

of S

UEX

Dry

Film

Pho

tore

sist

for

Elec

tric

al Im

peda

nce

Spec

tros

copy

»M

r. Y

uan

Cao1 , D

r. Ju

lia F

loeh

r2 , Pro

f. U

we

Schn

aken

berg

1 (1. I

nstit

ute

of M

ater

ials

in E

lect

rica

l Eng

inee

ring

, RW

TH A

ache

n U

nive

rsity

, Aac

hen,

5207

4, G

erm

any,

2. H

elm

holtz

-Inst

itute

for

Biom

edic

al E

ngin

eeri

ng,

RWTH

Aac

hen

Uni

vers

ity H

ospi

tal,

Aach

en, 5

2074

, Ger

man

y)

PA20

-Fab

rica

tion

of r

ose-

peta

l-eff

ect

surf

ace

usin

g m

oth-

eye

stru

ctur

e an

d ro

ll-pr

ess

proc

ess

»M

r. K

azuk

i Fuj

iwar

a1 , Mr.

Hiro

yuki

Sug

awar

a2 , Pro

f. Ju

n Ta

nigu

chi1 (1

.To

kyo

Uni

vers

ity o

f Sci

ence

, 2. G

EOM

ATEC

Co.

, Ltd

.)

PA22

-80

K Cr

yoge

nic

stag

e de

velo

pmen

t fo

r ic

e lit

hogr

aphy

»D

r. R

ubai

yet H

aque

1 , Mr.

Aff

an W

aafi1 , D

r. A

npan

Han

1 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k)

PA24

-Ice

litho

grap

hy u

sing

W(C

O)6

ice

»D

r. R

ubai

yet H

aque

1 , Mr.

Aff

an W

aafi1 , D

r. A

npan

Han

1 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k)

PA26

-Eff

icie

nt a

nd c

ost-

effe

ctiv

e cr

yo-s

tage

for

ice

litho

grap

hy»

Mr.

Yas

ir G

hias

i1 , Mr.

Aff

an W

aafi1 , D

r. R

ubai

yet H

aque

1 , Dr.

Anp

anH

an1 (1

. Tec

hnic

al U

nive

rsity

of D

enm

ark)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

55

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PA28

-Red

ucin

g da

mag

e of

pho

tore

sist

in o

ptic

al c

onta

ctph

otol

itho

grap

hy b

y us

ing

Tefl

on c

oate

d ph

otom

asks

»M

r. H

enk-

Will

em V

eltk

amp1 , M

r. M

eint

de

Boer

1 , Mrs

. Yiy

uan

Zhao

1 ,D

r. R

emco

Wie

geri

nk1 , M

r. H

uib

van

Voss

en1 , M

r. P

eter

Lin

ders

1 , Mr.

Ger

ard

Roel

ofs1 , P

rof.

Joos

t Löt

ters

2 (1. M

ESA+

Inst

itute

for

Nan

otec

hnol

ogy

/ Uni

vers

ity o

f Tw

ente

, 2. M

ESA+

Inst

itute

for

Nan

otec

hnol

ogy

/ Uni

vers

ity o

f Tw

ente

/ Br

onkh

orst

Hig

h-Te

ch B

V)

PA30

-Mea

sure

men

ts o

f att

ract

ing

surf

ace

forc

es in

nano

elec

trom

echa

nica

l sys

tem

s»

Mr.

Tho

r W

eis1 , M

r. M

arcu

s Al

brec

htse

n1 , Mr.

Kon

stan

tinos

Tsou

kala

s1 , Mr.

Ali

Naw

az B

abar

1 , Pro

f. Sø

ren

Stob

be1 (1

. DTU

Fot

onik

,Te

chni

cal U

nive

rsity

of D

enm

ark)

PA32

-Opt

imiz

atio

n pr

oces

s fo

r th

e fa

bric

atio

n of

ult

ra-lo

w lo

ssPE

CVD

sili

con

nitr

ide-

on-in

sula

tor

wav

egui

des

»D

r. Y

anni

ck B

leu1 , D

r. C

amill

e Pe

tit-E

tienn

e1 , Dr.

Lau

rène

You

ssef

1 , Dr.

Jona

than

FAU

GIE

R-TO

VAR2 , D

r. Q

uent

in W

ILM

ART2 , D

r. E

rwin

e Pa

rgon

1

(1. U

niv.

Gre

nobl

e Al

pes,

CN

RS, C

EA/L

ETI-M

inat

ec, G

reno

ble

INP,

LTM

,F-

3805

4 G

reno

ble,

Fra

nce,

2. U

niv.

Gre

nobl

e Al

pes,

CEA

, LET

I, F-

3800

0G

reno

ble,

Fra

nce)

PA34

-Sel

ecti

ve d

irec

t la

ser

wri

ting

of i

nter

digi

tate

d py

roly

tic

carb

on m

icro

elec

trod

es»

Mr.

Em

il Lu

dvig

sen1 , P

rof.

Jenn

y Em

néus

2 , Dr.

Dirc

h Pe

ters

en3 , P

rof.

Step

han

Sylv

est K

elle

r1 (1. D

TU N

anol

ab -

Nat

iona

l Cen

tre

for

Nan

oFa

bric

atio

n an

d Ch

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

f Den

mar

k, 2

.D

TU B

ioen

gine

erin

g, D

epar

tmen

t of B

iote

chno

logy

and

Bio

med

icin

e,Te

chni

cal U

nive

rsity

of D

enm

ark,

3. D

TU E

nerg

y, D

epar

tmen

t of E

nerg

yCo

nver

sion

and

Sto

rage

, Tec

hnic

al U

nive

rsity

of D

enm

ark)

PA36

-Mon

te C

arlo

sim

ulat

ion

of t

he r

esis

t m

asks

for

scal

able

supe

rcon

duct

ing

qubi

ts»

Ms.

Ana

stas

iya

Pish

chim

ova1 , M

s. D

aria

Eze

nkov

a1 , Ms.

Tat

iana

Kons

tant

inov

a2 , Ms.

Eliz

avet

a M

alev

anna

ya1 , M

r. A

lexe

i Mat

anin

1 , Mr.

Euge

ne Z

ikii1 , D

r. Il

ya R

odio

nov1 (1

. FM

N L

abor

ator

y, B

aum

an M

osco

wSt

ate

Tech

nica

l Uni

vers

ity a

nd D

ukho

v Au

tom

atic

s Re

sear

ch In

stitu

te(V

NIIA

), 2.

FM

N L

abor

ator

y, B

aum

an M

osco

w S

tate

Tec

hnic

alU

nive

rsity

)

PA38

-EO

S 72

– C

hem

ical

ly a

mpl

ifie

d re

sist

wit

h ou

tsta

ndin

g al

kali

stab

ility

»D

r. M

andy

Gru

be1 , D

r. B

enja

min

Sch

ille1 , M

r. M

atth

ias

Schi

rmer

1 , Dr.

Bodo

Fuh

rman

n2 , Pro

f. G

eorg

Sch

mid

t2 , Dr.

Judi

th H

ohm

ann3 (1

.Al

lresi

st G

mbH

, 2. M

LU H

alle

, 3. I

nstit

ute

of M

icro

stru

ctur

e Te

chno

logy

(IMT)

, Kar

lsru

he In

stitu

te o

f Tec

hnol

ogy

(KIT

))

PA40

-Opt

ical

pro

pert

ies

of a

sym

met

ric

bow

tie

nano

ante

nnas

»M

r. h

ao h

u1 (1. +

33 7

8316

0413

)

PA42

-Dir

ect

patt

erni

ng o

f met

hyla

mm

oniu

m le

ad b

rom

ide

pero

vski

tes

by t

herm

al im

prin

t»

Dr.

And

re M

ayer

1 , Mr.

Tob

ias

Hae

ger1 , M

r. M

anue

l Run

kel1 , M

r.Jo

hann

es S

taab

s1 , Mr.

Joha

nnes

Ron

d1 , Pro

f. Pa

tric

k G

oerr

n1 , Pro

f.Th

omas

Rie

dl1 , P

rof.

Hel

la-C

hris

tin S

chee

r1 (1. U

nive

rsity

of W

uppe

rtal

)

PA44

-Nan

opar

ticl

es-a

ssis

ted

Bosc

h pr

oces

s to

fabr

icat

e si

licon

nano

wir

es w

ith

stro

ng s

uper

hydr

opho

bici

ty a

nd s

uper

ior

abso

rpta

nce

»M

r. Z

engx

ing

Zhan

g1 , Pro

f. Ka

iyin

g W

ang1 (1

. Uni

vers

ity o

f Sou

th-

East

ern

Nor

way

)

PA46

-Nan

ofab

rica

tion

of r

ando

mly

dis

trib

uted

tra

nsm

issi

on h

ole

arra

y fo

r di

ffra

ctio

n im

agin

g in

sof

t X-

ray

»M

r. X

ujie

Ton

g1 , Mr.

Che

ngya

ng M

u2 , Ms.

Yiji

e Li

2 , Pro

f. Yi

fang

Che

n2

(1. S

choo

l of I

nfor

mat

ion

Scie

nce

and

Tech

nolo

gy, F

udan

Uni

vers

ity, 2

.Fu

dan

Uni

vers

ity)

PA48

-Fab

rica

tion

of S

peci

men

s fo

r Te

nsile

Tes

ting

at

the

Mic

ro-

and

Nan

oSca

le»

Dr.

Jaro

slav

Luk

es1 , D

r. E

ric

Hin

tsal

a2 , Dr.

Ude

Han

gen3 (1

. Bru

ker

BNSM

, 2. B

ruke

r N

IBU

, 3. B

ruke

r N

ano

Gm

bH)

PA50

-SiO

2 sp

utte

ring

by

low

ene

rgy

ions

»D

r. D

mitr

y Lo

paev

1 (1. S

kobe

ltsyn

Inst

itute

of N

ucle

ar P

hysi

cs,

Mos

cow

Sta

te U

nive

rsity

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

56

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PA52

-Bea

m s

hapi

ng w

ith

3D-p

rint

ed d

iffr

acti

ve o

ptic

al e

lem

ents

»D

r. E

inst

om E

ngay

1 , Ms.

Nur

ia d

el C

astil

lo In

iest

a1 , Mr.

Ale

xand

reW

etze

l1 , Pro

f. Ra

fael

Tab

orys

ki2 , D

r. A

da-Io

ana

Bune

a1 (1. D

TU N

anol

ab-N

atio

nal C

entr

e fo

r N

ano

Fabr

icat

ion

and

Char

acte

riza

tion

Tec

hnic

alU

nive

rsity

of D

enm

ark,

2. D

TU N

anol

ab)

PA54

-X-r

ay-in

duce

d ph

oto-

proc

ess

for

func

tion

alna

no/m

icro

stru

ctur

es a

nd m

ater

ials

in N

i aqu

eous

liqu

idso

luti

ons

»D

r. A

kino

bu Y

amag

uchi

1 , Mr.

Shu

nya

Saeg

usa1 , D

r. Ik

uya

Saku

rai2 ,

Prof

. Iku

o O

kada

2 , Dr.

Mar

i Ish

ihar

a3 , Pro

f. Yu

ichi

Uts

umi1 (1

. Uni

vers

ityof

Hyo

go, 2

. Nag

oya

Uni

vers

ity, 3

. Hyo

go P

refe

ctur

al In

stitu

te o

fTe

chno

logy

)

PA56

-Fab

rica

tion

of I

nter

digi

tate

d Ph

otor

esis

t-D

eriv

ed P

yrol

ytic

Carb

on M

icro

elec

trod

es u

sing

Mas

kles

s Li

thog

raph

y»

Mr.

Nic

olai

Stø

vrin

g1 , Pro

f. Je

nny

Emné

us2 , D

r. A

rto

Hei

skan

en1 , P

rof.

Step

han

Sylv

est K

elle

r3 (1. T

echn

ical

Uni

vers

ity o

f Den

mar

k, 2

. DTU

Bioe

ngin

eeri

ng, D

epar

tmen

t of B

iote

chno

logy

and

Bio

med

icin

e,Te

chni

cal U

nive

rsity

of D

enm

ark,

3. D

TU N

anol

ab, T

echn

ical

Uni

vers

ityof

Den

mar

k)

PA58

-Ult

ra-h

igh

aspe

ct r

atio

X-r

ay g

rati

ngs

by c

onfo

rmal

pul

sed

Au

elec

trop

lati

ng»

Dr.

Kon

stan

tins

Jefim

ovs1 , M

r. Z

hitia

n Sh

i1 , Dr.

Luc

ia R

oman

o1 , Pro

f.M

arco

Sta

mpa

noni

2 (1. P

aul S

cher

rer

Inst

itute

, 2. E

TH Z

uric

h)

PA60

-Rep

licat

ion

of b

iom

imet

ic, m

ulti

leve

l und

ercu

tna

nost

ruct

ures

usi

ng U

V-ba

sed

Nan

oim

prin

ting

»D

r. M

icha

el M

ühlb

erge

r1 , Mr.

