J.Lebowitz

Data Analysis using Spotfire at TI Data Analysis using Spotfire at TI

Joe Lebowitz Yield & Product Engineering

Texas Instruments - Kilby Fab

J.Lebowitz

Our propensity to collect data in the Semiconductor industry is unparalleled.

The ability to turn that data into useful information is ………………………………… catching up

OR:

More Data Analysis is Good, Good Data Analysis is Much More!

EDA for Semiconductor MfgEDA for Semiconductor Mfg

J.Lebowitz

Engineering Data Analysis is a vital, integral part of

Semiconductor development and manufacturing. The timely detection of problems, centering of complex process

interactions, and yield improvement hinges on efficient data analysis.Faced with overwhelming amounts of data we tend to rely upon

the analysis system to guide us to the pertinent information. This is becoming a more reliable thing to do as analysis systems become

more sophisticated.However, even the most sophisticated system, relying on rigorous

statistics, is often still far behind an experienced engineer’s intuitive analysis.

To the extent that Software tools can enhance the experience of the engineers using it they can add greatly to the value of the data analysis efforts

EDA for Semiconductor MfgEDA for Semiconductor Mfg

J.Lebowitz

TI’s Data Analysis NeedsTI’s Data Analysis Needs TI has a huge range of Mfg environments, each with their own

specific data analysis needs Need access to widely diverse data warehouses Speed to making good decisions is critical in supplying our customers with the

best product in a timely manner No one tool can be all / do all for everyone

Need a System for doing data analysis that provides the right data and the right analysis tools Ease of use is paramount Transparent data sourcing Immersion in the analysis through interactive queries and real time

visualizations Work flows that provide intuitive guides for the user Wide range of breadth and depth to analysis – with immediacy

Spotfiretm helps ease the burden of doing good analysis.

J.Lebowitz

Spotfire - OverviewSpotfire - Overview Overview

Spotfire is an analytic application designed to enhance engineering data analysis and decision making.

Spotfire’s primary advantage is a powerful, user friendly, graphical analysis engine Spotfire was originally developed for the pharmaceutical industry. TI was the first

Semiconductor company to use it. Many modifications/improvements have occurred as a result of the engagement

between TI and Spotfire

Benefits Easy to use, intuitive, Interfaces well with existing databases (SMSdw, TestWare,

ESDA, Sleuth,…) This enables users to easily merge data from different sources for analysis resulting in

significant time saving

Current / Potential Users Logic Fabs, Freising LBE’s, TI France, Hiji, TIPI ANYONE needing to do quality data analysis

DATE_WORK_WEEK10 11 12 13 14 15 16 17 18 19

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Started in Kilby Fab as a 16 user license Pilot in early ’01 Out of box application gave immediate ROI Applications development aimed at solving the majority of daily EDA needs

Spotfire has gained great acceptance with users across TI because: Ease of use Visualizations Live data manipulations

Data analysis being used daily for Yield, Qual, Parametric, & Defect work – expanding to WIP mgmt & planning apps as well: Wafer Mapping Bin Summaries Parametric/Yield Trends “Waterfall” lot movement charts

Approved to expand to Site & then Corporate wide licenses

SPC data mining Defect data analysis tool ANOVA & advanced statistics Correlations / Find-differences

The Use of Spotfire at Texas InstrumentsThe Use of Spotfire at Texas Instruments

Work with disparate data sourcesFast extractsAbility to handle huge data sets

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User TestimonialsUser TestimonialsFrom: Grice, Tom Sent: Thursday, March 21, 2002 11:02 AMTo: Eklund, Bob; McKee, Ben; Menon, VenuSubject: Spotfire Site Licensing

I would like very much to have my folks start using Spotfire for data analysis. I have reviewed the tool and I think it has a number of features that make it an excellent tool for our needs. However, I have one problem, there is no site license. I quit using SAS primarily because I could never count on being able to access the tool when I needed it. Because there are a limited number of licenses and they have to be assigned to individuals, and because I (and my people) are "intermittent" users, it seemed that our licenses were constantly being taken away and given to someone who "needed it worse". I am very impressed with Spotfire but I am told we have the same problem. My people can only have access so long as no one "needs it worse". Needless to say, I don't think we should waste time on training people if the tool is not going to be available for them to use. Data analysis is, to me, a little like eating. Our jobs is not based on eating, but we sometimes need to eat in order to get my job done. The cafeteria should be more or less intuitive to use, it should not require a lot of special training to get a sandwich. And, it needs to be reasonably accessible to whoever needs it, whenever they need it. Data analysis should be much the same. Anyone that needs to do analysis should not have to battle to get it done. We don't want TI's efforts to fail because everyone is going around to hungry to be able to get their work done, nor do we want TI to fail because we are unable to visualize a simple trend. In both cases the need is too obvious and the solution is too simple to allow it to be a cause of failure. Bottom line, I'd like your support to purchase a site license for this tool.

