Microproducts Breakthrough Institute Overview

Rich Peterson Ward TeGrotenhuisBrian Paul Terry HendricksGoran Jovanovic Dan PaloKevin Drost Pacific NorthwestChih-hung Chang National LaboratoryOregon State University

2

ONAMI Mission

Grow Oregon’s nanoscience and microtechnology innovation capacity to leverage outside investment:

• Compete nationally for research $$ growth via collaborations among OHSU, OSU, PNNL, PSU and UO

• Attract private capital to Oregon startups seeded by a professionally managed ONAMI “gap” fund

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ONAMI Shared Facilities*

Nano-Materials Characterization Commercialization

*not an exhaustive list of OUS-based labs offering services/collaboration to industry

Microproducts Breakthrough InstituteAn ONAMI Facility – Jointly Operated by OSU/Pacific Northwest National Laboratory

Goals Provide basic science “infrastructure” to

support technology development of Microchannel Process Technology (MPT) and Microreactor-Assisted Nanomanufacturing (MANX)

Development of innovative “early” product and process technology for a wide range of public and private sector applications

Support of MPT and MANX education at OSU by enabling collaboration with industrial partners

Private sector partnering for the development of specific devices and technology suites

Economic development in the Pacific Northwest

Enabling High Technology Commercialization by Accelerating the R&D of Emerging Microchannel and Nanomanufacturing Process Technologies

DH

L

• Microchannel Array

Microchannel Process Technology

• Heat and Mass Transfer

Microchannel

Macrochannel

resavg

H

res

tVLD

D

t

2

2

micromacro AnA

where DH is the hydraulic dia. and D is the fluidic diffusivity

Micro Energy and Chemical SystemsHeat Exchanger Comparison

Parameter Units PNNL HX Commercial HX [1]

HX mass [2] Kg 5 70

HX volume [3] L 1.25 35

Duty Watts 3500 3500

Effectiveness % 87 <80

Side 1, Air dP in H2O

4.3 4.3

Side 2, Air dP in H2O

3.1 3.1

Parameter Units PNNL HX Commercial HX

HX mass [1] g 432 2285

HX volume [2] cm3 134 ~1278

Duty W 155 136

Effectiveness % 92.2 80.0

Side 1, Air dP psi 0.3 <1 psi

Side 2, Air dP psi 0.9 < 1 psi

[1] Mass does not include tubing connections.

[2] Approximate volume occupied by heat exchanger.

Microchannel Benefits

Attribute BenefitReduced Size Factor of 10-100 (volume); 5-50 (weight) – rapid heat and

mass transfer & inherent high surface area to volume

Safety Low flame propagation; low inventory; fast quench

Low Pressure Drop Reduced pumping power for same process duty

Good Reaction Control

Minimize undesirable side and back reactions; can process highly energetic reactions

Can be Gravity Insensitive

Orientation independence

High Integration Enables complex processes in single device with higher efficiency

Modular & Reconfigurable

Enhances reliability, configurable in broad range of capacities, enables incremental capacity growth, testing at small capacities and more predictable scale up

Mass Production Microlamination approach suits mass production

Microfluidic Technology

Microchannel Process Technology (MPT)Micro Total Analysis Systems (µTAS)

BIOMEDICAL

MEMS

CHEMICAL

BIOLOGICALCHEMICAL

ENERGY

Cell sorting

DNA Diagnostics

Inkjet Print Heads

Drug Delivery

MicroelectronicCooling Automotive Heat

Pumps

Portable Power Generation

Fuel ReformingPoint-of-use

Nanomaterial Synthesis

BiodieselSynthesis

Lab-on-a-chip

ProteomicsSingle Cell Analysis

Cytosensors

KidneyDialysis

BiopolymerSynthesis

Water Purification

Person Portable Cooling

Blood Processing

At-Home Sensors

>> 100 mL/minpL or nL

higherlower

25 µm < Channel Height < 250 µm

Fluid Volume

Application Temperature

Channel Dimensions < 100 µm

Analytical Microfluidics Arrayed Microfluidics

Emerging Industry

Fuel Processing

Chemical Processing

Heating & Cooling

Nanomaterial Synthesis

Separations

life microsystems

200 µm wide channels

“Number Up” Channels

channel header

channels

Single Lamina

• Channels – 200 µm wide; 100 µm deep

– 300 µm pitch

• Lamina (24” long x 12” wide)– ~1000 µchannels/lamina

– 300 µm thickness

Patterning: • machining (e.g. laser …) • forming (e.g. stamping …)• micromolding

“Number Up” Laminae

• Laminae (24” long x 12” wide)– ~1000 µchannels/lamina

– 300 µm thickness

• Device (12” stack)~ 1000 laminae= 1 x 106 reactor µchannels

Bonding: • diffusion bonding• solder paste reflow• laser welding …

Patterning: • machining (e.g. laser …) • forming (e.g. stamping …)• micromolding

24”

12”

12”

12”

24”Cross-section of Microchannel Array

“Number Up” Devices

Bonding: • diffusion bonding• solder paste reflow• laser welding …

Interconnect• welding• tapping

24”12”

12”

Microchannel Reactor

Bank of Microchannel Reactors

(9 x 106 microchannels)• Device (12” stack)