Ste

phan

Rut

tloff

2 , Dr.

Die

ter

Nee

s2 , Mr.

Amiy

a M

ohar

ana2 , D

r. M

aria

Bel

egra

tis2 , M

r. P

hilip

p Ta

us3 , P

rof.

Hei

nzW

anze

nboe

ck3 , M

s. S

onja

Kop

p1 , Mr.

Pat

rick

Sch

ulle

r3 , Mr.

Ant

onTs

enov

3 , Mr.

Mar

kus

Schi

nner

l3 , Dr.

Mos

tafa

Sha

wra

v4 , Dr.

Mic

hael

Has

linge

r1 , Dr.

Adr

ian

Prin

z5 , Dr.

Dan

iel F

echt

ig1 (1

. Pro

fact

or G

mbH

, 2.

JOAN

NEU

M R

ESEA

RCH

For

schu

ngsg

esel

lsch

aft m

bH, 3

. TU

Wie

n, 4

.am

s AG

, 5. S

trat

ec C

onsu

mab

les

Gm

bH)

PA62

-Atl

as 4

6 –

nove

l neg

ativ

e to

ne p

hoto

resi

st s

imila

r to

SU

-8w

ith

a te

mpe

ratu

re s

ensi

tive

rem

oval

opt

ion

»D

r. B

enja

min

Sch

ille1 , D

r. A

rmag

han

Fakh

four

i2 , Mr.

Mat

thia

sSc

hirm

er1 , D

r. M

aik

Ger

ngro

ß1 , Dr.

Man

dy G

rube

1 , Dr.

And

reas

Win

kler

2 (1. A

llres

ist G

mbH

, 2. L

eibn

iz In

stitu

te fo

r So

lid S

tate

and

Mat

eria

l Res

earc

h (IF

W))

PA64

-Fle

xibl

e G

raph

ene

– ba

sed

inkj

et –

pri

nted

hea

ters

»M

r. D

imitr

is B

arm

pako

s1 , Pro

f. Va

ssili

ki B

eles

si2 , M

r. R

ayne

rSc

helw

ald3 , P

rof.

Gri

gori

s Ka

ltsas

1 (1. m

icro

SEN

SES

Labo

rato

ry,

Dep

artm

ent o

f Ele

ctri

cal a

nd E

lect

roni

cs E

ngin

eeri

ng, U

nive

rsity

of

Wes

t Att

ica,

2. D

epar

tmen

t of G

raph

ic D

esig

n an

d Vi

sual

Com

mun

icat

ion,

Gra

phic

Art

s Te

chno

logy

Stu

dy D

irect

ion,

Uni

vers

ity o

fW

est A

ttic

a, 3

. Film

etri

cs, A

KLA

Com

pany

)

PA66

-Ter

aher

tz P

olar

izat

ion

Mod

ulat

ion

wit

h 3D

hel

ixm

etam

ater

ial

»M

r. Y

ongg

ang

Piao

1 , Dr.

Zho

ngya

ng B

ai2 , M

r. H

aow

ei S

un2 , P

rof.

Youg

uang

Zha

ng2 , P

rof.

Tian

xie

Nie

1 , Pro

f. Xi

aoju

n W

u2 , Pro

f. Li

angg

ong

Wen

1 (1. S

choo

l of I

nteg

rate

d Ci

rcui

t Sci

ence

and

Eng

inee

ring

, Bei

hang

Uni

vers

ity, 2

. Sch

ool o

f Ele

ctri

cal I

nfor

mat

ion

Engi

neer

ing,

Bei

hang

Uni

vers

ity)

PA68

-Ang

ioge

nesi

s bi

omar

kers

det

ecti

on o

n a

poly

mer

ic 3

Dpr

inte

d de

vice

»D

r. G

ianl

uca

Palm

ara1 , D

r. A

less

andr

o Ch

iadò

2 , Dr.

Ann

alis

aCh

iapp

one1 , P

rof.

Fabr

izio

Pir

ri1 , D

r. Ig

nazi

o Ro

ppol

o1 , Dr.

Fra

nces

caFr

asce

lla1 (1

. Pol

itecn

ico

di T

orin

o, 2

. App

lied

Scie

nce

and

Tech

nolo

gyD

epar

tmen

t, Po

litec

nico

di T

orin

o, T

orin

o, 1

0129

, Ita

ly)

PA70

-Sta

bilit

y Co

nsid

erat

ions

for

Isol

ated

and

Den

se H

igh

Asp

ect

Rati

o N

anop

illar

s Re

plic

ated

by

UV

Nan

oim

prin

t Li

thog

raph

y»

Mr.

Oliv

er M

aier

1 , Dr.

Mic

hael

Has

linge

r2 , Dr.

Mic

hael

Müh

lber

ger2 ,

Mr.

Mar

kus

Prib

yl3 , M

r. P

hilip

p Ta

us3 , P

rof.

Hei

nz W

anze

nboe

ck3 , D

r.El

ena

Gui

llen2 (1

. Pr,

2. P

rofa

ctor

Gm

bH, 3

. TU

Wie

n)

PA72

-Impa

cts

of d

iffe

rent

car

rier

waf

ers

duri

ng C

l2 In

duct

ivel

yCo

uple

d Pl

asm

a et

chin

g on

the

GaN

sur

face

and

the

Al2

O3/

GaN

inte

rfac

e»

Dr.

Thi

baut

Mey

er1 , D

r. S

arah

Bou

beni

a1 , Dr.

Bas

sem

Sal

em1 , D

r.Ca

mill

e Pe

tit-E

tienn

e1 , Dr.

Erw

ine

Parg

on1 (1

. Uni

vers

ite G

reno

ble

Alpe

s, C

NRS

, LTM

, F-3

8000

Gre

nobl

e, F

ranc

e)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

57

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PA74

-Foc

used

Ion

Beam

Mill

ing

of S

ilico

n by

LM

IS a

nd L

MA

ISso

urce

s: c

ompa

riso

n be

twee

n A

u+ a

nd G

a+ p

roce

sses

.»

Mr.

Dam

iano

Giu

bert

oni1 , D

r. S

hyam

al M

onda

l1 , Mr.

Ale

ssan

dro

Cian

1 , Mr.

Mar

io B

aroz

zi1 , M

r. E

lia S

catt

olo1 , M

r. R

ober

to C

ante

ri1 , D

r. L

iaEm

anue

la V

anze

tti1 , D

r. A

chim

Nad

zeyk

a2 , Dr.

Bjo

ern

Witt

man

n2 , Dr.

Tors

ten

Rich

ter2 , D

r. P

ierl

uigi

Bel

lutt

i3 (1. F

BK, B

runo

Kes

sler

Foun

datio

n, 2

. Rai

th g

mbh

, 3. F

onda

zion

e Br

uno

Kess

ler)

PA76

-Sim

ulat

ion

and

proc

ess

desi

gn o

f dir

ect-

wri

te la

ser

gray

scal

eex

posu

re o

n th

ick

phot

osen

siti

ve p

osit

ive

resi

sts

»M

s. G

erda

Eki

ndor

f1 , Mr.

Dom

iniq

ue C

ollé

1 , Dr.

Pet

er H

eyl1 , M

r.D

anie

l Ritt

er2 , M

r. T

hom

as M

iche

ls2 (1

. Hei

delb

erg

Inst

rum

ents

, 2.

Gen

ISYS

Gm

bH)

PA78

-Sup

erhy

drop

hobi

c na

nost

ruct

ured

met

allic

sur

face

s fo

ren

hanc

ed h

eat

tran

sfer

»M

r. P

anag

iotis

Sar

kiri

s1 , Dr.

Kos

mas

Elli

nas2 , D

r. E

vang

elos

Gog

olid

es3

(1. N

atio

nal t

echn

ical

Uni

vers

ity o

f Ath

ens,

Ath

ens,

157

80, G

reec

e, 2

.In

stitu

te o

f Nan

osci

ence

and

Nan

otec

hnol

ogy,

NCS

R D

emok

rito

s, 3

.N

CSR

Dem

okri

tos)

PA80

-Edg

e-co

ntac

t M

oS2

tran

sist

ors

mad

e by

the

rmal

sca

nnin

gpr

obe

litho

grap

hy»

Dr.

Ana

Con

de-R

ubio

1 , Dr.

Xia

Liu

1 , Dr.

Gio

vann

i Boe

ro1 , P

rof.

Jürg

enBr

ugge

r1 (1. E

cole

Pol

ytec

hniq

ue F

édér

ale

de L

ausa

nne

(EPF

L))

PA82

-Sha

llow

slo

pes

wit

hout

ste

ps, a

cha

lleng

e fo

r di

rect

wri

ting

litho

grap

hy»

Dr.

Hel

mut

Sch

ift1 , M

r. M

arvi

n D

unau

2 , Mr.

Jan

Erja

wet

z2 , Mr.

Dom

iniq

ue C

ollé

3 (1. P

aul S

cher

rer

Inst

itut,

2. P

aul S

cher

rer

Inst

itute

, 3.

Hei

delb

erg

Inst

rum

ents

)

PA84

-Sm

art

desi

gn s

yste

m fo

r th

erm

al n

anoi

mpr

int

proc

ess

usi

nghy

brid

dee

p le

arni

ng»

Prof

. Yos

hihi

ko H

irai1 (1

. Osa

ka P

ref.

Uni

v.)

PA86

-Sin

gle

Pixe

l Lin

e FI

B m

illin

g of

Pla

smon

ic n

anos

truc

ture

s in

ultr

a-th

in A

u fi

lm b

y liq

uid

met

al a

lloy

ion

sour

ce s

peci

es: S

i++;

Ge+

+; A

u+ a

nd A

u++.

»M

r. D

amia

no G

iube

rton

i1 , Mr.

Ale

ssan

dro

Cian

2 , Dr.

Ros

sana

Del

l'Ann

a2 , Dr.

Javi

er R

odrí

guez

-Álv

arez

3 , Mr.

Alb

ert G

uerr

ero4 , D

r.G

ianc

arlo

Pep

poni

2 , Dr.

Xav

ier

Borr

isé5 , P

rof.

Aran

txa

Frai

le R

odrí

guez

3 ,Pr

of. X

avie

r Ba

tlle3 , P

rof.

Amilc

ar L

abar

ta3 , P

rof.

Fran

cesc

Per

ez-

Mur

ano6 (1

. FBK

, 2. F

BK, B

runo

Kes

sler

Fou

ndat

ion,

3. D

epar

tam

ent d

eFí

sica

de

la M

atèr

ia C

onde

nsad

a, U

nive

rsita

t de

Barc

elon

a, 4

. Ins

titut

ode

Mic

roel

ectr

ónic

a de

Bar

celo

na (I

MB-

CNM

, CSI

C), 5

. Ins

titut

Cat

alà

deN

anoc

iènc

ia i

Nan

otec

nolo

gia,

Bel

late

rra

(Bar

celo

na),

6. In

stitu

te o

fM

icro

elec

tron

ics)

PA88

-Ext

endi

ng t

he fi

eld

of v

iew

of h

olog

raph

ic t

wo-

phot

onfa

bric

atio

n by

em

ploy

ing

a th

ree-

mir

ror

scan

hea

d»

Dr.

Mar

co P

isan

ello

1 , Dr.

Di Z

heng

1 , Dr.

Ant

onio

Bal

ena1 , D

r. F

ilipp

oPi

sano

1 , Pro

f. M

assi

mo

De

Vitt

orio

1 , Dr.

Fer

rucc

io P

isan

ello

1 (1. I

stitu

toIta

liano

di T

ecno

logi

a, C

ente

r fo

r Bi

omol

ecul

ar N

anot

echn

olog

ies)

PA90

-The

eff

ect

of s

tiff

ness

on

mec

hani

cal b

acte

rici

dal e

ffic

acy

ofU

V na

noim

prin

t lit

hogr

aphy

pat

tern

ed p

olym

eric

sur

face

s»

Ms.

Sop

hie

Lohm

ann1 , D

r. A

bina

sh T

ripa

thy1 , D

r. A

than

asio

s M

ilion

is1 ,

Ms.

Anj

a Ke

ller1 , P

rof.

Mar

tin L

oess

ner1 , P

rof.

Dim

os P

oulik

akos

1 (1.

ETH

Zur

ich)

PA92

-3D

pri

nted

mic

ro-b

iore

acto

rs fo

r th

e st

udy

of b

iofi

lms

inpo

rous

med

ia»

Mr.

Chr

isto

s Pa

pado

poul

os1 , D

r. L

aure

nt M

alaq

uin2 , D

r. Y

ohan

Dav

it1

(1. I

nstit

ut d

e M

écan

ique

des

Flu

ides

de

Toul

ouse

, 2. L

AAS-

CNRS

)

PA94

-Nan

o ho

tpla

te fa

bric

atio

n by

com

bini

ng E

BL a

nd F

IBte

chni

ques

»D

r. Z

hifu

Fen

g1 , Dr.

