Microfluidic Substrates Market and Processing trendsObjectives of the report 26 Microfluidic Market 27 Introduction of the market section 28 Microfluidic devices market forecasts 29

Microfluidic Substrates Market

and Processing trends

Sample of the report

June 2011

© 2011• 2

Microfluidic Substrates 2011 Copyrights © Yole Développement SA - All rights reserved.

Table of Content

Page

Table of Content 2

Executive Summary 13

Introduction 24

Context 25

Objectives of the report 26

Microfluidic Market 27

Introduction of the market section 28

Microfluidic devices market forecasts 29

Microfluidic Component Market: Value and forecast 30

Microfluidic Component Market: Value and forecast; Market in M$ 31

Microfluidic Component Market: Value and forecast; Market in Munits 32

Microfluidic players world 33

Microfluidic Fabs Geographical Distribution 34

Microfluidic device market divided by substrates and applications; Market Value in $M 35

Microfluidic devices: Material value share 36

Microfluidic devices market by Substrates:Market value in $M 37

Material distribution 2010 38

Material trends for clinical and veterinary diagnostics 39

Material trends for point of care devices 40

Material trends for point of care devices 40

Material trends for pharmaceutical research 41

Material trends for analytical devices 42

Material trends for industrial and environment applications 43

Material trends for drug delivery 44

Material trends for microreaction technology 45

Microfluidics Value Chain 46

Value chain comparison 47

Polymer microfluidic devices market 48

Market of microfluidic devices made of polymer 49

Microfluidics Polymers Market 50

Polymer share evolution 51

Polymer Microfluidics supply chain & players 52

Polymer devices supply chain analysis 53

Value Chain for Polymer 54

Main polymer Players 55

EPOCAL: Epoc SmartCard 56

Ocusense (Occulogix) 57

Chempaq 58

Clondiag (Alere) PIMATM CD4 Analyzer 59

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Table of Content

Fluidigm Dynamic Array for Single Cell Gene Expression 60

Gyros Gyrolab Bioaffy™ CD 61

Glass microfluidic devices market 62

Market of microfluidic devices made of glass 63

Glass share evolution 64

Glass Microfluidics supply chain & players 65

Glass devices supply chain analysis 66

Supply Chain for Glass substrates 67

Value Chain for Glass substrates 68

Main Glass Players 69

Illumina Whole-Genome Genotyping Kits 70

CALIPER Life Sciences 71

Glass microreaction products: Corning Glass 72

Glass microreaction products: Chemtrix MRT 73

Silicon microfluidic devices market 74

Market of microfluidic devices made of silicon 75

Silicon Microfluidics supply chain & players 76

Supply Chain for Silicon substrates 77

Boehringer MicroParts Respimat® 78

MicroParts Respimat® Nozzle 79

Silicon wafer market, in units and $M 80

IBM Zurich 81

STMicroelectronics In-Check platform -1 82



Silicon Biosystems DEPArrayTM 85

Debiotech insulin pump 86

Metal and Ceramics microfluidic devices market 87

Market of microfluidic devices made of metal and ceramics 88

Micro Reaction Technology exemples 89

Lonza Microreactors 90

Ehrfeld modular microreaction systems 91

Transdermal Microneedle Developments 92

Summary and conclusions: Microfluidic devices market 93

Market section summary -1 94

Market section summary -2 95

Cost Analysis 96

Introduction and objectives 97

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Cost simulation: Chip Design 98

Cost Simulation: Scenario 1; Glass 99

Cost Simulation: Scenario 2; Si +Glass 100

Cost Simulation: Scenario 3; Polymer Injection Molding 101

Mold Optimization 102

Cost Simulation: Scenario 4; Polymer NIL 103

Stamp Optimization 104

Cost simulation: Results 105

Cost simulation analysis 106

Cost breakdown for large scale production 107

Summary of the cost analysis section 108

Microfluidic Materials 109

Microfluidic materials: Introduction 110

Microfluidics Materials 111

Materials overview -1 112

Materials overview -2 113

Glass Materials 114

Possible structurations of Glass substrates 115

Key features for glass substrates in microfluidics applications 116

Types of Glass -1 117

Types of Glass -2 118

Glass material comparison 119

Glass (structured) substrates players (Non-exhaustive list) 120

Main Material Suppliers (Non Exhaustive) 121

Main glass manufacturing processes -1 122

Main glass manufacturing processes -2 123

Polymer Materials 124

Microfluidics Polymers -1 125

Microfluidics Polymers -2 126

Main polymer materials suppliers 127

Summary and conclusions: Microfluidic materials 128

Summary of the material section 129

Manufacturing Techniques 130

Introduction and objectives 131

Process classification 132

Some process flow comparison 133

Example: Sony DADC process flow 134

Manufacturing processes comparison 135

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Manufacturing processes application 136

