MEMS Business Forum 2012 - MEPTEC MBF Proceedings.pdf · inventory of refurbished wafer fabrication and metrology equipment from top manufacturers such as SUSSMicrotec, EVG, STS,

MEMS JOURNAL & MEPTEC PRESENT

MEMS Business Forum2012

Thursday, May 24, 2012 • Biltmore Hotel & Suites • Santa Clara, California

PRESENTING COMPANIES:

n BOSCH SENSORTEC GMBH n IHS ISUPPLI n IDT INC. n INTEL CORPORATION n KP-MEMS n LUX CAPITAL MANAGEMENT n UNIVERSITY OF CALIFORNIA, BERKELEY n UNIVERSITY OF CALIFORNIA, IRVINE n UNIVERSITY OF CALIFORNIA, SAN DIEGO

n WISPRY, INC.

Exhibiting Companies

AGENDA7:45 am Registration Opens

8:45 am – 9:00 am Welcome and Introduction

9:00 am – 9:35 am Emerging Usages & Apps for Sensors in 2016+ Sandhiprakash (Sandhi) Bhide, Senior Strategist and Futurist, Intel Corporation

9:35 am – 10:10 am MEMS in Consumer Electronics: Will It Keep Growing Forever? Jeremie Bouchaud, Ph.D., Director and Principal MEMS Analyst, IHS iSuppli

10:10 am – 10:40 am Morning Break

10:40 am – 11:15 am MEMS: Enabling Distributed Healthcare Shahin Farshchi, Ph.D., Principal, Lux Capital Management

11:15 am – 11:50 am Emerging Opportunities for RF-MEMS in Mobile Applications Jeffrey Hilbert, President and Founder, WiSpry, Inc.

11:50 am – 1:00 pm Lunch

1:00 pm – 1:35 pm RF MEMS Switches and Tuners: Commercialization Trends and Business Opportunities Gabriel Rebeiz, Ph.D., Professor, University of California, San Diego

1:35 pm – 2:10 pm Consumer MEMS – A Technology Play Frank Melzer, Ph.D., CEO, Bosch Sensortec GmbH

2:10 pm – 2:45 pm Harsh Environment MEMS Wireless Sensors for Energy and Power Al Pisano, Ph.D., Professor, University of California, Berkeley

2:45 pm – 3:15 pm Afternoon Break

3:15 pm – 3:50 pm MEMS Alternatives to Quartz Oscillators: Why Do People Want To Buy Them? Harmeet Bhugra, Managing Director, MEMS Division, IDT Inc.

3:50 pm – 4:25 pm Suspended Carbon Nano Wire Sensors Marc Madou, Ph.D., Professor, University of California, Irvine

4:25 pm – 5:00 pm MEMS: How Did We Get Here? Kurt Petersen, Ph.D., President, KP-MEMS

5:00 pm – 6:30 pm Reception

Thursday, May 24, 2012 • Biltmore Hotel • Santa Clara, CA

ClassOne Equipment 5302 Snapfinger Woods Dr., Decatur, GA 30035Phone: 770-808-8708www.classoneequipment.comClassOne Equipment is a leading supplier of high quality refur-bished equipment to the semiconductor, MEMS, LED, wireless and emerging technology markets. They carry an extensive inventory of refurbished wafer fabrication and metrology equipment from top manufacturers such as SUSSMicrotec, EVG, STS, Semitool and KLA-Tencor™ at prices up to 65 per-cent less than the cost of a new tool. Their turn-key solution includes full refurbishment to original specifications, industry leading 6-month warranty, and full installation and training by experienced factory trained technicians. Post sale service, maintenance, and spare parts support is provided on all tools. ClassOne Equipment currently has 40 full-time employees. Their engineers and technicians have worked in technical posi-tions at Suss, EVG, Semitool,STS, and KLA-Tencor.

Compugraphics Photomasks 120 Albright Way, Los Gatos, CA 95032-1802Phone: 408-341-1600www.compsus.comCompugraphics Photomasks is a world leader in the pro-duction of photomasks, with manufacturing sites located in California, Scotland and Germany. Having over 40 years of experience Compugraphics Photomasks understands that it’s about more than technology – it’s about quality, service, flexibility and getting the correct mask for the job when you need it.

