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Website: www.amts.com Facebook: fb.com/AMTechnicalSolutions Twitter: @AMTechSol Phone: 1.888.729.1548 Key Semiconductor Equipment 1. Accretech/TSK UF3000 Wafer Prober 2. Advantest T5571P Memory Tester 3. AMAT Centura 5200 CVD 4. AMAT Centura 5200 Etcher 5. AMAT Centura 5200 RTP 6. AMAT Centura Advanced Gate Stack ALD 7. AMAT Centura Super-E Etcher 8. AMAT Centura Ultima CVD 9. AMAT Endura PVD 10. AMAT Mirra CMP 11. AMAT P-5000 Etcher 12. AMAT Producer CVD 13. AMAT Quantum Implanter 14. AMAT Verity CD-SEM 15. AMAT XR80 Ion Implanter 16. ASML 200mm PAS 5500* 17. Axcellis GSD 200 Ion Implanter 18. Canon FPA-3000 Stepper 19. Canon FPA-5000 Stepper 20. Canon FPA-5500 Stepper 21. Canon FPA-6000 Scanner 22. Canon TBW-CD-83 Stepper 23. CFM 8100 Wet Bench 24. DNS SS-80BW-AR Wafer Scrubber 25. Eaton 8250 Ion Implanter 26. Ebara FREX200 CMP 27. EG (ElectroGlas) Prober 28. Fusion 200/Gemini Resist Cure 29. Gasonics PEP 3510 Asher 30. Hitachi S-8820 CD-SEM 31. Hitachi S-9200 CD-SEM 32. HP / Agilent 4071 Tester 33. KLA-Tencor AIT Patterned Wafer Inspection 34. KLA-Tencor HRP Profilometer 35. KLA-Tencor Prometrix Thin Film Measurement 36. KLA-Tencor SP1 / 2 Surfscan Unpatterned Wafer Inspection 37. Lam 9600 Etcher 38. Lam 2300 Exelan Etcher 39. Lam 2300 Versys Etcher 40. Lam 9400 Etcher 41. Lam Alliance Etcher 42. Lam Rainbow Etcher 43. Lam TCP Etcher 44. Leica INM 200 Mircroscope 45. Steag / AST / Mattson 2800 RTP 46. Mattson Aspen Asher 47. Microvision MVT 7080 Wafer Sorter 48. Muratec Murata Machinery CSS10 Stocker 49. Nikon NSR-2005 Stepper 50. Nikon NSR-2205 Stepper 51. Nikon NSR-4425 Stepper 52. Nikon NSR-S2 Stepper 53. Nikon NSR-S3 Scanner 54. Nikon NSR-S6 Scanner 55. Nikon NSR-SF Stepper 56. Nikon Optishot Microscope 57. Nikon Optistation Wafer Inspection 58. Nissin Electric Exceed Ion Implanter 59. Novellus Atlus CVD 60. Novellus Speed CVD 61. Novellus Sequel PECVD 62. Novellus Gamma Stripper 63. Novellus Inova PVD 64. Novellus Pep Iridia Asher 65. Novellus Vector PECVD 66. Ontrak DSS-200 Series II Wafer Scrubber 67. PRI Automation Turbo Stocker 68. Semitool Magnum Spray Cleaner 69. Semitool SAT Wafer Cleaner 70. SEZ 203 Spin Processor 71. Speedfam Auriga CMP 72. Speedfam IPEC 472 CMP 73. Steag AG AWP Wet Bench 74. SVG Thermco (Aviza) AVP-8000 Vertical Furnace 75. SVG Thermco VTR-7000 Vertical Furnace

Key Semiconductor Equipment Draft-2 · PDF fileTEL P-8 Wafer Prober 89. TEL TE-5000 Etcher 90. TEL TELiNDY Vertical Furnace 91. TEL Telius Etcher 92. TEL Trias CVD 93. TEL Unity II

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Page 1: Key Semiconductor Equipment Draft-2 · PDF fileTEL P-8 Wafer Prober 89. TEL TE-5000 Etcher 90. TEL TELiNDY Vertical Furnace 91. TEL Telius Etcher 92. TEL Trias CVD 93. TEL Unity II

 

 