~ 1000 laminae= 1 x 106 reactor µchannels

• Laminae (24” long x 12” wide)– ~1000 µchannels/lamina

– 300 µm thickness

Arrayed Microchannel Manufacturing Fab

3.0 FTE MBI staff currently exists

Supply Chain

Partners

MBI

MPT Research

Application Development

Business Assessment

Commerciali-zation

Commerciali-zation

Capability Development

Processes

New devices Biz partn

er

Platforms

Business partners

Industrial PartnersIndustrial Partners

0.3 FTE ONAMI Extension Director

Micreactor-Assisted NanomanufacturingGreener, Safer, Cheaper Processing of Nanomaterials

Oregon Process Innovation Center

3.0 FTE MBI staff currently exists

Nanotech Business Partners

MBI Buildout

PilotProduction

Proto-typing

TestTest

Current

Ph 2

ONAMI $9.5M Facilities• 14 labs + 16 offices• AMM pilot production• Infrastructure

Nanomfg Equipment• Oregon BEST • Novel Process Equip• Process Diagnostics

Capabilities

• Design Studio

• Fab– Shells– Surfaces

• Characterization

• Machine Shop

• Concept Development and Solid Modeling

– Solidworks• Functional Analysis and

Computational Fluid Dynamics– COMSOL (Finite Element)– Fluent (Finite Volume)

• Manufacturability Analysis and Thermal and Stress Analysis

– Abaqus (Finite Element)– Cosmos (Finite Element)

Capabilities

• Design Studio

• Fab– Shells– Surfaces

• Characterization

• Machine Shop

• Laser micromachining–Deep UV (266 nm)–UV (355 nm)–Green (532 nm)

• Isotropic etching• microEDM• Electrochemical etching• Electroforming• Microembossing• Nanoimprinting• Injection molding• CNC micromilling• Ultrasonic machining

Cour

tesy

of D

OE

NETL

Capabilities

• Design Studio

• Fab– Shells– Surfaces

• Characterization

• Machine Shop

• Diffusion bonding• Diffusion brazing• Diffusion soldering• Solder paste bonding• Laser transmission welding• Thermal adhesive• UV adhesive• Pressure-sensitive adhesive• Solvent welding• Ultrasonic welding

Courtesy of DOE NETL

10 20 30 40 50 60

Cou

nts

per

seco

nd

substrate

222

111

CdS

2 (degrees)

Capabilities

• Design Studio

• Fab– Shells– Surfaces

• Characterization

• Machine Shop

• Plasma Cleaning/Prep• Sputtering• Atomic Layer Deposition• Microreactor-assisted

Nanoparticle Deposition• Microreactor-assisted Solution

Deposition• (Molecular Beam Epitaxy)

Capabilities

• Design Studio

• Fab– Shells– Surfaces

• Characterization

• Machine Shop

• Laser scanning microscope• Contact profiler• Optical microscopes at all mags

with video/image capture• Gas chromatography• Liquid chromatography• Scanning electron microscope

Supplier Interactions

• Desired interactions– Microforming– Microbrazing– Adhesive bonding

Patterning:Feature Process

Blind cut PCMDrawing of metal foilsRoller embossing

Through cut 

Laser cuttingPunch/blankAbrasive water jet

Bonding:Process CapabilityDiffusion brazing VHP (vendor)  Shim coating  DTE fixtureBrazing Braze dispense  Braze foil  Screen printing  Forming gas oven  Reflow oven  Humpback furnaceSoldering  Adhesive bonding Adhesive dispense

Screen printingLaser weldingUltrasonic weldingSpark plasma bonding

Current Vendor EngagementVendor Engagement Needed

Industry Partnership

Market Development

Technology Development

Technology Partners• Large companies• Technology “off-the-shelf”• Equipment, methods, platform technology

product licenses

Supply Chain Partners• Existing companies• Small & medium sized• Leverages capabilities

Process Development

apps

process licenses, manufacturability

research needs

Business Partners• Entrepreneurs• Marketeers• Existing businesses

product designs

Microproducts Breakthrough Institute

Industrial OutreachMonday, September 21,2009Tentative Agenda

1:00 – 1:10

Welcome and Introduction to the Workshop Kevin Drost, OSU, MBI

1:10 – 1:30

Significance of Microchannel Process TechnologyKevin Drost, OSU, MBI

1:30 - 1:50 Advantages of MPT Solutions Goran Jovanovic, OSU, MBI

1:50 - 2:15 Arrayed Microchannel ManufacturingBrian Paul, OSU, MBI

2:15 – 2:30

The MBI Alliance: Industry, National Labs and OSUDan Palo, PNNL, MBI

2:30 – 2:40

MPT OpportunitiesGoran Jovanovic, OSU, MBI

2:40 – 3:00 Break

3:00 – 3:20

Opportunity 1 – Microchannel Energy ApplicationsRichard Peterson, OSU, MBI

3:20 – 3:40

Opportunity 2 – Building TechnologiesWard TeGrotenhuis, PNNL, MBI

3:40 – 4:00

Opportunity 3 – Polysilicon ProductionGoran Jovanovic, OSU, MBI

3:40 – 4:00

Opportunity 4 – Sustainable NanomanufacturingBrian Paul, OSU, MBI

4:20 – 4:30

How Do You Connect to MBI and Transfer Technologies?Brian Wall, OSU Technology Transfer

4:30 – 5:00 Open Forum