MEMS Core 5127 Shelter Creek Lane, San Bruno, CA 94066Phone: 650-270-0755www.mems-core.comMEMS Core provides prototyping to manufacturing for your MEMS devices. MEMS Core was established in December 2001 under the cooperation of Professor, Masayoshi Esashi from Tohoku University who took the lead in the research and development field for a variety of system products, and Chemitronics which has a long experience of semiconductor manufacturing systems. Currently, MEMS CORE has a variety of MEMS manufacturing systems and are promoting devel-opment and production of new-generation MEMS products utilizing the technologies cumulated by Tohoku University and Chemitronics group. They support your MEMS device develop-ment with flexibility.

Micrel, Inc. 2180 Fortune Drive, San Jose, CA 95131Phone: 408-944-0800www.micrel.comMicrel, Inc. is a leading manufacturer of IC solutions. Micrel’s Custom Foundry Services allow customers to develop pro-prietary process flows, from R&D to high-volume production. Products include mixed-signal, analog, and power semicon-ductors, communication, clock management, Ethernet switch, and physical layer transceivers. Headquarters and state-of-the-art wafer fabrication facilities are in San Jose, CA, with offices and design centers globally.

MicroGen Systems, Inc. 95 Brown Road, Suite 120, Ithaca, NY 14850Phone: 585-683-1430www.microgensystems.comMicroGen Systems, Inc. delivers the first MEMS based vibra-tional energy harvesters based on patented technology and intended to power autonomous and networked wireless sen-sors. Markets include industrial (process and manufactur-ing monitoring) and commercial (appliances), automotive,

infrastructure and consumer. MicroGen has begun volume production for its first family of products MEMS. Initial markets are industrial and commercial. MicroGen Systems, powering the wireless world.

Milestone Technology 1292 Kifer Road, Suite 810, Sunnyvale, CA 94086Phone: 408-530-8378www.milestonefalab.comMilestone Technology is a Failure Analysis Lab providing services for the MEMS, Semiconductor, LED, Medical Device, Solar, Electronics, Disk Drive, Optical, Coating, Ceramics and Materials industries. They specialize in Ultra High Resolution SEM, EDX, Quantitative Analysis, Mapping, Precision Cross-Sectioning, Surface Contamination, FTIR, PCB Inspection, Dye Pry, and Metallography.

Quartet Mechanics 1040 Di Giulio Avenue, S-200, Santa Clara, CA 95050Phone: 408-200-8345mechanics.comBased in the Silicon Valley, California, Quartet Mechanics has core technology that lies in the areas of micron-level precision material handling, machine vision systems, advanced clean-room robotics and custom automation. Their product suite features standard or custom tool development, robotics and peripherals, high precision component tooling/fabrication, and tool connectivity/e-diagnostics. All their components are designed with module and versatile concept, so a single tool can bridge various substrate materials, sizes, shapes, process steps with no or limited change-over. High through-put 4-axis SCARA robots with machine vision are used for alignment & placement for your micro manufacturing. Regardless of wafer thickness, from 50 µm thin wafers to 6mm bonded wafers, or perforated, warped, bumped, and over-sized carrier wafers, their wafer transfer automation solution provides the precision and repeatability tolerance required by the MEMS industry.

EXHIBITOR DIRECTORY


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Si-Ware Systems 1150 Foothill Blvd., Suite M, La Canada, CA 91011Phone: 818-259-2785www.si-ware.comSi-Ware Systems is an independent fabless semiconductor company providing a wide spectrum of product design and development solutions, custom ASIC development and supply as well as standard products. The company leverages its highly talented teams in MEMS (micro electromechanical systems) design and development as well as analog/mixed-signal and radio frequency integrated circuits (RFICs) to provide highly innovative solutions and products in different areas ranging from PLL-based timing circuits, sensor interfaces, frequency synthesis, data converters, RF front ends, and MEMS-based sensor systems.

sp3 Diamond Technologies 1605 Wyatt Drive, Santa Clara, CA 95054Phone: 408-492-0630www.sp3inc.comFounded in 1993 and headquartered in Santa Clara, California, USA, sp3 Diamond Technologies makes chemical vapor depo-sition (CVD) diamond for a broad range of applications where current materials have reached their limit. sp3 provides thick-film and thin-film diamond products for advanced thermal management and cutting tool applications, CVD diamond coating and material services, hot filament CVD reactor sys-tems and diamond deposition consulting services.

