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SUB‐ELECTRON LOW‐NOISE CMOS IMAGESENSORS
Large Format, Fast, 0.5erms CIS with Oversampled 2‐Stage ADCs
J. A. SEGOVIA, F. MEDEIRO, A. GONZÁLEZ, A. VILLEGAS
TELEDYNE ANAFOCUS
and
A. RODRÍGUEZ-VÁZQUEZ
UNIVERSIDAD DE SEVILLA, IMSE/ [email protected]; [email protected]
Research of Angel Rodríguez-Vázquez supported by the SMART CIS3D, Junta de Andalucía P12-TIC-2338 Project
THE INVISIBLE IMAGER FLOOD
NOISE IN IMAGERS
TEMPORAL PIXEL NOISE
TWO-STAGE ADC FOR LOW-NOISE CIS
CHIP-LEVEL NOISE REDUCTION
FINAL REMARKS
THE INVISIBLE IMAGER FLOOD
NOISE IN IMAGERS
TEMPORAL PIXEL NOISE
TWO-STAGE ADC FOR LOW-NOISE CIS
CHIP-LEVEL NOISE REDUCTION
FINAL REMARKS
S4EVOLUTION OF IMAGE SENSORS MARKET
Source : Yole Development, 2016. www.yole.fr
RAPIDLY GROWING MARKET
S5. . . INVOLVING MANY CONCURRENT TECHNOLOGIES
Source : Yole Development, 2016. www.yole.fr
S6
Source : R. Fontaine, The State of the Art of Mainstream CMOS Image Sensors, Int. Image Sensor Workshop, 2015
EVOLUTION OF IMAGE SENSORS IP
HIGHLY INNOVATIVE MARKET
Active Image Sensor Patent by Year of Issue (1994-2014)
(based on Chipworks´ search methodology; favors fabrication patents
Year of Issue (or laid open)
Pub
licat
ion
Cou
nt
S7. . . IMAGERS ARE FLOODING OUR TERRITORIES
One image is worth more than thousand words:
Two Snapshots of Via Della Conciliazione, with eight year time interval:
Source : Der Spiegel
Exponential increase of the usage in consumer applications
S8. . . AND FLOODING IS NOT LIMITED TO CONSUMER APPS
Source : Yole Development, 2016. www.yole.fr
S9INCREASING VOLUMES IN EMERGING AREAS
Source: IC Insights
S10
Source: QUALCOMM, “Emerging Vision Technologies: Enabling a New Era of Intelligent Devices”, TR 2016
ARTIFICIAL VISION: A DISRUPTIVE TECHNOLOGY
S11
UBIQUITOUSELECTRONICS AND
INFOTECH
Personal
Entertainment Transportation
SurveillanceEnvironmental
Energy/Smart Grids
Internet of Things
Health
Brain-Machine
Interfacing
Etc. . .
… WITH POTENTIALS FOR ALL INFOTECH DOMAINS
S12NEW APPLICATIONS SET NEW CHALLENGESLarger Sensor Formats and Speed
Embedding of image Analysis and Vision Tasks at the Sensor
Pipeline for pedestrian detection
Source: SYNOPSIS white paper on embedded vision
Source: AnaFocus Eye-RIS
Range Estimation and Combined 2D/3D
Imaging and Vision
Source: A. Bhandari and R. Raskar
Source: I. Takayanagi and J. Nakamura,
Enlarged Granularity and Responsivity
S13. . . SOME OF THEM RELATED TO LOW-LIGHT VISION
BIOLOGICAL IMAGING
Source: F. Amat, Insight Awards 2013
GLOBAL NUCLEI TRACKING IN THE DROSOPHILA SYNCYTIAL
BLASTODERM
12th and 13th mitotic cycles in the syncytial blastoderm of a Drosophila embryo, recorded with SiMView microscopy
S14
AUTOMOTIVE
Source: BrightEye
. . . SOME OF THEM RELATED TO LOW-LIGHT VISION
THE INVISIBLE IMAGER FLOOD
NOISE IN IMAGERS
TEMPORAL PIXEL NOISE
TWO-STAGE ADC FOR LOW-NOISE CIS
CHIP-LEVEL NOISE REDUCTION
FINAL REMARKS
S16NOISE IN IMAGERS
CONCEPT OF IMAGER NOISE
Whichever perturbation of the absolute or relative pixel values
Deterministic circuit errors: gain error, limited bandwidth,incomplete settling, distortion, . . .
