Laboratory Equipment Indispensable for Advanced Technologies

Silicon Wafer PlatingLaboratory Set

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Silicon Wafer PlatingLaboratory Set

Yamamoto-MS silicon wafer plating laboratory set is used for precision plating such as to silicon wafers, glass and ceramic substrates, special materials and films. Our silicon wafer plating laboratory sets have been used in numerous fields including semi-conductors, MEMS, LIGA, various sensors, solar power generation, precision components, heavy/aerospace/chemical industries, researches involving various primary materials and also as equipment for small-lot production. The set is small-sized intended for use in laboratory experiments and inside draft chambers.

The set is composed of cathode/anode jigs specially equipped for precision plating, micro filter, agitator and a tank with enhanced temperature distribution and agitation efficiency. Plating is possible with solution volume of 250mL for chip-substrates of approximately 1cm-square size, 4L for 4cm-sized chips and 40L for 12cm-sized chips. Even when not included in our catalog, we are also able to accept custom-orders to fit our customers’ needs such as electroless plating systems and double-sided plating systems. Please feel free to inquire us on any desktop-size sets. If you can provide us with rough specifications such as plating-type, bath temperature, sample size of plating items and preferable volume of plating solution, we will be able to provide you with suggestions on the system that may be just right for your needs. We are proud of the fact that our silicon wafer plating series has satisfied numerous research institutes and manufacturers over the years since its first introduction in 1996.Who knows – there may be semi-conductors, sensors, ultra-small components or primary materials around you that were used in researches or manufactured using Yamamoto MS products.....

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How to select Silicon Wafer Plating EquipmentTo select equipment for silicon wafer plating, information such as kind of solution, shape, size and thickness of workpiece ( sample ), thickness of plated layer and so on are required. Please refer the chart shown bellow.

Thickness of Workpiece (sample)Thickness of Plated Layer

In case that thickness of workpiece ( sample ) is more than 200μm and

thickness of plating film is less than 20μm.

Cu, Cu (P), Ni, Ni (S) , Sn, Pt/Ti, Ir/Ti Shape of Anode Cartridge must be selected based on size and

shape of workpiece.

Kind of Anodeand

Anode Cartridge

Select Material of Equipmentaccording to kind of solution and bath temperature.( We can handle various material. )

Temperature is below 65℃ and not attacking Acryl or

Temperature is 65 ~ 80℃ and not invading PP. Consult us !

Size of Workpiece( sample )

In case of both sides-type or that material or structure is special.

Consult us !2 ~ 12inch Small size,

30mm

Type of plating ElectroplatingOrder Productionincluding Electroless plating ( Chemical )( )

A-52 Silicon Wafer Type( φ2,3,4,5,6,8,12inch is standard size. )

A-53 Micro Cell Type orA-56 Smart Cell Type

( 10mm×15mm, 30mm×30mm is standard size. )

Standard Type or Sealed-Type Sealed-Type Cathode Cartridge( Standard or Order made )

Yes

Yes

Yes

Yes

Yes

Yes

No

No

No

No

Videos of Plating on Si wafer are available.You can see the videos of experiment and experimental results and so on.Check this QR code or URL shown bellow.http://www.yamamoto-ms.co.jp/en/movie/index.html

QR Code is registered trademark ofDENSO WAVE INCORPORATED

in Japan and other countries.

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An example of experimental resultswith copper sulfate electroplating.

Experimental condition:Plating bath : Cu-sulfate electroplating solution with commercial

additivesSample : 8inch Wafer with sputter-deposited Cu filmC.D. : 1A/dm2

Target thickness : 3μmAnode : Phosphorus CopperBath Temp. : R.T. (25ºC±1ºC)Agitation : Air bubbling, Paddle agitation

8inch Silicon Wafer Test Piece Pattern and wafer specification : Octagonal/square line (Spiral pattern)L/S : 5~100μmRound/Square Bump, Diameter : 10~500μmWafer thickness : 725μmSputter-deposited Cu : 300nmResist thickness : 5μm

Sample

Sample plated with Copper Sulfate

Plating film thickness ( μm )40μm line 100μm line

a 3.012 3.006b 3.006 2.934c 3.036 2.857d 2.959 2.871e 3.189 3.026f 3.191 3.023g 2.961 2.975h 2.929 2.867i 3.072 2.856