Toppan 2920 Coronado Drive, Santa Clara, CA 95054Phone: 408-492-1900www.photomask.comToppan is a world leader in imaging technologies with experi-ence ranging from leading-edge IC photomasks to advanced packaging solutions. Having been a supplier to the MEMS market for decades, they know that one-size doesn’t fit all. That’s why they leverage their technology advantage and unparalleled manufacturing network to offer you optimized MEMS solutions - tailored products to fit your unique applica-tions. Their 9 manufacturing facilities are strategically posi-tioned and fully qualified to provide fast, local service to MEMS foundries across the globe. Through unbeatable technology, impeccable service, customized solutions and high quality, Toppan will work tirelessly to become your first choice supplier for photomasks.

Tousimis 2211 Lewis Avenue, Rockville, MD 20851Phone: 301-881-2450www.tousimis.comTousimis manufactures highly reliable Supercritical CO2 Dryers which enable delicate micro 3-D structural preservation. Their Critical Point Dryer (CPD) process technology elimi-nates surface tension forces. Current CPD applications include MEMS, Bio-MEMS, AeroGel, Nano Particle, Carbon Nanotube, Graphene and others. Tousimis is a USA based company locat-ed in the Washington D.C. area. Tousimis supports all products with their global sales and service support network.

VectorNav Technologies 903 N. Bowser Rd., Suite 200, Richardson, TX 75081Phone: 512-772-3615www.vectornav.comVectorNav Technologies specializes in manufacturing high performance inertial measurement units and orientation sen-sors using the latest miniature solid-state MEMS inertial sensor technology. Since its founding by five graduates of Texas A&M

University in 2008, VectorNav has been providing customers worldwide access to high quality, fully calibrated orientation sensors with state-of-the-art digital filtering technology. With a strong background in Aerospace Engineering and experience in the development and testing of spacecraft, launch vehicles, and micro-aerial vehicles, VectorNav brings high performance Aerospace filtering and calibration techniques into the world of low-cost industrial grade MEMS sensors, expanding the pos-sibilities of today’s MEMS sensor technology.

XACTIX 2403 Sidney Street, Suite 300, Pittsburgh, PA 15203Phone: 4412-381-3195www.xactix.comXACTIX is the manufacturer of the Xetch® xenon difluoride (XeF2) etching systems with many different models to sup-port small labs through high volume production. These dry isotropic etching tools are used to etch silicon, molybdenum and germanium and are popular in the MEMS community due to high selectivity versus many standard films including photoresist, silicon dioxide, silicon nitride, and aluminum. The Xetch® systems are particularly well suited for release, but are certainly not limited to MEMS applications and are useful for many applications where highly selective isotropic silicon, molybdenum and germanium etching is required. XACTIX also provides XeF2 etching services.

Xsens Pantheon 6a, Enschede OV 7521 PR, The NetherlandsPhone: +31889736700www.xsens.comXsens is the leading innovator in 3D motion tracking technol-ogy and products. Its sensor fusion technologies enable a seamless interface between the digital and physical world in consumer electronics devices and professional applica-tions such as 3D character animation, motion analysis, and industrial control & stabilization. Clients and partners include Electronic Arts, NBC Universal, Daimler, Autodesk, Sagem (Safran Group), Siemens and various other leading institutes and companies throughout the world. Founded in 2000, Xsens is a privately held company with headquarters in Enschede, the Netherlands and a US subsidiary in Los Angeles, California.


EXHIBITOR DIRECTORY

BIOGRAPHIES

TECHNICAL CHAIR

Mikhail (“Mike”) Pinelis, Ph.D. is the CEO and editor-in-chief of MEMS Journal, an independent publica-tion based in Southfield, Michigan that he founded in 2003 and grew to the current 21,200+ subscribers worldwide. Along with MEMS Journal, Dr. Pinelis has also developed a management consulting practice focused on MEMS, sensors and microsystems.

Prior to MEMS Journal, Dr. Pinelis served as Director of Business Development for ISD Technology Group in Mansfield, Massachusetts. Prior to that, Dr. Pinelis founded MindCruiser, a company specializing in devel-oping intellectual property online marketplaces that was sold to Akiva Corporation in 2001. Dr. Pinelis is an active participant in the MEMS and semiconductor market sectors and currently serves on advisory boards of leading industry associations such as the Micro Electronics Packaging and Test Engineering Council (MEPTEC) and Micro and Nanotechnology Commercialization Education Foundation (MANCEF).

