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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Risk management system for critical cleanroom supplies
Leif S. Johansen, Thøger Eskildsen, Jesper Hanberg & Jörg Hübner
DTU Nanolab, Ørsteds Plads 347, Kgs. Lyngby, Denmark
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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019 2
It all began with a tiny hole…
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019 3
Pressure relief on HBr regulator
Primary sideSecondary side
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019 4
1 mm hole
“Pressure
relief valve”
(check valve)To regulator
Leak in HBr gas pipe
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019 5
Common gas cabinet
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Corroded gas valves for three process gases…
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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Corroded gas valves for three process gases…
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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Summary of events
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• HBr leak corroded three gas panels, valves and bottles
• Lead time for new gas panels: 6 months
• Gas work lead time: >1 month
• Reinstallation time: 2 weeks (incl. entire new HBr line)
• Lead time for HBr: 5 months
• Lead time for BCl3: 6 months
• BCl3 bottle connector was wrong (CGA instead of DIN)
• Bottle connector lead time: >1 month
• Down time of HBr & CH4: Ca. 7 months
• Total down time of BCl3: 9 months (!)
• Many projects seriously affected
• Serious risks were not identified
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
ISO 9001:2015
• DTU Nanolab is ISO2009:2015 certified
• “…actions to address risks and opportunities…”
• A need to address risks in mission critical cleanroom supplies
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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Risk level assessment
• How do you quantify a risk?
• Risk = Probability x Consequence
• Probability: 1-5
• Consequence: 1-5
• 1-3: Very low risk
• 4-7: Low risk
• 8-13: Medium risk
• 14-19: High risk
• 20-25: Very high risk
• Risk level can help prioritize actions
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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Labmanager
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• LabManager – DTU Danchip’s proprietary lab management system
• Our home-made LIMS, Coral, Nemo,…
– Booking
– Start/stop
– Competences
– Equipment status
– Invoicing
– Wafer shop
– CAPAs
• Browser based
• No s/w installation needed
• Accessible anywhere (with login)
• Runs a LAMP server stack
(Linux, Apache, MySQL, PHP)
• Like a tailor made suit: fit us quite well
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Summary
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2 x 4 = 8
Medium risk
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Risk list – ”The sum of all known fears” and how to prioritize
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DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Preventive actions for the gas incident
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• Don’t share corrosive gases with other gases (not implemented yet)
• Combine pressure relief valve with burst disc
• Stock all gas spares
– Pipe (150 metres coax)
– Valves
– Gauges
– Panels
– Bottle connectors
• Consider stocking spare bottles (not implemented)
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Summary
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• Gas incident showed need for risk assessment
• A system for risk management of cleanroom supplies
implemented
• In line with ISO 9001:2015 requirements
• Runs on LabManager
• Risk = Probability x Consequence
• List of identified risks
• Helps log and prioritize preventive work on known risks
• Inside every small problem there is a big one struggling
to get out
• There’s always the unexpected…
DTU18 June 2019 Risk management system for critical cleanroom suppliesENRIS 2019
Thanks to…
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Jesper Hanberg & Thøger Eskildsen
PHP-programming of risk lists in LabManager software
Leif S. Johansen & Jan V. Eriksen
Work on cleanroom supplies
Own many actions on the risk list
Jörg Hübner
Set the vision, gave the orders and kept everyone on their toes