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MPM181 Pressure Sensor
MPM181 Pressure Sensor
Features
·Ranges: 0~100kPa…5MPa
·MEMS Technology
·Absolute, gauge or differential
·Metal TO package
·For non-corrosive gas or liquid
Applications
·For home appliance field, such as air-conditioner, washing machine, refrigerators etc.
·For automotive electronics field, such as automotive air conditioner, MAP sensor, engine oil
pressure test etc.
·For hydraulic pressure measurement, such as pump, fire fighting and diving etc.
·For other fields, such as workshop, environment monitoring, liquid level measurement etc.
Introduction
MPM181 is a piezo-resistive pressure sensor for fields such as home appliance, automotive
electronics and industrial etc. The core is a pressure sensing die processed by MEMS technology.
The pressure sensing die is composed of a springy diaphragm and four resistors integrated in the
diaphragm. Four piezo-resistors form a Wheatstone bridge structure. When the springy diaphragm
is pressured, Wheatstone bridge will output linear proportional voltage signal with the pressure
which pressed on.
With TO package, MPM181 is easy for users to install and seal PCB board.
With good repeatability, linearity, stability and sensibility, MPM150 is also easy for users to
adjust output using operational amplifier or integrated circuit.
It includes 2 types-- compensated and uncompensated
Cap is the pressure side. In the cap there is silicone glue for water-proof and oil-proof. MPM181
can also be pressurized from front side-cap and back side-tube as differential pressure sensor.
http: //www.microsensor.cn
Add: No.18,Yingda Road Baoji,P.R.China, 721006
Tel: +86 917 3600739/3600832 Fax:3609977 1
MPM181 Pressure Sensor
Electric Performance
Power supply: ≤10VDC or ≤2.0mADCInput impedance
Compensated: constant voltage 8kΩ~10kΩconstant current 3kΩ~5kΩ
Uncompensated: 4kΩ~6kΩOutput impedance
Compensated: constant voltage 4kΩ~6kΩconstant current 4kΩ~6kΩ
Uncompensated: 4kΩ~6kΩInsulation resistor:100MΩ,100VDCOverpressure:
0~100kPa…2MPa: 2 times FS 0~5MPa: 1.5 times FS
Construction
Sensing die: siliconDie mounting glue: silicone glueLeading wire: aluminium-silicon wireCap potting glue: silicon gluePacking housing
Base: Stainless Steel SPCCCap: nickel brassPin: gold plated Kovar
Net weight: around 5g
Environment condition
Orientation: deviate 90° from any direction, zero change ≤ 0.05%FSShock: no change at 10gRMS, (20~2000)Hz conditionImpact: 100g, 11msMedia compatibility:
Pressure side: liquid or gas compatible with nickel or silicone glueReference side (exclude absolute): liquid or gas compatible with silicon, silicone glue,
Pyrex or stainless steel SPCC.
Basic Condition
Media: AirMedia temp: (25±1)℃
http: //www.microsensor.cn
Add: No.18,Yingda Road Baoji,P.R.China, 721006
Tel: +86 917 3600739/3600832 Fax:3609977 2
MPM181 Pressure Sensor
Environment temp.: (25±1)℃Shock: 0.1g (1m/s2) MaxHumidity: (50%±10%) RHPower supply: (5±0.005) VDC
Specifications
Specifications Min. Typ. Max. Unit NotesStandard ranges 100、200、500、700、1000、2000、5000 kPa
Working temperature-40 +125 ℃ Uncompensated-40 +150 ℃ Compensated
Storage temperature -40 +150 ℃Bridge resistance 4 5 6 kΩ
Zero output -15 +15 mVFS output 70 130 mV
Bridge resistance thermal coefficient
2400 2800 3200 ppm/℃ Uncompensated300 400 500 ppm/℃ Compensated
Zero thermal coefficient
20 uV/℃ Uncompensated10 uV/℃ Compensated
FS thermal coefficient
-0.19 -0.22 -0.25 %FS/℃ Uncompensated0 0.02 0.03 %FS/℃ Compensated
Non-linearity 0.2 0.3 %FSHysteresis ±0.1 %FSRepeatability ±0.1 %FS
Annual drift ±1.0 %FS Uncompensated±0.5 %FS Compensated
Notes: 1. Testing at basic condition.2. Temp. range for Thermal drift: 0℃~80℃.
Outline construction
(Unit: mm)
http: //www.microsensor.cn
Add: No.18,Yingda Road Baoji,P.R.China, 721006
Tel: +86 917 3600739/3600832 Fax:3609977 3
MPM181 Pressure Sensor
Gauge/Differential Absolute
Electric connection
Pin 1 2 3 4 5 Notes
Definition-in +out +in -out -in Compensated
+out +out +in -out -in Uncompensated
Order Guide
MPM181 Piezo-resistive pressure sensorRange Notes
[0~100]kPa Y U, C
[0~200]kPa Y U, C
[0~500]kPa Y U, C
[0~700]kPa Y U, C
[0~1]MPa N U, C
[0~2]MPa N U, C
[0~5]MPa N C ( Only A)Code Pressure Type
G GaugeA Absolute
Code PressurizeY Available to pressurize from back sideN Unavailable to pressurize from back side
Code Temperature compensationU UncompensatedC Compensated
MPM181 [0~1]MPa G N C the whole spec.
Notes
1. Please pay special attention to protect the silicone glue which is for water-proof and oil-proof in the circular ring.
2. Please kindly contact us if customers have special requirements. And also please note clearly on the order.
http: //www.microsensor.cn
Add: No.18,Yingda Road Baoji,P.R.China, 721006
Tel: +86 917 3600739/3600832 Fax:3609977 4