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Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization

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Page 1: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 2: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 3: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 4: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 5: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 6: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 7: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 8: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 9: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization

Cu Pillar % µ-Bump Ag% µ-Bump Ag% (Sn-Ag)

W CMPSilicideHKMGHfOx

SOI/SiGe/Si:C

Cu Seed & Barrier

Metal Cu CMP

Non VisualCrystalline

defects

UBM thickness Waf

erLe

vel

Pack

aging

Cu M

etall

izatio

nGa

teSiG

e,HK

MG

Subs

trate

BOXSiGe SiGe STISiGe

X-RayTechnologies

3D geometry

Metal Cu CMP

XRR

GI-XRF

HRXRD

XRDI

WAXRD

XCD

Page 10: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 11: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization
Page 12: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization

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