1
Scien&fic Achievement So/, reusable stamps are fabricated and used to pa:ern nanoscale triangular prisms and cones for op&cal applica&ons including Raman sensing, an&reflec&ve coa&ngs for solar cells, and photolithography. Significance and Impact We offer a quicker and easier approach with a more diverse range of achievable pa:erns and substrates than other techniques, applied to applica&ons requiring precise control of light ma:er interac&ons. Research Details We fabricate polymerbased so3 lithography masters with decal transfer lithography and replicate elastomeric stamps. Nanoscale pa:erns by nearfield phase shi3 lithography can be achieved using a microscale mask. Slap, Stick, & Peel: Soft Triangular Stamps for Nanotexturing Work was performed at Univ. of Illinois at Urbana Champaign & Lawrence Berkeley NaEonal Lab A.M. Bowen, M.J. Motala, J.M. Lucas, S. Gupta, A.J. Baca, A. Mihi, A.P. Alivisatos, P.V. Braun, and R.G. Nuzzo, Adv. Func. Mater. (2012) SEM and AFM images of textured surfaces fabricated using soL PDMS stamps mask laminate to PDMS expose PDMS contact + heat peel (a) (b) (c)n (d) 20 μm (e) June 2012 Research Highlight

June 2012 Research Highlight Slap, Stick, & Peel: Soft Triangular … · 2017. 9. 19. · – We#fabricate#polymer0based#so3#lithography#masters# with# decal# transfer# lithography#

  • Upload
    others

  • View
    1

  • Download
    0

Embed Size (px)

Citation preview

Page 1: June 2012 Research Highlight Slap, Stick, & Peel: Soft Triangular … · 2017. 9. 19. · – We#fabricate#polymer0based#so3#lithography#masters# with# decal# transfer# lithography#

Scien&fic  Achievement  So/,  reusable  stamps  are  fabricated  and  used  to  pa:ern   nanoscale   triangular   prisms   and   cones  for  op&cal  applica&ons  including  Raman  sensing,  an&reflec&ve   coa&ngs   for   solar   cells,   and  photolithography.  

Significance  and  Impact  We   offer   a   quicker   and   easier   approach  with   a  more   diverse   range   of   achievable   pa:erns   and  substrates   than   other   techniques,   applied   to  applica&ons   requiring   precise   control   of   light-­‐ma:er  interac&ons.  

Research  Details  – We  fabricate  polymer-­‐based  so3  lithography  masters  with   decal   transfer   lithography   and   replicate  elastomeric  stamps.  

–  Nanoscale   pa:erns   by   near-­‐field   phase   shi3  lithography  can  be  achieved  using  a  microscale  mask.  

Slap, Stick, & Peel: Soft Triangular Stamps for Nanotexturing

Work  was  performed  at  Univ.  of  Illinois  at  Urbana-­‐Champaign  &  Lawrence  Berkeley  NaEonal  Lab  

A.M.  Bowen,  M.J.  Motala,  J.M.  Lucas,  S.  Gupta,  A.J.  Baca,  A.  Mihi,  A.P.  Alivisatos,  P.V.  Braun,  and  R.G.  Nuzzo,  Adv.  Func.  Mater.  (2012)    

SEM  and  AFM  images  of  textured  surfaces  fabricated  using  soL  PDMS  stamps  

mask  

laminate  to  PDMS  

expose  PDMS  

contact  +  heat  

peel  (a)  

(b)  

(c)n  

(d)  

20  μm  

(e)  

June 2012 Research Highlight