Ave 3.039 2.935Max 3.191 3.026Min 2.929 2.856Ran 0.262 0.170

Sampling points

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Silicon Wafer Equipment (2~4-inch)

No. Product No. Product Name UnitTank A-52-ST2-P01A 2-inch Silicon Wafer Tank 1 unit

JigA-52-ST2-P02A 2-inch Silicon Wafer Cathode Cartridge 1 setA-52-ST2-P02B 2-inch Silicon Wafer Cathode Cartridge ( Sealed-Type ) 1 setA-52-ST2-P09A 2-inch Silicon Wafer Anode Holder ( w/Anode Bag ) 1 set

Heater A-52-ST4-P10W Wafer Tank Heater ( DC48V,100W ) 2 pcs.Heater Clasp B-50-KTSG122011 Stainless-steel G-type Clasp ( Width : 12mm×20, φ11 ) 2 pcs.Thermostat B-93-YTC300 Thermostat YTC300 ( AC100-230V, 300W ) 1 unitSensor Clasp B-50-KTSG121513 Stainless-steel G-type Clasp ( Width : 12mm×15, φ13 ) 1 pcVibrating Equipment A-52-ST2-P04DW 2-inch-use Paddle Agitator ( Model-W ) 1 unitFilter B-90-A20-APFW05 Mini-Mini Filter Model-20APFW ( 0.5μm Cartridge type ) 1 unit

OtherA-57-15100-P01 Lead Wire ( 1-black/1-red, titanium clip ) 1 pairA-52-P18 Air Filter 1 pc.

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No. Product No. Product Name UnitTank A-52-ST4-P01A 4-inch Silicon Wafer Tank 1 unit

Jig

3inchA-52-ST3-P02A 3-inch Silicon Wafer Cathode Cartridge 1 setA-52-ST3-P02B 3-inch Silicon Wafer Cathode Cartridge ( Sealed-Type ) 1 setA-52-ST3-P09A 3-inch Silicon Wafer Anode Holder ( w/Anode Bag ) 1 set

4inchA-52-ST4-P02A 4-inch Silicon Wafer Cathode Cartridge 1 setA-52-ST4-P02B 4-inch Silicon Wafer Cathode Cartridge ( Shield-Type ) 1 setA-52-ST4-P09A 4-inch Silicon Wafer Anode Holder ( w/Anode Bag ) 1 set

Heater A-52-ST4-P10W Wafer Tank Heater ( DC48V,100W ) 3 pcs.Heater Clasp B-50-KTSG122011 Stainless-steel G-type Clasp ( Width : 12mm×20, φ11 ) 3 pcs.Thermostat B-93-YTC300 Thermostat YTC300 ( AC100-230V, 300W ) 1 unitSensor Clasp B-50-KTSG121513 Stainless-steel G-type Clasp ( Width : 12mm×15, φ13 ) 1 pcVibrating Equipment A-52-ST4-P04DW 4-inch-use Paddle Agitator ( Model-W ) 1 unitFilter B-90-A20-APFW05 Mini-Mini Filter Model-20APFW ( 0.5μm Cartridge type ) 1 unit

Other A-57-15100-P01 Lead Wire ( 1-black/1-red, titanium clip ) 1 pairA-52-P18 Air Filter 1 pc

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2-inch Silicon Wafer

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Outer ( Installasion ) Dimensions : 400mm ( D ) ×760mm ( W ) ×300mm ( H )

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3-inch / 4-inch Silicon Wafer

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Outer ( Installasion ) Dimensions : 480mm ( D ) ×810mm ( W ) ×350mm ( H )

Patent-Registered ProductJapan/USA/Europe/China/Korea/Taiwan

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Silicon Wafer Equipment (5~8-inch)

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※ 12 inch size, square-type, both sides type etc. are order production.

No. Product No. Product Name UnitTank A-52-ST8-P01A 8-inch Silicon wafer tank 1 unit

JigA-52-ST8-P02N 8-inch Silicon Wafer Notch Spec. Cathode Cartridge 1 setA-52-ST8-P02C 8-inch Silicon Wafer Notch Spec. Suction-Type Sealed Cathode Cartridge 1 setA-52-ST8-P09N 8-inch Silicon Wafer Notch Spec. Anode Holder ( w/Anode Bag ) 1 set

Heater

*Heater and Thermostat are not included in the set.Heater ClaspThermostatSensor ClaspVibrating Equipment A-52-ST8-P04DW 8-inch-use Paddle Agitator ( Model-W ) 1 unitFilter B-90-A20-APFW05 Mini-Mini Filter Model-20APFW ( 0.5μm Cartridge type ) 1 unit

OtherA-57-15100-P01 Lead Wire ( 1-black/1-red, titanium clip ) 1 pairA-52-P18 Air Filter 1 pc.

