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Tool interfaces in different industries
Dipl.-Ing.Matthias Bode
Supervisor Software Application22.01.2010
18.01.2010P 2
Agenda
About AIXTRONMotivationAIXTRON’s Control ConceptImplementation of MES InterfacesNext Steps…
18.01.2010P 3
Agenda
About AIXTRONMotivationAIXTRON’s Control ConceptImplementation of MES InterfacesNext Steps…
18.01.2010P 4
AIXTRON AG
Founded in 1983 as a spin-off of the RWTH Aachen UniversityMarket leader in the MOCVD Equipment marketmarket share around 72% (2008)Over 80% of the revenue is made by Compound Semiconductor Equipment73% of the End Applications are LED‘sAround 75% of the revenue will be achieved in Asiaaround 680 employees
18.01.2010P 5
AIXTRON System Technologies
Tricent® ALD
Silicon
NanoinstrumentsBlack Magic II -PECVD
Compound
OVPD®, PVPD
Compound
Tricent® AVD®
Silicon
Hot Wall SiC CVD
Compound
Silicon
Lynx-iXP CVD
Compound
MOCVD Planetary Reactor®
MOCVD Close Coupled Showerhead®Intr
oduc
tion
Intr
oduc
tion
18.01.2010P 6
Agenda
About AIXTRONMotivationAIXTRON’s Control ConceptImplementation of MES InterfacesNext Steps…
18.01.2010P 7
Motivation
AIXTRON MOCVD Systems
AutomationStandards
Productivity & product qualityMarketing
Requirements
AIXTRON’s original Customers
Universities „Start-up & Spin-offCompanies“
Standalone ToolsNo NetworkingNo AutomationHighly skilled OperatorsIndividual local Recipiesscientific oriented production
“Global Players”move into the market
Clusteringof Tools
Compliance with relevant regulations
(e.g. SEMI)
Central RecipeDatabase
Automated Material handling
Professionalizationof the business
Advanced ProcessControl (APC)
Networkingof Tools
Easy to useSystems
Run to RunSystem to System
reproducibilityData Mining
AndData Evaluation
18.01.2010P 8
Agenda
About AIXTRONMotivationAIXTRON’s Control ConceptImplementation of MES InterfacesNext Steps…
18.01.2010P 9
The AIXTRON Control Software: AIXACT = AIXTRON’s Advanced Control Technology
HTML User Interface
Frontend Interface
Script Core
Config DataAccess
ConfigData
Datalogs,Logbook
ControlLogixor PLC5
Clients
Server
Storage,
DevicesRecipes
Datalogger,Logbook
Recipe EngineRecipe Compiler
PLC orSimulator
Principle structure of the AIXACT Software
Chart ViewGraphic View
Recipe Manager
Table View
Configuration Views
ADDICard
3DChart View Panel View
Offline AnalyzerRecipe Editor
EpiTune
18.01.2010P 10
Common AIXTRON Control Software: AIXACT
Modular structureScalability of control systemNo programming for customized systems → only configurationNew components can be integrated with moderate effort
Web based automationClient-Server architecturePMC data's can be distributed to the whole fab network Remote control of PMC is possible
Database for system configurationAll system specific settings are stored in a database (XML)No system settings in source codeDifferent process modules can be configured easily
18.01.2010P 11
Concept of AIXACT – Control Architecture (I)Example: MOCVD system
PLC
PMC
Sensors&
Actuators
Levels
18.01.2010P 12
Concept of AIXACT – Control Architecture (II)
AIXACT control architecture for Silicon Equipment
AIXACTPMC
RouterTMC
AIXProcessControlLogix
AIXACTPMC
Router
CTC
Switch
FactoryHost
RemotePC
Factory Automation Network
AIXProcessControlLogix
Additional Customer Networks (SPC etc.)
PM1 PM2 PM3 PM4
optional optional
AIXACTcontrol
architecture
18.01.2010P 13
Agenda
About AIXTRONMotivationAIXTRON’s Control ConceptImplementation of MES InterfacesNext Steps…
18.01.2010P 14
Implementation of a MES interface for AIXACT
AixCtcServer
FabLinkTM
SECS/GEMMake use of the “industrial proofed”
Product AIS FabLinkTM as basis
Build an AIXTRON customized FabLinkTM Framework Application
Implement a generic .NET Remotinginterface in the AIXACT Control Environment
Use the proven Product AIXACT with it’s configuration features
18.01.2010P 15
SW Architecture of AIXACT with MES InterfaceSW ArchitectureSW Architecture of AIXACT with MES Interface
AIXTRONProcess Module
AIXACTServer PC
AIXACTServer
application
AIXTRonAIS FabLinkTM
application
AIXTRonMOCVDsystem
.xml.ini
.xml
Interface config
Fab NetworkMES
Cell Controller
AixCtcServer
FabLinkTM
SECS/GEM
18.01.2010P 16
SW Architecture for Silicon ToolsSW Architecture for Silicon Tools
AIXTRONProcess Module
AIXACTServer PC
AIXACTServer
application
AIXTRonAIS FabLinkTM
application
AIXTRonMOCVDsystem
.xml.ini
.xml
Interface config
Fab Network
FabLinkTM
SECS/GEM
VCTCTM
AixCtcServer
MES
Cell Controller
AIS VCTCTM
VAC Cluster Tool Controller
AIXTRonSilicon
Tool
AIXACTServer PC
CTC PC
18.01.2010P 17
SW Architecture of OVPD® ToolsSW Architecture of OVPD® Tools
AIXTRONProcess Module
AIXACTServer PC
AIXTRonMOCVDsystem
Fab Network
AIXTRonOVPD®, PVPD
system
OEM CTCCustomerspecific CTC
MES
Cell Controller
AIXACTServer
application
AIS FabLinkTM
application .xml.ini
.xml
Interface config
AixCtcServer
FabLinkTM
SECS/GEMCTC PC
AIXACTServer PC
SECS/CTMC
18.01.2010P 18
Agenda
About AIXTRONMotivationAIXTRON’s Control ConceptImplementation of MES InterfacesNext Steps…
18.01.2010P 19
Next Steps…
Product Finishing of the MES InterfaceMake it even more flexible and configurable to fulfill the needs of all AIXTRON Customers
Cluster Tool ControllerMake it easier customizableImprove the customizability of the GUI
Handling SystemIntegration of different Handling Systems
18.01.2010P 20
Questions?
18.01.2010P 21
Dipl.-Ing.Matthias Bode
Supervisor Software ApplicationE-mail: [email protected]
Phone: +49 241 8909 962Fax: +49 241 8909 655
AIXTRON AGKaiserstraße 98
52134 Herzogenrath
www.aixtron.com
