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2006
M i c r o e l e c t r o n i c S y s t e m s
Microelectronic Systems
at the
Department of Informatics, University of Oslo
Professor Oddvar Søråsen
October, 2006
2006
M i c r o e l e c t r o n i c S y s t e m s
Faculty of Theology
Faculty of ArtsFaculty
of LawFaculty of Medicine
Faculty of Dentistry
Faculty of Social Sciences
Faculty of Education
Faculty of Mathematics and Natural Science
Department of Informatics
Department of Mathematics
Department of Physics
Department of Geophysics
Department of Chemistry
Department of Biology
Institute of Theoretical Astrophysics
Department of Biochemistry Department of
Geography
School of Pharmacy
University of Oslo
UoO: 30 000 students, 4600 employees
2006
M i c r o e l e c t r o n i c S y s t e m s
Department of InformaticsDepartment of Informaticswww.ifi.uio.no
The CS department at UoO
2006
M i c r o e l e c t r o n i c S y s t e m s
KeyKey figuresfigures800 Bachelor students550 Master students135 PhD students1800-2000 course students110 courses + seminars
6 study programs (3+2)5 years structured Master program directed towards a professionInternational MasterParticipator in “cross disipline”informatics education (faculties of art, soc.sciences, education, law)
200 employees (incl PhD-students)13 research groups>50 partners in industry and governmentProjects funded by theNorwegian Research CouncilIncreasing number of EU projectsInnovation through UoO centre(Birkeland Innovation)
2006
M i c r o e l e c t r o n i c S y s t e m s
Main research directionsMain research directionsSoftware Technology
Object orientation: SIMULADistributed SystemsInformation SystemsMicroelectronic SystemsComputational Science
Splines
Professors O.J.Dahl andKristen Nygaard:von Neumann medal, Turing awardCommanders of St.Olaf Order
Splines for geometri and radiance rendering
2006
M i c r o e l e c t r o n i c S y s t e m s
40% 40% ofof activitiesactivities towardstowards medicinemedicine//healthhealth
Texture analysis in cancer research Health Information System Program(developing countries)
Self-adapting systems(interactive arm prosthesis)
2006
M i c r o e l e c t r o n i c S y s t e m s
Takk for oppmerksomhetenTakk for oppmerksomheten
Participating in the Norwegian Centre of Excellence: Mathematics for Applications
2006
M i c r o e l e c t r o n i c S y s t e m s
Microelectronic Systems (MES)
One of the main researchdirections at the department
2006
M i c r o e l e c t r o n i c S y s t e m s
Strategic location of the research fieldStrategic location of the research field
Mikroelektronic
Systems
MEMS Physics
Programming Signal processing
2006
M i c r o e l e c t r o n i c S y s t e m s
MES MES researchresearch groupsgroups6 faculty
iDag T. WislandiYngvar Berg iOddvar SøråseniBassen LandeiMats HøviniJim Tørresen
2 engineersiHåvard Kolle RiisiHans K. Otnes Berge
5 part time facultyiSigbjørn Næss (Nera)iAlf Olsen (Mikron) iTor Fjeldly (UNIK)iJoar M. Østby (SINTEF)iJørgen Norendal (FINT)
9 PhD studentsiShaomeng LiiJohannes LomsdaleniRene JenseniHenning GunderseniOmid MirmotahariiKyrre GletteiJens Petter AbrahamseniHåkon A. HjortlandiJørgen A. Michaelsen
3 ResearchersiPhilipp HäfligeriSnorre AunetiLena Mariann Garder
EU project: CaviarNFR project: Biol
2006
M i c r o e l e c t r o n i c S y s t e m s
TheThe NationalNational Organ for Organ for QualityQuality in in EducationEducation
The prize winner 2006: Microelectronic Systems
Close follow-up of studentsExtensive use of laboratory workCompulsory tasks/ problems to be solvedTutorsStudents participate in thedevelopment of the educationStreamlined curriculum
2006
M i c r o e l e c t r o n i c S y s t e m s
MicroelectronicMicroelectronic SystemsSystemsDeveloping systems based on integrated electronics
VLSI, ASICFrom embedded systems to transistor modeling
Two main directionsA. Robotics and Intelligent SystemsB. Nanoelectronics
2006
M i c r o e l e c t r o n i c S y s t e m s
A. A. RoboticsRobotics and Intelligent Systemsand Intelligent Systems
Design of digital systems at a high level ofabstraction
Interface towards software and algorithmsEmbedded systemsReconfigurable hardware and self-adapting systems
Implementation in FPGAs – Field Programmable Gate ArraysEvolutionary algorithms for designing hardware
Machine learning
2006
M i c r o e l e c t r o n i c S y s t e m s
B. B. NanoelectronicsNanoelectronics
Full-custom design of analog, digital and mixed-mode circuits
Requiring a thorough insight in the technology!