Reshaping processes 137

Reshaping processes overview 138

Reshaping processes characteristic data 139

Roller imprinting 140

Hot embossing 141

Thermal NIL (TNIL) 142

UV - NIL 143

UV NIL versus Thermal NIL 144

Soft Lithography -1 145

Soft lithography -2 146

Soft Lithography -3 147

Injection Molding 148

Injection molding process 149

Subtractive processes 150

Subtractive processes overview 151

Characteristic dimensions 152

Photolythography 153

Glass process: FOTURAN 154

The FOTURAN Process versus standard etching 155

LIGA Process 156

LIGA process flow 157

Etching processes -1 158

Etching processes -2 159

Wet etching vs dry etching 160

Etching process comparison 161

Wet etching process 162

Wet etching principle 163

Wet chemicals for Etching 164

Dry etching principle 165

Dry etching types 166

Dry etching characteristics 167

Dry etching qualitative data 168

Sputter etching/ Ion milling 169

Plasma etching 170

Plasma etching principle 171

Reactive ion etching RIE 172

Typical dry etch chemistries 173

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Table of Content

Powder blasting / Sand blasting 174

Laser ablation 175

Micro-Electro Discharge Machining: EDM -1 176

Micro-Electro Discharge Machining: EDM -2 177

Additive processes 178

Screen Printing: Definition 179

Screen Printing: Technology Principle 180

Surface modification 181

Exemple Sony Proprietary coatings 182

Common Organic Functionalized Surfaces 183

Deposition techniques 184

Chemical vapor deposition (CVD) 185

Chemical vapor deposition (CVD) process 186

Physical vapor deposition (PVD) 187

PVD Evaporation 188

CVD vs PVD 189

PVD Sputtering 190

Electron beam gun evaporation 191

Sputtering vs Evaporation 192

Resistive heating & inductive heating 193

Resistive heating vs Electron beam processes 194

Electroplating 195

Sealing and Bonding 196

Bonding and sealing 197

Anodic bonding -1 198

Anodic bonding -2 199

Thermal fusion bonding 200

Laser welding -1 201

Laser welding -2 202

Summary and conclusions: Manufacturing techniques 203

Summary of the Manufacturing section 204

Main Equipment Suppliers (non exhaustive) -1 205




Supply chain for Diagnostic applications 209

Introduction supply chain analysis 210

The IVD Supply chain 2011 -1 211

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Table of Content

The IVD Supply chain 2011 -2 212

Top 15 IVD companies 2009 213

Examples of Collaboration 214

IVD supply chain analysis 215

Conclusion 216

Summary and conclusions -1 217



Appendix 220

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Context

• Microfluidics is on its way to becoming a main stream enabling technology

for medical diagnostics, life science research, as well as drug delivery and

synthesis. The market of microfluidic devices (first level packaged devices,

without biological content) is expected to growth with more than 20% in

the next five years and exceed $5 Billion in 2016.

• Today, no real standard in terms of materials have been defined, but the

economic drivers create a partitioning of the market with on one hand, low

cost single point disposable devices, and on the other hand high density

and high accuracy chips.

• The future perspectives for polymer, glass or silicon made microfluidic

chips are thus strongly dependent on the targeted applications.

© 2011• 9


Objectives of the report

• The report answers the following questions:

From the OEM perspective: Which material fits best my application?

From the material and manufacturing service providers perspective: What is the

potential of my technology in the microfluidics market?