No. Product No. Product Name UnitTank A-52-ST6-P01A 6-inch Silicon Wafer Tank 1 unit

Jig

5inchA-52-ST5-P02A6 5-inch Silicon Wafer Cathode Cartridge 1 setA-52-ST5-P02C6 5-inch Silicon Wafer Suction-Type Sealed Cathode Cartridge 1 setA-52-ST5-P09A6 5-inch Silicon Wafer Anode Holder ( w/Anode Bag ) 1 set

6inchA-52-ST6-P02N 6-inch Silicon Wafer Notch Spec. Cathode Cartridge 1 setA-52-ST6-P02C 6-inch Silicon Wafer Notch Spec. Suction-Type Sealed Cathode Cartridge 1 setA-52-ST6-P09N 6-inch Silicon Wafer Notch Spec. Anode Holder ( w/Anode Bag ) 1 set

Heater

*Heater and Thermostat are not included in the set.Heater ClaspThermostatSensor ClaspVibrating Equipment A-52-ST6-P04DW 6-inch-use Paddle Agitator ( Model-W ) 1 unitFilter B-90-A20-APFW05 Mini-Mini Filter Model-20APFW ( 0.5μm Cartridge type ) 1 unit

Other A-57-15100-P01 Lead Wire ( 1-black/1-red, titanium clip ) 1 pairA-52-P18 Air Filter 1 pc

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5-inch / 6-inch Silicon Wafer

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Outer ( Installasion ) Dimensions : 600mm ( D ) ×800mm ( W ) ×450mm ( H )

8-inch Silicon WaferOuter ( Installasion ) Dimensions : 800mm ( D ) ×800mm ( W ) ×530mm ( H )

Patent-Registered ProductJapan/USA/Europe/China/Korea/Taiwan

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Silicon Wafer Equipment (For Small Size, 30mm )

Micro Cell Silicon Wafer-use Set YTC300A-53-M*-ST01W

Small acrylic-resin tank used for plating experiments, during which filtering is conducted constantly. Designed to fit the heater into the base part, making heating and air agitation possible. Optimal for basic experiments for plating of silicon wafer tips and bump plating, etc. ( M1:300mL , M2:500mL , M3:1000mL types ) Wafer-tip jigs are used as the standard. * M1 : 1 M2 : 2 M3 : 3※ Air pump and anode are sold separately.

Patent-Registered Product Japan/USA/Europe/China/Korea/Taiwan

No. Product No. Product Name UnitTank A-53-M*-P01W Micro Cell Tank MODEL ( lw / llw / lllw ) ( w/Busbar, Holding Jig, Pinset ) 1 set

Jig

For 10×15mm Test PiecesTank : M1,M2,M3

A-53-M1-P06-1015 Micro Cell Cathode Jig ( for 10×15mm Test Pieces ) Busbar not included 1 setA-53-M*-P06-K1 Micro Cell Cathode Jig ( for 10×15mm Test Pieces ) Busbar 1 pc.A-53-M1-P07-1015 Micro Cell Anode Jig ( for 10×15mm Test Pieces ) Busbar not included 1 setA-53-M*-P07-K1 Micro Cell Anode Jig ( for 10×15mm Test Pieces ) Busbar 1 pc.

For 30×30mm Test PiecesTank : M3

A-53-M3-P06-3030 Micro Cell Cathode Jig ( for 30×30mm Test Pieces ) Busbar not included 1 setA-53-M3-P06-K1 Micro Cell Cathode Jig ( for 30×30mm Test Pieces ) Busbar 1 pc.A-53-M3-P07-3030 Micro Cell Anode Jig ( for 30×30mm Test Pieces ) Busbar not included 1 setA-53-M3-P07-K1 Micro Cell Anode Jig ( for 30×30mm Test Pieces ) Busbar 1 pc.

