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Microscopia electronica
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2
Electron Microscopy
• beams of electrons are used to produce images
• wavelength of electron beam is much shorter than light, resulting in much higher resolution
Figure 2.20
definition of resolution
dmin =0.61 n sin
n = refractive index = wavelength
d
note: resolving power independent of lens properties
: for green (500nm) light dmin = c. 0.2 µm
Microscopía Óptica vs Microscopía Electrónica de Barrido
m
OM SEM
Baja profundidad de campo Baja resolución
Alta profundidad de campo Alta resolución
radiolarian
http://www.mse.iastate.edu/microscopy/
Depth of focus
Optical microscopy vs SEM
• A SEM typically has orders of magnitude better depth of focus than a optical microscope making SEM suitable for studying rough surfaces
• The higher magnification, the lower depth of focus
Screw length: ~ 0.6 cm
Images: the A to Z of Materials
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
the electron gun
Bias (Wehnelt)Cylinder
Filament (20-100 KV)
Anode
stream of electrons originating from outer shell of filament atoms
wavelength & voltage
Wavelength () of electrons is determined by the accelerating voltage (V) on the filament from
which they are emitted
= 0.1*(150/V)0.5
. . . thus very high voltages (up to 100 kV) are used to produce small values of (<0.005 nm)
(de Broglie, 1924)
why high vacuum ?
• mean free path of electrons v short in air
- at least 10 -5 mbar usually aimed for
• also
- tungsten filaments burn out in air
- columns must be kept dust free
• achieved by 2-fold pumping:
rotary (mechanical) pump + diffusion pumpor + turbo pump
TEM - transmission electron microscopyTEM - transmission electron microscopy
ExamplesExamples
dislocationsin superalloydislocationsin superalloy
SiO2 precipitate particle in Si
SiO2 precipitate particle in Si
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
TEM - transmission electron microscopyTEM - transmission electron microscopy
ExamplesExamples
Matrix - '-Ni2AlTi
Precipitates - twinned L12 type '-Ni3Al
Matrix - '-Ni2AlTi
Precipitates - twinned L12 type '-Ni3Al
TEM - transmission electron microscopyTEM - transmission electron microscopy
DiffractionDiffraction
Cr23C6 - F cubica = 10.659 Å
Cr23C6 - F cubica = 10.659 Å
Ni2AlTi - P cubica = 2.92 Å
Ni2AlTi - P cubica = 2.92 Å
TEM - transmission electron microscopyTEM - transmission electron microscopy
Polycrystalline regionsPolycrystalline regions
polycrystalline BaTiO3 spotty Debye rings
polycrystalline BaTiO3 spotty Debye rings
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
EL MICROSCOPIO ELECTRÓNICOEL MICROSCOPIO ELECTRÓNICO
Electron beam-sample interactions• The incident electron beam is scattered in the sample,
both elastically and inelastically• This gives rise to various signals that we can detect
(more on that on next slide)• Interaction volume increases with increasing acceleration
voltage and decreases with increasing atomic number
Detectors
Image: Anders W. B. Skilbred, UiO
Secondary electron detector:(Everhart-Thornley)
Backscattered electron detector:(Solid-State Detector)
IMPERFECCIONES CRISTALINAS Y MICROSCOPIA ELECTRONICA
MENA3100
How do we get an image?
• In brief: we shoot high-energy electrons and analyze the outcoming electrons/x-rays
Electrons inElectrons out
or: x-rays out
Secondary electrons (SE)• Generated from the collision
between the incoming electrons and the loosely bonded outer electrons
• Low energy electrons (~10-50 eV)• Only SE generated close to
surface escape (topographic information is obtained)
• Number of SE is greater than the number of incoming electrons
Topographical Contrast
Topographic contrast arises because SE generation depend on the angle of incidence between the beam and sample.
Bright
Dark
+200V
e-
lens polepiece
SE
sample
Everhart-ThornleySE Detector
Scintillator
light pipe
Quartzwindow
+10kVFaraday
cage
Photomultiplier tube
PMT
MENA3100
Backscattered electrons (BSE)
• A fraction of the incident electrons is retarded by the electro-magnetic field of the nucleus and if the scattering angle is greater than 180 ° the electron can escape from the surface
Backscattered electrons (BSE)• High energy electrons (elastic scattering)• Fewer BSE than SE
BSE vs SE
Effect of Atomic Number, Z, on BSE and SE Yield
SEM - scanning electron microscopySEM - scanning electron microscopySpecimen Specimen
Conducting - little or no preparation attach to mounting stub
for insertion into instrument may need to provide conductive path with Ag paint
Conducting - little or no preparation attach to mounting stub
for insertion into instrument may need to provide conductive path with Ag paint
Non-conducting - usually coat with conductive very thin layer (Au, C, Cr)
Non-conducting - usually coat with conductive very thin layer (Au, C, Cr)
The most versatile instrument for a materials scientist?
