MEMS: From Jewel to consumer Commodity

BRUNO MURARI

POVO 29-01-09

BENEDETTO VIGNA

2

Concentrated System in a Single Box

Bipolar, BCD, CMOSBiCMOS, VIP,µ-Machining

Power Management

InformationProcessing(Super Integration)

MultifunctionPeripheral (System

Oriented Tech.)

Data Acquisitionand Conversion

Bipolar, CMOS,RF-BiCMOS,µ-Machining

Central Processing(µP, DSP)

Digital CMOS

PowerActuators

Bipolar, BCD,CMOS, HVCMOS,VIP, µ-Machining

Memories

CMOS, Flash,DRAM, µ-Machining

Line, Batteries,Alternators, Solar Cells, Fuel Cells

Sensors

Antennas

Keyboards

LineInterfaces

Switches

Clock Clock

Clock

Lamps

Motors

Displays

Solenoids

Speakers

CRTs

Inkjets

Antennas

3

EV

OL

UT

ION

/RO

AD

MA

P (

*)

NO ROADMAP–CLUSTERS OF INVENTIONS(*)Room for Nobel Prize

(*) – Modified by Bruno Murari

4

Outline

• MEMS in ST

• MEMS and Epiphany, what are they?

• MEMS Epiphany and:– Nintendo and Apple– STMicroelectronics

• What’s next on the horizon?

• Conclusions

5

6

ST MEMS Growth and 8” Fab

0

20

40

60

80

100

120

140

160

180

200

220

240

2005 2006 2007 2008

0.0%

1.0%

2.0%

3.0%

4.0%

5.0%

6.0%

7.0%

8.0%

9.0%

10.0%

MEMS Revenues MEMS Market Share

> 10x

> 3x

> 2x96M

209M

30M8” Fab in Milan

ST leads the “MEMS Consumerization Wave”

7

MEMS: A Look From the Inside• MEMS means Micro Electro Mechanical Systems … taking

advantage of the mechanical AND electrical properties of silicon

• Three key elements:– Micron-sized Transducer realized through a specific

process called Micro-Machining (THELMA)– An Advanced Analog Chip with embedded smart

functionalities– Dedicated package and calibration features

+ =

8

….and from outside

7x55x5

3x54x4 3x3

Capacitive 3X accelerometers, analog and digital output

9

Technology Epiphany:

the Manifestation of the essential and more powerful meaning of that

technology.

10

Technology Epiphany = Carving out a quiescent meaning of that technology

“The Statue is already embedded in the marble block, I’m just removing the marble in excess”, Michelangelo Buonarroti

Technology Epiphany: ……visible only to few people.

Pieta’ Rondanini, Michelangelo’s last incomplete sculpture (1564). It is now patrimony of the Museo d’Arte Antica in the Sforza Castle in Milano, Italy.Source: Wikipedia

11

Technology Epiphany as Innovation Strategy

OLD

MEANING

INCREMENTAL

RADICAL T E C H N O L O G Y

NEW

MARKET PULL (user cent ered )

TECHNOLOGY PUSH

DESIGN DRIVEN

TECHNOLOGY EPIPHANY

Technology Epiphany = Design Driven + Technology Push

Source: Prof. Verganti

12

Wii is a MEMS Epiphany

Technology Push + Design Driven

13

Kyoto,Early 2000’s

Milano,March 2000

“Throw away the button.Just move it”

“Let’s compete against nonconsumption”

Where, When and Why?

14

Nintendo Starting point: “6th Generation” Controllers

Many people were intimidated by a two-handed remote controller and you’d need to be an octopus

15

Nintendo Innovation Strategy

Adaptation to the evolution of

socio-cultural models

MEANINGS (languages)

Incremental Improvement

Radical Improvement

PERFORMANCE (technology)

Generation of new meanings

Playstation 3Microsoft Xbox

360

Nintendo Wii

GraphicsSpeed

MEMSAccelerometerfor EnhancedUser Interface

16

Bulky Power Hungry

Expensive

MEMS before STMicroelectronics

ESP/EPB/ABS

Side Airbag Satellite

Occupancy Detection

Front Airbag

Seatbelt / Pre-safe

17

Kyoto, March 2005: First MeetingNintendo said:“Your products are very good and may fit our innovative consoles…..….but we need right price, quality and security of supply….otherwise it’s useless”

I replied:“We are able to match your price thanks to our innovation in technology and product design. We can also guarantee the manufacturing capacity and the quality you need”

18

ST MEMS in Wii Controller

19

MEMS puts players into the action!