Tom

J.Lebowitz

From: Mougenot, Olivier Sent: Monday, April 19, 2004 11:47 AMTo: Lebowitz, Joe; Lopez, Jose (TIF)Cc: Alloo, VincentSubject: RE: SPotfire

Joe,We have created excitement; already have engineers playing with it. Engineers also now understand what tool has been used to create the best material that we have seen in the past 1-1.5 years, coming from multiple sources, KFAB, Ardantec, DMOS6.

BROlivier

From: Mougenot, Olivier Sent: Thursday, May 20, 2004 4:32 PMTo: Lebowitz, JoeSubject: GPM-2004-May20.ppt

Joe, Can’ resist… If you have 5 or 10 minutes: this is a Spotfire analysis, including very sensitive data, in

answer to WTBU management asking for GPM review and improvement for all volume products without preliminary analysis of where are the problems… Really helps me and team too, to further improve, so thank you.

Olivier

User TestimonialsUser Testimonials

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Scatter Plot

LOG_DATE

005100510051

2336

4396

6054

7506

7896

8396

8716

12/16/00 11:59:26 PM 12/27/00 1/6/01 1/16/01 1/26/01 2/5/01 2/15/01

ILD2 loop Process Commonality:

ILD 2 Liner depo: DC49-2.

ILD2 HSQ depo: LT01C

Spotfire “Lot collision” curve

0343166 Lnom: 23.8%, Vcc 22.2%, Gross 27.8%

0343151 Lnom: 38.5%, Vcc 17.9%, Gross 5.1%

0348500 Lnom: 20.7%, Vcc 33.8%, Gross 16.7%

SRAM Fail vs ILD1 HSQ Edge Thickness

Thickness (A)

468

101214161820

352035403560358036003620364036603680

Old metal

New metal

SR

AM

fai

l rat

e (%

)

Typical Usage Examples & Future DirectionsTypical Usage Examples & Future Directions

Early examples of Spotfire used in Kfab that have helped visualize problems and reach resolution

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Typical Usage Examples Original & New CapabilitiesTypical Usage Examples Original & New Capabilities

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1A 2C 3D 4E 5F 6 6G 7 8 9 TenCountMeanMedianMaxStdDevIQR

1 22 13 31 11 7 101 34 11 10 2631.9 27.4 46.7 42.0 43.1 48.5 52.4 45.5 57.2 62.5 59.831.9 26.3 46.6 43.5 46.8 51.3 53.3 47.6 59.6 63.6 60.531.9 46.4 55.4 50.0 53.9 52.8 67.1 57.0 62.0 64.9 68.6

7.1 5.1 5.8 10.0 5.1 7.0 9.0 7.3 2.8 6.30.0 5.3 6.7 6.9 13.6 5.8 6.9 12.0 4.2 3.2 10.3

Tukey-Kram...Root MSE =...sqrt(2)q* = 4...

BaselineM

PY

_4142

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WIP Management using SpotfireWIP Management using Spotfire• 4414 wfrs inline• 318 wfrs – development• 4072 wfrs – production

• 2229 wfrs – 4.1• 1843 wfrs – 4.2

• Lead wave of 4.1 Rd8 material is in T5 loop.

• Lead wave of 4.2 Rd8 material is in S/W loop.

• RLC11 lots expected at MP on 6/8 and 6/9.

4.2 Rd8 4.1 Rd8 4.1 Rd6

RLC11 lots due at MP 6/8 and 6/9

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Wafer 04 Wafer 11 Wafer 13

Wafer 24Wafer 222058662

Defect Management ApplicationsDefect Management Applications

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Base vs. J G

Orig J ob GroupCluster2 JG24-27 JG28 JG29-30 JG31-32

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Use of Spotfire for CRP AnalysisUse of Spotfire for CRP AnalysisSample Visualization of Comp Ratio (%) by Job Group.Colors show Top/Bottom 10, Size of box shows Relative Raise %

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Looking ForwardLooking Forward Continued use expansion throughout TI

It’s available to everyone, so no excuse to not use itAdditional usage will bring new applications