Interferences, external perturbations, crosstalk, . . . Random fluctuations of technological parameters VTO, Cox . . . Microscopic random fluctuations of photons and charges due to
physics and/or defects Data conversion errors Etc.
stdvfpn
=stddsnu
200 400 600 800 1000
200
400
600
800
1000
stdvfpn
=stddsnu
/2
200 400 600 800 1000
200
400
600
800
1000
stdvfpn
=stddsnu
/4
200 400 600 800 1000
200
400
600
800
1000
stdvfpn
=stddsnu
/8
200 400 600 800 1000
200
400
600
800
1000
SPATIAL ARTIFACTS: FPN, PRNU, . . TIME-VARYING ARTIFACTS
S17
Source :J. Nakamura (Ed.), Image Sensors and Signal Processing for Digital Still Cameras, Taylor & Francis 2006
NOISE IN IMAGERS: OVERVIEW OF NOISE TYPES
S18NOISE IN IMAGERS: SPATIAL NOISE
IDEALLY
All pixels identical: same parameter p
All channels identical: same transmittance t
IN PRACTICE
All pixels different
All channels with different transmittance
p11 p12 p13 p1N
p21 p22 p23 p2N
p31 p32 p33 p3N
pM1 pM2 pM3 pMN
t1(.) t2(.) t3 (.) tN (.)
ADDRESSING STRATEGIES
Suitable readout architectures Compensation techniques: CDS,
offset cancellation, . . . Adaptive biasing Optimum component sizing Digitally-assisted analog design Dynamic Element Matching Digital calibration
S19TYPICAL SMART-CIS READOUT ARCHITECTURE
LONIS CIS
S20TEMPORAL NOISE IN THE PHOTON-TO-DN PATH
THE INVISIBLE IMAGER FLOOD
NOISE IN IMAGERS
TEMPORAL PIXEL NOISE
TWO-STAGE ADC FOR LOW-NOISE CIS
CHIP-LEVEL NOISE REDUCTION
FINAL REMARKS
S22TEMPORAL NOISE SOURCES OVERVIEW
e2 e
Shot noise Not relevant for low light conditions
d2 d
Dark charges very small in pinnedphotodiodes (~10e/s)
Negligible for exposures in the rangeof msec
Otherwise, active cooling may be used
Reset Noise (kT/C)
Removed by CDS
Source follower thermalnoise
Source follower low-frequency noises
Noise coming from thetransfer (TX)
S23ADDRESSED NOISE SOURCES
SOURCE FOLLOWER
THERMAL NOISE
White noise.
Sampled every timethe ADC samples thepixel data.
Limited by the LPFtransfer function atpixel output.
SOURCE FOLLOWER
LOW-FREQUENCY
NOISE
Flicker (1/f) noise.
RTS noise.
They change slightlyover the time.
Partially removed byCDS operation.
NOISE COMING FROM
THE TRANSFER (TX)
It is the noise storedin the FD node aftercharge transfer .
Related to theoverlap capacitorbetween photodiodeand transfer gate.
