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The Marathon 8500
• High resolution, PC-style graphics pack more information into the operator interface
• Powerful trending, analytical and operational functions are built into the interface with InduSoft HMI
• Web server, email notification and paging were provided as part of the HMI package
• Extra InduSoft processing power reduces load on machine PLC, frees up resources for advanced control
• Flexible file management functions enable operators to perform more functions at machine interface
Marathon development team from left to right: Shaun Crawford, Youssef Loldj, Manual Diaz,Megawati Tanudjaja, Daniel Clark, Earl Oshiro, Robbert Vermeulen, Rodney Chiu.
Metron, Inc. Corporate Headquarters11911 Freedom Drive, Suite 800Reston, VA 20190-5602703.787.8700www.metsci.com
Youssef Loldj, Control EngineerMetron, Inc. (www.metsci.com)
The operator interface on a Marathon 8500 flow abatement tool combines beautiful graphics with efficient functionality.
The same screen can be used to view trends and trend history
®
Headquarters
200 Professional Building New Orleans Road
Hilton Head Island - SC, USA 29928
Phone: (843) 842-6668 – Fax: (843) 363-6252
E-mail: [email protected]
www.InduSoft.com
Sales and Marketing Office
3445 Executive Center Drive, Suite 212
Austin, TX, USA 78731
Phone: 877-INDUSOFT or 512-349-0334
E-mail: [email protected]
Engineering Office
Av. Eng. Luís Carlos Berrini, 962 9oandar
São Paulo, SP Brazil 04571-906
Tel: (11) 5505-5676 –
Fax: (11) 5505-5676 r.13
E-mail: [email protected]
Metron, Inc.:Semiconductor equipment supplier designs cost-effectiveoperator interface with high resolution graphics, powerful features
®
Background Metron helps customers inthe worldwide semiconductorindustrytoimprovewaferyields,lower operating costs, and im-proveprocessefficiency. Ensuring that none of thehighly reactive gases used insemiconductor manufacture es-capes into the environment iscrucial to successful manufac-turing. Metron flow abatementtools treat gas effluent from
semiconductor fabrication. TheMetron Marathon series is anadvancedpoint-of-useintegratedthermal/wet treatment systemthat provides a controlled gasconditioning environment forsemiconductor process chemis-tries. The Marathon series per-formscontrolleddecomposition/oxidation treatment of flamma-ble, pyrophoric, corrosive, andparticulate generating processrecipes.
The Challenge Metron recently added anew model to the Marathon™line: the 8500 high flow abate-ment tool. The 8500 performshighlyefficientgasdestructioninultra-high volume applications,including epitaxial, low-k, andperfluorinatedcompoundsg
From one screen, the operator can view and control the status of various gas flows being processedby the machine.
Continued from front page...
The Indusoft graphic interfaceversus the traditional operator interface
Right:Alarms can be easily managed from the operator interface of the Marathon 8500.
Screen developed for a traditional operator interfaceScreen developed with Indusoft
(PFC) process exhaust abate-ment. The control system for thenewequipmenthadtomeetde-mandingrequirementsforsafetyand reliability, had to conformto the SEMI S2 Guideline andCE Marking requirements cov-eringalargerangeofsafetyandhealth provisions, and had todemonstrate a high level of ef-ficiency while remaining costcompetitive. Obviously,acrucialelementof the control system was theoperator interface. Metron re-quiredanOIthatwouldbecost-effective solution while also en-abling the product design teamtoprovide sophisticatedgraphicdisplays and incorporating fea-tures for process optimizationwith a minimal strain on com-putingresources.g
From one screen, the operator can view and control the status of various gas flows being processedby the machine.
Continued from front page...
The Indusoft graphic interfaceversus the traditional operator interface
Right:Alarms can be easily managed from the operator interface of the Marathon 8500.
Screen developed for a traditional operator interfaceScreen developed with Indusoft
The Solution The control platform cho-sen by the Metron engineeringwasadualPLCsystem,usingthesecondPLCforsafetyinterlocks.OMRONwas the chosenPLC.The operator interface unit iscomposedofInduSoftWebStu-dio running on an Arista ARP-1610 panel running WindowsCE.TheAristapanelwasspecifi-cally chosenbecauseof its solidreputation as a stable hardwareplatform.
Solution Justification Metronengineershadanum-berofhighlyspecificreasonsforselectinganInduSoftsolution.