Micro effect circuitsData conversion circuitsBio-inspired microelectronicsUltra Wideband RadioRF MEMS – co-integration of MEMS and CMOS
2006
M i c r o e l e c t r o n i c S y s t e m s
MicroMicro effecteffect circuitscircuitsInvestigating methods for reducing power consumption
Varios transistor structuresDecreased supply voltageMultiple Valued LogicThreshold logicIntegrated redundancy
2006
M i c r o e l e c t r o n i c S y s t e m s
Data Data conversionconversion circuitscircuits
Effective methods and circuits for data conversion
DAC, ADCDelta-Sigma methodsInterface to MEMS sensors
Integrated pressure sensor
2006
M i c r o e l e c t r o n i c S y s t e m s
BioBio--inspiredinspired microelectronicsmicroelectronics”Neuromorph engineering”
Coclea implantNew ways of coding signal for transmission (pulse coding)
2006
M i c r o e l e c t r o n i c S y s t e m s
Ultra Ultra WidebandWideband radioradioWireless shorthold communication
Impuls radioRadar for medical detection
2006
M i c r o e l e c t r o n i c S y s t e m s
RF MEMS RF MEMS Integrated filters and resonators with high Q-factors
Co-integration of MEMS and CMOS
3D model of H-filter, O.P Arhaug
2006
M i c r o e l e c t r o n i c S y s t e m s
MEMS a MEMS a newnew activityactivity at MESat MESNational initiative to establish micro and nanotechnology in Norway
Norwegian Research CounselMiNaLab in neighbouring building (SINTEF and UiO)
on sabattical leave 03/04
MEMS a new degree of freedom to implementintegrated systems
microelectronics can use micromechanical componentsMEMS structures would need an electronic framework
Suitable competence at MESmodeling, analysis, implementation of VLSI from transistors to complex systems
2006
M i c r o e l e c t r o n i c S y s t e m s
SelectingSelecting a a focusfocusMEMS is a broad field
focusing om RF MEMS”RF MEMS refers to the design and fabrication ofdedicated MEMS for RF (integrated) circuits”
1a) The components operate by micromechanicsand/or
1b) The components are fabricated by micromachining
2) The components are used in RF systems
A new course established, 2005: INF5490 RF MEMS
2006
M i c r o e l e c t r o n i c S y s t e m s
WhyWhy RF MEMS?RF MEMS?Challenging, promising and exciting field!Close connection to circuit technique
An increasing number of applications of MEMS in RFLarge market: wireless communication
telecommunication, mobile phonesdistributed intelligence (observation, activation)environmental surveillance
IFI/MES strategic activity Wireless Sensor Nets
2006
M i c r o e l e c t r o n i c S y s t e m s
AppealingAppealing advantagesadvantages given by RF MEMSgiven by RF MEMS
Circuit and system miniaturizationmonolithic integration with IC or by packaging!
Lower costbatch processing
Lower power dissipationHigher performance
increased selectivityhigher Q-factorreduced lossbetter isolationlow distortionincreased bandwidth
2006
M i c r o e l e c t r o n i c S y s t e m s
Basic RF MEMS Basic RF MEMS componentscomponentsSwitchesVariable capacitorsInductorsPhase shifters
ResonatorsMicromechanical filters
focusing on real vibrating structures
Can be used to implementoscillators
filtersmixer with filter
2006
M i c r o e l e c t r o n i c S y s t e m s
Master Master projectproject ((finishedfinished))Micromechanical filter by resonating beams
H structures
Master student Ole-Petter ArhaugModeling
analytical, FEMSimulations with CoventorWare, CadenceDesign according to a specific process: QinetiQ
QinetiQ INTEGRAM processes, a part of Europractice
O.-P. Arhaug and O. Søråsen, "Designing H-shaped MicromechanicalFilters", International MEMS Conference 2006, iMEMS2006, Singapore, 9 -12 May, 2006. Journal of Physics: Conference Series, Institute of Physics(IOP), (http://www.iop.org/EJ/journal/conf).
2006
M i c r o e l e c t r o n i c S y s t e m s
MeshedMeshed 3D 3D modelmodel for FEM for FEM analysisanalysis
O-P Arhaug
2006
M i c r o e l e c t r o n i c S y s t e m s
Filter Filter operationoperation: 2 : 2 identicalidentical resonatorsresonators
In phase Out of phase
2006
M i c r o e l e c t r o n i c S y s t e m s
CoventorWare simulations for 6 resonating modes (O-P Arhaug)
2006
M i c r o e l e c t r o n i c S y s t e m s
HarmonicHarmonic responseresponse for given dampingsfor given dampings
O-P Arhaug
2006
M i c r o e l e c t r o n i c S y s t e m s
OnOn--goinggoing projectprojectIntegrated MEMS/CMOS oscillator
based on a resonating cantilever beam
Master student Jan Erik Ramstad (Bachelor HiVe)MEMS resonator with CMOS feedback amplifierTo be used as a ”resonant detector”
a mechanical resonating structure where physicalmeasurement parameters modify the resonant frequencye.g. sensing acceleration
Investigate possibilities for monolithic integrationpost CMOS micromachining
2006
M i c r o e l e c t r o n i c S y s t e m s
2006
M i c r o e l e c t r o n i c S y s t e m s
UsingUsing RF MEMSRF MEMSTodays RF systems need off-chip components to obtain required performance
matching networks, filters, resonators etc.
RF MEMS components can be used asA) Replacement for discrete passive components
B) New integrated functionalitynew system architectures
reconfigurable RF ICs by using switches
2006
M i c r o e l e c t r o n i c S y s t e m s
OnOn--goinggoing projectprojectRF transceiver for a Wireless Sensor Node
Medical applicationBrain pressure sensor
Built-in intelligenceRobustLow-power
Design and demonstration of critical RF MEMS partsInterfacing and implementation issues
2006
M i c r o e l e c t r o n i c S y s t e m s
Personal Personal researchresearch goalsgoals1) Designing RF MEMS and investigating how to usehigh performance micromechanical replacement parts in RF systems instead of todays bulky and powerconsuming off-chip components
2) Investigating effective methods for integration of theMEMS with microelectronic subsystems, preferably as a monolithic Si chip (SoC)
Critical technology and realistic implementations ofWireless Sensor Nodes