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MPM181 Pressure Sensor MPM181 Pressure Sensor Features ·Ranges: 0100kPa…5MPa ·MEMS Technology ·Absolute, gauge or differential ·Metal TO package ·For non-corrosive gas or liquid Applications ·For home appliance field, such as air-conditioner, washing machine, refrigerators etc. ·For automotive electronics field, such as automotive air conditioner, MAP sensor, engine oil pressure test etc. ·For hydraulic pressure measurement, such as pump, fire fighting and diving etc. ·For other fields, such as workshop, environment monitoring, liquid level measurement etc. Introduction MPM181 is a piezo-resistive pressure sensor for fields such as home appliance, automotive electronics and industrial etc. The core is a pressure sensing die processed by MEMS technology. The pressure sensing die is composed of a springy diaphragm and four resistors integrated in http: //www.microsensor.cn Add: No.18,Yingda Road Baoji,P.R.China, 721006 Tel: +86 917 3600739/3600832 Fax3609977 1

MDM291选型 - SENSOR+TEST€¦  · Web viewMPM181 Pressure Sensor Features ·Ranges: 0~100kPa…5MPa ·MEMS Technology ·Absolute, gauge or differential ·Metal TO package ·For

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Page 1: MDM291选型 - SENSOR+TEST€¦  · Web viewMPM181 Pressure Sensor Features ·Ranges: 0~100kPa…5MPa ·MEMS Technology ·Absolute, gauge or differential ·Metal TO package ·For

MPM181 Pressure Sensor

MPM181 Pressure Sensor

Features

·Ranges: 0~100kPa…5MPa

·MEMS Technology

·Absolute, gauge or differential

·Metal TO package

·For non-corrosive gas or liquid

Applications

·For home appliance field, such as air-conditioner, washing machine, refrigerators etc.

·For automotive electronics field, such as automotive air conditioner, MAP sensor, engine oil

pressure test etc.

·For hydraulic pressure measurement, such as pump, fire fighting and diving etc.

·For other fields, such as workshop, environment monitoring, liquid level measurement etc.

Introduction

MPM181 is a piezo-resistive pressure sensor for fields such as home appliance, automotive

electronics and industrial etc. The core is a pressure sensing die processed by MEMS technology.

The pressure sensing die is composed of a springy diaphragm and four resistors integrated in the

diaphragm. Four piezo-resistors form a Wheatstone bridge structure. When the springy diaphragm

is pressured, Wheatstone bridge will output linear proportional voltage signal with the pressure

which pressed on.

With TO package, MPM181 is easy for users to install and seal PCB board.

With good repeatability, linearity, stability and sensibility, MPM150 is also easy for users to

adjust output using operational amplifier or integrated circuit.

It includes 2 types-- compensated and uncompensated

Cap is the pressure side. In the cap there is silicone glue for water-proof and oil-proof. MPM181

can also be pressurized from front side-cap and back side-tube as differential pressure sensor.

http: //www.microsensor.cn

Add: No.18,Yingda Road Baoji,P.R.China, 721006

Tel: +86 917 3600739/3600832 Fax:3609977 1

Page 2: MDM291选型 - SENSOR+TEST€¦  · Web viewMPM181 Pressure Sensor Features ·Ranges: 0~100kPa…5MPa ·MEMS Technology ·Absolute, gauge or differential ·Metal TO package ·For

MPM181 Pressure Sensor

Electric Performance

Power supply: ≤10VDC or ≤2.0mADCInput impedance

Compensated: constant voltage 8kΩ~10kΩconstant current 3kΩ~5kΩ

Uncompensated: 4kΩ~6kΩOutput impedance

Compensated: constant voltage 4kΩ~6kΩconstant current 4kΩ~6kΩ

Uncompensated: 4kΩ~6kΩInsulation resistor:100MΩ,100VDCOverpressure:

0~100kPa…2MPa: 2 times FS 0~5MPa: 1.5 times FS

Construction

Sensing die: siliconDie mounting glue: silicone glueLeading wire: aluminium-silicon wireCap potting glue: silicon gluePacking housing