Dr. Pinelis earned a Bachelor’s degree in engineering from Harvey Mudd College in Claremont, California and Master’s and Ph.D. degrees in electrical engineering with a focus in MEMS and microfluidics at the University of Michigan in Ann Arbor.

PRESENTERS

Sandhiprakash (Sandhi) Bhide is a Senior Strategist and Futurist focusing on mobile devices. His job involves looking at emerging usages and form factors, evolution of many technology vectors, and making sure both usages and technologies make business sense. He has 30+ years in high-tech in HW, SW, and Systems and 18+ years at Intel in various technical and management positions. Sandhi is a recognized expert on Multimodal and Adaptive Interfaces, Context-Aware Computing, and Sensors. He has a BE in Electronics and Telecommunication from University of Pune, India; MS in CS from University of Wyoming, Laramie; and an Executive MBA in Strategic Management from the University of Oregon. Sandhi lives in Beaverton, Oregon with his wife and 2 grown-up children and loves to sing Bollywood music, has his own music charity group and plays four musical instruments.

Harmeet Bhugra is the Managing Director of the MEMS Timing Product Line at IDT and is responsible for the vision, growth and general management of the MEMS business. He and his team are credited with an aggressive and ground-breaking development of world’s first and smallest Piezoelectric MEMS products. Harmeet has published multiple technical articles and was recently awarded the Distinguished Inventor award at IDT. He was also the founder and CEO of a startup, Integral Sight. He has travelled to 34 countries and lived in three.

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Jérémie Bouchaud is the Director and Principal Analyst MEMS and Sensors at IHS. Mr. Bouchaud is head of market research for MEMS and is responsible for over 100 MEMS-related consulting and market research studies. His breadth of knowledge in MEMS applications and individual markets – such as in MEMS sensors for the automotive and consumer markets, as well as RF MEMS – is unique to the industry.Jérémie is a graduate of the Munich University of Applied Sciences in Germany and of the École Supérieure de Commerce of Grenoble, France. He was in charge of technology transfer for sensors and MEMS at the German office of CEA-LETI (a leading French R&D center in semiconductor and MEMS) between 1998 and 2000 when he joined WTC as co-founder. He speaks French, English and German.

Shahin Farshchi, Ph.D. has worked with Lux Capital since 2006, focusing on investments in energy and technology. Before joining Lux, he held technical positions at General Motors and several Silicon Valley technology startups. He received his B.S. degree in Electrical Engineering Computer Science with College of Engineering Honors from the University of California at Berkeley, and M.S. and Ph.D. degrees in Electrical Engineering with a Minor in Management from the University of California at Los Angeles. Shahin has also served as a Postdoctoral Scholar at the UCLA department of Electrical Engineering, and Staff Research Associate at the California NanoSystems Institute. His research on wireless biosignal telem-etry has been published in over ten IEEE conference proceedings and three IEEE journals.

Shahin sourced Lux’s investments in Silicon Clocks (acquired by NASDAQ:SLAB) and SiBEAM (acquired by NASDAQ:SIMG) and played key roles in Lux’s investments in Everspin and Luxtera. He works closely in supporting all of Lux’s energy and technology companies. Shahin has been an invited speaker/panelist at a variety of Universities and organizations including the IEEE, UC Berkeley, Stanford, UCLA, UCI, the California Cleantech Initiative, OCTane, and the MIT Club of Silicon Valley.

Jeffrey L. Hilbert is the President, COO and founder of Wispry, Inc. Wispry, based in Irvine, California is a fabless semiconductor company utilizing radio frequency micro-electro-mechanical systems (RF-MEMS) technology integrated with CMOS technology to develop tunable electronic products for the cellular communications and wireless consumer electronics markets. Jeff has over 30 years of executive manage-ment and technical experience in a number of leading semiconductor and MEMS companies including LSI Logic, Compass Design Automation, AMCC, Motorola, Harris and Coventor. An experienced entrepre-neur, Jeff has raised over $75M in financing to fund two consecutive start-up semiconductor companies over the past twelve years. Mr. Hilbert holds a BS in Chemical Engineering from the University of Florida and an MS in Computer Science from Florida Institute of Technology. Dr. Marc Madou - Before joining UCI as the Chancellor’s Professor in Mechanical and Aerospace Engineering (MEA), Dr. Madou was Vice President of Advanced Technology at Nanogen in San Diego, California. He specializes in the application of miniaturization technology to chemical and biological problems (BIO-MEMS). He is the author of several books in this burgeoning field he helped pioneer both in Academia and in Industry. He founded several micromachining companies and has been on the board of many more.