Heater Tank : M1,M2 A-53-M1-P05W Micro Cell Ⅰw /Ⅱw Heater w/Thermal Fuse ( DC48V,50W ) 1 pc.Tank : M3 B-58W Hull Cell Heater w/Thermal Fuse ( DC48V,100W ) Thermostat B-93-YTC300 Thermostat YTC300 ( AC100-230V, 300W ) 1 unitSensor Clasp B-50-KTSG121513 Stainless-steel G-type Clasp ( Width : 12mm×15, φ13 ) 1 pc.Vibrating Equipment A-55-PCR200BW Paddle Cathode Rocker 200Bw ( W / Speed Controler ) 1 unitLead Wire A-57-15030-P01 Lead Wire ( 1-black / 1-red, titanium clip ) 1 pairMotor Controler B-75-P14A Speed Controler 1 unit

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No. Product No. Product Name UnitTank A-56-0500W / A-56-1000W Smart Cell 500W / 1000W 1 pc.Stirrer B-62W Stirrer ( IKAMAG KMO 2 basic ) w/Stand 1 set

Jig

For 10×15mm Test PiecesTank : 500W, 1000W

A-53-M1-P06-1015 Micro Cell Cathode Jig ( for 10×15mm Test Pieces ) Busbar not included 1 setA-56-0500W-P01 / A-56-1000W-P01 Smart Cell 500W Busbar / Smart Cell 1000W Busbar 1 pc.A-53-M1-P07-1015 Micro Cell Anode Jig ( for 10×15mm Test Pieces ) Busbar not included 1 setA-56-0500W-P01 / A-56-1000W-P01 Smart Cell 500W Busbar / Smart Cell 1000W Busbar 1 pc.

For 30×30mm Test PiecesTank : 1000W

A-53-M3-P06-3030 Micro Cell Cathode Jig ( for 30×30mm Test Pieces ) Busbar not included 1 setA-56-1000W-P01 Smart Cell 1000W Busbar 1 pc.A-53-M3-P07-3030 Micro Cell Anode Jig ( for 30×30mm Test Pieces ) Busbar not included 1 setA-56-1000W-P01 Smart Cell 1000W Busbar 1 pc.

Heater Tank : 500W A-53-M1-P05W Micro Cell Ⅰ w / Ⅱ w Heater w / Thermal Fuse ( DC48V,50W ) 1 pc.Tank : 1000W B-58W Hull Cell Heater w / Thermal Fuse ( DC48V,100W ) Thermostat B-93-YTC300 Thermostat YTC300 ( AC100-230V, 300W ) 1 unitSensor Clasp B-50-KTSG121513 Stainless-steel G-type Clasp ( Width : 12mm×15, φ13 ) 1 pc.Vibrating Equipment A-55-PCR200BW Paddle Cathode Rocker 200Bw ( W / Speed Controler ) 1 unitLead Wire A-57-15030-P01 Lead Wire ( 1-black / 1-red, titanium clip ) 1 pairMotor Controler B-75-P14A Speed Controler 1 unit

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Smart Cell Silicon Wafer-use Set YTC300Outer ( Installasion ) Dimensions : 480mm ( D ) ×810mm ( W ) ×350mm ( H ) ※ Air pump and anode are sold separately.

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Cathode / Anode

Anode is used with anode cartridge. Various kind of soluble and insoluble anodes are available. We can make special sized one by order. In case the material not shown in the table below is required, consult us.

Types Of Cathode Cartridge

Anode Holder

Anode Plate

Jigs for double-sided plating ( custom-order ) , flexible substrates ( custom-order ) and diaphragm-type holder for insoluble anodes are also available.Please inquire for further details.

Jiggs for fixing anode plate, which is set facing cathode cartridge. Using with cathode cartridge, good macrothrowing power is obtained. Anode bag for soluble anode is also attached.

Micro Cell Silicon Wafer-use Set YTC300

Decompression or vacuum state is formed by a suction pump. This system can be combined with sealed cathode cartridge etc. This system equips liquid leakage sensor. Therefore, is liquid is sucked, pump is immediately stopped.

[ Thickness : 2mm ]

Various Anode HoldersNo Product No. Product ( w / Anode Bag made from raised fabric )

A-52-ST2-P09A 2-inch Silicon Wafer Anode holderA-52-ST4-P09A 4-inch Silicon Wafer Anode holderA-52-ST6-P09A 6-inch Silicon Wafer Orientation Flat Spec. Anode holderA-52-ST6-P09N 6-inch Silicon Wafer Notch Spec. Anode holderA-52-ST8-P09N 8-inch Silicon Wafer Notch Spec. Anode holderA-53-M1-P07-1015 Micro Cell Anode Jig ( 10×15mm Test Pieces ) Busbar not includedA-53-M3-P07-3030 Micro Cell Wafer Anode Jig ( 30×30mm Test Pieces ) Busbar not included

Various Anode PlatesNo Product No. Product Size Unit

A-52-ST2-P08- ※ ※ 2-inch Silicon Wafer Anode Plate 67 × 170 × t 2mm

1pc.