And

rea

Gai

ardo

2 , Mr.

Dam

iano

Giu

bert

oni3 , M

r.Al

essa

ndro

Cia

n4 , Dr.

Pie

rlui

gi B

ellu

tti2 , P

rof.

Vinc

enzo

Gui

di5 (1

.Fo

ndaz

ione

Bru

no K

essl

er In

stitu

te, 2

. Fon

dazi

one

Brun

o Ke

ssle

r, 3.

FBK,

4. F

BK, B

runo

Kes

sler

Fou

ndat

ion,

5. F

erra

ra U

nive

rsity

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

58

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PA96

-Des

ign

of a

sim

plif

ied

mic

rofa

bric

atio

n pr

oces

s to

obt

ain

vert

ical

str

uctu

res

from

pla

nar

flex

ible

sub

stra

tes

»M

r. Jo

ão S

erra

1 , Dr.

Djib

ril F

aye2 , D

r. Jo

ão V

entu

ra3 , D

r. P

aulo

Agu

iar4 ,

Dr.

Sus

ana

Card

oso

de F

reita

s5 , Dr.

Dia

na L

eitã

o2 (1. I

nstit

uto

Supe

rior

Técn

ico,

Uni

vers

idad

e de

Lis

boa,

2. I

nstit

uto

de E

ngen

hari

a de

Sist

emas

e C

ompu

tado

res

– M

icro

sist

emas

e N

anot

ecno

logi

as (I

NES

CM

N),

3. In

stitu

to d

e Fí

sica

de

Mat

eria

is A

vanç

ados

, Nan

otec

nolo

gia

eFo

tóni

ca, U

nive

rsid

ade

do P

orto

(IFI

MU

P), 4

. Ins

titut

o de

Inve

stig

ação

eIn

ovaç

ão e

m S

aúde

da

Uni

vers

idad

e do

Por

to (i

3S),

5. U

nive

rsid

ade

deLi

sboa

)

PA98

-Sub

stra

te r

emov

al t

echn

ique

in w

et u

nder

cut

etch

ing

ofse

mi-p

olar

(20-

21) I

nGaN

lase

r st

ruct

ures

by

the

inco

rpor

atio

n of

un/r

elax

ed s

acri

fici

al la

yer

sing

le q

uant

um w

ell

»D

r. A

RWA

SAU

D A

BBAS

1 , Pro

f. Ah

med

Aly

aman

i2 , Pro

f. Sh

uji

Nak

amur

a3 , Pro

f. St

even

P. D

enBa

ars3 (1

. Mat

eria

ls D

epar

tmen

t,U

nive

rsity

of C

alifo

rnia

, San

ta B

arba

ra (U

CSB)

, CA,

U.S

.A. &

atio

nal

Cent

er fo

r N

anot

echn

olog

y an

d Ad

vanc

ed M

ater

ials

, Kin

g Ab

dula

ziz

City

for

Scie

nce

and

Tech

nolo

gy (K

ACST

), Ri

yadh

, KSA

, 2. N

atio

nal

Cent

er fo

r N

anot

echn

olog

y an

d Ad

vanc

ed M

ater

ials

, Kin

g Ab

dula

ziz

City

for

Scie

nce

and

Tech

nolo

gy (K

ACST

), Ri

yadh

, KSA

, 3. M

ater

ials

Dep

artm

ent,

Uni

vers

ity o

f Cal

iforn

ia, S

anta

Bar

bara

(UCS

B), C

A, U

.S.A

.&

Dep

artm

ent o

f Ele

ctri

cal a

nd C

ompu

ter

Engi

neer

ing,

Uni

vers

ity o

fCa

lifor

nia,

San

ta B

arba

ra (U

CSB)

, CA

, U.S

.A.)

PA10

0-A

new

leve

l of n

anom

eter

tra

ceab

ility

in lo

caliz

atio

nm

icro

scop

y»

Dr.

Cra

ig C

opel

and1 , D

r. R

on D

ixso

n1 , Dr.

And

rew

Mad

ison

2 , Dr.

Ada

mPi

ntar

1 , Dr.

Rob

ert I

lic2 , D

r. S

amue

l Sta

vis3 (1

. Nat

iona

l Ins

titut

e of

Stan

dard

s an

d Te

chno

logy

(NIS

T), 2

. Nat

iona

l Ins

titut

e of

Sta

ndar

dsan

d Te

chno

logy

, 3. N

IST)

PA10

2-Po

int

patt

ern

anal

ysis

of n

anos

truc

ture

pos

itio

ns: E

ffec

tsof

SEM

imag

e pr

oces

sing

par

amet

ers

on t

he N

eare

st N

eigh

bour

Inde

x»

Mr.

Arg

yris

Mav

rogo

nato

s1 , Ms.

Efi-

Mar

ia P

apia

1 , Dr.

Pan

agio

tisD

imitr

akel

lis2 , D

r. V

assi

lios

Cons

tant

oudi

s1 (1. I

nstit

ute

of N

anos

cien

cean

d N

anot

echn

olog

y, N

CSR

Dem

okri

tos,

2. I

nstit

ute

of N

anos

cien

ce &

Nan

otec

hnol

ogy,

NCS

R D

emok

rito

s)

3:30

pmPo

ster

Ses

sion

- Ev

en N

umbe

rs -

Mic

ro a

nd N

ano

Dev

ices

for

Life

Scie

nces

and

Che

mis

try

PB2-

Ligh

ting

Jew

ells

: HCS

-SPI

M p

latf

orm

for

para

llel g

row

th a

ndliv

e im

agin

g of

hun

dred

s of

Org

anoi

ds»

Dr.

Ann

e Be

ghin

1 , Dr.

Gia

nluc

a G

renc

i1 , Dr.

Rem

i Gal

land

2 , Dr.

Jean

-Ba

ptis

te S

ibar

ita2 , P

rof.

Virg

ile V

iasn

off1 (1

. Mec

hano

biol

ogy

Inst

itute

,N

atio

nal U

nive

rsity

of S

inga

pore

, 2. I

nter

disc

iplin

ary

Inst

itute

for

Neu

rosc

ienc

e)

PB4-

Mol

ecul

ar S

cale

Spa

tio-

Chem

ical

Con

trol

of t

he A

ctiv

atin

g-In

hibi

tory

Sig

nal I

nteg

rati

on in

NK

Cells

»M

rs. E

sti T

oled

o1 , Dr.

Gui

llaum

e Le

Sau

x1 , Pro

f. M

ark

Schv

artz

man

1 ,M

r. V

iraj B

hing

ardi

ve1 (1

. Ben

Gur

ion

Uni

vers

ity in

the

Neg

ev)

PB6-

Dev

elop

men

t of

Pol

ypyr

role

/Gol

d N

anop

arti

cle

Com

posi

teEl

ectr

ode

for

Elec

troc

hem

ical

Sen

sor

»M

r. H

iroki

Kaw

akam

i1 , Pro

f. Ts

o-Fu

Mar

k Ch

ang2 , P

rof.

Mas

ato

Sone

2 ,M

r. Y

u-An

Chi

en2 , P

rof.

Taka

mic

hi N

akam

oto3 , M

r. Y

uki I

to3 , D

r. T

ing

Chiu

Wan

1 , Dr.

Par

thoj

it Ch

akra

bort

y1 , Pro

f. Ch

un-Y

i Che

n2 (1. I

nstit

ute

of In

nova

tive

Rese

arch

, Tok

yo In

stitu

te o

f Tec

hnol

ogy,

Kan

agaw

a 22

6-85

03, J

apan

, 2. T

okyo

Inst

itute

of T

echn

olog

y, 3

. Tok

yo In

stitu

te o

fTe

chno

logy

, Kan

agaw

a 22

6-85

03, J

apan

)

PB8-

In-S

itu

and

Real

-Tim

e op

tica

l Mea

sure

men

t Sy

stem

for

Char

acte

rizi

ng t

he Q

ualit

y of

Wat

er B

odie

s»

Mr.

Tho

mas

Pos

nice

k1 , Mr.

Kar

lhei

nz K

elln

er1 , D

r. M

artin

Bra

ndl1 (1

.D

anub

e U

nive

rsity

Kre

ms)

PB10

-Bia

s st

ress

stu

dy o

n El

ectr

olyt

e-G

ated

Org

anic

Fie

ld-E

ffec

tTr

ansi

stor

s m

icro

arra

y fo

r in

liqu

id b

iose

nsin

g.»

Mr.

Mat

teo

Sega

ntin

i1 , Dr.

Mat

teo

Parm

eggi

ani2 , D

r. A

lber

to B

alle

sio1 ,

Dr.

Fra

nces

ca F

rasc

ella

1 , Dr.

Gia

nluc

a Pa

lmar

a1 , Pro

f. M

atte

o Co

cuzz

a1 ,Pr

of. F

abri

zio

Pirr

i1 , Dr.

Sim

one

Luig

i Mar

asso

1 (1. P

olite

cnic

o di

Tor

ino,

2.Is

titut

o Ita

liano

di T

ecno

logi

a)

PB12

-Pla

teau

–Ray

leig

h In

stab

ility

Indu

ced

Self

-Ass

embl

y of

Nan

o-Cu

bes

in S

tret

ched

DN

A M

olec

ules

»D

r. P

eng

Zhan

g1 , Mr.

ZIQ

IAN

G Y

ANG

1 , Pro

f. SI

GU

RDU

RTH

ORO

DD

SEN

1 , Pro

f. EN

ZO D

i Fab

rizi

o2 (1. K

ing

Abdu

llah

Uni

vers

ity o

fSc

ienc

e an

d Te

chno

logy

, 2. P

olite

cnic

o di

Tor

ino)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

59

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PB14

-Dev

elop

men

t of

an

elec

troc

hem

ical

sen

sor

for

the

dete

ctio

nof

Lis

teri

a m

onoc

ytog

enes

usi

ng lo

op m

edia

ted

isot

herm

alam

plif

icat

ion.

»M

s. A

ne R

ivas

Mac

ho1 , D

r. U

nai E

letx

iger

ra2 , D

r. S

anto

s M

erin

o2 , Mr.

Antt

on S

anju

an3 , D

r. M

ouni

r Bo

uali3 , D

r. Jo

sé L

uis

Vila

s4 , Dr.

Fel

ipe

Goñ

i5 , Dr.

Gar

biñe

Ola

barr

ia5 (1

. GAI

KER,

Tec

hnol

ogy

Cent

er, B

asqu

eRe

sear

ch a

nd T

echn

olog

y Al

lianc

e, 2

. Sur

face

Che

mis

try

and

Nan

otec

hnol

ogie

s U

nit,

Tekn

iker

, Eib

ar 2

0600

, 3. M

ondr

agón

Uni

bert

sita

tea,

Arr

asat

e-M

ondr

agón

, 4. G

rupo

de

Quí

mic

aM

acro

mol

ecul

ar, D

epar

tam

ento

de

Quí

mic

a Fí

sica

, Fac

ulta

d de

Cie

ncia

y Te

cnol

ogía

, Uni

vers

idad

del

Paí

s Va

sco,

Lei

oa, 5

. Gai

ker,

GAI

KER

Tech

nolo

gy C

entr

e, B

asqu

e Re

sear

ch a

nd T

echn

olog

y Al

lianc

e)

PB16

-Nan

opar

ticl

e ga

s se

nsor

s fo

r co

mm

erci

al-p

esti

cide

iden

tifi

cati

on»

Dr.

Eva

ngel

os S

kota

dis1 , D

r. E

vang

elos

Asl

anid

is1 , M

r. N

ikos

Kal

atzi

s2 ,D

r. F

otis

Cha

tzip

apad

opou

los2 , D

r. N

ikos

Mar

iano

s2 , Pro

f. D

imitr

isTs

ouka

las1 (1

. NAT

ION

AL T

ECH

NIC

AL U

NIV

ERSI

TY O

F AT

HEN

S, 2

.N

euro

publ

ic S

.A.)

PB18

-Fle

xibl

e SA

W m

icro

flui

dic

devi

ce a

s w

eara

ble

pH s

enso

rba

sed

on Z

nO n

anop

arti

cles

»M

r. L

uigi

Piro

1 , Dr.

Leo

nard

o La

man

na1 , D

r. F

ranc

esco

Gui

do1 , D

r.An

toni

o Ba

lena

1 , Mr.

Mas

sim

o M

arie

llo1 , D

r. F

ranc

esco

Riz

zi1 , P

rof.

Mas

sim

o D

e Vi

ttor

io2 (1

. Ist

ituto

Ital

iano

di T

ecno

logi

a, 2

. Ist

ituto

)

PB20

-Nan

opar

ticl

es fo

r im

pedi

met

ric

biod

etec

tion

on

pape

r-ba

sed

subs

trat

es»

Ms.

Mar

go H

auw

aert

1 , Mr.

Gré

goire

Le

Brun

1 , Mr.