Many of his colleagues became well know in their own right in academia and through successful MEMS start-ups. Madou was the founder of the SRI International’s Microsensor Department, founder


and President of Teknekron Sensor Development Corporation (TSDC), Visiting Miller Professor at UC Berkeley and Endowed Chair at the Ohio State University (Professor in Chemistry and Materials Science and Engineering). The third edition of “Fundamentals of Microfabrication,” an introduction to MEMS and NEMS, which has become known as the “bible” of micromachining, was published in July of this year (http://fundamentalsofmicrofabrication.wordpress.com/).

Some of Dr. Madou’s recent research work involves artificial muscle for responsive drug delivery, a com-pact disc-based fluidic platform and carbon MEMS, the two latter fields were pioneered by Dr. Madou. To find out more about those recent research projects, visit www.biomems.net. At UCI (USA) and UNIST (South Korea), Dr. Madou works on carbon-MEMS, a CD based fluidic platform, artificial muscle for responsive drug delivery and integrating fluidics with DNA arrays as well as researching label–free assays for the Molecular Diagnostics platform of the future.

Dr. Frank Melzer has been General Manager and CEO of Bosch Sensortec since its foundation in early 2005. Prior to joining Bosch Sensortec Dr. Melzer held various engineering and managerial positions at Robert Bosch in Germany and Spain. Dr. Melzer received a Ph.D. in Mechanical Engineering from the University of Stuttgart, Germany in 1994 and an MBA from the Rotman School of Management at the University of Toronto in 2003.

Dr. Kurt Petersen received his BS degree cum laude in EE from UC Berkeley in 1970. In 1975, he received a Ph.D. in EE from the Massachusetts Institute of Technology. Dr. Petersen established a micromachin-ing research group at IBM from 1975 to 1982, during which he wrote the review paper “Silicon as a Mechanical Material,” published in the IEEE Proceedings (May 1982). This paper is still the most frequently referenced work in the field of micromachining and micro-electro-mechanical systems (MEMS).

Since 1982, Dr. Petersen has co-founded six companies in MEMS technology, Transensory Devices Inc. in 1982, NovaSensor in 1985 (now owned by GE), Cepheid in 1996 (now a public company on NASDAQ: CPHD with $360M/year of sales), SiTime in 2004 (which has shipped >100M MEMS oscillators), Profusa in 2008 (still private), and Verreon in 2009 (acquired by Qualcomm). All of these companies have become technical and commercial leaders in the field of MEMS devices and applications.

In 2011, Dr. Petersen joined the Band of Angels in Silicon Valley. The Band is an angel investment group which mentors and invests in early stage, high-tech, start-up companies. Today, he spends most of his time helping and mentoring such companies.

Dr. Petersen has published over 100 papers, and has been granted over 35 patents in the field of MEMS. In 2001, he was awarded the IEEE Simon Ramo Medal for his contributions to MEMS. Dr. Petersen is a member of the National Academy of Engineering and is a Fellow of the IEEE in recognition of his contri-butions to “the commercialization of MEMS technology”.


