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© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 1
ROCHESTER INSTITUTE OF TEHNOLOGYMICROELECTRONIC ENGINEERING
4-21-2008 mem_app_pumps.ppt
Microelectromechanical Systems (MEMs)Applications – Valves and Pumps
Dr. Lynn Fuller
webpage: http://www.people.rit.edu/lffeeeMicroelectronic Engineering
Rochester Institute of Technology82 Lomb Memorial Drive
Rochester, NY 14623-5604Tel (585) 475-2035Fax (585) 475-5041
Email: [email protected]: http://www.microe.rit.edu
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 2
REVIEW
Valves and Pumps
ValvesFlapDiaphragm
PumpsRotaryDiaphragm PumpPeristaltic
ActuationHeatPiezoelectricElectrostaticMagnetic
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 3
OUTLINE
Introduction
Basic Flapper and Diaphragm Valve
Micromachined Silicon Microvalve, T. Ohnstein, et.el., Sensor and System Development Center, Honeywell, Inc., Bloomington, Minnesota, Proceedings of the IEEE Micro Electro Mechanical Systems Conference, February 1990.
A Pressure-Balanced Electrostatically Actuated Microvalve, M. A. Huff, et.el., MIT, Cambridge, MA, Technical Digest of the IEEE Solid-State Sensor and Actuator Workshop, June 1990.
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 4
OUTLINE
Basic Diaphragm and Peristaltic Pumps
A Thermopneumatic Micropump Based on Micro-engineering Techniques, F.C. M. Van De Pol, et. el., University of Twente, Department of Electrical Engineering, Enschede, The Netherlands, Proceedings of 5th International Conference on Solid-State Sensors and Actuators, June 1990
Piezoelectrically Actuated Miniature Peristaltic Pump, Y. Bar-Cohen, JPL/Caltech, Pasadena, CA, SPIE’s 7th Annual International Symposium on Smart Structures and Materials, March 1-5, 2000, Newport CA.
Thermally Actuated Peristaltic Pump Design, Vinay V.Abhyankar, Lynn F. Fuller, RIT, January 22, 2002
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 5
INTRODUCTION
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 6
FLAPPER VALVES
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 7
DIAPHRAGM VALVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 8
AN ELECTROSTATIC FLAPPER VALAVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 9
AN ELECTROSTATIC FLAPPER VALAVE
Normally-open ValveClosure Plate
350 µm x 390 µmInlet Orifice
24 µm x 60 µm
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 10
AN ELECTROSTATIC FLAPPER VALAVE
Metal electrodes (did not say, guess W)4 Nitride LayersOxide or Aluminum Sacrificial Layer
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 11
AN ELECTROSTATIC FLAPPER VALAVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 12
AN ELECTROSTATIC FLAPPER VALAVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 13
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 14
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 15
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 16
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 17
AN ELECTROSTATIC DIAPHRAGM VALVE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 18
VALVE DESIGN AND SIMULATION
Greg Schallert – 2003Fluent Simulation
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 19
JERMAINE WHITE CHECK VALVE
200µ
200µ
100µ
2µ
2µ
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 20
CHECK VALVE THEORY OF OPERATION
§ When the backside pressure is greater, the flexible flap will bend up and allow airflow.
§ When the front side pressure is greater, the flap bends down and occludes the hole thus preventing airflow.
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 21
MOVIE OF CHECK VALVE OPERATING
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 22
MOVIE OF CHECK VALVE OPERATING
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 23
DIAPHRAGM PUMP
Heater
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 24
PERISTALTIC PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 25
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 26
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 27
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 28
THERMAL ACTIVATED DIAPHRAGM PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 29
THERMAL ACTIVATED DIAPHRAGM PUMP
Conclusion:
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 30
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 31
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 32
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 33
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 34
PIEZOELECTRIC ACTIVATED PERISTALTIC PUMP
Flow = 3 cc/minPressure = 1100 Pascal = 0.16 psi
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 35
THERMAL ACTUATED PERISTALTIC PUMP
Silicon Substrate
Silicon
80 µm diaphragm (watch glass)
Insulating material
Thin Film Heater
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 36
THERMAL ACTUATED PERISTALTIC PUMP
1 2 3 4 5 6
• Sequentially activating the pumps 1- 6 will advance the fluid• Cycling pumping system gives desired flow rate [picoL/sec]• Additional channels can be added in increase flow rate further
1 2 3 4 5 6
1 2 3 4 5 6
reservoir reservoir
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 37
THERMAL ACTUATED PERISTALTIC PUMP
• The resistive heating element heats the cavity• The cavity pressure rises till the watch glass deflects downward
since p/T = constant (want 10 psi activation pressure)• The deflection results in volume displacement in the etched channel
Silicon Substrate
Silicon
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 38
THERMAL ACTUATED PERISTALTIC PUMP
Length
WidthDeflected diaphragm
Forward DisplacementReverse Displacement
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 39
THERMAL ACTUATED PERISTALTIC PUMP
32
24
)/1(]1)/1[()979.249(
δvEvPR
y−
=
y = deflection [µm]P = pressure [mm hg]R = diaphragm radius [µm]v = Poisson’s ratio [-]Y = Young’s Modulus [dyne/cm2]δ = diaphragm thickness [µm]
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 40
THERMAL ACTUATED PERISTALTIC PUMP
Required Pressure vs Diaphragm Radius for 0.75 µm deflection
Required Pressure vs Diaphram Radius for 0.75 µm Deflection
0
5
10
15
20
25
30
1000 1200 1400 1600 1800
Radius
Pres
sure
[psi
]
§ v = 0.206 [-]§ y = 0.75 µm § Y = 7.30E11 dyne/cm2
§ δ = 80 µm§ P = 517.149 mm Hg
(10 psi)§ R = 1226.932983 µm
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 41
THERMAL ACTUATED PERISTALTIC PUMP
Thermal Design Calculations
(qin – qout) + qgen = qstored0 0
qgen= q1 + q2~ 0
qgen = q2
Theater – Tambient
(kA/L)glass + (kA/L) silicon
q2 =
= 20 mW
Tambient
Tsurface
Power
q1
q2
Tambient
Theater(kA/L)glass
(kA/L) silicon
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 42
THERMAL ACTUATED PERISTALTIC PUMP
Fabrication Process
§ Anisotropically etch pump pattern in silicon wafer§ Glue 80µm thick slip glass cover across
channel section§ Place resistance heaters above diaphragm§ Glue patterned rubber insulator or pattern
photoresist over channel section
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 43
THERMAL ACTUATED PERISTALTIC PUMP
Fabrication Process Continued
Not to scale
HeaterDiaphragmInsulatorChannel
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 44
PUMPING FLUIDS WITH VOLTAGE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 45
PUMPING FLUIDS WITH VOLTAGE
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 46
REFERENCES
1. Micromachined Transducers, Gregory T.A. Kovacs, McGraw-Hill, 1998.
2. Microsystem Design, Stephen D. Senturia, Kluwer Academic Press, 2001.
3. Microfluidic Technology and Applications, Michael Koch, Research Studies Press Ltd., Baldock, Hertfordshire, England, TJ853.K63 2000, ISBN 0 86380 244 3, 2000.
2. IEEE Journal of Microelectromechanical Systems.
© April 21, 2008 Dr. Lynn Fuller
Rochester Institute of TechnologyMicroelectronic Engineering
MEMs Applications –Valves and Pumps
Page 47
HW – APPLICATIONS VALVES AND PUMPS
1. Find another publication describing the fabrication of a MEMs valve or pump. Describe the fabrication sequence in your own words. Attach a copy of the paper.