A-52-ST3-P08- ※ ※ 3-inch Silicon Wafer Anode Plate 87 × 195 × t 2mmA-52-ST4-P08- ※ ※ 4-inch Silicon Wafer Anode Plate 106 × 200 × t 2mmA-52-ST6-P08- ※ ※ 6-inch Silicon Wafer Anode Plate 160 × 275 × t 2mmA-52-ST8-P08- ※ ※ 8-inch Silicon Wafer Anode Plate 200 × 350 × t 2mmA-53-M1-P81- ※ ※ Micro Cell ( Ⅰ / Ⅱ / Ⅲ ) 10 × 15 Wafer Anode Plate 28 × 120 × t 2mmA-53-M3-P81- ※ ※ Micro Cell ( Ⅲ ) 30×30 Wafer Anode Plate 44 × 145 × t 2mm※ ※02 : Sumitomo Electrolytic Nickel 03 : Pure Lead 04 : Zinc 06 : Stainless-steel SUS304 07 : Sumitomo SK Nickel ( Sulfur depolarized nickel / Please note that there are variations in plate thickness ) 08 : Phosphorous Copper 10 : Oxygen-free Copper ( Electrolytic Copper ) 11 : 5%Tin-contained Lead 12 : High-Purity Tin 15 : Carbon ( t = 3mm ) 17 : Silver 18 : Platinum-plated Titanium 19 : Cobalt 23 : Pure Iron 24 : Titanium 28 : Iridium-plated Titanium

No. Product name Specifications Application

Wafer CathodeCartridge( Standard-type )

Material : Acryl, SUS304, etc

Heatproof Temp. : 0~65℃

For use with regular thickness wafers.

Wafer Sealed-Type Cathode Cartridge ( 2-4inch )

Liquid will not enter the rear-side of the wafer. Also used as anodizing jigs.

Micro CellCathode Jig For use with regular thickness wafers.

Wafer Suction-TypeSealed CathodeCartridge ( CompatibleWith Thin Wafers, 4-12 inch )

Material : PPS, SUS304, etcHeatproof Temp. :0~80℃

By using together with vacuum defoamer, liquid will not enter the rear-side of the wafer. Also used as anodizing jigs. Suited for use with flagile thin wafers.

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Vacuum Defoamer AUVACSB-90-AVS-10W5

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Tank / Paddle Agitator / FilterSilicon Wafer Tank ( Acryl )A-52-ST-P01A

Tank for 2~12 inch silicon wafer plating. Designed with overflow-mechanism. A gentle convection is generated from the base of the tank, while constant fi ltration is conducted. Please inquire if you require tanks made of materials other than acryl. Tank Material : Acryl Heatproof Temp. : 65℃

specificationFlow rate ( L / min ) 4.8 ( MAX )

Filter ( μm ) 0.5Wetted material PP, PTFE

Operating temperature limit (℃ ) 80Size ( Outer ) ( mm ) 240 ( D ) × 290 ( W ) × 290 ( H )

Weight ( kg ) 5.6Input voltage AC 220-240V, 40WRated output 20W

specification Number of Particles0.5μm 1.0μm

Start 73,000pcs. 100% 9,300pcs. 100%15min 364pcs. 0% 6pcs. 0%30min 394pcs. 1% 5pcs. 0%45min 147pcs. 0% 1pcs. 0%

Mini-Mini Filter Model-20APFW ( 0.5μm Cartridge )

B-90-A20-APFW05

PTFE tube-filter with excellent heat-resistant and chemical-resistant properties. By using (0.5μm Cartridge) filters, filtration can be performed with precision.

specification

No.