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Albert (“Al”) P. Pisano is a Director of the Berkeley Sensor & Actuator Center (BSAC) and has recently completed 5-1/2 years as Professor and Chair of the Department of Mechanical Engineering at the University of California at Berkeley. He was elected to the National Academy of Engineering in 2001. A member of the American Society of Mechanical Engineers, he was elected to Fellow status in 2004. In Mechanical Engineering, Professor Pisano holds the FANUC Chair of Mechanical Systems, with a joint appointment to the Department of Electrical Engineering and Computer Science. From 1997-1999, he served as Program Manager for the MEMS program at the Defense Advanced Research Projects Agency (DARPA) in Arlington, VA, where he expanded the MEMS research portfolio to 83 contracts awarded nationwide with a total MEMS research expenditure in excess of $168 million distributed over 3 fiscal years. His research interests and activities at UC Berkeley include MEMS for a wide variety of applications, including harsh environment sensors systems. Professor Gabriel Rebeiz is the Wireless Communications Industry Chair Professor at the University of California, San Diego. He is an IEEE Fellow, an NSF Presidential Young Investigator, a URSI Koga Gold Medal Recipient, IEEE MTT 2003 Distinguished Young Engineer, and is the recipient of the IEEE MTT 2000 Microwave Prize, the IEEE MTT 2010 Distinguished Educator Award and the IEEE Antennas and Propagation 2011 John D. Kraus Antenna Award. He is also the recipient of the 1998 Amoco Teaching Award given to the best undergraduate teacher at the University of Michigan, and the 2008 Jacobs ECE Teacher of the Year Award at UCSD. He is considered as being one of the fathers of RF MEMS and tunable networks. He leads a group in mm-wave RFIC, microwave circuits, RF MEMS, tunable networks, and is the Director of the UCSD/DARPA Center on RF MEMS Reliability and Design Fundamentals.


Emerging Usages & Apps for Sensors in 2016+

Presented bySandhiprakash (Sandhi) BhideSenior Strategist and Futurist

Intel Corporation

For last 50+ years of computing, humans have molded themselves around computers but not the other way around. Going forward, we want computers and devices to understand you/me/us: who I am, what I want and when, where I am, how I like to do things, and so on. In short, we want devices to mold around us, we want them to be contextually-aware. To achieve this feat, devices would need many sensors similar to humans. The number and type of sensors and sensor-based applications in today’s devices are growing rapidly. But do these sensors help devices to understand you/me/us? Sandhi will explore and paint a vision of the future sensors and emerging applications that devices must have to achieve this dream.


MEMS in Consumer Electronics: Will It Keep Growing Forever?

Presented byJeremie Bouchaud, Ph.D.

Director and Principal MEMS AnalystIHS iSuppli

MEMS devices for consumer electronics broke a new record in 2011 with 31% revenue growth following a 26% increase in 2010. Overall, the four-year market prospects will see the market double from $2.16 billion in 2011, to $4.25 billion in 2015 – an enviable 18.5 % CAGR over this time period. The first reason for this impressive expansion is the booming market for smart-phones and tablets. These products are a hotbed for all kinds of MEMS, from accelerometers to gyroscopes, BAW filters, and microphones; not forgetting emerging categories such as pressure sensors for indoor navigation, MEMS actuators for optics autofocus, pico-projectors, thermopiles, etc. The second reason is the fact that a series of new MEMS devices that came to fruition in 2010 and 2011, and especially 3-axis gyroscopes, started selling in 2010 and will exceed $900 million in 2015.

Two other new types of MEMS devices were introduced early in 2011: MEMS joysticks for gam-ing, handsets and tablets, and a new format of thermopile that measures the temperature of the case in handsets and tablets next to the processor. The teardown team at IHS iSuppli also started to find RF MEMS based antenna tuners in smartphones at the end of 2011. Also, MEMS timing is no longer the playground for start-ups as major players recently stepped into this market – namely IDT and NXP. There are, in total, 10 types of MEMS devices including gas sen-sors and actuators for autofocus in camera phones which did not exist five years ago, and that will (themselves) generate close to $2 billion in 2015. Some areas however, are less rosy. The “casual” gaming market (i.e., the users of mass appeal Nintendo Wii type products) is saturat-ing, and as a result MEMS sensor sales into this segment fell 21% in 2011. New-generation platforms will generate revenue again in 2013 through 2015. Also the golden years are behind for accelerometers in the consumer space, 2011 was the last year with a double digit revenue growth and IHS iSuppli anticipates only a 6% CAGR from 2011 2015.

IHS iSuppli will give its take on the so called next “killer apps” . The presentation will also high-light in which segments newcomers may still have a chance to grab a share of the pie, and where it is too late. Finally, IHS iSuppli will address the adjacent opportunities created by the proliferation of MEMS in consumer devices, e.g. for software suppliers or for new generations of processors supporting context awareness.