What can we study in a SEM?
• Topography and morphology
• Chemistry
• Crystallography
• Orientation of grains
• In-situ experiments:– Reactions with atmosphere– Effects of temperature
“Easy” samplepreparation!!
“Big” samples!
Low-voltage micrograph (300 V) of distribution of adhesive droplets on aPost-it note. No conductive coating was applied: such a coating would alter this fragile specimen.
Image Magnification
Example of a series of increasing magnification (spherical lead particles imaged in SE mode)
Low-temperature SEM magnification series for asnow crystal. The crystals are captured, stored, and sputter-coated with platinum at cryogenic temperatures for imaging.
Topography and morphology
• High depth of focus
Image: Camilla Kongshaug, UiOImage: Christian Kjølseth, UiO
SE Images - Topographic Contrast
The debris shown here is an oxide fiber got stuck at a semiconductor device detected by SEM
1m
Defect in a semiconductor device Molybdenumtrioxide crystals
Scanning electron microscope (SEM) image showing corrosion products on hot-dip galvanized steel after immersion in sodium chloride solution
Comparison of SEM techniques:Top: backscattered electron analysis – compositionBottom: secondary electron analysis – topography
Backscattered electron (BSE) image of an antimony-rich region in a fragment of ancient glass. Museums use SEMs for studying valuable artifacts in a nondestructive manner.
Typical SEM/EDX of Ipetumodu clay showing the morphology of the clay and its chemical composition (x500) de: Effects of Alumina Cement on the Refractory Properties of Leached Ipetumodu Clay Davies Oladayo FOLORUNSO1,2*, Peter Apata OLUBAMBI2,3, and Joseph Olatunde BORODE 1,2
MENA3100
X-rays• Photons not electrons• Each element has a
fingerprint X-ray signal• Poorer spatial resolution
than BSE and SE• Relatively few X-ray signals
are emitted and the detector is inefficient
relatively long signal collecting times are needed
Analytical Methods in Electron Microscopy
• a: Energy-Dispersive Spectrometry (EDS)
Analytical Methods in Electron Microscopy
• b: Electron Energy Loss Spectroscopy (EELS)
By examining energy losses at high resolution (about 30 meV), as in HREELS, data concerning the vibrations of molecules on surfaces can be determined
A typical x-ray spectrum for an alloy (5p coin)
In-situ imaging• A modern SEM can be equipped with various
accessories, e.g. a hot stage
In-situ imaging: oxidation of steel at high temperatures
• 800 °C, pH2O = 667 Pa• Formation of Cr2O3
Images: Anders W. B. Skilbred, UiO
2 min 10 min 90 min
Environmental SEM: ESEM
• Traditional SEM chamber pressure: ~ 10-6
Torr
• ESEM: 0.08 – 30 Torr
• Various gases can be used
• Requires different SE detector
Why ESEM?
• To image challenging samples such as:– insulating samples– vacuum-sensitive samples (e.g. biological samples)– irradiation-sensitive samples (e.g. thin organic films)– “wet” samples (oily, dirty, greasy)
• To study and image chemical and physical processes in-situ such as:– mechanical stress-testing– oxidation of metals– hydration/dehydration (e.g. watching paint dry)
Piece of a crystallized polystyrene latex, SE image with ElectroSscan 2020 ESEM.
The world's first ESEM prototype
Wool fibers imaged in an ESEM by the use of two symmetrical plastic scintillating backscattered electron detectors. Pseudocolor.
Fungal spores in lemon grass leaf, SE image, ElectroSscan E3 ESEM
Orchid pollen viewed in an ElectroScan 2020 ESEM, with GSED, 23 kV and 4.9 torr (=653 Pa).
Hydration of NaCl crystals on Teflon, as water vapor pressure rises, at room temperature, in an ESEM by the use of two symmetrical plastic scintillating backscattered electron detectors. Field width 300 µm, 10 kV
Summary• Signals:
– Secondary electrons (SE): mainly topography
• Low energy electrons, high resolution• Surface signal dependent on curvature
– Backscattered electrons (BSE): mainly chemistry
• High energy electrons• “Bulk” signal dependent on atomic number
– X-rays: chemistry• Longer recording times are needed