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Micro-wire EDM @ Viteris Technologies Examples of small parts Precision Machines Designed and Built to Meet your Needs Viteris Technologies, LLC 1883 South 5070 West Salt Lake City, Utah 84104 USA Web: www.viteris.com Phone: +1 (801) 503-3912 Fax: +1 (801) 886-9427 Electrical Discharge Machining Electrical discharge machining (EDM) is non-contact process capable of removing material at very small lengthscales without creating mechanical stresses. The material is removed through highly lo- calized melting and evaporation as a result of electrical discharges from an electrode to the mate- rial. The discharges, which form tiny plasma channels with temperatures up to 10,000 °C, locally melt very small amounts of material. As the plasma collapses when the current flow is shut off, the resulting vacuum pulls out the molten material into the surrounding dielectric medium. For discharg- es to occur, the material needs to have sufficient electrical conductivity whereas material hardness is of no consequence. As such, any metal as well as many semiconductors are candidates for this process. Micro-EDM is a specialized form of EDM whereby the workpieces have features as little as 10 mi- crons (0.0004 inches). These small features are achieved with electrodes that are also very small in size. For EDM sinker and EDM milling, the typical features are internal geometries such as holes, slots, etc. Therefore, the electrodes are typically a tiny bit smaller than the features to be machined. For wire- EDM (micro-WEDM), where most features are external, this restriction is not necessarily the case. 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 10 4 10 5 10 6 10 7 10 8 10 9 10 10 10 11 10 12 Silver Aluminum Gold Copper Iron Carbon Silicon (intrinsic) Metals Semiconductors Spark erosion Resistivity (Ωcm) Insulators Glass Si doping level high low high low Ge doping level Germanium (intrinsic) EDM machinability of various materials (Source: Lee et. a., Effect of metal coating on machinability of high purity germanium with wire electrical discharge machining, J Mat Proc 213, 2013) Micro-EDM Examples - 0.1 mm (0.004 in) brass wire 0.4 mm (0.016 in) pitch microelectrode array, 5x5mm (0.2 x 0.2 in) with 144 electrodes of 5 mm height (0.2 in). Material: doped silicon 0.4 mm (0.016 in) pitch microelectrode array, 5x5mm (0.2 x 0.2 in) with 144 electrodes of 5 mm height (0.2 in). Cross section of electrodes is varied along length to increase flexibility. Material: doped silicon. 0.4 mm (0.016 in) 5.0 mm (0.2 in)

Micro-wire EDM @ Viteris Technologiesviteris.com/downloads/MicroEDM from Viteris Technologies.pdf · 2015. 3. 3. · Gold Copper Iron Carbon Silicon (intrinsic) Metals Semiconductors

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Page 1: Micro-wire EDM @ Viteris Technologiesviteris.com/downloads/MicroEDM from Viteris Technologies.pdf · 2015. 3. 3. · Gold Copper Iron Carbon Silicon (intrinsic) Metals Semiconductors

Micro-wire EDM @ Viteris TechnologiesExamples of small parts

Precision Machines Designed and Built to Meet your NeedsViteris Technologies, LLC1883 South 5070 WestSalt Lake City, Utah 84104USA

Web: www.viteris.comPhone: +1 (801) 503-3912Fax: +1 (801) 886-9427

Electrical Discharge MachiningElectrical discharge machining (EDM) is non-contact process capable of removing material at very small lengthscales without creating mechanical stresses. The material is removed through highly lo-calized melting and evaporation as a result of electrical discharges from an electrode to the mate-rial. The discharges, which form tiny plasma channels with temperatures up to 10,000 °C, locally melt very small amounts of material. As the plasma collapses when the current flow is shut off, the resulting vacuum pulls out the molten material into the surrounding dielectric medium. For discharg-es to occur, the material needs to have sufficient electrical conductivity whereas material hardness is of no consequence. As such, any metal as well as many semiconductors are candidates for this process.Micro-EDM is a specialized form of EDM whereby the workpieces have features as little as 10 mi-crons (0.0004 inches). These small features are achieved with electrodes that are also very small in size. For EDM sinker and EDM milling, the typical features are internal geometries such as holes, slots, etc. Therefore, the electrodes are typically a tiny bit smaller than the features to be machined. For wire-EDM (micro-WEDM), where most features are external, this restriction is not necessarily the case.