MEMS: Enabling Distributed Healthcare Presented by

Shahin Farshchi, Ph.D.Principal

Lux Capital Management

Over the past 15 years, we witnessed MEMS technology revolutionize DNA analysis, lab auto-mation, and devices used in surgery & clinical diagnostics. As our society becomes more con-nected, it is not just the microfluidic capabilities that MEMS brings to bear that is transforma-tional, but also the various sensing, communications, energy harvesting, and computational capabilities that can revolutionize healthcare. This presentation will consider an environment where a cloud-connected, constantly-data-generating society can receive treatment from healthcare providers anywhere at any time, and role MEMS can play in facilitating wellness, as well as the required interfaces between patients, providers, and treatment.


Emerging Opportunities for RF-MEMS in Mobile Applications

Presented byJeffrey Hilbert

President and FounderWiSpry, Inc.

3G and rapidly growing 4G mobile applications have intensified the requirements for a new, disruptive technology to implement next generation radio hardware particularly in the RF front-end of these devices. RF micro-electro-mechanical systems (RF-MEMS) is one such technology. Recent progress in RF-MEMS has provided growing access to the numerous ben-efits enabled by micro-mechanical solutions while achieving the cost points and scalability required for success in the mobile applications market.

This presentation will review the current status of RF-MEMS in mobile applications as well as look at future product applications and integration opportunities. By way of an example, state-of-the-art results from the implementation of software tunable, digital, RF-CMOS MEMS circuits will be discussed.


RF MEMS Switches and Tuners: Commercialization Trends and Business

Opportunities Presented by

Gabriel Rebeiz, Ph.D.Professor

University of California, San Diego

RF MEMS (radio frequency micro-electro-mechnical-systems) ohmic switches and tunable capacitors are now being used in high speed testers and in tunable antennas for cell phone applications. They offer extremely high performance at DC-6 GHz (very low loss, high linear-ity, high-Q, high power and voltage handling) and this has lead to a large development effort in a number of start-up companies and research labs. This presentation will introduce the technical challenges in building RF MEMS devices for high volume applications, and will sum-marize the leading companies in this field.


Consumer MEMS – A Technology Play Presented by

Frank Melzer, Ph.D.CEO

Bosch Sensortec GmbH

A big enabler of new applications in today’s handheld devices are MEMS sensors. In the past few years the integration of different sensors with different technologies increased steadily. This evolution does not only challenge the development of single components as such, but also requires new approaches towards integration and sensor signal processing. As a result, sensor fusion does not only mean the integration of the MEMS devices into one package, but also the process of handling multiple sensors’ raw data in such a manner that the resulting data is an enhanced subset of initial raw sensor data to achieve a superior performance. This presentation provides an insight into the different sensor fusion possibilities and require-ments of IMUs and 6-/9- and 10- degrees of freedom sensor solutions.


Harsh Environment MEMS Wireless Sensors for Energy and Power

Presented byAl Pisano, Ph.D.

ProfessorUniversity of California, Berkeley

In this presentation, current research and future visions will be presented for extreme harsh environment, MEMS wireless sensors fabricated from silicon carbide and aluminum nitride. These sensors are being integrated with silicon carbide electronics and aluminum nitride energy harvesting devices to build the first instance of a single-chip, self-powered, wireless sensor system. The presentation will begin with a research motivation that examines the actual flows of energy (about 100 exajoules per year) through the United States. This energy flow is approximately 85% derived from the combustion of fossil fuel, and so the seminar proceeds to outline the options for a true high-temperature sensor system (600-1000˚C). The presentation then will present a series of visions of sensors that can survive combustion environments, including some prototypes that have survived 600˚C, 64,000 g shocks and a jet of dry steam. A number of thin film materials, suitable for fabrication via MEMS methods will be described as candidates for application to this sensor suite. Then, a number of sensors, both existing and under development, will be presented. Integration into silicon carbide elec-tronics will be addressed, and new research results for the fabrication and testing of silicon carbide electronic devices (both active and passive) will be presented. The use of aluminum nitride as a RF component in harsh environments will be described and new results for temperature-compensated radio filters shown. A future vision of a single-chip, self-powered, wireless sensor systems will be described, and a set of conclusions about the future of the technology will be given.


MEMS Alternatives to Quartz Oscillators: Why Do People Want to Buy Them?

Presented byHarmeet Bhugra

Managing Director, MEMS DivisionIDT Inc.