Product No. A-52-ST2,ST4-P04DW A-52-ST6-P04DW A-52-ST8-P04DW

2,3,4 inch 5,6 inch 8 inch

Speed ( rpm ) 0-100

Stroke ( mm ) 30-96 30-150 30-150

Size ( Outer ) ( mm )

180 ( D ) × 210 ( W ) × 290 ( H )

270 ( D ) × 290 ( W ) × 380 ( H )

270 ( D ) × 290 ( W ) × 470 ( H )

Weight ( kg ) 6.0 12.9 13.4

Input Voltage AC 200-240W

Rated Output 30

Paddle AgitatorA-52-ST-P04DW

Reduces the width of the diffusion layer by agitating the area around the article to be plated. Two types - with or without speed meter - are available

12inch type is made to order. Please contact us in detail.

Filtration Performance Comparison Table ( measurement with pure water )

specification

No. Product No.Product Name Acrylic resin ( MAX65℃ )

Size ( Inside Dimension ) ( mm ) D W H Volume ( approx. ) L

A-52-ST2-P01A 2 inch ( Silicon wafer tank ) 100 100 100 1.5

A-52-ST4-P01A 3,4 inch ( Silicon wafer tank ) 140 140 140 4

A-52-ST6-P01A 5,6 inch ( Silicon wafer tank ) 210 210 210 13

A-52-ST8-P01A 8 inch ( Silicon wafer tank ) 280 280 280 28

A-52-ST12-P01A 12 inch ( Silicon wafer tank ) - - - -

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41 2 inch

4 8 inch

2 3,4 inch

1 2,3,4 inch

2 5,6 inch

3 8 inch

3 5,6 inch

180 ( D )

270 ( D )

270 ( D )

210 ( W )

290 ( W )

290 ( W )

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specification

No Product No. Product Name Dimensions : ( internal ) Tank Volume

A-53-M1-P01W Micro Cell Tank Model Ⅰ w 65 ( D ) × 65 ( W ) × 95 ( H ) mm Approx.300mL

A-53-M2-P01W Micro Cell Tank Model Ⅱ w 80 ( D ) × 80 ( W ) × 105 ( H ) mm Approx.500mL

A-53-M3-P01W Micro Cell Tank Model Ⅲ w 100 ( D ) × 100 ( W ) × 140 ( H ) mm Approx.1000mL

Micro Cell TankA-53-M-P01W

Space can be efficiently used since the tank-base has an opening for air agitation and an outlet for inserting heater (standard-type heater only). Busbars, anode/cathode jigs and cathode rocker for experiments are available. Tanks can be made of materials other than acryl. Tank Material : Acryl Heatproof Temp. : 65℃

Paddle Cathode Rocker 200BWA-55-PCR200BW

By exchanging the tip of the bar, can be used as both Paddle Agitator and Cathode Rocker. Optimal for Micro Cell Tank or Beaker experiments.

specification

Input Voltage AC100~240V

No. of Rotations 0~240rpm

Power Consumption 5W

Vertical Stroke 15,25,40,58mm

Outer ( Installation )Dimensions 100 ( D ) × 230 ( W ) × 198~285 ( H )mm

Main Unit Weight 1.6kg

Maximum Loading Weight 300g

Smart CellA-56

Innovative tank that uses magnetic stirrer, instead of a pump, for overflow circulation. The circulation volume can be controlled. Optimal for space-saving layout. Smart Cell designed to fit a Heater into the base part.We also accept custom-orders for different sizes. Heater is sold separately. Tank Material : Acryl Heatproof Temp. : 65℃

Tank / Paddle Cathode Rocker / Smart Cell

Description of Operation of Smart Cell

Smart cell is placed on the stirrer,and rotate a stirring bar. Solution flows in the direction of the arrow in this figure, It will begin overflow circulation.

Patent-Registered

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specificationNo Product No. Product Name Tank Volume Dimensions ( internal ) Note

A-56-0500A Smart Cell 500A 500mL 72 ( D ) × 72 ( W ) × 62 ( H ) mm -A-56-1000A Smart Cell 1000A 1000mL 92 ( D ) × 92 ( W ) × 82 ( H ) mm -A-56-0500W Smart Cell 500w 500mL 72 ( D ) × 72 ( W ) × 62 ( H ) mm W type heater

dedicatedA-56-1000W Smart Cell 1000w 1000mL 92 ( D ) × 92 ( W ) × 82 ( H ) mm

1234

3 ⅠⅠⅠ w2 ⅠⅠ w

1 Ⅰ w

1 500A

3 500W

2 1000A

4 1000W

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Thermostat

specification

Model YTC-300 YTC-1KL

Rating AC 100-230V±10%, 50/60Hz, 524VA AC 100-240V±10%, 50/60Hz, 1KVA

Rating Output DC48V, 300W ( 25-100W, 1-3pcs. or 300W,1pcs. ) AC 100-240V,1KW ( 500W, 2pcs. or 1KW,1pcs. )