Josq

uin

Vand

eput

te1 , D

r. Ju

lien

Mah

y1 , Pro

f. So

phie

Her

man

s1 , Pro

f. Je

an-P

ierr

eRa

skin

1 (1. U

nive

rsité

cat

holiq

ue d

e Lo

uvai

n)

PB22

-Art

ific

ial B

asem

ent

Mem

bran

e Co

mpo

nent

s A

ffec

tD

isse

min

atio

n an

d EM

T Be

havi

or o

f Ova

rian

Tum

or 3

D S

pher

oid

inVi

tro

»M

r. C

hang

chon

g Ch

en1 , D

r. A

mbr

oise

Lam

bert

2 , Yon

g Ch

en3 , D

r.Ca

role

Aim

é1 (1. P

ASTE

UR,

Dép

arte

men

t de

chim

ie, É

cole

Nor

mal

eSu

péri

eure

, PSL

Uni

vers

ity, S

orbo

nne

Uni

vers

ité, C

NRS

, 750

05 P

aris

,Fr

ance

, 2. E

RRM

ECe,

Equ

ipe

de R

eche

rche

sur

les

Rela

tions

Mat

rice

Extr

acel

lula

ire-C

ellu

les

(EA1

391)

, Uni

vers

ité d

e Ce

rgy-

Pont

oise

, 950

01N

euvi

lle s

ur O

ise

Cede

x, F

ranc

e, 3

. Eco

le N

orm

ale

Supé

rieu

re)

PB24

-Inco

rpor

atin

g th

e el

ectr

oche

mic

al s

enso

rs in

to p

last

icm

icro

flui

dic

devi

ces

»D

r. Z

heng

Mao

1 , Mr.

Fen

g Li

ang1 , D

r. Ji

an S

hi2 , D

r. L

i Wan

g2 , Dr.

Juan

Peng

1 , Pro

f. Yo

ng C

hen1 (1

. PAS

TEU

R, D

épar

tem

ent d

e ch

imie

, Éco

leno

rmal

e su

péri

eure

, PS

L U

nive

rsity

, Sor

bonn

e U

nive

rsité

, CN

RS, 2

.M

esoB

ioTe

ch)

PB26

-Hum

an b

lood

pla

tele

ts a

dsor

ptio

n on

pol

ymer

ic m

ater

ials

for

liqui

d bi

opsy

»M

rs. C

ecili

a Pe

derz

olli1 , D

r. F

ranc

esca

Fra

scel

la2 , P

rof.

Nat

alia

Mal

ara3 ,

Dr.

Cri

stin

a Po

tric

h1 , Dr.

Lor

enzo

Lun

elli1 , M

r. M

ario

Bar

ozzi

1 , Pro

f.M

aria

Laur

a Co

lucc

io4 , D

r. S

imon

e Lu

igi M

aras

so2 , D

r. V

alen

tina

Bert

ana2 , M

r. F

eder

ico

Picc

oli5 , D

r. A

ttili

o Fa

bio

Cris

tallo

5 , Dr.

Adr

iano

Anes

i5 , Pro

f. Ca

ndid

o Fa

briz

io P

irri

2 (1. F

onda

zion

e Br

uno

Kess

ler,

2.Po

litec

nico

di T

orin

o, 3

. Uni

vers

ità d

ella

Mag

na G

raec

ia, 4

. Uni

vers

itàde

lla M

agna

Gra

ecia

, 5. A

PSS

Osp

edal

e S.

Chi

ara

Tren

to)

PB28

-3D

str

uctu

red

bioc

hip

for

labe

l-fre

e m

ulti

-ana

lyte

dete

rmin

atio

ns a

t th

e Po

N»

Dr.

Gri

gori

s Zi

sis1 , D

r. G

eorg

ios

Papa

geor

giou

1 , Mr.

Vas

ilios

Anas

tasi

adis

1 , Dr.

Pan

agio

ta P

etro

u1 , Dr.

Nik

os P

apan

ikol

aou1 , D

r.Io

anni

s Ra

ptis

1 (1. N

CSR

Dem

okri

tos)

PB30

-A p

rogr

amm

able

cul

ture

pla

tfor

m fo

r st

imul

atio

n an

d in

sit

use

nsin

g of

lung

epi

thel

ial c

ells

»D

r. N

icol

ò Ca

cocc

iola

1 (1. P

olite

cnic

o di

Tor

ino)

PB32

-Nov

el F

abri

cati

on M

etho

d fo

r Pi

ezoe

lect

ric

Mic

rofl

uidi

c Ce

llSo

rter

Chi

ps»

Mr.

Hak

an M

erda

n1 , Pro

f. An

drew

Hol

mes

1 (1. I

mpe

rial

Col

lege

Lond

on)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

60

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PB34

-Pro

duct

ion

of p

late

lets

by

usin

g hu

man

plu

ripo

tent

ste

mce

lls d

eriv

ed m

egak

aryo

cyte

s an

d a

mic

rofl

uidi

c de

vice

wit

hin

tegr

ated

con

ical

-hol

e m

icro

filt

er»

Dr.

Box

in H

uang

1 , Dr.

Xia

oche

n H

uang

2 , Dr.

Aiw

ei Z

hu3 , M

r. F

eng

Lian

g1 , Dr.

Juan

Pen

g1 , Dr.

Jian

Shi

1 , Dr.

Li W

ang1 , D

r. F

erna

ndo

Real

3 ,D

r. M

orga

ne B

omse

l3 , Pro

f. Yo

ng C

hen1 (1

. Eco

le N

orm

ale

Supé

rieu

re,

2.PA

STEU

R, D

épar

tem

ent d

e ch

imie

, Éco

le n

orm

ale

supé

rieu

re,

PSL

Un i

vers

ity, S

orbo

nne

Uni

vers

ité, C

NRS

, 3. L

ab M

ucos

al e

ntry

of H

IV a

ndm

ucos

al Im

mun

ity)

PB36

-Gen

erat

ion

of p

late

let

poor

pla

sma

for

circ

ulat

ing

cell-

free

mit

ocho

ndri

al D

NA

ana

lysi

s on

a c

entr

ifug

al m

icro

flui

dic

plat

form

»M

s. F

ranz

iska

Sch

lenk

er1 , M

s. L

ena

Kark

ossa

1 , Dr.

Nils

Pau

st2 , P

rof.

Rola

nd Z

enge

rle2 , D

r. S

tavr

os G

iagl

is3 , P

rof.

Ulr

ich

Wal

ker3 , D

r. T

obia

sH

utze

nlau

b2 , Dr.

Pet

er Ju

elg1 (1

. Hah

n-Sc

hick

ard,

2. H

ahn-

Schi

ckar

dan

d La

bora

tory

for

MEM

S Ap

plic

atio

ns, I

MTE

K-D

epar

tmen

t of

Mic

rosy

stem

Eng

inee

ring

, 3. U

nive

rsity

Hos

pita

l of B

asel

, Dep

artm

ent

of R

heum

atol

ogy)

PB38

-Lar

ge s

ampl

e vo

lum

e m

anag

emen

t on

cen

trif

ugal

mic

rofl

uidi

c ca

rtri

dges

»M

s. Ju

dith

Sch

land

erer

1 , Dr.

Jan

Lüdd

ecke

1 , Pro

f. Ro

land

Zen

gerl

e2 ,D

r. N

ils P

aust

2 (1. H

ahn-

Schi

ckar

d, 2

. Hah

n-Sc

hick

ard

and

Labo

rato

ryfo

r M

EMS

Appl

icat

ions

, IM

TEK-

Dep

artm

ent o

f Mic

rosy

stem

Engi

neer

ing)

PB40

-Cur

ved

Opt

oele

ctro

nic

Plat

form

to

Mea

sure

Ret

inal

Act

ion

Pote

ntia

ls»

Dr.

Ros

alia

Mor

eddu

1 , Dr.

Fra

nces

co D

e An

gelis

1 (1. I

stitu

to It

alia

no d

iTe

cnol

ogia

, Gen

ova,

Ital

y)

3:30

pmPo

ster

Ses

sion

- Ev

en N

umbe

rs -

Mic

ro a

nd N

ano

Dev

ices

for

Elec

tron

ics,

Pho

toni

cs, P

hysi

cal A

pplic

atio

ns &

Ene

rgy

PC2-

Co-E

lect

rode

posi

tion

of T

iO 2

Nan

opar

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e Re

info

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Hig

hSt

reng

th N

i Film

Ass

iste

d by

Sup

ercr

itic

al C

arbo

n D

ioxi

de fo

rM

inia

turi

zed

Elec

tron

ics

»M

r. Y

u-An

Chi

en1 , P

rof.

Chun

-Yi C

hen1 , P

rof.

Tso-

Fu M

ark

Chan

g1 ,Pr

of. M

asat

o So

ne1 (1

. Tok

yo In

stitu

te o

f Tec

hnol

ogy)

PC4-

Shoc

k Tu

be C

hara

cter

izat

ion

of A

ir B

last

Pre

ssur

e Se

nsor

Base

d on

Ult

ra-M

inia

ture

Sili

con

Mem

bran

e an

d Pi

ezor

esis

tive

Gau

ges

»M

r. Jé

rôm

e RI

ON

DET

1 , Dr.

Ant

ony

Cous

tou1 , D

r. B

ilel A

CHO

UR1 , D

r.Au

rélie

LEC

ESTR

E1 , Mr.

Sam

uel C

HAR

LOT1 , D

r. M

aylis

LAV

AYSS

IERE

2 , Dr.

Jérô

me

LUC2 , M

r. A

lexa

ndre

LEF

RAN

COIS

2 , Pro

f. H

ervé

AU

BERT

1 , Dr.

Patr

ick

PON

S1 (1. C

NRS

-LAA

S, 2

. CEA

-DAM

)

PC6-

Mec

hani

cal P

rope

rty

of G

old

Mic

ro-C

anti

leve

rs fo

rA

pplic

atio

n in

Mic

roel

ectr

onic

s an

d th

e Sa

mpl

e G

eom

etry

Eff

ect

»M

r. K

azuy

a Fu

jita1 , M

r. K

osuk

e Su

zuki

1 , Pro

f. Ch

un-Y

i Che

n1 , Pro

f. Ts

o-Fu

Mar

k Ch

ang1 , P

rof.

Dai

suke

Yam

ane2 , P

rof.

Hiro

yuki

Ito1 , P

rof.

Kats

uyuk

i Mac

hida

1 , Pro

f. Ka

zuya

Mas

u1 , Pro

f. M

asat

o So

ne1 (1

. Tok

yoIn

stitu

te o

f Tec

hnol

ogy,

2. R

itsum

eika

n U

nive

rsity

)

PC8-

Ink

jett

abili

ty c

ompa

riso

n of

par

ticl

e-fr

ee s

ilver

car

bona

te &

citr

ate

for

the

deve

lopm

ent

of w

eara

ble

ante

nna

for

wir

eles

sbo

dy a

rea

netw

ork

»M

s. M

orga

n St

acey

1 , Dr.

Tho

mas

Jone

s1 , Pro

f. Am

in A

bdol

vand

1 , Dr.

Dee

pak

Sham

vedi

1 , Dr.

John

Low

e2 (1. U

nive

rsity

of D

unde

e, 2

. Cei

mig

Ltd)

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-Pt/

PET

Com

posi

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iber

Pre

pare

d by

Sup

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itic

al C

O2

Cata

lyza

tion

for

Wea

rabl

e D

evic

e A

pplic

atio

ns»

Mr.

Mas

aki M

itsum

oto1 , D

r. T

ing

Chiu

Wan

1 , Pro

f. Ch

un-Y

i Che

n1 ,Pr

of. T

so-F

u M

ark

Chan

g1 , Ms.

Ari

sa Ji

nno2 , D

r. H

irom

ichi

Kur

osu2 , M

r.Ya

sush

i Wat

anab

e3 , Pro

f. M

asat

o So

ne1 (1

. Tok

yo In

stitu

te o

fTe

chno

logy

, 2. N

ara

Wom

en's

Uni

vers

ity, 3

. Sho

wa

Den

ko M

ater

ials

Co.,

Ltd.

)

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-Inkj

et p

rint

ing

of t

empe

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re s

enso

rs fr

om n

ovel

par

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ee o

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omet

allic

pla

tinu

m in

ks»

Mr.

Tim

othy

Gra

nt1 , D

r. T

hom

as Jo

nes1 , D

r. Jo

hn L

owe2 , M

s.Ro

sem

ary

Roth

wel

l2 , Pro

f. Am

in A

bdol

vand

1 (1. U

nive

rsity

of D

unde

e,2.

Ceim

ig L

td)

PC14

-Eff

ect

of z

inc

oxid

e na

now

ire

patt

erne

d ar

ea o

n fl

exib

lepr

essu

re s

enso

rs»

Mr.

Muh

amm

ad A

mm

ar B

in C

he M

ahza

n1 , Dr.

Gra

ham

Woo

d1 , Ms.

Kari

na Je

roni

mo1 , M

r. Y

ulin

Gen

g1 , Dr.

