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8702
p. 1/8www.burkert.com
Mass Flow Meter for Gases (MFM)
Type 8702 can be combined with…
•Nominalflowrangesfrom0.010lN/minto80lN/min
•Highaccuracy
•Veryfastresponsetimes
•ProtectionclassIP65
•Optional:Fieldbusinterface
1)Thenominalflowvalueisthemax.flowvaluecalibratedwhichcanbecontrolled.Thenominalflowrangedefinestherangeofnominalflowrates(fullscalevalues)possible.
2)IndexN:Flowratesreferredto1.013barand0°C.AlternativelythereisanIndexSavailablewhichrefersto1.013barand20°C.
Nominal flow range1) (Qnom) 0.01…80lN/min2)(ref.toN2)
Turn-down ratio 1:50,widerspanonrequest
Operating gas Neutral,non-contaminatedgases,othersavailableonrequest
Calibration gas Operatinggasorairwithcorrectingfunction
Max. operating pressure(Inletpressure)
Uptomax.10bar(145psi),dependingontheorificeofthevalve
Gas temperature -10…+70°C(-10…+60°Cwithoxygen)
Ambient temperature -10…+50°C
Accuracy (after1minwarmuptime) ±0.8%o.R.±0.3%F.S.(o.R.;F.S.:offullscale)
Repeatability ±0.1%F.S.
Settling time (t95 %) <300ms
MaterialsBodyHousingSeals
StainlesssteelPC(Polycarbonate)FKM,EPDM(othersonrequest)
Port connection G¼",NPT¼"orcompressionfitting
Electr. connection
Additionallywithfieldbus:
SocketM16,round,8pinandsocketD-SubHD15,15pinWithPROFIBUS-DP:SocketM125pin(forIP65)orD-Sub9pinWithCANopen:PlugM125pin(forIP65)orD-Sub9pin
Operating voltage 24VDC
Voltage tolerance ±10%
Residual ripple <2%
Power consumption max.2.5W(analogcommunicator)to5W(digitalcommunicator)
Output signal (signaloutput) Max.current,volt.output Max.load,currentoutput
0…5V,0…10V,0…20mAor4…20mA10mA600Ω
Digital communication viaadapterpossible:
RS232,ModbusRTU(viaRSinterface)RS485,RS422orUSB(seeaccessoriestableonp.3)
Fieldbus option PROFIBUS-DP,CANopen(D-SubHD15coveredwithsealedplatewithfieldbusMFC)
Type of protection (withconnectedcables)
IP65
Dimensions [mm] (withoutfitting) Seedrawingsonp.7-8
Total weight 1000g
Mounting position Horizontalorvertical
Light emitting diodes(Default,otherfunctionsprogrammable)
IndicationforPower,Communication,Limit,Error
Binary inputs(Default,otherfunctionsprogrammable)
Threevariousfunctionsprogrammable
Binary outputs(Default,otherfunctionsprogrammable)
Tworelayoutputs1.Limit(Qnomalmostreached)2.Error(i.e.sensorfault)Loadcapacity:max.60V,1A,60VA
Technische Daten
Type 8619
Multichannel program controller
Type 0330
3/2 or 2/2 way solenoid valve
Typ 8611
eCONTROL
Typ 6027
2/2 way plunger valve
The mass flow meter (MFM) type 8702 is sui-ted for measuring the mass flow of gases over a big flow range. The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Type 8702 can optionally be calibrated for two different gases; the user can switch between these two gases. As electrical interfaces both, analog standard signals and fieldbuses are available.
Type 8712 is especially designed for use in harsh environments due to the high protection class.
8702
p. 2/8
Measuring Principle
The actual flow rate is detected directly by a sensor placed in a bypass channel. This operates according to a thermal principle which has the advantage of provid-ing the mass flow which is independent of pressure and temperature.
A small part of the total gas stream is diverted into a small, specifically designed bypassing channel which ensures laminar flow conditions. The sensor element is a chip immersed into the wall of this flow channel. The chip, produced in MEMS technology, contains a heating resistor and two tem-perature sensors (thermopiles) which are arranged symmetrically upstream and downstream of the heater. The differential voltage of the thermopiles is a meas-ure of the mass flow rate passing the flow sensor. The calibration procedure effectuates a unique assignment of the sensor signal to the total flow rate through the device.
