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McGill Nanotools Microfab Facility: MCRF Site Visit
Peter GrutterAcademic Director
September 2011
McGill Nanotools Microfab Facility
• 3300sq.ft. facility, 1000 sq.ft. clean room space.
• $13 million capital investment, $615K/year operating budget
• In 2010:– 87 individual projects– 42 principal investigators – 38% users external to McGill– Internal users from 5 faculties– 10 corporate users– 91 students/PDFs trained– At least 63 peer reviewed papers, 6 patents, 52
thesis
0.7um features
Outline - Selection Criteria • Accreditation:
1.Character of the facility2.Efficient use of the facility3.Quality of the nanotechnology research program
• Accessibility:4.Users5.Benefits for Quebec6. Integration and promotion7.Development plan
3
1. Characteristics of the Facility
• Facility: over the past 10 years over 13M$ capital equipment invested by Quebec, CFI and NSERC
• Equipment enables R&D and training in:1. Nanoelectronics2. Nanobiology3. NEMS/MEMS 4. Nanophotonics
• Providing leadership within QNI: – integrating fabs of 4 major universities in Quebec: – Training: NSERC CREATE ISS (2009)– Infrastructure support: NSERC MRS (2011, in prep.) 4
1. Characteristics of the Facility
Equipment: • Complete NEMS/MEMS fab facility (see section F for details).• Complementarity with the global QNI offer (see Section C of
application).Unique character of McGill Nanotools Microfab:• Ecosphere of integrated training and world-class R&D in
terms of processing know-how and established collaborations along 2 major axes: – fundamental – industrial – interdisciplinary (medicine – biology – chemistry –
physics – ECE – materials science – tissue eng.)
5
Unique Ecosphere: Green Technology
6
Growing, understanding, processing and integrating InN for energy and sensing applications
University:Z. Mi (ECE), G. Gervais (Physics), P. Kambhampati (Chemistry), T. Szkopek (ECE), A. Kirk (ECE), Lennox (Chemistry), R. Sladek (Genomics)
Companies:ICP Solar Technologies, Future Lightning Solutions, Silonex Inc. DNA Landmarks (St. Jean-sur-Richelieu, QC), BASF
Government and Crown Corporations:IREQ (Hydro Quebec), DRDC (Val Cartier, QC), Canadian Space Agency (Brossard, QC)
Unique Ecosphere: Green Technology
MBE growth of GaN nanowires (Z. Mi)
Closed loop growth-fabrication-characterization-application Proximity to fab crucial!
7
World’s most efficient phosphor-free white light LEDs: Devices grown in McGill MBE lab and fabricated in McGill Nanotools Microfab. 17.8.2011: $ 667,500 MDEIE for commercialization (wafer scale demonstration)!
McGill leads the pack in nanoscale nitride semiconductors. Only nitride MBE system in Canada.
Vol. 11, 1919 (2011).
GaAs Substrate
Zetian Mi, ECE, McGill
Integrated tube lasers waveguides on Si
OSA Optics Express 19, 12164 (2011)
Fabrication of Optical Ring Resonators
8
Unique Ecosphere: SiC
9
SiC Micromachining compatible with CMOS technologies
University:Mourad el-Gamal (ECE, McGill), Srikar Vengallatore (Mechanical, McGill) Companies:MEMS-Vision (Montreal), Thales Inc., Boston Microsystems
10
The Vision
•Very small, for portable devices …•Batch fabrication, for very low cost•Endless functionalities•Much less battery consumption
+
MicroMechanical Sensors &Actuators
=
MEMS(Micro Electro-Mechanical Systems)
State-of-the-Art in MEMS Integration
11
MEMS Technology
Connections
IC Technology
MEMS
Connections
IC
At least three manufacturing or assembly facilities are needed
Objective: “Growing” the mechanical devices “on top of” the electronics using IC compatible technologies
12
Challenges: Incompatible temperatures, materials, and chemicals.
- High elastic modulus- High acoustic velocity - High fracture strength - Sustains higher temp.- Inert surfaces- Resists corrosion, erosion, and radiation- Biocompatible
A Breakthrough Material ?
13
Before New Inventions:
- Difficult to deposit - High temp. processing - Not compatible with IC manufacturing - High residual stresses - Difficult & slow etching and deposition
SiC is routinely used in the manufacturing of CMOS electronics, for example in some of today’s state-of-the-art and very high-end microprocessors.
Metals
IC & MEMS
Problems Solved - MoSiC™ MEMS (El-Gamal, McGill)patented, published, commercialization venture started – MEMS Vision Inc.
Harp-like Vibration SensorsMicro Beam ResonatorsPressure Sensors
Input
Isolation
Micro Switches
Input Output
ActuationIsolation
Output
Input
Square Resonators Tunable Capacitors
Input
Output 14
150m
12m
220m
150m
12m
220m
Stress Control
< 50 MPa of stress
- Small gaps (high sensitivity) - High initial sensors accuracies
High Yield
Problems Solved - MoSiC™ MEMS Processing and materials know-how key! Many have tried, all others have failed!