Enr

ico

Mas

trop

aolo

1 , Dr.

Rebe

cca

Cheu

ng1 (1

. Uni

vers

ity o

f Edi

nbur

gh)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

61

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PC16

-Eff

ect

of C

urre

nt D

ensi

ty o

n M

echa

nica

l Pro

pert

ies

ofEl

ectr

odep

osit

ed G

old

Eval

uate

d by

Mic

ro-C

ompr

essi

on T

est

»M

r. T

aro

Om

ura1 , P

rof.

Chun

-Yi C

hen1 , P

rof.

Tso-

Fu M

ark

Chan

g1 , Pro

f.D

aisu

ke Y

aman

e2 , Pro

f. H

iroyu

ki It

o1 , Pro

f. Ka

tsuy

uki M

achi

da1 , P

rof.

Kazu

ya M

asu1 , P

rof.

Mas

ato

Sone

1 (1. T

okyo

Inst

itute

of T

echn

olog

y, 2

.Ri

tsum

eika

n U

nive

rsity

)

PC18

-A m

icro

heom

eter

bas

ed o

n pL

-fer

rofl

uid

drop

let

defo

rmat

ion

»M

r. D

anyi

l Aza

rkh1 , M

s. S

usan

Bab

u2 , Ms.

Ann

a K.

Ste

rnbe

rg3 , P

rof.

Laur

a D

e La

port

e2 , Pro

f. Ir

mga

rd C

lass

en-L

inke

3 , Pro

f. Ru

dolf

Leub

e3 ,Pr

of. U

we

Schn

aken

berg

1 (1. I

nstit

ute

of M

ater

ials

in E

lect

rica

lEn

gine

erin

g 1

(IWE1

), RW

TH A

ache

n, 2

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I - L

eibn

iz-In

stitu

te fo

rIn

tera

ctiv

e M

ater

ials

, 3. I

nstit

ute

of M

olec

ular

and

Cel

lula

r An

atom

y(M

OCA

), U

nikl

inik

RW

TH A

ache

n)

PC20

-Opt

ical

non

linea

riti

es in

pho

toni

c na

noca

viti

es w

ith

extr

eme

sub-

wav

elen

gth

conf

inem

ent

»M

r. S

øren

Eng

elbe

rth

Han

sen1 , D

r. B

abak

Vos

ough

i Lah

ijani

1 , Mr.

Mar

cus

Albr

echt

sen1 , D

r. P

hilip

Trø

st K

rist

ense

n1 , Pro

f. Je

sper

Mør

k1 ,Pr

of. S

øren

Sto

bbe1 (1

. DTU

Fot

onik

, Tec

hnic

al U

nive

rsity

of D

enm

ark)

PC22

-Dev

elop

men

t of

a fl

exib

le g

raph

ene-

base

d ga

s se

nsor

usi

ngpi

cose

cond

lase

r ab

lati

on»

Prof

. Chi

en-P

ing

Wan

g1 (1. N

atio

nal T

aipe

i Uni

vers

ity o

f Tec

hnol

ogy)

PC24

-Sys

tem

atic

Stu

dy a

nd C

hara

cter

izat

ion

of A

lAs

oxid

atio

nPr

oces

s»

Mr.

Giu

lio T

avan

i1 , Pro

f. An

drea

Chi

appi

ni2 , D

r. A

lexe

y Fe

doro

v3 , Pro

f.D

anie

l Chr

astin

a1 , Pro

f. Fr

ance

sco

Scot

ogne

lla4 , D

r. E

rfan

Maf

akhe

ri5 ,

Prof

. Ste

fano

San

guin

etti6 , D

r. M

onic

a Bo

llani

5 (1. L

-NES

S, D

ipar

timen

todi

Fis

ica

del P

olite

cnic

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Mila

no, 2

. IN

F-CN

R CS

MFO

Lab

& F

BK C

MM

,3.

IFN

-CN

R LN

ESS

Labo

rato

ry, 4

. Pol

itecn

ico

di M

ilano

, 5. I

FN-C

NR,

L-

NES

S, 6

. Dip

artim

ento

di s

cien

za d

ei m

ater

iali,

Uni

vers

ità d

i Mila

no-

Bico

cca)

PC26

-Dro

plet

Pla

tfor

m fo

r A

myl

oid

Fibr

il G

row

th a

nd In

-Sit

uCh

arac

teri

zati

ons

»D

r. P

eng

Zhan

g1 , Pro

f. EN

ZO D

i Fab

rizi

o2 , Dr.

Man

ola

Mor

etti1 (1

. Kin

gAb

dulla

h U

nive

rsity

of S

cien

ce a

nd T

echn

olog

y, 2

. P)

PC28

-Aco

usti

c se

nsor

wit

h sh

ort-

term

ada

ptat

ion

mec

hani

sm fo

rso

und

proc

essi

ng a

t se

nsor

leve

l»

Mr.

Ste

ve D

urst

ewitz

1 , Mr.

Kal

pan

Ved1 , P

rof.

Mar

tin Z

iegl

er1 , D

r.Cl

audi

a Le

nk1 (1

. Tec

hnis

che

Uni

vers

ität I

lmen

au)

PC30

-The

rmal

oxi

dati

on a

ssis

ted

chem

ical

mec

hani

cal p

olis

hing

for

low

-loss

4H

-SiC

inte

grat

ed p

hoto

nic

devi

ces

»M

r. X

iaod

ong

Shi1 , M

r. W

eich

en F

an1 , M

r. Y

aoqi

n Lu

1 , Mr.

Ailu

n Yi

2 ,Pr

of. X

in O

u2 , Pro

f. Ka

rste

n Ro

ttw

itt1 , P

rof.

Hai

yan

Ou1 (1

. DTU

Fot

onik

,Te

chni

cal U

nive

rsity

of D

enm

ark,

2. S

hang

hai I

nstit

ute

of M

icro

syst

eman

d In

form

atio

n Te

chno

logy

, Chi

nese

Aca

dem

y of

Sci

ence

s)

PC32

-Cor

e-sh

ell p

erco

lati

ve n

anod

iele

ctri

cs fo

r hi

gh v

olta

gein

tegr

ated

cap

acit

ors:

com

para

tive

stu

dy o

n di

ffer

ent

carb

on-

coat

ed m

etal

lic in

clus

ions

(Co,

Ni &

Cu)

»M

r. C

édri

c LA

PEYR

ON

IE1 , D

r. M

arco

ALF

ON

SO1 , D

r. B

erna

rd V

IALA

2 ,D

r. Je

an-H

ervé

TO

RTAI

1 (1. L

TM-C

NRS

, 2. C

EA-L

ETI M

inat

ec, U

nive

rsité

Gre

nobl

e-Al

pes,

F-3

8000

Gre

nobl

e, F

ranc

e)

PC34

-MEC

HA

NIC

AL

SEN

SORS

WIT

H S

TRU

CTU

RAL

COLO

URA

TIO

N: A

LOW

-CO

ST W

AY T

O S

ENSI

TIVE

DET

ECTI

ON

»D

r. F

erra

n Pu

jol-V

ila1 , D

r. P

au G

üell-

Gra

u2 , Dr.

Ped

ro E

scud

ero2 , D

r.Ca

rlos

Pas

cual

3 , Dr.

Ros

a Vi

lla2 , D

r. B

orja

Sep

úlve

da4 , D

r. M

ar A

lvar

ez2

(1. I

nstit

ute

of M

icro

elec

tron

ics

of B

arce

lona

(IM

B-CN

M,C

SIC)

, 2.

Inst

itute

of M

icro

elec

tron

ics

of B

arce

lona

(IM

B-CN

M, C

SIC)

, 3. A

LBA

Sync

hrot

ron,

082

90 C

erda

nyol

a de

l Val

les,

4. C

atal

an In

stitu

te o

fN

anos

cien

ce a

nd N

anot

echn

olog

y (IC

N2)

)

PC36

-Con

form

al P

lati

num

Coa

ting

of H

igh

Asp

ect

Rati

o M

EMS

byA

tom

ic L

ayer

Dep

osit

ion

for

Hig

h Re

flec

tivi

ty V

erti

cal M

icro

-M

irro

rs a

nd M

icro

-Shu

tter

s»

Dr.

Ant

on L

agos

h1 , Dr.

Ben

edik

t Gul

dim

ann2 , D

r. G

erge

ly H

uszk

a1 , Dr.

Ham

ed S

atta

ri1 , D

r. B

erit

Ahle

rs2 , D

r. P

hilip

pe G

iacc

ari3 , D

r. G

régo

ireKe

rr4 , D

r. P

eym

an R

ahna

ma3 , D

r. T

akes

hi N

ishi

zaw

a4 , Pro

f. N

iels

Qua

ck1 (1

. Eco

le P

olyt

echn

ique

Féd

éral

e de

Lau

sann

e (E

PFL)

, 2.

Euro

pean

Spa

ce R

esea

rch

and

Tech

nolo

gy C

entr

e, 3

. Mic

osEn

gine

erin

g, 4

. OH

B Sy

stem

AG

)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

62

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PC38

-Pyt

hon-

base

d el

ectr

o-m

echa

nica

l co-

opti

miz

atio

n of

MEM

Sin

erti

al s

enso

rs»

Mr.

Rui

Am

endo

eira

Est

eves

1 , Dr.

Che

n W

ang2 , P

rof.

Joan

a Va

z Pi

nto3 ,

Mr.

Aoj

ie Q

uan1 , M

r. Y

uan

Wan

g4 , Mr.

Hua

feng

Liu

4 , Pro

f. M

icha

el K

raft

2

(1. K

U L

euve

n, 2

. Uni

vers

ity o

f Leu

ven,

3. i

3N/C

ENIM

AT, N

OVA

Sch

ool o

fSc

ienc

e an

d Te

chno

logy

, 4. P

GM

F an

d Sc

hool

of P

hysi

cs, H

uazh

ong

Uni

vers

ity o

f Sci

ence

and

Tec

hnol

ogy)

PC40

-Hig

hly

flex

ible

tri

boel

ectr

ic n

anog

ener

ator

s ba

sed

ondi

rect

ly e

lect

rosp

un n

anof

iber

s on

MW

CNT/

PDM

S co

mpo

site

elec

trod

es»

Ms.

Cha

eeun

Lee

1 , Dr.

Yeo

ngju

n Ki

m1 , P

rof.

Je H

oon

Oh1 (1

. Han

yang

Uni

vers

ity)

PC42

-Ele

ctri

cal i

nter

faci

ng b

etw

een

inkj

et-p

rint

ed s

truc

ture

s an

dpa

tter

ned

copp

er t

rack

s on

flex

ible

sub

stra

te»

Mr.

Dim

itris

Bar

mpa

kos1 , M

r. A

post

olos

Apo

stol

akis

1 , Mr.

Agg

elos

Pila

tis2 , P

rof.

Geo

rge

Pats

is1 , P

rof.

Gri

gori

s Ka

ltsas

1 (1. m

icro

SEN

SES

Labo

rato

ry, D

epar

tmen

t of E

lect

rica

l and

Ele

ctro

nics

Eng

inee

ring

,U

nive

rsity

of W

est A

ttic

a, 2

. Dep

artm

ent o

f Nav

al A

rchi

tect

ure,

Uni

vers

ity o

f Wes

t Att

ica)

PC44

-Nar

row

Lin

ewid

ths

Ridg

e W

aveg

uide

AlG

aAs

Dio

de L

aser

sw

ith

Surf

ace

Gra

ting

s; R

ealis

atio

n an

d D

evic

e Ex

ampl

es»

Dr.

Ola

f Bro

x1 (1. F

erdi

nand

-Bra

un-In

stitu

t gG

mbH

, Lei

bniz

-Inst

itut

für

Höc

hstf

requ

enzt

echn

ik)

PC46

-Nan

omec

hani

cal s

enso

rs in

par

tial

wet

ting

con

diti

on fo

rbi

osen

sing

app

licat

ions

»M

s. M

artin

a Co

nti1 , D

r. L

aura

And

olfi2 , M

r. E

rik

Betz

-Gut

tner

1 , Dr.

Nic

ola

Cefa

rin2 , D

r. S

imon

e D

al Z

ilio2 , D

r. M

arco

Laz

zari

no2 (1

.U

nive

rsità

di T

ries

te, 2

. CN

R-IO

M)

PC48

-Ban

d-to

-ban

d tu

nnel

ling

in t

wo-

dim

ensi

onal

van

der

Waa

lshe

tero

stru

ctur

es»

Mr.

Pha

nish

Cha

va1 , D

r. K

enji

Wat

anab

e2 , Dr.

Tak

ashi

Tan

iguc

hi2 , P

rof.

Man

fred

Hel

m3 , D

r. A

rtur

Erb

e3 (1. H

elm

holt

Zent

rum

Dre

sden

-Ro

ssen

dorf

, Dre

sden

, 2. N

atio

nal I

nstit

ute

for

Mat

eria

ls S

cien

ce,

Tsuk

uba,

3. H

elm

holtz

-Zen

trum

Dre

sden

-Ros

send

orf)

PC50

-Wav

efro

nt s

hapi

ng a

pplie

d to

pla

smon

ic fi

ber

opti

cs»

Dr.