Cost Effectiveness Traditional Windows in-dustrial PC-style operator in-terfaceswerepriced at $1100 to$1400 for units with a six-inchdisplay, and $2000 for unitswithatwelve-inchdisplay.Thesefiguresdidnot include any soft-ware and either a machine-levelHMI product or a full SCADApackage would have been re-quired in addition. The Aristabox running Windows CE andan InduSoft runtime license in-cludedcameinunder$1200forthe six-inch unit and $2100 fora twelve-inch unit. When com-pared with other SCADA pack-ages, the runtime solutions wereusuallyevenmoreexpensive.g
The Marathon 8500
• High resolution, PC-style graphics pack more information into the operator interface
• Powerful trending, analytical and operational functions are built into the interface with InduSoft HMI
• Web server, email notification and paging were provided as part of the HMI package
• Extra InduSoft processing power reduces load on machine PLC, frees up resources for advanced control
• Flexible file management functions enable operators to perform more functions at machine interface
Marathon development team from left to right: Shaun Crawford, Youssef Loldj, Manual Diaz,Megawati Tanudjaja, Daniel Clark, Earl Oshiro, Robbert Vermeulen, Rodney Chiu.
Metron, Inc. Corporate Headquarters11911 Freedom Drive, Suite 800Reston, VA 20190-5602703.787.8700www.metsci.com
Youssef Loldj, Control EngineerMetron, Inc. (www.metsci.com)
The operator interface on a Marathon 8500 flow abatement tool combines beautiful graphics with efficient functionality.
The same screen can be used to view trends and trend history
®
Headquarters
200 Professional Building New Orleans Road
Hilton Head Island - SC, USA 29928
Phone: (843) 842-6668 – Fax: (843) 363-6252
E-mail: [email protected]
www.InduSoft.com
Sales and Marketing Office
3445 Executive Center Drive, Suite 212
Austin, TX, USA 78731
Phone: 877-INDUSOFT or 512-349-0334
E-mail: [email protected]
Engineering Office
Av. Eng. Luís Carlos Berrini, 962 9oandar
São Paulo, SP Brazil 04571-906
Tel: (11) 5505-5676 –
Fax: (11) 5505-5676 r.13
E-mail: [email protected]
Metron, Inc.:Semiconductor equipment supplier designs cost-effectiveoperator interface with high resolution graphics, powerful features
®
Graphics Quality MetrondeterminedquicklythatmuchbettergraphicdisplayscouldbebuiltusingtheInduSoftWebStudiothanwiththeopera-tor interfaces usually availablewithPLCs.Notonlywastheres-olutionfiner,theselectionofcol-orsbetter,butInduSoftprovidedalibraryofexistingsymbolsandpermitted the Metron designersto create symbols. Bitmappedgraphics in formats suchas .jpgcould be imported, and Win-dowsCEprovided the standardMicrosoft iconswithwhichop-eratorswouldalreadybefamiliar,therebyeliminatingtheneedforadditionaltraining.
Ease of Programming, Powerful Features Theoperatorinterfacesnor-mallyofferedwithPLCsofferednowaytoprogramanycontrollogic.This meant that all logicneeded to reside in the PLC.WithInduSoftalltheprogram-ming needed for the graphicscouldbehandledbytheopera-torinterfaceterminal.Notonlywasprogrammingtimereducedbecauseofthebuiltindevelop-menttoolsofInduSoft,butthedemands placed on communi-cations andPLCprocessing re-sourcescouldbeminimized. InduSoft also offered thedevelopment team a host of
otherfeaturesandfunctionsthatenabled them to build in addi-tional features. These includedfilemanagementfunctions,clockandtimefunctions,plustheabil-ity to create and file reports inXMLand.txtformatsasneeded.The file management functionmeant that in developing OIapplication, Metron designerscouldgive anoperator the abil-itytoopen,moveanddeletefilessuchasalarmfilesdirectly fromthe touch-screen.Clock settingscanalsobemodifiedforschedul-ingpurposes. The alarms and alarm his-tory features of InduSoft WebStudio included the ability toprovide email notification ofalarm conditions; even thoughotherSCADApackagesmayof-ferthisfeature,itusuallyinvolvesanadditionalcost. A major cost savings wasrealizedbecauseof theInduSoftwebserver.Thismeansthatmul-tipleclientscanaccesstheMara-thon8500control systemwith-outincurringthecostburdenforextralicenses.
Working With Indusoft The development team gotexcellentsupportfromInduSoft.Designwasstartedwithonever-sionofInduSoftandwhenanewreleasecameout,problemswere
experienced with the speed ofcommunicationswith thePLCsused for control; once InduSoftwascontactedtheyidentifiedandresolvedtheissuewithindays.