Setting Range 0-100℃, Resolution 0.1℃

Outer (Installation) Dimensions 160mm ( W ) × 350mm ( D ) × 230mm ( H ) 160mm ( W ) × 200mm ( D ) × 230mm ( H )

Main Unit Weight 5.4kg 3.7kg

Fuse AC 250V, 5A, φ5 × 20mm HT ( Time lag-type, High breaking capacity ) AC 250V, 16A ( Time lag-type ) / AC 250V, 16A ( Quick cutoff )

Transient Overvoltage Overvoltage CategoryⅡ

Pollution Degree 2

StandardsSafety IEC60101-1

EMC EN61326-1 ( IEC61326-1 )

Material

Thermostat Cabinet : SPCC / Ni-Plated, Aluminium

Temperature Sensor Liquid-wetted Member : PTFE

Liquid Level Sensor Liquid-wetted Member : PP,PTFE

Heater DC48V, 25-300W, Exclusive Heater with Thermal Fuse AC100-230V, 50-1000W

Temperature Sensor Pt100

Liquid Level Sensor Float Type ( Sepalately sold )

Accessories Temperature Sensor 1 pcs, AC cable with plug ( AC250V, 5A, C Type ) Temperature Sensor 1 pcs, AC cable with plug ( AC250V, 10A, C Type )

B-93-YTC300 B-93-YTC1KL

Thermostat Specially designed thermostat that fulfills international standards. Current supplied to heaters are monitored all the time, and if abnormal current is detected, output is shut off immediately.

All of dedicated heaters equip with thermal fuses, and in case of dry-boiling, thermal fuses blow.

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No. Product Product No. Rating Specifications MaximumTemperature

Tank

Product No. Product

Hull Cell Heater B-58W AC / DC 48V, 100WTotal Length : 163mm,Tube Diameter : 11mm,Heater Section : 85mm

70℃

B-53W Hull Cell ( Thermostatic-Control-Type )

B-53-SMW Smart Hull Cell

B-53LW Hull Cell ( Thermostatic-Control / Long-Type )

B-77-P01W Haring Cell Tank

Micro Cell ⅠW / ⅡW 50W Heater A-53-M1-P05W AC / DC 48V, 50W

Total Length : 135mm,Tube Diameter : 8mm,Heater Section : 50mm

A-53-M1 or 2-P01W Micro Cell Tank

Wafer Tank Heater A-52-ST4-P10W

AC / DC 48V, 100W

Total Length : 240mm,Tube Diameter : 11mm,Heater Section : 85mm

80℃

A-52-ST2 or 4-P01 2.4 inch Silicon Wafer Tank

100W Laboratory-use Drop-in Heater B-82W

Total Length : 305mm,Tube Diameter : 11mm,Heater Section : 85mm

Beaker etc

300W Quartz Small Drop-in Heater

B-83W1

AC / DC 48V, 300W

Total Length : 370mm,Tube Diameter : 15mm,Heater Section : 150mm

Beaker etc

B-83W2Total Length : 310mm,Tube Diameter : 15mm,Heater Section : 150mm

A-45-P02W High Speed Hull Cell

※ For 5-12 inch tank, we recommend heaters provided from “MAZURCZAK”.

Consult Distributors.

Heater

1

2

3

4

5

How to set Heater

Wafer Tank Heater 100WA-52-ST4-P10W

3

5

Hull Cell Heater 100WB-58W

1

Micro Cell ⅠW / ⅡW 50W HeaterA-53-M1-P05W

2

300W Quartz Small Drop-in HeaterB-83W

100W Laboratory-use Drop-in HeaterB-82W

4

Fix it to tank with dedicated metal fitting.

In case immersion heater is used.

13

In the late 1990s, a revolution occurred in semiconductor manufacturing methods and the technique of plating onto silicon wafers spread worldwide. Around th is t ime, Yamamoto-MS received requests f rom universit ies and manufacturers for a test kit that could accommodate this technique, and we took this opportunity to swiftly embark on the manufacture of a simplified kit. We first started out by receiving special orders to produce custom-made kits, but before long, we had developed substantial expertise and knowhow and were able to launch commercial production, which eventually led to acquiring patents in Europe and the US.