Lia

m C

olla

rd1 , D

r. D

i Zhe

ng1 , D

r. F

ilipp

o Pi

sano

1 , Mr.

MU

HAM

MAD

FAYY

AZ K

ASH

IF2 , D

r. M

arco

Pis

anel

lo1 , D

r. A

nton

io B

alen

a1 , Dr.

Mar

coG

rand

e2 , Dr.

Fer

rucc

io P

isan

ello

1 , Pro

f. M

assi

mo

De

Vitt

orio

1 (1. I

stitu

toIta

liano

di T

ecno

logi

a, C

ente

r fo

r Bi

omol

ecul

ar N

anot

echn

olog

ies,

2.

Polit

ecni

co d

i Bar

i)

PC52

-Fab

rica

tion

of V

anad

ium

-Dio

xide

for

Ther

mal

Tun

ing

inPh

oton

ic S

truc

ture

s»

Mr.

MU

HAM

MAD

FAY

YAZ

KASH

IF1 , D

r. T

izia

na S

tom

eo2 , D

r. F

ranc

esco

Gui

do3 , D

r. M

aria

Ant

onie

tta

Vinc

enti4 , D

r. Ir

ene

Vass

alin

i4 , Pro

f.M

assi

mo

De

Vitt

orio

5 , Pro

f. An

tone

lla D

'Ora

zio1 , P

rof.

Ivan

o Al

essa

ndri

4 ,Pr

of. C

osta

ntin

o D

e An

gelis

4 , Dr.

Mar

co G

rand

e1 , Pro

f. D

omen

ico

deCe

glia

6 (1. P

olite

cnic

o di

Bar

i, 2.

Ital

ian

Inst

itute

of t

echn

olog

y, 3

.Is

titut

o Ita

liano

di T

ecno

logi

a, 4

. Uni

vers

ity o

f Bre

scia

, 5. I

stitu

toIta

liano

di T

ecno

logi

a, C

ente

r fo

r Bi

omol

ecul

ar N

anot

echn

olog

ies,

6.

Uni

vers

ity o

f Pad

ova)

PC54

-Fab

rica

tion

and

cha

ract

eriz

atio

n of

a s

oft-

cont

act

elec

troa

dhes

ion

surf

ace

for

cont

rolli

ng t

acti

le p

erce

ptio

n»

Mr.

Lui

gi P

orta

luri

1 , Dr.

Luc

iana

Alg

ieri

2 , Dr.

Kon

stan

tinos

Pag

kalis

2 ,Pr

of. M

assi

mo

De

Vitt

orio

1 , Pro

f. M

iche

le S

cara

ggi1 (1

. Ist

ituto

Ital

iano

di T

ecno

logi

a - U

nive

rsità

del

Sal

ento

, 2. I

stitu

to It

alia

no d

i Tec

nolo

gia)

PC56

-Infl

uenc

e of

pla

sma

indu

ced

surf

ace

roug

hnes

s on

the

perf

orm

ance

of t

ribo

elec

tric

gen

erat

or»

Ms.

Ste

lla A

rvan

iti1 , M

r. A

post

olos

Seg

kos1 , M

r. A

chill

eas

Bard

akas

1 ,D

r. A

ngel

os Z

enio

u1 , Dr.

Chr

isto

s Ts

amis

1 (1. I

nstit

ute

of N

anos

cien

cean

d N

anot

echn

olog

y, N

atio

nal C

ente

r fo

r Sc

ient

ific

Rese

arch

‘Dem

okri

tos’,

153

10 A

then

s, G

reec

e.)

PC58

-Las

er in

duce

d gr

aphe

ne fo

r fl

exib

le h

ybri

d en

ergy

harv

esti

ng a

nd s

tora

ge d

evic

es»

Mr.

Rob

erto

Spe

ranz

a1 , Mr.

Mar

co R

eina

1 , Pro

f. An

drea

Lam

bert

i1 ,Pr

of. F

abri

zio

Pirr

i1 (1. P

olite

cnic

o di

Tor

ino)

PC60

-Low

-tem

pera

ture

ato

mic

laye

r de

posi

tion

of h

afni

um o

xide

for

gati

ng a

pplic

atio

ns»

Ms.

Pra

gya

Shek

har1 , D

r. S

aqui

b Sh

amim

1 , Mr.

Vol

kmar

Hoc

k1 , Pro

f.H

artm

ut B

uhm

ann1 , D

r. Jo

hann

es K

lein

lein

1 , Pro

f. La

uren

s W

.M

olen

kam

p1 (1. P

hysi

kalis

ches

Inst

itut (

EP3)

, Uni

vers

ität W

ürzb

urg,

Wür

zbur

g, 9

7074

, Ger

man

y)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

63

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PC62

-Ult

rath

in w

ire

scan

ner

for

X-ra

y be

am m

onit

ors

»D

r. S

imon

e D

al Z

ilio1 , D

r. M

arco

Laz

zari

no1 , D

r. S

ilvia

Nap

pini

1 , Dr.

Elen

a M

agna

no1 , D

r. N

icol

a Ce

fari

n1 (1. C

NR-

IOM

)

PC64

-Des

ign

and

Fini

te E

lem

ent

Ana

lysi

s of

an

Elec

trot

herm

ally

Act

uate

d M

icro

grip

per

for

Biom

edic

al A

pplic

atio

ns»

Mr.

Tef

eri S

itota

w Y

alle

w1 , M

r. A

lvis

e Ba

golin

i2 , Dr.

Mar

ia F

Pan

tano

1

(1. u

nive

rsity

of t

rent

o, 2

. Fon

dazi

one

Brun

o Ke

ssle

r)

PC66

-Ana

lysi

s of

Hys

teri

c Be

havi

our

in N

onlin

ear

Reso

nanc

e of

Silic

on N

anoe

lect

rom

echa

nica

l Res

onat

ors

»M

r. F

ANG

BEN

1 , Mr.

Jam

es F

erna

ndo1 , D

r. Ju

n-Yu

Ou2 , D

r. Y

oshi

shig

eTs

uchi

ya3 (1

. Sch

ool o

f Ele

ctro

nics

and

Com

pute

r Sc

ienc

e,U

nive

rsity

of

Sout

ham

pton

, 2. O

ptoe

lect

roni

cs R

esea

rch

Cent

re, U

nive

rsity

of

Sout

ham

pton

, 3. S

choo

l of E

lect

roni

cs a

nd C

ompu

ter

Scie

nce,

Uni

vers

ity o

f Sou

tham

pton

)

PC68

-Die

lect

ric

Mat

eria

ls fo

r N

ext

Gen

erat

ion

Nan

oele

ctro

nics

»Pr

of. A

rezk

i Ben

fdila

1 (1. M

oulo

ud M

amm

eri U

nive

rsity

Tiz

i-Ouz

ou, B

P17

RP)

3:30

pmPo

ster

Ses

sion

- Ev

en N

umbe

rs -

Nan

ofab

rica

tion

and

Man

ufac

turi

ng fo

r Fu

ncti

onal

Str

uctu

res/

Surf

aces

PD2-

Om

nidi

rect

iona

l Abs

orpt

ion

of t

he S

olar

Lig

ht w

ith

Arr

ays

ofSu

bwav

elen

gth

Com

poun

d Pa

rabo

lic L

ight

Con

cent

rato

rs»

Mr.

Ash

ish

Praj

apat

i1 , Dr.

Gil

Shal

ev1 (1

. Ben

Gur

ion

Uni

vers

ity o

f the

Neg

ev)

PD4-

Poly

mer

Mic

rone

edle

s fo

r Tr

ansd

erm

al T

hera

nost

ics

and

Vacc

inat

ion

»Pr

of. P

hilip

Pre

wet

t1 , Dr.

Zah

ra F

araj

i Rad

2 , Mr.

Vah

id E

brah

imin

ejad

2 ,Pr

of. G

raha

m D

avie

s3 (1. O

xfor

d Sc

ient

ific

Cons

ulta

nts

Ltd,

2.

Uni

vers

ity o

f Sou

ther

n Q

ueen

slan

d, 3

. Uni

vers

ity o

f New

Sou

th W

ales

)

PD6-

Funn

ellin

g sp

onta

neou

s em

issi

on in

to w

aveg

uide

s vi

a ep

silo

nne

ar-z

ero

met

amat

eria

ls»

Mr.

Mar

wan

Cha

nnab

1 , Dr.

Fed

eric

o Fe

rrar

ese

Lupi

2 , Mr.

Irdi

Mur

ataj

1 ,Pr

of. F

abri

zio

Pirr

i1 , Dr.

Ang

elo

Ange

lini2 (1

. Pol

itecn

ico

di T

orin

o, 2

.IN

RiM

)

PD8-

Mic

ro 3

D p

rint

ing

for

life

scie

nces

and

mic

roro

boti

cs»

Dr.

Ada

-Ioan

a Bu

nea1 , M

s. N

uria

del

Cas

tillo

Inie

sta1 , M

s. A

riad

niD

roum

pali1 , D

r. E

inst

om E

ngay

1 , Mr.

Ale

xand

re W

etze

l1 , Pro

f. Ra

fael

Tabo

rysk

i1 (1. D

TU N

anol

ab -

Nat

iona

l Cen

tre

for

Nan

o Fa

bric

atio

n an

dCh

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

f Den

mar

k)

PD10

-Nan

ofab

rica

ted

patt

erns

for

the

cont

rol o

f T c

ell r

ecep

tor

clus

teri

ng»

Mr.

Yuv

al S

egal

1 , Mr.

ASH

ISH

PAN

DEY

1 , Ms.

Siv

an T

zadk

a2 , Mrs

. Est

iTo

ledo

3 , Mr.

Muh

amm

ed Ir

aqi4 , D

r. O

lga

Radi

nsky

4 , Pro

f. An

gel

Porg

ador

4 , Dr.

Gui

llaum

e Le

Sau

x3 , Pro

f. M

ark

Schv

artz

man

3 (1.

Dep

artm

ent o

f Mat

eria

ls E

ngin

eeri

ng, I

lse

Katz

Inst

itute

for

the

Nan

osca

le S

cien

ce a

nd T

echn

olog

y, B

en-G

urio

n U

nive

rsity

of t

heN

egev

, 2. B

en G

urio

n U

nive

rsity

of t

he N

egev

, 3. B

en G

urio

n U

nive

rsity

in th

e N

egev

, 4. S

hrag

a Se

gal D

epar

tmen

t of G

enet

ics,

Imm

unol

ogy,

and

Cell

Biol

ogy,

Ben

-Gur

ion

Uni

vers

ity o

f the

Neg

ev)

PD12

-Nan

oim

prin

ted

mul

tifu

ncti

onal

nan

opro

bes

for

aho

mog

eneo

us im

mun

oass

ay: a

top

-dow

n fa

bric

atio

n ap

proa

ch»

Prof

. Hub

ert B

ruec

kl1 , D

r. A

stri

t Sho

shi1 , D

r. S

tefa

n Sc

hritt

wie

ser2 , D

r.Ba

rbar

a Sc

hmid

2 , Ms.

Pia

Sch

neew

eiss

1 , Ms.

Tin

a M

itter

amsk

ogle

r3 , Dr.

Mic

hael

Has

linge

r3 , Dr.

Mic

hael

Müh

lber

ger3 , D

r. Jo

erg

Scho

tter

2 (1.

Dan

ube

Uni

vers

ity K

rem

s, 2

. AIT

Aus

tria

n In

stitu

te o

f Tec

hnol

ogy,

3.

Prof

acto

r G

mbH

)

PD14

-Low

-Tem

pera

ture

ALD

Pro

cess

Dev

elop

men

t of

200

mm

waf

er-s

cale

MoS

2 fo

r G

as S

ensi

ng A

pplic

atio

n»

Ms.

Rah

el N

eubi

eser

1 (1. F

raun

hofe

r IM

S, D

uisb

urg)

PD16

-Fle

xibl

e ch

itos

an-b

ased

vib

rota

ctile

act

uato

rs e

xplo

itin

gw

rink

ling

inst

abili

ty»

Ms.

Fed

eric

a Ve

rgar

i1 , Ms.

Gai

a de

Mar

zo1 , D

r. A

nton

io Q

ualti

eri1 , D

r.Vi

ncen

zo M

astr

onar

di1 , P

rof.

Mic

hele

Sca

ragg

i1 , Pro

f. M

assi

mo

De

Vitt

orio

1 (1. I

stitu

to It

alia

no d

i Tec

nolo

gia)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

64

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PD18

-Sca

labl

e di

sord

ered

hyp

erun

ifor

m a

rchi

tect

ures

»M

r. M

oham

med

Bou

abde

llaou

i1 , Dr.

Zei

nab

Cheh

adi1 , D

r. M

arco

Salv

alag

lio2 , P

rof.

