The Anti-Gravity MicroMachine

Presented by: Vertically Challenged

Introduction

• Vertically Challenged is…Shabnam Abedi MoghaddamMichele La HayeRichard TuTerrence Yu

What are Micromirrors?• Change the angle of a reflected beam in

multiplexing and de-multiplexing of optical signals

• Very precise and flawless• Aim: raise the mirror to the desired

angle

Mirror Animation

Click in window to start animation

The Problem• Vertical lift cannot be obtained through

horizontal movement• Fabrication process leads the mirror to

sag down

Fixed Hinge

MirrorLever Applied

Force

Wafer

The Solution• Provide initial lift to the mirror

Fixed Hinge Mirror Lever Applied

Force

Wafer

Thermal Actuators• Make use of differing arm thickness to

provide movement• Problem: using the principles described,

it is difficult to obtain vertical movement

Vertical Thermal Actuators• Design 1: Built to provide a downward

motion but is overdriven; when current is removed the actuator snaps up

202

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Poly 2

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More Vertical Thermal Actuators • Design 2: Provides upward motion

through the use of thin flexible connectors

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Poly 2

Poly 1

Even More Vertical Thermal Actuators• Design 3: U-shaped designed to

prevent thicker arm from conforming

2

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Poly 2

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Thermal Actuator Animation

Click in window to start animation

Levers• Design 4: Downward Vertical Thermal

Actuator is used to create lift by pressing down on one end of a lever

Mirror Hinge Thermal Actuator

Lever

Poly0

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Poly 2

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More Levers• Design 5: Flexible connector used to

transfer downward force of Vertical Thermal Actuator to a lever

Mirror Hinge Thermal Actuator

Lever

Poly0Poly 0

Poly 2

Poly 1

Lever Animation

Click in window to start animation

Linear Stepper Motor• Makes use of 2 banks of horizontal

thermal actuators to provide a drive mechanism

Staple HingeRotating Bar

Staple

Staple Hinge

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Staple Hinge Issues

Rotating bar

Rotating bar

Applied Force

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Poly 1

Torsion Hinge• Thin flexible rods attached to mirror on

either side

Mirror

Rotating Bar

Lever

Applied Force

Prevent Bar from Bowing Out

Torsion Hinge

Poly 0

Poly 2

Poly 1

Final Picture

Possible Issues• Torsion hinge might break or not be

flexible enough• Actuating arms might bend• Vertical thermal actuators might not give

enough deflection

Conclusion• Testing has yet to be done• “We are confident of positive results…”

Terrence

Thanks To• Dr. Ash Parameswaran• Rob Johnstone• Shivalik Bakshi• Coffee

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