Website:  www.amts.com  Facebook:  fb.com/AMTechnicalSolutions  

Twitter:  @AMTechSol      

Phone:  1.888.729.1548  

 Key  Semiconductor  Equipment  

1. Accretech/TSK UF3000 Wafer Prober 2. Advantest T5571P Memory Tester 3. AMAT Centura 5200 CVD 4. AMAT Centura 5200 Etcher 5. AMAT Centura 5200 RTP 6. AMAT Centura Advanced Gate Stack ALD 7. AMAT Centura Super-E Etcher 8. AMAT Centura Ultima CVD 9. AMAT Endura PVD 10. AMAT Mirra CMP 11. AMAT P-5000 Etcher 12. AMAT Producer CVD 13. AMAT Quantum Implanter 14. AMAT Verity CD-SEM 15. AMAT XR80 Ion Implanter 16. ASML 200mm PAS 5500* 17. Axcellis GSD 200 Ion Implanter 18. Canon FPA-3000 Stepper 19. Canon FPA-5000 Stepper 20. Canon FPA-5500 Stepper 21. Canon FPA-6000 Scanner 22. Canon TBW-CD-83 Stepper 23. CFM 8100 Wet Bench 24. DNS SS-80BW-AR Wafer Scrubber 25. Eaton 8250 Ion Implanter 26. Ebara FREX200 CMP 27. EG (ElectroGlas) Prober 28. Fusion 200/Gemini Resist Cure 29. Gasonics PEP 3510 Asher 30. Hitachi S-8820 CD-SEM 31. Hitachi S-9200 CD-SEM 32. HP / Agilent 4071 Tester 33. KLA-Tencor AIT Patterned Wafer Inspection 34. KLA-Tencor HRP Profilometer 35. KLA-Tencor Prometrix Thin Film

Measurement 36. KLA-Tencor SP1 / 2 Surfscan Unpatterned

Wafer Inspection 37. Lam 9600 Etcher

38. Lam 2300 Exelan Etcher 39. Lam 2300 Versys Etcher 40. Lam 9400 Etcher 41. Lam Alliance Etcher 42. Lam Rainbow Etcher 43. Lam TCP Etcher 44. Leica INM 200 Mircroscope 45. Steag / AST / Mattson 2800 RTP 46. Mattson Aspen Asher 47. Microvision MVT 7080 Wafer Sorter 48. Muratec Murata Machinery CSS10 Stocker 49. Nikon NSR-2005 Stepper 50. Nikon NSR-2205 Stepper 51. Nikon NSR-4425 Stepper 52. Nikon NSR-S2 Stepper 53. Nikon NSR-S3 Scanner 54. Nikon NSR-S6 Scanner 55. Nikon NSR-SF Stepper 56. Nikon Optishot Microscope 57. Nikon Optistation Wafer Inspection 58. Nissin Electric Exceed Ion Implanter 59. Novellus Atlus CVD 60. Novellus Speed CVD 61. Novellus Sequel PECVD 62. Novellus Gamma Stripper 63. Novellus Inova PVD 64. Novellus Pep Iridia Asher 65. Novellus Vector PECVD 66. Ontrak DSS-200 Series II Wafer Scrubber 67. PRI Automation Turbo Stocker 68. Semitool Magnum Spray Cleaner 69. Semitool SAT Wafer Cleaner 70. SEZ 203 Spin Processor 71. Speedfam Auriga CMP 72. Speedfam IPEC 472 CMP 73. Steag AG AWP Wet Bench 74. SVG Thermco (Aviza) AVP-8000 Vertical

Furnace 75. SVG Thermco VTR-7000 Vertical Furnace

Page 2: Key Semiconductor Equipment Draft-2 · PDF fileTEL P-8 Wafer Prober 89. TEL TE-5000 Etcher 90. TEL TELiNDY Vertical Furnace 91. TEL Telius Etcher 92. TEL Trias CVD 93. TEL Unity II

 

 

76. Teradyne Catalyst Tester 77. Therma-Wave Opti-Probe Thin Film

Measurement 78. TEL Alpha-303i Vertical Furnace 79. TEL Alpha-8 Vertical Furnace 80. TEL Clean Track Act 12 Double Block

Coater/Developer 81. TEL Clean Track Act 12 Single Block

Coater/Developer 82. TEL Clean Track Act 8 Double Block

Coater/Developer 83. TEL Clean Track Act 8 Single Block

Coater/Developer 84. TEL Clean Track Lithius Coater/Developer 85. TEL Clean Track Mark VII Coater/Developer 86. TEL Clean Track Mark VIII Coater &

Developer 87. TEL P-12 Wafer Prober

88. TEL P-8 Wafer Prober 89. TEL TE-5000 Etcher 90. TEL TELiNDY Vertical Furnace 91. TEL Telius Etcher 92. TEL Trias CVD 93. TEL Unity II Etcher 94. TEL Unity IIe Etcher 95. TEL Unity M Etcher 96. TEL Unity Me Etcher 97. TEL UW200Z Wet Bench 98. Ulvac Enviro Asher 99. Varian E220 Ion Implanter 100. Varion Viision 80 Ion Implanter 101. Varian Viista 80 Ion Implanter 102. Varian Viista 810HP Ion Implanter 103. Veeco Dimension Atomic Force Profiler

 *ASML - AM Technical Solutions is an Authorized Service Provider for the ASML 200mm PAS 5500 Product Line.  

                       

                                           TEL  Act8                                                                                                                          Applied  Centura      

 Website:  www.amts.com  

Facebook:  fb.com/AMTechnicalSolutions  Twitter:  @AMTechSol  

   

Phone:  1.888.729.1548