S24TRANSFER NOISE ANALYSIS REDUCTION
Caused by electrons thatremain in the overlap capacitorbetween TX gate and PD
Source : Wegmann 1987
S25TRANSFER NOISE ANALYSIS REDUCTION
Caused by electrons thatremain in the overlap capacitorbetween TX gate and PD
Problem similar to charge feedthrough in SC circuits
Partially handled through control signals: Voltage levels Signal slopes
S26SOURCE FOLLOWER NOISE ANALYSIS
Framework for SF Noise Analysis
White and pink noise contributions
Low-pass filtering of the noise
Additional filtering due toCorrelated Double Sampling
BEAR IN MIND !! CDS may beembedded within the ADC in thecase on ULN readout.
S27
Transfer function with CDS
Output noise power:
By integrating both noise contributions
0.577215
SOURCE FOLLOWER NOISE ANALYSIS
S28SF NOISE CONTROL THROUGH TO
4 2⁄
1
1
1
4 2⁄
► LOW FREQUENCY NOISE IS FILTERED
OUT BY CHANNEL AND CDS
► THE SHORTER TO THE MORE EFFECTIVE
LOW FREQUENCIES FILTERING
To cannot be shortenedarbitrarily due to:
It contains the transfertime (minimum 0.5us)
Enough room for signalsettling must be provided
S29PIXEL NOISE MODEL: DEVIATIONS IN LF BEHAVIOR
LF pixel noise is crucial for low-noise CIS design
Calculations give
Formula not accurate due deviations from the 1/f trend
LF pixel noise depends on several parameters:
CDS time, CMS technique, time inter samples, etc.
Analytical calculations may not be not feasible
For instance, several slopes are obtained for different To values
Empirical noise fitting required for optimized
noise design
THE INVISIBLE IMAGER FLOOD
NOISE IN IMAGERS
TEMPORAL PIXEL NOISE
TWO-STAGE ADC FOR LOW-NOISE CIS
CHIP-LEVEL NOISE REDUCTION
FINAL REMARKS
S31BASIC ADC TYPES
Source: A. Rodríguez-Vázquez @ IMSE CVIS Lab, “CMOS Telecom Data Converters”.Kluwer Academic Publishers, 2003
S32COMPARISON OF ADCS FOR CISS
Source: J.A. Leñero and A. Rodríguez-Vázquez @ IMSE CVIS Lab, “ADCs for ImageSensors: Review and Performance Analysis”. CRC Press, 2016
Cyclic, SAR, andRamp ADCs havelower FoM
Hybrid architecturesprovide large designflexibility
Column-parallel archi-tectures chosen toreview the state-of-the-art
By using the followingFOM
FOM defined in THE
LOWER-THE-BETTER
form
S33LONIS: READOUT CHANNEL ARCHITECTURE
CONVERSION PERFORMED INTO TWO STEPS:
● Shorter conversion time (Tconv)
● Non-significant complexity overhead
● High-accuracy with low hardware overhead
● Second stage errors (noise and mismatch) aredivided by the gain of first stage
● Much better power efficiency, much betterFoM=Power/(Tconvꞏ2ENOB)
● Mismatch among stages must be carefullyaddressed
LONIS CIS READOUT
S34
Measurement according to the EMVA Standard 1288
Temporal Noise (DN14bit) STD total =1.14DN
100 200 300 400 500 600
50
100
150
200
250
300
350
400
450-3
-2
-1
0
1
2
3
r/o-channeltemp. noise of1.14DN14-bit
equivalent to0.9e-rms
LONIS TEMPORAL NOISE MEASUREMENT
S35Lux
Source : [A. Fenigstein et al, IISW 2015]
S36LONIS: OVERALL NOISE DESIGN LEVELS
Readout channel noise < 112μVrms
Strategies for further noise reduction
Semi-empirical modeling of the LF pixelnoise and pixel optimization.
Modification of the ADC architecture toinclude oversampling of the pixel noise
Readout Channel Noise 112uVrms
S37ULN: ADC CONCEPT
2122 DDD N
out
● No Sample-and-Hold; Pixel directly drives the AD,
● Pixel output is oversampled, high-frequency noiseis reduced.