15
Unique Ecosphere: Nanobiotech & Health
Nanofluidics Microfluidic systems
16
3D microfluidic probe:Shear free gradient at the stagnation point for cell chemotaxis studies.
Juncker et al.,Nature Commun. 2 465 (2011)
nano
chan
nel
100 nm
Reisner et al., PNAS (2010)
Sculpting the energy landscape of polymers and DNA.
DNA melting assay.
Si pins for multi-spotting proteins.System used to identify 6 relevant markers for breast cancer. Developing protein chip.
Pla-Roca et al. Mol. Cell. Prot. (under review)
Myoblast response to RGD Peptide Gradient (MNI)
nanopore in 20nm thick SiNx membrane (made via TEM milling)
Conventional Nanopore Nanopore Nanochannel
Concept: Nanopore-Nanochannel Device
reservoirs
nanopore
nanochannel
Reisner (Physics, McGill) 17
Nanopore-Nanochannel: Device Fabrication
loadingmicrochannel
Membrane(50x50μm)
nanochannel
10μm
nanopore
TEM image of nanoporeembedded in nanochannel
100nm
18
Other concrete example of interdisciplinary interactions
Plasmonic Micro-array BiosensorLow cost 24,000 element plasmonic sensing array based on patterned, functionalized self assembled gold nano rods. Read-out: absorption spectrum shift. Integrated system demonstrated. Currently being tested with leishmania (protozoan infection common in northern Asia), in collaboration with B. Ward (Fac. of Medicine) Kirk (ECE), Lennox (Chem.) and Reven (Chem.)
19
Gold nanorods100 nm
Read-out
cartridge
Completed chip
Cantilever based biochemical sensingFunctionalized microfabricated cantilevers transduct electrochemical signal (Lennox (Chem.), Sladek (Genomics) & Grutter (Physics)). Systems integration in collaboration with A. Boisen (DTU) and M. Roukes (Cal Tech). Transfer of fundamental insights to nanowire sensors: Si nanowires (M. Reed, Yale) and InN nanowires (Z. Mi (ECE) and DNA Landmarks Inc.).
Unique Ecosphere Micro/NanoSystems
20
10 nm
Grutter (Physics, McGill), Guo (Physics, McGill), Silva (Chemistry UdM), Beerens (ECE, Sherbrooke)
Microelectronic Engineering 87, 652 (2010)Advanced Materials 21, 2029 (2009) (including cover page)J. Phys.: Condens. Matter 21, 423101 (2009) (invited topical review)Phys. Rev. Lett. 100, 186104 (2008)
Light off Light on
CuPc:PTCDI deposited on KBr PTCDA on KBr(001)
Unique Ecosphere Micro/NanoSystems
Molecular electronics, OPV, CNT, graphene, nanowires for topological quantum computing, ...
21graphene FET memory cells
T. Szkopek (ECE, McGill), R. Martel (Chem., UdM)M. Siaj, (Chem. UQAM)
A. Champagne (Concordia)
SNS Z. Mi (ECE), T. Szkopek (ECE, McGill), G. Gervais (Physics, McGill)
Suspended bridge CNT device
3. Quality of Nanotechnology Research Programs
22
From NanoQuebec’s website:
http://w
ww
.nanoquebec.ca/en/nano-in-quebec.php
Unique Ecosphere
Training:• New type of students:
– Sébastien Ricoult: neuroengineering PhD with extensive fab experience. Industry needs such people!
– Michael Ménard: ECE McGill -> Cornell -> UQAM – Frédéric Nabki: ECE McGill -> UQAM (NanoQAM)
• NSERC CREATEs: ($900k p.a. total)– Integrated Sensor systems (2009); PI Kirk– Neuroengineering (2010); PI Lennox – Nanobiomachines (2010); PI Gehring
• Nanobiotechnology Microfab Course:Hands-on course, organized by D. Juncker4th year in 2011, attracted 26 participants (national, international and industry). 23
2. Efficient operation
• Our guiding principle is to fund operating costs (including maintenance/repairs) from user fees.
• Keeping the Microfab ‘ready for use’ requires dedicated and highly trained personnel – which is financed by a combination of other contributions.
• Responsive, transparent management structure.