10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103 104 105 106 107 108 109 1010 1011 1012

Silver

AluminumGold

Copper

IronCarbon Silicon (intrinsic)

Metals Semiconductors

Spark erosion

Resistivity (Ωcm)

Insulators

Glass

Si doping levelhigh lowhigh lowGe doping level

Germanium (intrinsic)

EDM machinability of various materials (Source: Lee et. a., Effect of metal coating on machinability of high purity germanium with wire electrical discharge machining, J Mat Proc 213, 2013)

Micro-EDM Examples - 0.1 mm (0.004 in) brass wire

0.4 mm (0.016 in) pitch microelectrode array, 5x5mm (0.2 x 0.2 in) with 144 electrodes of 5 mm height (0.2 in). Material: doped silicon

0.4 mm (0.016 in) pitch microelectrode array, 5x5mm (0.2 x 0.2 in) with 144 electrodes of 5 mm height (0.2 in). Cross section of electrodes is varied along length to increase flexibility. Material: doped silicon.

0.4 mm (0.016 in)

5.0 mm (0.2 in)

Page 2: Micro-wire EDM @ Viteris Technologiesviteris.com/downloads/MicroEDM from Viteris Technologies.pdf · 2015. 3. 3. · Gold Copper Iron Carbon Silicon (intrinsic) Metals Semiconductors

0.4 mm (0.016 in) pitch microelectrode array, 5x5mm (0.2 x 0.2 in) with 144 electrodes of 5 mm height (0.2 in). Cross section of electrodes is wavy to increase flexibility. Material: doped silicon

R 0.03 mm (0.0011 in)

0.05 ± 0.005 mm (0.002 ± 0.0002 in)

Turbine vane test windows with very small corner radius of 0.03 mm (0.0011 in) and matched curvature as well as very tight tolerance relative to a non-conductive out layer. Material: nickel-superalloy. Courtesy of Prof. Kevin Hemker and Binwei Zhang, Johns Hopkins University.

0.4 mm (0.016 in) pitch microelectrode array, 5x5mm (0.2 x 0.2 in) with 144 electrodes of 5-9 mm height (0.2 -0.35 in). Cross section of electrodes is tapered towards tip to increase flexibility. Material: doped silicon

9.0 mm (0.35 in)

Micro-EDM Examples - 0.05 mm (0.002 in) steel wireFor wire diameters smaller than 0.1 mm, inexpensive brass wire is replaced by higher-strength alternatives that include silver- or gold-coated steel wires, molybdenum, or tungsten.

0.15 mm (0.006 in) pitch microelectrode array, 3x3mm (0.12 x 0.12 in) with 1156 electrodes of 1.0 mm height (0.04 in). Cross section of elec-trode is curved to increase flexibility. Material: brass

0.15 mm (0.006 in)

Page 3: Micro-wire EDM @ Viteris Technologiesviteris.com/downloads/MicroEDM from Viteris Technologies.pdf · 2015. 3. 3. · Gold Copper Iron Carbon Silicon (intrinsic) Metals Semiconductors

Micro-EDM Examples - 0.02 mm (0.0008 in) tungsten wire

0.05 mm pitch (0.002) microelectrode array, 1.5x3mm (0.06 x 0.12 in) with 3000 electrodes of 0.2 mm height (0.008 in). Material: brass

0.05 mm (0.002 in)

0.05 mm pitch (0.002) microelectrode array, 1.5x3mm (0.06 x 0.12 in) with 3000 electrodes of 0.2 mm height (0.008 in). Electrodes are slanted to increase electrode flexibility. Material: brass

Micro-EDM Examples - 0.012 mm (0.00047 in) tungsten wire

0.04 mm pitch (0.0016) micro-electrode array, 0.3x0.3mm (0.012 x 0.012 in) with 9 electrodes of 0.4 mm height (0.016 in) - before clean-ing. Electrodes have a revere bendslanted to increase electrode flexibility. Material: copper berylium

Micro-EDM Examples - rotational features

1.0 mm pitch (0.04 in) helical microswimmer machined with rotary axis. Material: 1mm diameter nitinol tubing. Courtesy of Prof Jake Abbott, University of Utah

0.3 mm pitch (0.012 in) helix support for artificial muscles. Material: 1mm diameter nitinol tubing. Courtesy of Prof Stephen Mascaro, University of Utah

0.04 mm (0.0016 in)

0.05 mm (0.002 in)