► 1st stage is a SD modulator
► 2d stage is a ramp converter
● Programmable resolution for noise improvement
● CDS realized in 1st stage
S38
Internal CDS: one conversion per row time
Phase exchanged to integrate pixel output inopposite direction for reset and signal, thusperforming CDS operation
At the same time pixel output is oversampled
ULN CIS: ADC FIRST STAGE
S39ULN CIS: ADC SECOND STAGE
Single-slope ramp in second ADC stage
Converts the residue coming from ADC1in internal CDS and external CDS
Digital register
Analogue ramp
Digital ramp (counter)
Output digital
Analog input(Vzero)
en
phi_ro_adc2_sa_d_h
phi_ro_adc2_sa_h
phi_ro_adc2_vcmi_sa_h
SAMPLING IDLE
phi_ro_adc_start
armp_phi_clear
armp_phi_start
scm_sps_adc_last
AD CONVERSION
analog_ramp
Linear ramp
º
digital_ramp
Vzero
Vmax
0
1024
IDLE
phi_ro_adc1_end_d_h
phi_ro_adc2_comp_h
phi_ro_adc2_comp2_h
S40ULN CIS: ADC CALIBRATION
IDEAL SITUATION
● All input-output ranges perfectlymatch
● Conversion error bounded by +/-1LSB
TO-BE-AVOIDED SITUATION
● Due to circuitry errors, rangesdon’t match perfectly
● Large conversion errors show up
● Information is lost due to clipping
● No calibration/correction ispossible
DESIRABLE SITUATION
● Ranges don’t match, but fit in eachother
● Large conversion, but noinformation loss
● Calibration/correction is possible
S41ADC CALIBRATION
S42SELF-ADAPTIVE ERROR CORRECTION
S43
14bits 16 61.44 17.50 19.00 35.24 75.39 0.79 72.32 0.76
15bits 32 42.83 8.75 9.50 17.62 48.08 0.51 48.06 0.51
16bits 64 30.06 4.38 4.75 8.81 31.99 0.34 32.73 0.34
Readout Noise
CG= 95uV/e [e]
Experimental Noise measurements
Quantization
Noise
[uVrms]
Readout Noise
[uVrms]
Readout Noise
CG= 95uV/e [e]
Simulated Noise results
Readout Noise
[uVrms]Readout mode nc
ADC1 Noise
[uVRms]
ADC2 Noise
[uVRms]
Ramp Noise
[uVrms]
2122 DDD N
out
Pixel noise not included in this table
ULN CIS: ADC NOISE PERFORMANCE
THE INVISIBLE IMAGER FLOOD
NOISE IN IMAGERS
TEMPORAL PIXEL NOISE
DATA CONVERSION FOR LOW-NOISE CIS
CHIP-LEVEL NOISE REDUCTION
FINAL REMARKS
S45CORRELATED MULTIPLE SAMPLING TECHNIQUE
Accuracy enhanced by averaging M different reset and signal samples
It requires replacing an amplifier by an integrator
Some Observations
Correlated Multiple Sampling is effective for high-frequency noise
Not so much effective for low-frequency noise
By increasing M, the time lag TG + MTo between reset and signal increases as well
Decorrelation of LF noise contributions to reset and signal increases
There is a trade-off affecting M value
S46ILLUSTRATING CMS TRADE-OFF
S47NOISE PERFORMANCE: PIXEL TYPE V0, V1 AND V2
Multi-sampling data assumes 14 bits
ULN ADC Resolution (Nbits)
ULN Noise (uVrms)