Over the past few decades, quartz crystal oscillators (XOs) have been used for frequency refer-ence applications in almost all electronic systems. The current market for timing systems and oscillators is approximately $4 billion, with the vast majority of this market still dominated by quartz-based components. However, non-quartz oscillators are gradually penetrating the marketplace and are increasingly being favored by system designers. This presentation will provide an overview of the timing market and discuss major application trends driving fre-quency control products. It will also discuss non-quartz approaches being taken by various companies and address why alternative solutions to quartz are gaining traction. In particu-lar, various MEMS and IC oscillator implementations and how they compare to each other, including the pros and cons of each approach, will be discussed.


Suspended Carbon Nano Wire Sensors Presented by

Marc Madou, Ph.D.Professor

University of California, Irvine

The carbon MEMS (C-MEMS) microfabrication technique is based on the pyrolysis of shaped/patterned polymers (e.g., resists patterned with photolithography) at different temperatures and different ambient atmospheres. Carbon, because it is brittle and hard, is a difficult mate-rial to machine. Polymers on the other hand, can be machined easily in a wide variety of machine tools. In the embodiment of the C-MEMS process that allows us to make the very smallest carbon features, a photoresist is patterned by lithography and is subsequently pyro-lyzed at high-temperature in an oxygen-free environment. The resulting carbon material was found to be amorphous and glassy carbon-like in electrochemical behavior. Using a combi-nation of photolithography, near field and far-field electro spinning for patterning polymer precursors and carbonization of the thus patterned precursors, a wide variety of new carbon based devices are enabled.


MEMS: How Did We Get Here? Presented by

Kurt Petersen, Ph.D.President KP-MEMS

During the past 30 years, MEMS has grown from a cottage industry to a multi-billion dollar market. Today, people are actually seriously talking about a one trillion part MEMS market. When I began building MEMS devices, I had to build my own equipment for double-sided wafer lithography, aligned wafer bonding, and sprayed photo-resist for complex surface topographies. Today, there are many sophisticated pieces of wafer processing equipment commercially available by vendors solely for manufacturing MEMS. For most of the past 30 years, MEMS has been a poor second cousin to the IC industry. Today, the traditional IC indus-try has whole-heartedly embraced MEMS, and MEMS now appears almost as a “more than Moore” savior of the IC industry. How and why has MEMS achieved this status? I believe the reason is similar to why new start-up companies are successful; the Team, the Market, and the Technology. We will consider this question in more detail during this presentation.


About MEMS Journal

MEMS Journal is the only independent publication devoted to providing comprehensive coverage of the latest developments in the rapidly emerging MEMS industry. Their weekly newsletter is specifically designed for MEMS industry professionals and reports on the top MEMS stories from 7000+ sources worldwide. They cover the most critical developments in the MEMS industry to ensure that their subscribers explore and take advantage of the latest investment, commercialization and partnership opportunities. Their newsletter also reports on the most vital newly granted patents in the MEMS industry. Benefits and features include: comprehensive MEMS news coverage, 7-14 MEMS and microsystems news stories every week, interviews with MEMS industry leaders, latest MEMS patents and patent applications, sample chapters from newly published MEMS books, MEMS classifieds including job posts and equipment, latest MEMS whitepapers and presentations, MEMS CDs, catalogs and vendor literature.

About MEPTEC

MEPTEC (MicroElectronics Packaging and Test Engineering Council) is a trade association of semiconductor suppli-ers, manufacturers, and vendors concerned exclusively with packaging, assembly, and testing, and is committed to enhancing the competitiveness of the back-end portion of the semiconductor industry. Since its inception over 30 years ago, MEPTEC has provided a forum for semiconductor packaging and test professionals to learn and exchange ideas that relate to packaging, assembly, test and handling. Through our monthly luncheons, and one-day sympo-siums, and an Advisory Board consisting of individuals from all segments of the semiconductor industry, MEPTEC continuously strives to improve and elevate the roles of assembly and test professionals in the industry. For more information about MEPTEC events and membership visit www.meptec.org.

PO Box 222, Medicine Park, OK 73557Tel: 650-714-1570 www.meptec.org

14681 Talbot Street, Oak Park, MI 48237Tel: 734-277-3599

www.memsjournal.org

Documents

MEMS Business Forum 2012 - MEPTEC MBF Proceedings.pdf · inventory of refurbished wafer fabrication and metrology equipment from top manufacturers such as SUSSMicrotec, EVG, STS,