01 Desktop Plating Kit for Semiconductors

All of Yamamoto-MS’s equipment for silicon wafers is handmade. From the exterior appearance, our kits seem easy to make and sometimes people try to reproduce the kits themselves… However, when cracking, warping, and leaking starts in no time, people realize that Yamamoto-MS products embody expertise not revealed by external appearance. How materials are handled and the processing methods used are the result gleaned from our constant trial and error efforts, since we are aware that even minute differences can have a major impact on results.

03 Gleaning Expertise through Constant Trial and Error

Structure and Shape Derived from Years of EffortOne problem that emerged in the development process was that plating tended to become uneven. Results differed greatly depending on tank structure, the way of electric contact on cathode, and how anodes were positioned. Restrictions on size, cost, and usability meant that the desired results could not be readily achieved. Through trial and error, we were able to finally arrive at the present structure and shape and we intend to keep making further improvements to satisfy our customers’ requests.

02

Continuing to be a Company that Strongly Supports CustomersWe often hear from our customers of how Yamamoto-MS equipment has helped them in their work such as commercialization of new products based on successful R&D or when they were able to manufacture products that were previously difficult to plate or which were too expensive to manufacture. As a company, nothing makes us more happy than receiving such feedback from our customers, since it is our mission to provide products and services that make the impossible possible for our customers or that allow them to satisfactorily complete their work as they are expected to be done. We intend to continue working together day by day, with a commitment to satisfying as many customers as possible, while seeking to become a company trusted and admired all over the world.

President Wataru Yamamoto

04

COLUMN Yamamoto-MS’s Progress in Developing Silicon Wafer Plating Laboratory Sets

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Design, development and manufacture of wet surface treatment equipment ( 100L Volume ), wet surface treatment testing equipment,

wet surface treatment analyzers (excluding coating appli-cation)

Design, development and manufacture of wet surface treatment-related products (equipment/chemicals)

Major electrics/device manufacturersRaw/Primary Materials Manufacturer MEMS-related laboratories & manufacturersLIGA, MEMS-related laboratories & manufactures Automotive industrial manufactures / aerospace affiliated manufactureresPCB / electronics parts manufacturing plantsPrecision machinery industrial manufacturesPlating divisions / laboratories of other manufacturersNational/public laboratoriesUniversity laboratoriesPlating specialistsPlating chemicals manufacturing companiesPlating Skills Assessment Committee (Japan)

Line of Business

Major Customers

Corporate ProfileEstablished Yamamoto-Shoten at 3-6, Hongokuchou, Nihonbashi, Chuo-ku, TokyoStarted distribution of Sulphameters (kit for measuring sulphuric acid in chromium plating solution)Admitted as a Sustaining Member of Metal Finishing Society of Japan (the current The Surface Finishing Society of Japan)

Relocated to 5-28-1, Sendagaya, Shibuya-Ku, Tokyo Specialized the company's business-line to the manufacture of plating testing equipment and analytical reagents

Changed company name to Yamamoto-Shoten Co., Ltd.Changed company name to YAMAMOTO-MS Co., Ltd.Increased capital from JPY 42,000,000 to JPY 63,000,000Increased capital to JPY 75,600,000Registered ISO9001 Certification Increased capital to JPY 80,000,000

*In 1998, English name has changed from YAMAMOTO MEKKI SIKENKI to YAMAMOTO-MS Co., Ltd.

1950

December 1961

August 1964July 1975October 2000November 2002May 2004November 2004

History

ISO9001

We also sell to other countries than the above. Please contact us for more information.

Price change and Specification ModificationPlease be aware that in order to improve our products,

we may modify specifications or other aspects and price is subject to change without giving prior notice.

YAMAMOTO-MS Co., Ltd. 151-0051 5-28-1, Sendagaya, Shibuya-Ku, Tokyo JapanTel : +81-3-3352-2475 FAX : +81-3-3350- 0775URL http://www.yamamoto-ms.co.jp/en/ E-mail info-eu@yamamoto-ms.co.jp

Tokyo

Japan

here

15

YAMAMOTO-MS Co., Ltd. 151-0051 5-28-1, Sendagaya, Shibuya-Ku, Tokyo JapanTel : +81-3-3352-2475 FAX : +81-3-3350- 0775URL http://www.yamamoto-ms.co.jp/en/ E-mail info-eu@yamamoto-ms.co.jp