Upload
denghuei
View
233
Download
0
Embed Size (px)
Citation preview
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
1/19
MEMS Sensors for Smart Living:
ITRI Solutions
Chris Chen, ITRI
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
2/19
Outline
• MEMS Sensors for Smart Living – Sensors are Everywhere
– What MEMS Sensors are Most Required
– Smart Living Megatrend Herald Next Wave of MEMS
• MEMS Technologies in ITRI
– Total Solutions on MEMS
– ITRI’s Smart Sensors
– Roadmap toward Smart Living• Summary
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
3/19
MEMS Sensors for Smart Living
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
4/19
Sensors are Everywhere!
Power Management
Smart AppliancesHome Security
(IR Sensors)
Healthcare Anywhere
Consumer Electronics
Wearable DevicesAir Quality Monitoring
(Gas Sensors)
Entertainments Health Care Security Sports Fitness Others
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
5/19
What MEMS Sensors are Most Required?
Entertainments Health Care Security Sports Fitness Others
MEMS Sensors for Smart Living
Environment Motion Physiologic RF Others
Accelerometer
Gyroscope
Magnetometer
IMU (Inertial
Measurement Unit)
MEMS Microphone
Barometer (P)
IR Sensor (T)
Moisture Sensor
Gas Sensors, …
Pressure Sensor
Bio Sensors (ex.
HbO2, ECG,EEG, Glucose,
PPG etc.), …
FBAR
Oscillator
MEMS Switch
MEMS Varicap
IPD, …
Apparently, motion and environmental sensors play as the key
roles for smart living applications.
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
6/19
Smart Living Megatrend Herald Next Wave of MEMS
Sensors for M otion & Envirement
(Source: Yole developpement )
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
7/19(Source: Yole developpement )
Huge Market Opportunities on Smart Living:
IMU, MEMS Microphone and Pressure Sensor
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
8/19
Magnetometer
Low-res.
Acc.
3-axis
Gyro.
6-DoF
9 DoF/
10 DoF
High-res.
Acc.
New
Process
Develop.
WLP
TSV
CMOS
MEMS
Low Power
Mode
Sensor
HUB
Sensor
Fusion
Specific
Algorithms
Smaller Size, Lower Cost,Higher Performance
MoreSensors
More
Software
Sensor Fusion is Driving
Combo Sensors
Low-drift
Gyro.
10mm2
2011
2012
2014
4 x 4 x 0.9 mm3
Size mm2
15mm2
20mm2
3 x 4.5 x 0.95 mm3
2015
3.0 x 3.0 x1.0 mm3
2013
(6-DoF IMU Size)
2.0 x 2.0 x0.9 mm3
Inertial Combo will Dominate the Future Market!
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
9/19
MEMS Technologies in ITRI
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
10/19
Total Solutions on MEMS
Processes
&
Materials
Circuit Design
Softwares
&
Applications
Advanced Tech
MEMS Design
Package
&
Testing
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
11/19
ITRI’s Smart Sensors
Optical Devices
• Electrostatic Mirror
• Magnetic Mirror
RF Devices
• Variable Capacitor
• MEMS Oscillator
Fluidic Devices
• Gas Sensor
• Lab on a Chip
Inertial Sensors
• Low-g Accelerometer
• Medium-g Accelerometer
• High-Rate Gyroscope
• Medium-Rate Gyroscope
• Inertial Measurement Unit
MEMS Microphones
• Analog Microphone
• Digital Microphone
Pressure Sensors
• High Resolution Barometer
• 0.3-1.3 Barometer
• 0.5-10 Bar Pressure Sensor
Magnetic Sensors
• High Res. Compass
• Magnetometer
Fluidic
RF
Pressure
Inertial
Magnetic
Optical
Acoustic
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
12/19
X-axis Y-axis Z-axisNewton’s 2nd Law of Motion
Low-noise Accelerometer
Low-power Gyroscope
Capacitive E-compass
3-axis Parts Share Same Mechanical Structure
Low Off-axis Sensitivity & High Shock Survival
Compatible with Inertial MEMS Platform
Low Noise & Programmable Digital Calibration
Single-axis Dual-axis Tri-axis
Low Power Consumption (
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
13/19
Ultra-compact 6-DOF IMU
3-axis Gyro.
3-axis Acc.
Acc. & Gyro Hermetic Sealed in
a Same Cap
Electrical Isolation of Acc. & Gyro.
Analog / Digital Pulse / Digital
Data Output Options
Mechanical Decoupling of Acc. &
Gyro.
(Source: Internet)
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
14/19
x
yz
Gyroscope Accelerometer
Magnetometer
The World’s First
Single Chip 9-DOF IMU!
Single Chip Integrated 9-DOF IMU
Small Size, Low Power & Low Cost
One Chip Integration of 9-DOF Sensor
Lorentz Force Sensing Mechanism
for M-Sensor
All Capacitive Interfacing for 9-DOF
Sensor
Acc., Gyro. & M-Sensor Hermetic
Sealed in a Same Cap
Current
Direction
Sensing Electrode
Turning
Driving Electrode
B
3-Axis M-Sensor 3-Axis Acc.-Axis Gyro.
http://3.bp.blogspot.com/_zqFoq3qej2c/TA1jap_5FdI/AAAAAAABYiM/8Spo0DI2BfY/s1600/gyroscope.jpg
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
15/19
MEMS Microphone
Meas. Item Test Condition Specification
Freq. Response 100 ~ 10kHz 100 ~ 10kHz
Sensitivity@1kHz
(0dB=1V/Pa)-38+/- 3dB
SNR [A weight]
(Typical)
@1kHz
(0dB=1V/Pa)> 6 dB
THDAt 94dB SPL
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
16/19
- Gas Sensors
- MEMS Tactile Ar ray- PPG Sensor (Healthcare)
- H ighly Sensitive IR Array
Smart Sensors for the Future
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
17/19
Roadmap toward Smart Living
(Source: Internet)
MEMS Microphone (Acoustic)
Inertial Combo (Motion)
Barometer (Positioning)
Gas Sensors (Environment)
PPG Module (Healthcare)
IR Image Sensor (Safety)
Tactile Array (Service Robot)
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
18/19
Summary
Motion and environmental sensors look to play
as the key roles for smart living applications.
The three devices Inertial combo, MEMS
microphone and pressure sensor are with very
huge market opportunities currently.
Driven by the sensing needs of smart living, a
new wave of MEMS is coming
ITRI is committed to be the total-solution
provider for smart living, leading Taiwan’s
MEMS industry to win in this booming era.
8/8/2019 Mems Sensors for Smart Living Itri Solutions Itri 0 091514DL
19/19
Thank you for you r at tent ion !
Chris Chen
Office: +886 6 3847050
E-mail: [email protected]
mailto:[email protected]:[email protected]