What is the link between applications, functions needed and materials

• The objectives of this report are:

Provide and overview of the main materials used in microfluidics

Provide market forecast of the by material

Describe the main manufacturing processes and their characteristics

Compare the processes in terms of structure sizes, aspect ratios, speed and

costs

Provide an understanding of the supply and value chain

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Microfluidic Fabs Geographical Distribution

Asia Pacific 20%

Europe 41%

North America

39%

Microfluidic Fabs distribution Activity Distribution

Number of microfluidic

Fabs identified: 218

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Microfluidics Materials

Main Materials used in Microfluidics

Silicon

Glass

D 263

B 270

Borosilicate

Borofloat

Fused silica

Pyrex

Polymer

SU-8

PMMA

COC

PDMS

PTFE

PI

COP

PEEK

PET

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Process classification

Reshaping processes

• Casting, molding

• Hot embossing

• Nano imprint

• Thermo-forming

• …

Substractive processes

• Lithography

• Etching

• Micromachining

• Sand blasting

• …

Additive processes

• PVD, CVD Coatings

• Screen printing

• Lamination

• …

Bonding and sealing processes

• Anodic bonding

• Thermal bonding

• Adhesives

• …

There are many ways to classify the manufacturing processes used for

microfluidics.

We propose the four main categories, as depicted below:

In the next chapters, we will describes the different techniques in terms of

process steps and provide their main characteristics (Feature sizes,

advantages, …)

© 2011• 13


Reshaping processes overview

Reshaping methods

Large area continuous

Roll-to-roll

Imprint by UV exposure

UV- NIL

Imprint under pressure and temperature

Thermal NIL

Hot embossing

Soft lithography

Replica molding

Microtransfer Molding

Microcontact printing

Micromolding in capillaries

Solvent-assisted micromolding

Injection Molding

Reel to Reel manufacturing: screen printing of silver conducting paste

(source FhG-IZM)

© 2011• 14


UV - NIL

• In UV- NIL, a UV-curable liquid photopolymer is deposited as a resist on the

substrate before the imprinting process.

• The mold is composed of transparent material such as glass, fused silica.

• This method also use subsequent deposition and/or etching steps.

UV - NIL Basic process flow

Imprint steps

• A thin layer of UV-curable liqud photopolymer is spin-coated on the substrate.

• The resin is liquid at room temperature

• A mold is pressed into the melt polymer under small pressure and the resist fill the trenches of the mold

• The resist is then cured in UV-light, becomes solid and is crosslinked

• After the imprinting step, the mold is released

• Resist residual layer is then removed

A contrast pattern in the resist is left on the substrate

Mold removed

UV and Pressure applied

Mold

Silicon substrate

Resist layer

Mold

Silicon substrate Mold

Silicon substrate

UV-light

© 2011• 15


Subtractive processes overview

Subtractive Technologies

Photolithography LIGA process Etching

Wet etching

Dry etching

Mechanical process

Powder blasting Laser ablation Micromachining;

uEDM

Die sinking

Wire EDM

High aspect ratio structure made with

the FOTURAN process, Source

Mikroglas

© 2011• 16


Etching processes -1

• Etching processes consists of removing selected areas from wafer substrates. They follow the “resist mask patterns step on the wafer, called lithography.

• Etching processes can be classified into two categories :

Wet etching process

uses liquid chemicals or etchants to remove materials from the wafer

does not change the chemical nature of the dissolved material

Has usually the isotropic etch profile ie: wet etching takes place in all directions at the same rate

Dry etching process

utilizes a vapor phase etchant or reactive ions to dissolve or sputter the material

Has the anisotropic etch profile ie: process proceeds in one direction only

( vertical only = completely anisotropic which is preferable)

Provides higher resolution

Anisotropic wet etching Isotropic wet etching

Layer that has to be

etched

Substrate

substrate

Substrate

Etch mask

© 2011• 17


Etching processes -2

• The selection of the etching method is relies on finding an

optimum among the following conflicting requirements

– Vertical profile

– Minimal undercutting or bias

– Selectivity to other exposed films and resist

– Uniform and reproducible

– Clean, economical, and safe

Anisotropic etch Isotropic etch Perfectly anisotropic

Wet Etching Dry Etching

$, Fast $$$, Slow

© 2011• 18


Chemical vapor deposition (CVD)

• Chemical vapor deposition (CVD) is a deposition method where reactants gases (chemical precursors) are simultaneously introduced into a reaction chamber (furnace heater).

CVD set-up with hot wall

CVD set-up with cold wall

© 2011• 19


Yole activities in Microfluidics

Media business News feed / Magazines /

Webcasts

www.yole.fr

Market Research Reports & database

Consulting services

Market research, Technology & Strategy

© 2011• 20


Microfluidics reports from YOLE

Documents

Microfluidic Substrates Market and Processing trendsObjectives of the report 26 Microfluidic Market 27 Introduction of the market section 28 Microfluidic devices market forecasts 29