• User driven
24
4. Usage
25
2806
1097
265
29
135
35
Facility Hours Used - FY2008/2009
Engineering(10)
Medicine(3)
Science(9)
Agricultural and Environmental Sciences(1)
External Academic(11)
Industrial(2)
Total PIs (36)
Total Hours = 4367
Source: annual McGill Nanotools Microfab reports
4210370
314
1 415
1019
Hours Used - FY2010-2011Total PI: 42
Total Hours: 6328
Engineering(13)Medicine(5)Science(7)Agricultural Sc.(1)External Academics(13)Industrials(3)
60% incre
ase in 2
years
4. Usage
26
2806
1097
265
29
135
35
Facility Hours Used - FY2008/2009
Engineering(10)
Medicine(3)
Science(9)
Agricultural and Environmental Sciences(1)
External Academic(11)
Industrial(2)
Total PIs (36)
Total Hours = 4367
4210370
314
1 415
1019
Hours Used - FY2010-2011Total PI: 42
Total Hours: 6328
Engineering(13)Medicine(5)Science(7)Agricultural Sc.(1)External Academics(13)Industrials(3)
60% incre
ase in 2
years Expect 75% increase in total hours per year:
• Expect to be able to offer better and more services to outside users (both academic and non-academic).
• Need to run longer hours.• Expect to increase access by
bio and med. researchers.
40% of PIs hired since 2005 45% increase in processing tool capital investment: 3M$ new equipment in 2009/10 (ebeam, DRIE, spray coater, PECVD, evaporator, sputtering)
NanoQuebec funding
1. Increase capacity of McGill Nanotools Microfab• Requests by users for extended hours. This is a result of 50 new faculty
since inception and hands-on component of NSERC CREATE programs.• Customer services for the life sciences: large number of untapped
biomed users (2 CREATE, 1 CIHR Systems Biology Training grant).
2. Develop active industrial outreach • ‘From academia to industry’. Coordinate disperse academic know-how
that solves real-world problems for industry and facilitate the creation of start-ups. Complimentary to NQ outreach coordinator.
3. Enable sustainable funding model
27
5. Benefits to Quebec
• Empirical observation: most companies access microfabs through collaboration with academic research groups. They value the expertise and access to world class facilities of academic researchers; very few companies have the need or interest to directly access the fab.
• In 2010, direct, funded collaborations with more than 10 companies from Quebec in key economic sectors (see p.29 of 34 for list).
• In 2010 NEW contracts/grants worth 2.7M$ p.a. were obtained (2009: 1.3M$). These grants are often multi-year and fund HQP, R&D as well as fab access.
28
6. Integration and Promotion within the QNI
Integration & Leadership:• Founding member of NQ (2000)• NSERC CREATE ISS (2009)• NSERC MRS QNI (to be submitted 2011)
Increased international visibility:• In 2010 McGill nano researchers have signed MOUs and
started exchanging researchers with:– RIKEN (Japan): green chemistry, nanoelectronics– IIT Mumbai (India): micro and nanofabrication training– IoP CAS (Beijing): nanoelectronics and photonic
29
Go
ogl
e ‘m
icro
fab
’: r
anks
nr.
2 !!
!
7. Development plan for the facility
• Development and upgrade plans for the McGill Nanotools Microfab are driven by its users and coordinated with other facilities.
• In upcoming CFI call VII the McGill Nanotools Microfab facility will replace, upgrade and expand equipment necessary for:– Fabrication, including material deposition and growth– Packaging and assembly– Characterization
In particular we are planning to establish a rapid prototyping facility suitable for bio/medical applications
30
Summary
• Unique R&D and training ecosystem: from fundamental to applied, across all disciplines.
• Broad user base and efficient management – NanoQuebec and partners finance ‘ready for business’ status; users pay for operation.
• Close interactions of Science & Eng. with biomed R&D unique among all NanoQuebec supported fabs. By increasing fab manpower we will capitalize on this opportunity.
• New outreach and industrial coordinator to facilitate knowledge transfer and the creation of start-ups.
• NanoQuebec funding to partially replace unsustainable current bridge funding from MIAM.
31
What will 300k$ from NanoQuebec enable?
• Extended operation hours needed due to usage increase.
• Incorporation of unique R&D ecosphere within NQ – from fundamental to applications.
• Grow and nurture emerging applications in bio med.• In-reach coordinator to take advantage of academic
know-how and facilitate transfer to industry.
32
Budget details: Expenses
33(see p 14 of 34 for overview)
Budget details: Expenses
34
Future:
Budget details: Revenues
35
(*) CREATE: cash from McGill support of ISS, Neuroeng. and Nanobiomachines for help with facilitating internships as a result of Business Development person.
(see p. 14 of 34 for overview)
Budget details: Revenues
36
Current (past): (partial) FTE to bridge funding shortfall and establish well functioning infrastructure.
Future: Equivalent in cash, frees up the previously used manpower to support intensified R&D and training at CMP.
Note: Increased MIAM funds will directly benefit fab – training, networking, characterization facility support (e.g. SEM, TEM).
Complementarity with other microfabs
37
• Toolset (in particular spray coater, wafer bonder)
• Processing know-how (SiC, nitrides, microfluidic systems)
• Leadership
• Training
Statistiques d'utilisation des QNI
38Source: RQMP annual report (2011)