Gas Min. Qnom[lN/min]
Max. Qnom[lN/min]
Argon 0.01 80Helium 0.01 500Carbon dioxide 0.02 40Air 0.01 80Methane 0.01 80Oxygen 0.01 80Nitrogen 0.01 80Hydrogen 0.01 500
Nominal Flow Range of Typical Gases(other gases on request)
0
10
20
30
40
50
60
70
80
90
100
110
120
0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80
Q [lN/min]
∆p [mbar]
G1/4
Sub-base
Pressure Loss Diagram (ref. to air, with 250µm inlet filter)
The diagram shows exemplarily thepressure loss characteristics when airflowing through.For determining the pressure losswith another gas it needs to calculatethe air equivalent and respect thefluidics needed with the other gas.
Notes regarding the selection of the unit
The decisive factors for the perfect functioning of an MFM within the application are the fluid compatibility, the normal inlet pressure and the correctchoice of the fl ow meter range. The pressure drop over the MFM depends on the fl ow rate and the operating pressure.
Please use the form on page 8 for the information about your specific requirements..
8702
p. 3/8
Ordering Chart for Accessories
Article Article no.
Connectors/Cables
RoundplugM168pin(solderconnection) 918299RoundplugM168pinwith5mcable 787733RoundplugM168pinwith10mcable 787734PlugD-SubHD1515pinwith5mcable 787735PlugD-SubHD1515pinwith10mcable 787736Adapters3)
RS232adapterforconnectiontoacomputer,connectionwithanextensioncable(itemno.917039) 654757ExtensioncableforRS2329pinsocket/plug2m 917039RS422-Adapter(RS485compatible) 666370USB-Adapter(Version1.1,USBsockettypeB) 670696USBconnectioncable2m 772299Adapterformanualsettingofbusaddress 667525SoftwareMassFlowCommunicator Downloadunter
www.buerkert.com
Accessories for Fieldbus PROFIBUS DP(B-codiert)
CANopen(A-codiert)
M12-Plug4) 918198 917115M12-socket(coupling)4) 918447 917116Y-junction4) 902098 788643T-junction 918531 (aufAnfrage)
Shut-offresistor 902553 (aufAnfrage)
GSD-Datei(PROFIBUS),EDS-Datei(CANopen) Downloadunterwww.buerkert.com(unterTyp8712)
3)Theadaptersservemainlyforinitialoperationordiagnosis.Thosearenotobligatoryforcontinuousoperation.4)ThetwoM12connectorsaslistedabovecannotbeusedtogetheronthesamesideoftheY-junction.AtleastoneofthetwoM12connectionneedstobeaprefabricatedcablewhich
usestypicllyathinnerconnector.
M12 P-DP: 918 198DVN/CAN: 917 115
USB-Adapter 670 696
RS422 adapter 666 370
Female M12 with cable
M12 P-DP: 918 198DVN/CAN: 917 116
OR
RS232 adapter654 757
Adapter for manual setting of a bus address667 525
M12 P-DP: 918 447DVN/CAN: 917 116
Shut-off resistorP-DP: 902 553 (male)DVN/CAN: on request
Male M12 with cable
T junctionP-DP: 918 531DVN/CAN: on request
Y junctionP-DP: 902 098DVN/CAN: 788 643
8702
p. 4/8
Socket D-Sub HD15 Pin Assignment
Analogue Control Bus control
1 N.C. N.C.5)
2 N.C. N.C.
3 Actualvalueoutput+ N.C.
4 Binaryinput2
5 12V-Output(onlyforinternalcompanyuse)
6 RS232TxD(directconnectiontocomputer)
7 Binaryinput1
8 GND(forbinaryinputs)
9 onlycompanyinternaluse(donotconnect!)
10 12V-Output(onlyforinternalcompanyuse)
11 12V-Output(onlyforinternalcompanyuse)
12 Binaryinput3
13 ActualvalueoutputGND N.C.
14 RS232RxDdirectconnectiontocomputer)
15 DGND(forRS232-interface)
5)N.C.:notconnected(notused)Note:–OptionalPin1and2withbusversionastransmitterinputpossible–ThecablelengthforRS232/flowvaluesignalislimitedto30
meters.