Sense ADC Resolution (Nbits)
ULN Noise (e-)
ULN ADC Resolution (Nbits)
Noise in Multi-sampling (e-)
M: Multi-Sampling Factor
Channel readout
14 bits 15 bits 16bits M=1 M=2 M=4 M=8 M=16 M=32
v2 [uVrms] 9.99E‐05 7.58E‐05 6.45E‐05 1.21E‐04 8.99E‐05 6.81E‐05 5.58E‐05 4.86E‐05 4.47E‐05
v2 [e‐] 1.07E+00 8.10E‐01 6.89E‐01 1.30E+00 9.61E‐01 7.28E‐01 5.97E‐01 5.19E‐01 4.78E‐01
14 bits 15 bits 16bits M=1 M=2 M=4 M=8 M=16 M=32
v0 [uVrms] 1.16E‐04 9.61E‐05 8.74E‐05 1.36E‐04 1.05E‐04 8.82E‐05 7.91E‐05 7.55E‐05 7.57E‐05
v0 [e‐] 1.04E+00 8.57E‐01 7.80E‐01 1.21E+00 9.33E‐01 7.87E‐01 7.06E‐01 6.74E‐01 6.75E‐01
14 bits 15 bits 16bits M=1 M=2 M=4 M=8 M=16 M=32
v1 [uVrms] 1.13E‐04 9.23E‐05 8.32E‐05 1.33E‐04 1.02E‐04 8.44E‐05 7.51E‐05 7.04E‐05 7.00E‐05
v1[e‐] 1.04E+00 8.52E‐01 7.68E‐01 1.23E+00 9.46E‐01 7.79E‐01 6.93E‐01 6.49E‐01 6.46E‐01
CG v1 [uV/e‐]
108.4E‐6
CG v2 [uV/e‐]
93.6E‐6
CG v0 [uV/e‐]
112.1E‐6
Sense internal CDS Sense Multisampling (Readout Noise included)
Sense internal CDS Sense Multisampling (Readout Noise included)
Sense internal CDS Sense Multisampling (Readout Noise included)
3.82E‐09
v2 Nf [V^2/Hz]
1.45E‐09
v0 Nf [V^2/Hz]
4.43E‐09
v1 Nf [V^2/Hz]
v2
v1
v0
S48ILLUSTRATIVE LOW LIGHT CAPTURES
0.396lux
0.00891lux
S490.5eRMS, LARGE FORMAT CIS
S50SUMMARY
Low-noise design at pixel level achieved through:
Pixel noise modeling based on empirical fitting
Optimization of transistor sizes
Proper control of waveform levels and shapes
Two-stage ADC readout channels feature:
Shorter conversion times: 2N2*Tbit vs. 2N*Tbit (Tbit = 2ns in 180nm CMOS)
Second stage noise and errors are attenuated by the Gain of the first stage
Second stage is optimized in power consumption and area, and it remainsin very good FoM:
FoM = Pw/(2^ENOB)*Tconv
FoM = 0.24pJ/LSB per channel in this work ADC FoM =0.6pJ/LSB traditional approach
S51. . . LOOKING BEYOND
BESIDES LOW-NOISE, EXTENSION OF THE TOP BOUNDS OF THE DYNAMIC RANGE IS
NEEDED FOR SOME APPLICATIONS, SUCH AS AUTOMOTIVE
No ghosting artifacts
Source : S. Vargas, G. Liñán, A. Rodríguez-Vázquez@ IMSE CVIS Lab – “A 151dB High Dynamic Range CMOS Image Sensor Chip Architecture with Tone Mapping Compression Embedded in-Pixel”. IEEE Sensor Journal , 2015
S52
VERY LOW ILLUMINATION AND COMBINED 2D/3D IMAGING CAN BE HANDLED BY USING
SPADS
Source: I. Vornicu, R. Carmona, A. Rodríguez-Vázquez@ IMSE CVIS Lab – “Real-Time Inter-Frame Histogram Builder for SPAD Image Sensors”. IEEE Sensors Journal 2018.
. . . LOOKING BEYOND
TIMEFOR
QUESTIONS !!
A. RODRÍGUEZ-VÁZQUEZ
UNIVERSIDAD DE SEVILLA, IMSE/ [email protected]; [email protected]
Research of Angel Rodríguez-Vázquez supported by the SMART CIS3D, Junta de Andalucía P12-TIC-2338 Project