Axel

Voi

gt2 , P

rof.

Dav

id G

ross

o1 , Ms.

Chi

ara

Barr

i3 , Dr.

Erfa

n M

afak

heri

4 , Mr.

Luc

a Fa

gian

i5 , Pro

f. Fr

ance

sca

Into

nti6 , D

r. Je

anBe

noit

Clua

de1 , P

rof.

Jero

me

Wen

ger1 , P

rof.

Piet

ro D

e An

na7 , D

r. M

arco

Abba

rchi

1 , Dr.

Mon

ica

Bolla

ni4 (1

. Aix

Mar

seill

e U

nive

rsity

, 2. T

UD

resd

en, 3

. Pol

itec,

4. I

FN-C

NR,

L-N

ESS,

5. P

olite

cnic

o di

Mila

no, I

FN-

CNR,

6. L

ENS,

Uni

vers

ity o

f Flo

renc

e, 7

. Ins

titut

des

Sci

ence

s de

laTe

rre,

Uni

vers

ity o

f Lau

sann

e)

PD20

-A p

umpl

ess

mod

ular

mic

rofl

uidi

c pl

atfo

rm b

ased

on

capi

llari

ty a

nd w

etta

bilit

y fo

r ra

pid

diag

nost

ics

»M

r. B

ehro

uz A

ghaj

anlo

o1 , Dr.

Mat

teo

Parm

eggi

ani2 , D

r. A

lber

toBa

llesi

o3 , Dr.

Sim

one

Luig

i Mar

asso

4 (1. I

sfah

an U

nive

rsity

of

Tech

nolo

gy, 2

. Ist

ituto

Ital

iano

di T

ecno

logi

a, 3

. Pol

itecn

ico

di T

orin

o, 4

.CN

R-IM

EM)

PD22

-Des

ign

and

fabr

icat

ion

of a

com

pact

evo

lved

3D

pri

nted

met

amat

eria

l-bas

ed p

atch

ant

enna

for

5G c

omm

unic

atio

ns»

Ms.

Ilar

ia M

aras

co1 , M

r. G

IOVA

NN

I NIR

O1 , D

r. V

ince

nzo

Mas

tron

ardi

2 ,D

r. F

ranc

esco

Riz

zi2 , P

rof.

Anto

nella

D'O

razi

o1 , Pro

f. M

assi

mo

De

Vitt

orio

2 , Dr.

Mar

co G

rand

e1 (1. P

olite

cnic

o di

Bar

i, 2.

Istit

uto

Italia

no d

iTe

cnol

ogia

)

PD24

-Top

olog

ical

mag

neto

tran

spor

t pr

oper

ties

of m

icro

n-sc

ale

CoSi

Hal

l bar

s fa

bric

ated

by

focu

sed

ion

beam

mill

ing

»D

r. A

lan

Mol

inar

i1 , Mr.

Hei

nz S

chm

id1 , D

r. M

arcu

s Sc

hmid

t2 , Dr.

Vic

kySu

ess2 , D

r. M

arily

ne S

ousa

1 , Dr.

John

Bru

ley3 , D

r. S

ergu

eï T

chou

mak

ov4 ,

Dr.

Ado

lfo G

rush

in4 , D

r. Jo

hann

es G

ooth

2 , Dr.

Ber

nd G

otsm

ann1 (1

. IBM

Rese

arch

Eur

ope

- Zur

ich,

2. M

ax P

lanc

k In

stitu

te fo

r Ch

emic

al P

hysi

csof

Sol

ids,

3. I

BM T

hom

as J

Wat

son

Rese

arch

Cen

ter,

4. In

stitu

t Nee

l)

PD26

-Stu

dy o

n sp

in-o

rbit

-tor

que

indu

ced

mag

neti

zati

onm

odul

atio

n u

sing

pla

nar

Hal

l eff

ect

in c

ross

-sha

ped

mul

tila

yer

wir

es»

Dr.

Aki

nobu

Yam

aguc

hi1 , D

r. N

obuk

o M

atsu

mot

o2 , Dr.

Wat

aru

Yosh

ikaw

a2 , Dr.

Yas

uhis

a Fu

jii2 (1

. Uni

vers

ity o

f Hyo

go, 2

. KRI

inc.

)

PD28

-MW

CNT/

PDM

S –

Base

d D

ry E

lect

rode

for

a W

eara

ble

Elec

troe

ncep

halo

gram

Acq

uisi

tion

»M

s. M

aria

Bri

tes

Atal

aia

Rosa

1 , Mr.

Mat

hieu

Bai

jot1 , D

r. F

rede

rik

Ceys

sens

1 , Dr.

Nad

ezda

Kuz

nets

ova1 , P

rof.

Mic

hael

Kra

ft2 (1

. KU

Leuv

en, 2

. Uni

vers

ity o

f Leu

ven)

PD30

-Mul

tifu

ncti

onal

nan

opar

ticl

es fo

r bi

osen

sing

and

med

ical

imag

ing

»D

r. S

tefa

n Sc

hritt

wie

ser1 , D

r. M

icha

el H

aslin

ger2 , M

s. T

ina

Mitt

eram

skog

ler3 , D

r. M

icha

el M

ühlb

erge

r2 , Dr.

Ast

rit S

hosh

i4 , Pro

f.H

uber

t Bru

eckl

4 , Dr.

Mar

tin B

auch

1 , Dr.

The

odor

os D

imop

oulo

s1 , Ms.

Barb

ara

Schm

id1 , D

r. Jo

erg

Scho

tter

1 , Dr.

Mor

itz E

ggel

ing1 , M

r. C

hris

tian

Der

ntl1 (1

. AIT

Aus

tria

n In

stitu

te o

f Tec

hnol

ogy,

2. P

rofa

ctor

Gm

bH, 3

. P,

4.D

anub

e U

nive

rsity

Kre

ms)

PD32

-Dev

elop

men

t of

a L

ab o

n a

Chip

for

vira

l RN

A a

naly

sis

»M

rs. E

ve V

erpo

orte

n1 , Mrs

. Lic

ia P

erri

1 , Dr.

Val

entin

a Be

rtan

a1 , Dr.

Giu

lia M

assa

glia

2 , Dr.

Mar

zia

Qua

glio

1 , Dr.

Sim

one

Luig

i Mar

asso

1 (1.

Polit

ecni

co d

i Tor

ino,

2. p

olite

)

PD34

-Shi

ftin

g th

e pa

radi

gm o

f foc

used

-ion-

beam

mac

hini

ng fr

omsu

per-

reso

luti

on t

o ul

trah

igh-

thro

ughp

ut»

Dr.

And

rew

Mad

ison

1 , Dr.

John

Vill

arru

bia1 , D

r. K

uo-T

ang

Liao

1 , Dr.

Josh

ua S

chum

ache

r1 , Dr.

Ker

ry S

iebe

in1 , D

r. R

ober

t Ilic

1 , Dr.

J.Al

exan

der

Lidd

le1 , D

r. S

amue

l Sta

vis2 (1

. Nat

iona

l Ins

titut

e of

Sta

ndar

dsan

d Te

chno

logy

, 2. N

IST)

PD36

-Pho

toth

erm

al in

vest

igat

ion

of m

icro

ele

ctro

de a

rray

sde

cora

ted

wit

h pl

asm

onic

nan

ostr

uctu

res

»D

r. R

usta

mzh

on M

elik

ov1 , D

r. G

iulia

Bru

no1 , D

r. F

ranc

esco

Tan

tuss

i1 ,D

r. M

iche

le D

ipal

o2 , Dr.

Fra

nces

co D

e An

gelis

3 (1. I

talia

n In

stitu

te o

fte

chno

logy

, 2. I

stitu

to It

alia

no d

i Tec

nolo

gia,

3. I

stitu

to It

alia

no d

iTe

cnol

ogia

, Gen

ova,

Ital

y)

PD38

-Con

trol

of o

ptic

al p

rope

rtie

s of

pol

ymer

ic s

urfa

ces

via

plas

ma

proc

essi

ng in

a n

ew-t

ype

of p

lasm

a re

acto

r.»

Dr.

Ang

elos

Zen

iou1 , D

r. E

vang

elos

Gog

olid

es2 , M

r. G

eorg

ePa

pavi

eros

1 , Dr.

Vas

silio

s Co

nsta

ntou

dis1 (1

. Ins

titut

e of

Nan

osci

ence

and

Nan

otec

hnol

ogy,

NCS

R D

emok

rito

s, 2

. NCS

R D

emok

rito

s)

Pow

ered

by

Ex

Ord

o, e

very

thin

g yo

u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

65

Cont

inue

d fr

om W

edne

sday

, 22

Sept

embe

r

PD40

-Nan

opat

tern

ing

phot

onic

neu

ral i

mpl

ants

tow

ards

wav

evec

tor-

enco

ded

opti

cal m

onit

orin

g of

dee

p br

ain

regi

ons

»D

r. F

ilipp

o Pi

sano

1 , Dr.

Ant

onio

Bal

ena2 , M

r. M

UH

AMM

AD F

AYYA

ZKA

SHIF

3 , Dr.

Mar

co P

isan

ello

1 , Dr.

Lia

m C

olla

rd1 , D

r. D

i Zhe

ng1 , M

rs.

Sam

uela

Mar

ia A

ndri

ani1 , M

rs. C

inzi

a M

ontin

aro1 , M

r. M

arco

Bia

nco1 ,

Dr.

Bar

bara

Spa

gnol

o1 , Dr.

Leo

nard

o Si

leo1 , P

rof.

Anto

nella

D'O

razi

o4 ,D

r. M

arco

Gra

nde5 , P

rof.

Mas

sim

o D

e Vi

ttor

io6 , D

r. F

erru

ccio

Pis

anel

lo1

(1. I

stitu

to It

alia

no d

i Tec

nolo

gia,

Cen

ter

for

Biom

olec

ular

Nan

otec

hnol

ogie

s, 2

. Ist

ituto

Ital

iano

di T

ecno

logi

a, 3

. Pol

itecn

ico

diBa

ri, D

ipar

timen

to d

i Ing

egne

ria

dell'

Inno

vazi

one,

4. P

olite

cnic

o di

Bar

i,5.

Polit

ecni

co, 6

. Ist

ituto

)

PD42

-Ver

tica

l Gra

phen

e Lu

bric

ant-

infu

sed

Surf

ace

for

Cont

inuo

usD

ropw

ise

Cond

ensa

tion

»M

r. C

heuk

Win

g Ed

mon

d La

m1 , D

r. A

bina

sh T

ripa

thy1 , D

r. D

iana

Dav

ila2 , M

r. M

atte

o D

onat

i1 , Dr.

Ath

anas

ios

Mili

onis

1 , Pro

f. Ch

ande

rSh

ekha

r Sh

arm

a3 , Pro

f. D

imos

Pou

likak

os1 (1

. ETH

Zur

ich,

2. I

BMRe

sear

ch -

Zuri

ch, 3

. Ind

ian

Inst

itute

of T

echn

olog

y, R

opar

, Ind

ia)

PD44

-Fab

rica

tion

of m

esop

orou

s si

licon

mem

bran

es p

assi

vate

dw

ith

atom

ic la

yer

depo

site

d m

etal

oxi

des

»M

s. C

lara

Why

te F

erre

ira1 , M

s. R

osel

ien

Verc

aute

ren1 , P

rof.

Laur

ent

Fran

cis1 (1

. Ins

titut

e of

Info

rmat

ion

and

Com

mun

icat

ion

Tech

nolo

gies

,El

ectr

onic

s an

d Ap

plie

d M

athe

mat

ics,

UCL

ouva

in)

PD46

-Mic

roel

ectr

ode

arra

ys in

tegr

ated

wit

h ho

llow

mic

rofl

uidi

cna

nocy

linde

rs e

nabl

e lo

caliz

ed d

rug

deliv

ery

and

larg

e sc

ale

elec

trop

hysi

olog

ical

rec

ordi

ngs

»D

r. F

ranc

esco

Tan

tuss

i1 , Dr.

Giu

lia B

runo

2 , Dr.

Giu

sepp

ina

Iach

etta

1 ,D

r. G

iova

nni M

elle

1 , Dr.

Nic

olò

Colis

tra1 , D

r. M

iche

le D

ipal

o1 , Dr.

Fran

cesc

o D

e An

gelis

3 (1. I

stitu

to It

alia

no d

i Tec

nolo

gia,

2. I

talia

nIn

stitu

te o

f tec

hnol

ogy,

3. I

stitu

to It

alia

no d

i Tec

nolo

gia,

Gen

ova,

Ital

y)

PD48

-Con

trol

ling

surf

ace

roug

hnes

s of

nan

olam

inat

e Cr

N/W

2Nco

atin

gs b

y m

odul

atin

g th

e co

nsti

tuen

t la

yers

thi

ckne

ss»

Mr.

Mar

co B

eltr

ami1 , D

r. S

imon

e D

al Z

ilio2 , D

r. G

rego

r Ka

pun3 , D

r.Ca

talin

Dac

ian

Ciub

otar

u2 , Dr.