Socket M16, round, 8 pin Pin Assignment
1 24V-Supply+
2 Relay1–referencecontact
3 Relay2–referencecontact
4 Relay1–normallyclosedcontact
5 Relay1–normallyopencontact
6 24V-SupplyGND
7 Relay2–normallyopencontact
8 Relay2–normallyclosedcontact
Socket D-Sub 9 pin (only with fieldbus version)
Pin Assignment
PROFIBUS DP CANopen
1 Shield Shield
2 N.C. CAN-Ldataline
3 RxD/TxD-P(B-line) GND
4 RTS(controlsignalforrepeater)
N.C.
5 GND N.C.
6 VDD(onlyforterminationresistor)
N.C.
7 N.C. CAN-Hdataline
8 RxD/TxD-N(A-line) N.C.
9 N.C. N.C.
Pin Assignment
1
2
3
4
5
6
7 8
12345
6789
15 14 13 12 11
12345
678910
8702
p. 5/8
PROFIBUS DP – socket B-coded M12 (DPV1 max. 12 Mbaud)
Pin Assignment
1 VDD(onlyforterminationresistor)
2 RxD/TxD–N(A-line)
3 DGND
4 RxD/TxD–P(B-line)
5 N.C.
CANopen – Plug A-coded M12 Pin Assignment
1 Shield
2 N.C.6)
3 DGND
4 CAN_H
5 CAN_L6)Optionalconfigurationwith24VDCpossibleforpowersupply
viafieldbusconnector.WiththisnopowersupplyconnectiononroundM16plugneeded.
Pin Assignment (continued)
12
3
4
5
2 1
4
3
5
8702
p. 6/8
115
2.4
A
12
A
12
12.5
137
37
3.929.21.9
25
42
71
23
2x M4 - 10 deep
973.8
111
111.
5
Dimensions [mm]
Standard version Mass A
G¼NPT¼
with fieldbus
DSub M12
8702
p. 7/8
M4
10
2.4
3.8
44.5
0
25
42
71
137.15
52
4x 4.5 2x 8.8
44.5
44.5
2x 6
0 4 10 32
66.5 83 92 111
115
111
113.
8
Dimensions [mm] (continued)
Flange version
with fieldbus
DSub M12
8702
p. 8/8
Incaseofspecialapplicationconditions,pleaseconsultforadvice.
Subjecttoalteration.©ChristianBürkertGmbH&Co.KG 1803/8_EU-en_00891856
To find your nearest Bürkert facility, click on the orange box www.buerkert.com
Company Contactperson
CustomerNo Department
Address Tel./Fax
Postcode/Town E-mail
MFC/MFM-applications - Request for quotation
Please complete and send to your nearest Bürkert sales centre
MFC-Application MFM-Application Quantity Required delivery date
Medium dataType of gas (or gas proportion in mixtures)
Density kg/m3 7)
Gas temperature [ºC or ºF] ºC ºF
Moisture content g/m3
Abrasive components/solid particles no yes, as follows:
Fluidic dataFlow range Qnom Min. lN/min7)
lS/min (slpm) 8)
Max. mN3/h7)
kg/h
cmN3/min7) cmS
3/min (sccm) 8)
lN/h7) lS/h8)
Inlet pressure at Qnom9)
p1= bar(g) •Outlet pressure at Qnom p2= bar(g) •Max. inlet pressure P1 max bar(g) •MFC/MFM port connection without screw-in fitting
¼" G-thread (DIN ISO 228/1)
¼" NPT-thread (ANSI B1.2)
with screw-in fitting (acc. to specification for pipeline)
mm Pipeline (external Ø)
inch Pipeline (external Ø)
Flange version
Installation horizontal
vertical, flow upwards vertical, flow downwards
Ambient temperature °C
Material dataBody Aluminium Stainless steel
Housing Plastic Metal (not with type 8712/8702 and not with fieldbus)
Seal FKM EPDM
Electrical dataSignals for set point with standard signal with fieldbus
and actual value Setpoint actual value
0 … 5 V 0 … 5 V PROFIBUS DP M12 0 … 10 V 0 … 10 V CANopen D-Sub 0 … 20 mA 0 … 20 mA 4 … 20 mA 4 … 20 mA
• Please quote all pressure values as overpressures with respect to atmospheric pressure bar(ü)7)at:1.013bar(a)and0°C 8)at:1.013bar(a)and20°C 9)matcheswithcalibrationpressure
Note
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