ST MEMS in the Nintendo WiiTM:Playing is Believing

20

One-Hand Interface in Mobile Phones

Portrait / Landscape

auto-detection

On-screen

map readjustment

21

MEMS in Apple NanoPod

Source: www.apple.com

22

Just as graphical icons and a mouse have transformed the way people use computers, today MEMS are revolutionizing

the way people use handheld devices

1960

Computational Power

Text

Multimedia

1980 2000

MEMS

User Interface

MEMS = Mouse for Handsets

23

Low Supply VoltageLow Current

ConsumptionSmall Package

Easy to Integrate Embedded Smart

FunctionalityLow Cost

The ST path to radical innovation

Radical Innovation in Technology, Design, Package and Testing

24

2 Chip Solution:Time-to-Voluume and Time-to-market

+

25

3X 3x3x1 Digital Output Accelerometer

Source: iSupply Oct. 2008

Micromachined Transducer

High PerformanceASIC

26

Ultra Low Power Accelerometers

10 - 250 uA6 – 12 Bits3x3x1 mm3

27

Package of LIS3L02AL

MATRIX

Before injection molding

After injection molding

LIS3L02AL: 3X CapacitiveAccelerometer

28

Packaging Manufacturing Challenges

Before STMicroelectronics, sensor packaging was taking most of the manufacturing cost

29

Packaging Design Challenges: reduce stress

Sensor Die

Logic Die

BT

(b) ½ Package model (a) MC removed to display dice

X

Z Y

Moulding Comp

Cap

A B

C (a) Unit warpage (b) Sensor warpage

Before STMicroelectronics no LGA or QFN package was used for MEMS

30

Calibration Challenge: High Accuracy Positioning in 3-Dim Space

High Accuracy, High Productivityhandlers and Rate Tables have beendeveloped @ low cost

31

What’s next on the horizon?• Multiple axis Gyroscopes

• Pressure sensors

• Combo Modules

• Motes: Wireless Sensors

• Healthcare applications

32

Yaw Gyro 5x5 with Analog and Digital ouput

33

ST Multi Axis Coriolis’ Gyroscopes

+

Micromachined Transducer

High PerformanceASIC

5x5x1.5mm3

34

Roll Gyroscope

35

Pitch/Roll Gyroscope

36

Pitch and Roll with some details

Pitch/Roll

Gyroscope

Roll Gyro

37

Technological Innovation: Oxide isolation on air gap

Oxide Isolation simplifiesASIC architecture

V1

V2

38

2X Coriolis Gyroscope ASIC Architecture

39

HLGA fosters Miniaturization of pressure sensors

ST Approach

8x8x4 mm3

5x5x0.9 mm3

40

HLGA for Pressure Sensors

After molding

Before Moulding

41

Combo Module for……

3X Acc

3X Gyro

RF / uC

Touch Sensor

Microphone

Magnetometers

3X Acc

3X Gyro

RF / uC

Other

PressureMagnetometers

42

Combo modules:Accelerometers + Gyroscopes

43

Motes of the future

3D integrationSmall footprint

2D integration: Thin and flexible

Stick on skin, integrate in clothingSource: IMEC

44

Miniature and Disposable Insulin Pump

• Small– Size: 6 mm x 10 mm– Flow range: up to 5 ml/h– Stroke Volume: 200 nl, 0.02 U

• Precise– Nominal Accuracy ±5%– Reproducibility ±2%

• Safe– Built-In failure detection– Anti Free-flow features

Source: Debiotech

45

Disposable MicroPump for Insuline delivery

Pumping membrane

Outlet Check Valve

Through hole for electrical

connections

Through hole for outlet port flipping

Inlet check valve Detector Vent openingsThin layer patterning

Source: Debiotech

46

Conclusions

• ST contributed to MEMS Epiphany and it’s leading the MEMS Consumerization Wave.

• “There is still a plenty of room” at Consumer market.

• When seeking new MEMS epiphanies ask:– “How can we expand consumption by reaching customers whom

we can’t adequately serve today?”

• When doing Innovation pls consider that:– Customer is not enough, imagination is needed to carve a

quiescent meaning from a technology– Proper network with research centers and acadamic institutions

is key

47

Let’s continue to innovate!

Thank you

48

Key Milestones of MEMS in STMicroelectronics

MEMS2006, Feb.

Sep. 2005Jan. 2009

TIME