LED ESD + TLP TESTER ESD + TLP TESTER... · 2013-08-07 · 1 The Leader of Opto-electronics ZONETECH CORP. Wafer ESD Tester & TLP Tester for LED,LD & System LSI ZONETECH CORP. 경기도수원시영통구영통동980-3,

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The Leader of Opto-electronics ZONETECH CORP.ZONETECH CORP.ZONETECH CORP.ZONETECH CORP.

Wafer ESD Tester & TLP Tester Wafer ESD Tester & TLP Tester Wafer ESD Tester & TLP Tester Wafer ESD Tester & TLP Tester

for LED,LD & System LSIfor LED,LD & System LSIfor LED,LD & System LSIfor LED,LD & System LSI

ZONETECH CORP.ZONETECH CORP.ZONETECH CORP.ZONETECH CORP.

경기도 수원시 영통구 영통동 980-3,디지털 엠파이어 빌딩 E동 605호

Tel:031)303-5858,Fax:031)303-5855

www.zonetech.co.kr

1.Full automatic Wafer ESD Tester

2.Semi-automatic Wafer ESD Tester

3.Low cost ESD Tester

4.TLP Tester4.TLP Tester4.TLP Tester4.TLP Tester

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An inspection machine to test ESD endurance for devices which are sensitive against ESD.

Specially effective for LED or Laser diode applications.

1.1.1.1.Full automatic type Wafer ESD testerFull automatic type Wafer ESD testerFull automatic type Wafer ESD testerFull automatic type Wafer ESD tester

(HED(HED(HED(HED----W5100D)W5100D)W5100D)W5100D)

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AutomaticAutomaticAutomaticAutomatic MoveMoveMoveMovePC

RightZap Unit

LeftZap Unit

Wafer

RS-232C

Full automatic type ESD tester outlineFull automatic type ESD tester outlineFull automatic type ESD tester outlineFull automatic type ESD tester outline

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M.M. Short+400Ｖ2A/DIV

20ns/DIV

H.B.M. Short+4000Ｖ

400mA/DIV50ns/DIV


ＥＳＤ waveform

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2.2.2.2.SemiSemiSemiSemi----automatic Wafer ESD testerautomatic Wafer ESD testerautomatic Wafer ESD testerautomatic Wafer ESD tester

(HED(HED(HED(HED----W5000MW5000MW5000MW5000M----Z1)Z1)Z1)Z1)

After manual alignment on chip pad, ESD testing continues until automatic determination of destruction.

Features

1.Automatic determination of destruction . After ESD application, level of destruction is automatically and

accurately determined.

W740XD550XH610mmDimension

Windows2000/XPＯＳ

0.5±（1/500FS±1nA）measurement precision

±10VMeasurement voltage

0.058μｍZ-axis movement step

8mmZ-axis sphere of

movement

8mm×8mm（Only as for the

GND pin）X/Y axis movalble range

0.3～9.9ｓPulse interval

1～9 timesZap count

Min. ±10VStep voltage

±4KV/8kVZap voltage

HBM、MMPulse model

HEDHEDHEDHED----W5000MW5000MW5000MW5000M

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2.The discharge needle is equipped with a position

alignment function

3.Shortest identical discharge circuit can be achieved

The 2 discharge pins use the identical discharge circuit on all test pins, making a consistant

& stable dicharge wave possible.

Note: Wave form can be easily monitored using a current probe.


4.Adapts to various standard wave forms. HBM&MM supplied as standard features.Conforms to JEITA , JEDEC, ESDA standards.

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M.M. Short+400Ｖ2A/DIV

20ns/DIV

ＥＳＤ waveform

H.B.M. Short+4000Ｖ

400mA/DIV50ns/DIV

5.Max 8KV ESD testing possible.

6.Can be connected with your existing manual prober

7.ESD test available for molded IC packages too. .

8.Can be used on wafer production line to conduct sampling tests on every wafer.

9.Can be combined with LED color tone inspection machine.

10.The test program can be made available, so that users can develop their own measurement systems.

( Borland C++ Builder (Ver.6) ) or VB(Visual Basic) test program can be provided, along with the related DLL files.

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Manual Prober

W5000MZap Unit

W5000M Controller

(Hi voltage supply)

(Evaluation supply) PCPCPCPC

RS-232C

Hi Voltage cable

Wafer

HED HED

SemiSemiSemiSemi----automatic type outlineautomatic type outlineautomatic type outlineautomatic type outline

（Parts listed in blue are provided by Supplier）

A system that doesn’t require a PC is also available （Model : HED-W5000M-Z０）

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Semi-automatic System: Zap Unit (inner layout)

Zap probe

MM/HBM Zap System

(HBM MAX8KV)

BNC

To any Tester

(for example: Agilent , Keithley or HANWA)

Safety Relay

Zap Relay

GND probe

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3.3.3.3.Low cost ESD testerLow cost ESD testerLow cost ESD testerLow cost ESD tester

(HED(HED(HED(HED----W5000MW5000MW5000MW5000M----SP0)SP0)SP0)SP0)

ESD testing is available by adopting Hanwa tester head into customer’s light intensity inspection system.

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The Leader of Opto-electronics

W5000M

Controller

(Hi voltage

supply)

op.(Evaluation

supply)

W5000MZap Unit

Other company Prober

PC

Light Intensity inspection

Light intensity inspection

HED HED

BNC

Hi Voltage cable

Manipulator

Wafer

RS-232C

（Blue part could be supplied by Supplier ）

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xX××Program source code disclosure

*○X××Providing of test program

*○XX×Adaptation to light intensity inspection

*○XX△Adaptation to production line

○○○○DUT: package

○○○○DUT: Wafer

××△△Probe pin installation

○○○○Standard ( JEDEC/ESDA/JEITA)

△△△△8KV up-grade（HBM only）

○○○○MM／HBM discharge (MAX 4KV)

x○○○PC / Printer

x○○○Automatic evaluation

×△△×Manual position Alignment

×××○Automatic position Alignment

×××○Wafer chip destruction color display

×××△Pattern Recognition System

××*×○CCD Camera

×××○Automatic inspection of all wafer chip

Low cost

type

W5000M-SP0-F1

Low cost

type

W5000M-SP0

Semi-automatic

PC include

W5000M-Z1

Full automatic

W5100DFUNCTIONS/EQUIPMENTS

○：include △：option ×： no include

Wafer ESD tester listWafer ESD tester listWafer ESD tester listWafer ESD tester list

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Documents

LED ESD + TLP TESTER ESD + TLP TESTER... · 2013-08-07 · 1 The Leader of Opto-electronics ZONETECH CORP. Wafer ESD Tester & TLP Tester for LED,LD & System LSI ZONETECH CORP. 경기도수원시영통구영통동980-3,