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Laser-Arc Module & ta-C Coatings
LASER-ARC MODULE
IN COOPERATION WITH
Fraunhofer USA
1449 Engineering Research Ct.
East Lansing, MI 48824, USA
Contact
Thomas Schuelke, Director
Phone: +1 517 4328709
ccd.fraunhofer.org
Center for Coatings and
Diamond Technologies (CCD)
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The Laser-Arc Module (LAM) is a modularplasma source for the large scale and highvolume deposition of tetrahedral amorphouscarbon (ta-C) thin film coatings in industrialphysical vapor deposition machines. Suchta-C coatings are extremely hard and have alow coefficient of friction, which make themideally suited for wear resistance applications.Ta-C is also biocampatible making it anexcellent coating material for medical deviceapplications.
The German engineered Laser-Arc plasmasource can be installed on production machinesfrom various coating equipment suppliers. Itis available in new machine installations andalso as a retrofit solution for existing coatingmachines.
The Laser-Arc Technology
The Laser-Arc technology combines theadvantages of pulsed laser deposition andvacuum arc deposition processes. The lasercombined with an optical scanner definesthe location of arc discharge for maximumgraphite target utilization. The efficient pulsedarc process in combination with high repetitionrates yields energetic plasma pulses andcompetitive deposition rates.
The process deposits highly sp3 bondedamorphous carbon films (ta-C) of extremehardness and durability. The temperatureimpact on the substrate is minimized allowingfor a deposition temperature well below100°C. Typical film thicknesses range fromnanometers to tens of micrometers, depend-ing on the application requirements. Themodular design of the Laser-Arc technologyallows for customized implementations.
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1. Laser-Arc discharge
2. Optional plasma filter
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F R A U N H O F E R U S A C E N T E R F O R C O AT I N G S A N D D I A M O N D T E C H N O L O G I E S
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2018
Fraunhofer CCD Offer
Our engineering team offers retrofit soluti-ons and complete coating machines withLaser-Arc technology. Engineering servicesinclude system and coating demonstrations,application and coating process developm-ent, support during coating and equipmentselection, installation and start-up. We offerall services necessary to successfully transferthe technology to our customers.
The high hardness and low friction of ta-Ccoatings in conjunction with biocompatibi-lity and chemical resistance are particularlysuitable for:
Components and parts in autom-otive and mechanical engineering,e.g. piston pins and rings, pumpcomponents, etc.
Cutting and forming tools
Components for packaging, foodprocessing and textile machinerythat do not tolerate liquid lubrication
Implants, components, devices forthe pharmaceutical and biomedicalindustry
Protective coatings for temperaturesensitive materials (e.g. plasticsand foils)
Ta-C Applications
Laser(moves across
height of graphite)
Graphite
Mirror
C+
C+
C+
C+
C+
C+
Rotating Cathode
Substrate
C Plasma +
Anodes
Laser(moves across
height of graphite)
Graphite Mirror
C+
C+
C+
C+
C+
C+
Rotating Cathode SubstrateC Plasma +Anodes
1. Inside the Laser-Arc Module2. Industrial Laser-Arc Module3. Laser-Arc Module coating process
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2 1
3
Laser-Arc Process
Precise arc discharge control by pulsedlaser for high energy density
Oscillating laser in combination withcathode rotation for uniform targetutilization
High current pulse discharge: 1500 A
Pulse duration: 0.13 – 0.33 ms
Pulse frequency: 200 – 1000 Hz
Deposition rate: up to 6 µm/hour
Deposition conditions: gas-free, highvacuum (p 10 mbar)
Deposition temperature: T < 100°C
Ta-C Coating Properties
Hardness: 40 – 60 GPa
Young’s modulus: 400 - 600 GPa
Coefficient of friction: 0.1 (dry);< 0.05 (lubricated)
Thermal stability: 400°C (air); 650°C(vacuum)
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Laser-Arc System Components®
Laser-Arc Module plasma chamberwith adapter to connect to coatingmachine flange
Computer controlled system
Pulsed high current arc power supply
Optional: Pulse-synchronized powersupply for substrate bias
Optional: Plasma filter for particleminimization
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