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Advanced Technology Solutions, L.L.C.
John Cox
Advanced Technology Solutions, L.L.C
Beth Tshudy Analog Devices, Inc.
Tuesday, September 30, 2014
Advanced Technology Solutions, L.L.C.
Reducing Risk, Improving Safety Current Safety Controls at Analog Devices, Inc. Roof-top Silane Gas Pad Design Overview Project Team Participants
Design Phase Considerations
Code and Guidelines Excerpts
Safety Features
Project Milestones
Acknowledgements
Advanced Technology Solutions, L.L.C.
Responds to obsolescence of vacuum silane
Recommended for FM Global Insurance
compliance (a ‘Key Exposure’)
Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
One of the greatest hazards of silane is that its behavior in air is unpredictable. Five things can happen:
– Nothing – Brown or white powder formation – Intermittent popping sounds—”poppers” – Immediate ignition-fire – Delayed Ignition-fire/explosion
Under the same conditions different results can occur
Shutdown or abrupt reduction in flow can cause ignition in atmosphere
Advanced Technology Solutions, L.L.C.
The majority of our systems utilized vac-silane (14 tools).
Advanced Technology Solutions, L.L.C.
ADI Stakeholders: Facilities Environmental, Health and Safety Process Engineers On-site Service Staff (contractor that changes silane cylinders)
Speciality Consultants: Advanced Technology Solutions, LLC—EHS/Code Hallam/ICS---Specialty Gas Piping & Controls External Stakeholders: Connolly Brothers, Inc. Symmes Maini & McKee Associates
Advanced Technology Solutions, L.L.C.
Review and develop options for siting the pad
Understand constraints
Understand and explore nature of catastrophic release
Research the current regulations for providing an outside storage facility that incorporate all code, safety, and environmental regulations
Determine actual process needs (present and future)
Advanced Technology Solutions, L.L.C.
Finalize conceptual design for filing permits with Town.
Work with local officials to educate them on ADI’s proposed risk reduction initiative (buy-in).
Solicit feedback from town officials.
EDUCATE, Educate, educate.
Advanced Technology Solutions, L.L.C.
ATS identified….
Code requirements (C)
Guideline safety recommendations (G)
Industry Best Practice (IBP)
Advanced Technology Solutions, L.L.C.
ATS identified 168 requirements after a thorough code review. The referenced codes and guidelines pertaining to silane gas storage and distribution are below:
ANSI/CGA-G-13 -- 2006 (American National Standards Institute / Compressed Gas Association) – Storage and Handling of Silane and Silane Mixtures;
FM Global Property Loss Prevention Data Sheets 7-7 – Semiconductor Fabrication SEMI S18 – 1102 – Environmental , Health and Safety Guideline for Silane Family Gases Handling; NFPA 318 -- Standard for the Protection of Semiconductor Fabrication Facilities NFPA 55 -- Compressed Gases and Cryogenic Fluids Code; International Fire Code: Chapter 18 (Semiconductor Fabrication Facilities), Chapter 27 (Hazardous Materials – General Provisions), Chapter 30 (Compressed Gases) and Chapter 41 (Pyrophoric Materials); and Massachusetts Building and Fire Codes. SEMI S18
Advanced Technology Solutions, L.L.C.
46 safety feature recommendations
were developed for use and review for FM Global and other stakeholders.
Advanced Technology Solutions, L.L.C.
Restricted Flow Orifices
Automated Cylinder Valve
Excess flow valves
UV/IR detection
Ventilation
Sprinkler protection
Closed Circuit Television
Seismic bracing and anchoring
Emergency Shut Off button
Auxillary blowers
¼” thick steel plates
Damage limiting construction
Auto-purge
Class 1, Div. 2 electrical Water mist to cool Lightening protection Safety systems on UPS
Advanced Technology Solutions, L.L.C.
Formal Process Hazard Analysis
Cause/Effect Matrix
Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
Shutdown Conditions: (Typical for each GSM) 1. GSM panel flame verified 2. GSM panel heat detector tripped 3. Silane cylinder temperature > 150°F 4. GSM outlet excess flow - internal GSM safety 5. GSM outlet high delivery pressure - internal GSM safety 6. GSM EPO activation - internal GSM safety 7. VMB exhaust gas detection 8. VMB enclosure flame verified 9. VMB controller EPO activated 10. Roof Pad Exit EPO activated -shutdown all PAD GSMs 11. Security Office Pull Station (via FACP to SGMCS) -shutdown all PAD GSMs 12. Heat detectors beneath PAD in Bldg 2 ceiling tripped
Advanced Technology Solutions, L.L.C.
Schematics of exterior fenced structure (shell) Schematics of lower level exterior Schematics of damage limiting construction
requirements Structural support bracing Site preparation plans Utility plan Site details Schematics of all safety controls
Advanced Technology Solutions, L.L.C.
Roof steel will be installed during the Christmas shutdown week
Silane process piping will start in January 2011
Concrete slab and site work will begin April 2011
Gas equipment and the elevator should begin in May 2011
System completion and testing by July 2011
Fab tie into equipment TBD
Advanced Technology Solutions, L.L.C.
Includes 2 story cylinder elevator, heated slab, exhaust, 14 cylinder positions with silane auto switchover.
Advanced Technology Solutions, L.L.C.
Advanced Technology Solutions, L.L.C.
SILANE ROOF PAD
Rack 1
Side A
Side B
Flame
Detector
Ring
Blowers
25%
50%
100%
I.R.
Camera
Heat
Detector
U.V./I.R.
Detector
Storage Rack
Flame
Detector
Ring
Sprinkler
U.V./I.R.
Sensor
Gas Monitoring
Point
3-1 VMB ROOM (1-5)
ROOFTOP
At both exits
First Vision Panels (SCC)
Silane Alarms to ERT…
Rack Hazard Alarms:
• Emergency Gas Off • Excess Flow • UVIR Fault • UVIR Flame Detected • Side A standby cylinder leak • Side B standby cylinder leak • Side A High Cylinder pressure • Side B High Cylinder pressure
Regular Regular Thermal Thermal Thermal Thermal
Advanced Technology Solutions, L.L.C.