Mar

co L

azza

rino

2 , Pro

f. O

rfeo

Sba

izer

o1

(1. D

ipar

timen

to d

i Ing

egne

ria

e Ar

chite

ttur

a, U

nive

rsità

di T

ries

te,

Trie

ste

3412

7, It

alia

, 2. C

NR-

IOM

, Ist

ituto

Off

icin

a de

i Mat

eria

li-Co

nsig

lio N

azio

nale

del

le R

icer

che,

Tri

este

341

49, I

talia

, 3. C

ente

r of

Exce

llenc

e on

Nan

osci

ence

and

Nan

otec

hnol

ogy,

Lju

blja

na, 1

000,

Slov

enia

)

PD50

-Ext

rem

e A

spec

t Ra

tio

Met

amat

eria

ls fo

r Se

nsin

g an

d Sp

ace

Expl

orat

ion

»D

r. R

icha

rd N

orte

1 (1. D

elft

Uni

vers

ity o

f tec

hnol

ogy)

PD52

-Pho

tolu

min

esce

nce

mec

hani

sms

of c

itri

c ac

id-d

eriv

ed, N

-do

ped

Carb

on Q

uant

um D

ots

for

sens

ing

appl

icat

ions

»M

r. A

post

olos

Seg

kos1 , D

r. E

leni

Ale

xand

rato

u2 , Dr.

Elia

s Sa

kelli

s1 , Dr.

Nik

olao

s Bo

ukos

1 , Pro

f. Sp

yrid

on G

arde

lis3 , P

rof.

Kons

tant

inos

Kord

atos

4 , Dr.

Chr

isto

s Ts

amis

5 (1. I

nst.

of N

anos

cien

ce a

ndN

anot

echn

olog

y, N

CSR

“Dem

okri

tos”

, Ath

ens,

153

10, G

reec

e, 2

.D

ivis

ion

of E

lect

rom

agne

tics,

Ele

ctro

optic

s an

d El

ectr

onic

Mat

eria

ls,

Scho

ol o

f Ele

ctri

cal E

ngin

eeri

ng, N

TUA,

Ath

ens,

157

80, G

reec

e, 3

.D

epar

tmen

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Rom

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. Lui

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ngay

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ang

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3 , Dr.

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mic

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vann

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Prof

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i1 , Dr.

Lai

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r. W

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Luc

ia R

oman

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Joan

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tefe

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adm

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r. Z

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s. C

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MC

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r. S

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nore

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Mar

co S

alva

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r. R

ober

to B

erga

mas

chin

i4 , Dr.

And

rea

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bio1 , M

rs. V

irgin

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r. V

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nkar

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Andr

eas

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co A

lban

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ente

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f. Ax

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onid

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ance

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rof.

Kers

tin V

olz2 , P

rof.

Albe

rto

Tosi

1 , Pro

f. G

iova

nni I

sella

1

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olite

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no, 2

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lipps

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10:1

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na A

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erea

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r. Is

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rt M

ülle

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mut

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kim

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r. S

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r. Jo

se M

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r. Jo

ana

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e Ca

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r. G

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ume

Le S

aux1 , D

r. A

vish

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dri2 , D

r. U

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Yos

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1 , Mrs

. Est

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s. M

ing-

Chun

g W

u4 , Pro

f. Je

an-C

heng

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of. A

ngel

Por

gado

r2 , Pro

f. M

ark

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artz

man

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tmen

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eria

ls E

ngin

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lse

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chno

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-Gur

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vers

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aga

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e Ka

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anos

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isw

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o Fa

bric

atio

nan

d Ch

arac

teri

zatio

n T

echn

ical

Uni

vers

ity o

f Den

mar

k, 3

. Uni

vers

ity o

fCo

penh

agen

, 4. D

epar

tmen

t of M

echa

nica

l Eng

inee

ring

, Tec

hnic

alU

nive

rsity

of D

enm

ark.

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0pm

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h Br

eak

1:45

pmA

7 -

Sess

ion

A7:

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ance

d Ph

oton

Lit

hogr

aphy

Audi

toriu

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aire

d by

: Pro

f. Lu

cian

o Sc

altr

ito a

nd D

r. D

IMIT

RIO

S KA

ZAZI

S

1:45

pmA

dvan

cing

the

pho

tolit

hogr

aphy

for

mor

e M

oore

»D

r. Y

asin

Eki

nci1 (1

. Pau

l Sch

erre

r In

stitu

te)

2:15

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o-ph

oton

fluo

resc

ence

-ass

iste

d la

ser

abla

tion

of n

on-p

lana

rm

etal

sur

face

s: fa

bric

atio

n of

opt

ical

ape

rtur

es o

n ta

pere

d fi

bers

for

opti

cal n

eura

l int

erfa

ces

»M

r. M

arco

Bia

nco1 , D

r. A

nton

io B

alen

a2 , Dr.

Fili

ppo

Pisa

no2 , D

r. M

arco

Pisa

nello

2 , Dr.

Leo

nard

o Si

leo1 , P

rof.

Bern

ardo

L. S

abat

ini3 , P

rof.

Mas

sim

o D

e Vi

ttor

io2 , D

r. F

erru

ccio

Pis

anel

lo2 (1

. Ist

ituto

Ital

iano

di

Tecn

olog

ia, C

ente

r fo

r Bi

omol

ecul

ar N

anot

echn

olog

ies,

2. I

stitu

toIta

liano

di T

ecno

logi

a, 3

. Mas

sach

uset

ts G

ener

al H

ospi

tal a

nd H

arva

rdM

edic

al S

choo

l)

2:30

pmIm

plem

enta

tion

of p

hase

mas

k pi

nhol

es a

s sp

atia

l filt

ers

for

lase

rin

terf

eren

ce li

thog

raph

y»

Ms.

Gio

vann

a Ca

prar

o1 , Mr.

Mic

hael

Möl

ler2 , M

r. T

obia

s Ab

el1 , D

r.Je

ns B

olte

n2 , Pro

f. M

ax C

hris

tian

Lem

me1 (1

. AM

O G

mbH

, RW

THAa

chen

, 2. A

MO

Gm

bH)

2:45

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pto-

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dic

3D p

rint

ing

plat

form

for

mic

ro-e

nvir

onm

ent

and

tiss

ue e

ngin

eeri

ng»

Mr.

vic

tor

four

nie1 , M

rs. S

andr

ine

Assi

e-So

ulei

lle2 , D

r. Ju

lie F

oncy

2 , Dr.

Rem

i cou

rson

2 , Ms.

loui

sa B

oyer

2 , Dr.

Pie

rre

Jose

ph2 , D

r. G

ozde

Eke

-Ce

vik2 , M

r. x

avie

r do

llat2 , D

r. Ju

lien

Roul

2 , Dr.

Em

man

uelle

Tre

visi

ol3 ,

Mr.

Arn

aud

Reitz

1 , Dr.

Lau

rent

Mal

aqui

n2 (1. F

luig

ent,

2. L

AAS,

3. T

BI)

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r. F

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ccio

Pis

anel

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ter

P. K

ern

1:45

pmA

sin

gle-

chai

n st

imul

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pons

ive

poly

mer

as

a no

vel

elec

troc

hem

ical

sen

sing

pla

tfor

m -

MN

E Yo

ung

Inve

stig

ator

Aw

ard

2021

»Pr

of. E

dwar

d So

ng1 (1

. Uni

vers

ity o

f New

Ham

pshi

re)

2:15

pmPo

lym

er S

uppo

rts

for

Prot

ein

Dyn

amic

Stu

dies

at

X-ra

y Fr

eeEl

ectr

on L

aser

s»

Dr.

Cel

estin

o Pa

dest

e1 , Ms.

Mel

issa

Car

rillo

1 , Ms.

Agn

iesz

ka K

arpi

k1 ,D

r. Jo

hn B

eale

1 (1. P

aul S

cher

rer

Inst

itut)

2:30

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n-ch

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icro

scal

e 3D

pri

ntin

g of

gol

d vi

a lo

cally

con

fine

del

ectr

odep

osit

ion

»D

r. P

atri

k Sc

hürc

h1 , Mr.

Dav

id O

senb

erg2 , D

r. P

aolo

Tes

ta1 , D

r. Ja

kob

Schw

iedr

zik2 , D

r. W

abe

Koel

man

s1 (1. E

xadd

on, 2

. Em

pa T

hun)

2:45

pm“P

hase

nan

oeng

inee

ring

” vi

a th

erm

al n

anol

itho

grap

hy:

nano

patt

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ng m

agne

tism

and

bey

ond

»D

r. E

doar

do A

lbis

etti1 , D

r. S

ilvia

Tac

chi2 , D

r. R

affa

ele

Silv

ani2 , M

r.D

avid

e G

irard

i1 , Dr.

Sim

one

Fini

zio3 , D

r. S

ebas

tian

Win

tz3 , D

r. Jo

erg

Raab

e3 , Pro

f. G

iova

nni C

arlo

tti4 , P

rof.

Ricc

ardo

Ber

tacc

o1 , Pro

f. El

isa

Ried

o5 , Pro

f. D

anie

la P

etti1 (1

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itecn

ico

di M

ilano

, 2. C

NR-

IOM

, 3. P

SI,

4.U

nive

rsità

di P

erug

ia, 5

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Yor

k U

nive

rsity

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1:45

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ssio

n C7

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wit

h ce

lls a

nd b

acte

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Lon

dra

Chai

red

by: D

r. B

arba

ra S

pagn

olo

and

Dr.

Fra

nces

co R

izzi

1:45

pmLi

ving

bac

teri

a di

rect

ly e

mbe

dded

into

ele

ctro

spun

nan

ofib

ers:

desi

gn o

f new

ano

de fo

r-bi

oele

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chem

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sys

tem

s»

Dr.

Giu

lia M

assa

glia

1 , Dr.

Adr

iano

Sac

co2 , D

r. A

ngel

ica

Chio

doni

2 , Pro

f.Fa

briz

io P

irri

1 , Dr.

Mar

zia

Qua

glio

1 (1. P

olite

cnic

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Tor

ino,

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ter

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aina

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echn

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lito)

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ente

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stai

nabl

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ture

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hnol

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s (II

T, C

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Polit

o))

2pm

Elab

orat

ion

of n

anon

eedl

e ar

rays

via

nan

osph

ere

litho

grap

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o to

p-do

wn

appr

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es: A

pplic

atio

n to

intr

acel

lula

r de

tect

ions

of n

euro

dege

nera

tive

dis

ease

s’ b

iom

arke

rs.

»M

r. P

aul M

OU

STIE

Z1 , Mr.

Dm

itri Y

AREK

HA1 , D

r. Y

anni

ck C

OFF

INIE

R1 (1.

CNRS

-IEM

N)

2:15

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cent

Dev

elop

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Can

tile

ver

Tech

nolo

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r H

igh-

Spee

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FM»

Prof

. Geo

rg F

antn

er1 (1

. EPF

L)

2:45

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lect

ive

cell

adhe

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on

3D s

caff

olds

via

pho

to-in

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NA

func

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aliz

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Dr.

Enr

ico

Dom

enic

o Le

mm

a1 , Ms.

Rob

erta

Tab

one1 , M

r. K

ai R

ichl

er1 ,

Dr.

Ann

-Kat

hrin

Sch

neid

er1 , P

rof.

Chri

stof

Nie

mey

er1 , D

r. C

laud

iaBi

zzar

ri1 , P

rof.

Mar

tin B

astm

eyer

1 (1. K

arls

ruhe

Inst

itute

of T

echn

olog

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3pm

Coff

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reak

3:30

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enar

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Pao

lo V

inei

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dito

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red

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r. F

erru

ccio

Pis

anel

lo a

nd P

rof.

Anja

Boi

sen

Tech

nica

l dev

elop

men

ts o

n th

e st

udy

of t

he h

ealt

h im

pact

of

envi

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osur

es»

Paol

o Vi

neis

(Im

peri

al C

olle

ge L

ondo

n (U

K))

4:15

pmPl

enar

y 6:

Zhe

nan

Bao

Audi

toriu

mCh

aire

d by

: Dr.

Fer

rucc

io P

isan

ello

and

Pro

f. An

ja B

oise

n

Skin

-insp

ired

org

anic

ele

ctro

nics

»Zh

enan

Bao

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Ord

o, e

very

thin

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ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

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onf

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n M

icro

and

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o E

ngin

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ng 2

0 - 2

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Cont

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d fr

om T

hurs

day,

23

Sept

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5pm

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ing

Conc

ert

Audi

toriu

m

5:45

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osin

g Re

mar

ksAu

dito

rium

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o, e

very

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u ne

ed t

o ru

n a

rese

arch

con

fere

nce.

MN

E20

21 -

47t

h in

tern

atio

nal c

onf

eren

ce o

n M

icro

and

Nan

o E

ngin

eeri

ng 2

0 - 2

3 Se

p 2

021

73

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