Base: Stainless Steel SPCCCap: nickel brassPin: gold plated Kovar

Net weight: around 5g

Environment condition

Orientation: deviate 90° from any direction, zero change ≤ 0.05%FSShock: no change at 10gRMS, (20~2000)Hz conditionImpact: 100g, 11msMedia compatibility:

Pressure side: liquid or gas compatible with nickel or silicone glueReference side (exclude absolute): liquid or gas compatible with silicon, silicone glue,

Pyrex or stainless steel SPCC.

Basic Condition

Media: AirMedia temp: (25±1)℃

http: //www.microsensor.cn

Add: No.18,Yingda Road Baoji,P.R.China, 721006

Tel: +86 917 3600739/3600832 Fax:3609977 2

Page 3: MDM291选型 - SENSOR+TEST€¦  · Web viewMPM181 Pressure Sensor Features ·Ranges: 0~100kPa…5MPa ·MEMS Technology ·Absolute, gauge or differential ·Metal TO package ·For

MPM181 Pressure Sensor

Environment temp.: (25±1)℃Shock: 0.1g (1m/s2) MaxHumidity: (50%±10%) RHPower supply: (5±0.005) VDC

Specifications

Specifications Min. Typ. Max. Unit NotesStandard ranges 100、200、500、700、1000、2000、5000 kPa

Working temperature-40 +125 ℃ Uncompensated-40 +150 ℃ Compensated

Storage temperature -40 +150 ℃Bridge resistance 4 5 6 kΩ

Zero output -15 +15 mVFS output 70 130 mV

Bridge resistance thermal coefficient

2400 2800 3200 ppm/℃ Uncompensated300 400 500 ppm/℃ Compensated

Zero thermal coefficient

20 uV/℃ Uncompensated10 uV/℃ Compensated

FS thermal coefficient

-0.19 -0.22 -0.25 %FS/℃ Uncompensated0 0.02 0.03 %FS/℃ Compensated

Non-linearity 0.2 0.3 %FSHysteresis ±0.1 %FSRepeatability ±0.1 %FS

Annual drift ±1.0 %FS Uncompensated±0.5 %FS Compensated

Notes: 1. Testing at basic condition.2. Temp. range for Thermal drift: 0℃~80℃.

Outline construction

(Unit: mm)

http: //www.microsensor.cn

Add: No.18,Yingda Road Baoji,P.R.China, 721006

Tel: +86 917 3600739/3600832 Fax:3609977 3

Page 4: MDM291选型 - SENSOR+TEST€¦  · Web viewMPM181 Pressure Sensor Features ·Ranges: 0~100kPa…5MPa ·MEMS Technology ·Absolute, gauge or differential ·Metal TO package ·For

MPM181 Pressure Sensor

Gauge/Differential Absolute

Electric connection

Pin 1 2 3 4 5 Notes

Definition-in +out +in -out -in Compensated

+out +out +in -out -in Uncompensated

Order Guide

MPM181 Piezo-resistive pressure sensorRange Notes

[0~100]kPa Y U, C

[0~200]kPa Y U, C

[0~500]kPa Y U, C

[0~700]kPa Y U, C

[0~1]MPa N U, C

[0~2]MPa N U, C

[0~5]MPa N C ( Only A)Code Pressure Type

G GaugeA Absolute

Code PressurizeY Available to pressurize from back sideN Unavailable to pressurize from back side

Code Temperature compensationU UncompensatedC Compensated

MPM181 [0~1]MPa G N C the whole spec.

Notes

1. Please pay special attention to protect the silicone glue which is for water-proof and oil-proof in the circular ring.

2. Please kindly contact us if customers have special requirements. And also please note clearly on the order.

http: //www.microsensor.cn

Add: No.18,Yingda Road Baoji,P.R.China, 721006

Tel: +86 917 3600739/3600832 Fax:3609977 4