Need to build a support model for corporate wide useMake IT support model developed and will help drive

robustness for corp wide solutionNeed “technical expert” pool developing new apps

Working closely with the user base, located in the Fab/LBE/ATWorking closely with IT to ensure apps developed to framework for

supportability/portability

Drive new capabilities with Spotfire DevelopersThis user’s meeting presents a great opportunity to begin doing

so…

J.Lebowitz

SummarySummary The key attributes enabling Spotfire to become adopted is it’s ease of

use, strong visualization capabilities, drill down capabilities, and ability to allow us to seamlessly integrate data sets across multiple sources

TI has had excellent success in deploying Spotfire as an integral part of it’s Data Analysis System Initially centered at Kfab this is now seen in many other Fab & LBE sites Spotfire has gained wide spread acceptance by the user base, who quickly show

increased ability to make good decisions Spotfire has become a strategic tool for TI’s Engineering.

Need to understand that Spotfire is not “just” an EDA tool, more it’s a General Data Analysis tool that can make anyone who uses it more effective

By deploying Spotfire throughout TI we have moved from lagging the industry in EDA capability to leading the way…

The engagement with Spotfire has been mutually beneficial to both This engagement is strengthening, as demonstrated by this meeting The potential is astounding

J.Lebowitz

Backup

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Imm

edia

cy a

nd

Sim

pli

city

Breadth and Depth

SAS Programming language

Web Tools

Mid Level Tools

Web

Rep

ortsWeb Reports

And Tools

Webtools

Mid Level Packages

High Level / User Customizable

Packages

• Few PE / PI / PDE• Analysis Specialists• Statisticians

Broad and Deep Analysis

• Large Scale Correlation• Cross Platform Analysis • Data Mining

• Advanced Training in Stats & Analysis methods

• Auto Reports• Browse able• Yields & Trends

• All Engineers• Product Lines• Management

• No special training

Point/Click Standards

Rapid Routine Analysis

• Process Integration• Product Engineering• Equip & Process Eng.

• Variable Correlation• Split Analysis• Simple Statistics

• General Technical Training

Complex and Specialty Analysis • Most PI / PDE/YE• Limited PE/EE• Analysis Specialists

• Complex Analysis• DD Test die• Rigorous Statistics

• More Specific Statistical & Analytical Training

TI’s Integrated Data Analysis System TI’s Integrated Data Analysis System

J.Lebowitz

What is Spotfire?What is Spotfire?

Spotfire DecisionSite is a data analysis product used at Texas Instruments for Yield Analysis and Optimization

DecisionSite consists of a server component (located at Kilby Center) and a desktop client application

DecisionSite has been customized by TI for TI usersConnected to data sourcesConfigured with pre-defined analysis guides as suggested analysis processes

DecisionSite is not a database, it is a data access and analysis tool linked to existing TI data sources

J.Lebowitz

Spotfire DecisionSite StructureSpotfire DecisionSite Structure

DataSources

DataSources

Guides &Tools Library

InformationLibrary

Parametric Data

Yield Data In-Line Data Defect Data ESDA

DecisionSite Client

(desktop)

DecisionSite Client

(desktop)

DecisionSite Server(Kilby

Center)

DecisionSite Server(Kilby

Center)

J.Lebowitz

Available DataAvailable Data

DecisionSite extracts data, on demand, from: Testware: Electrical test data, site, wafer, lot level SMS: Information collected in the SMS database that is collected while

wafers are processed ESDA: Bit failure pattern recognition of memory arrays Defect: Data collected from wafer scanning defect detection equipment

during processing – including defect images & classification codes Yield Trends: Functional testing data summarized by Lot, Wafer and

Zone.

This data is then analyzed by the user: On an ad-hoc basis Or Following any one of the pre-configured analysis guides

Analysis occurs in a visual, dynamic environment optimized for intuitive data analysis

J.Lebowitz

Simple, Elegant and Powerful

• Integrated Decision-Making

• Simplifies Access to Data

• Speeds Data Interpretation

• Speeds Decision-Making

The Spotfire ClientThe Spotfire ClientDynamic Visualization

• Fast-Interactive Viewing• Merge / Analyze Data From

Multiple Sources• Multiple View Preferences• Integrated Reporting

Dynamic Queries

• Quickly Evaluate

“What-If” Scenarios

• Explore Alternatives

• Solve Multiple Problems

Guides:

• Capture / Automate

Repeatable Analysis

Tasks

•Capture “Specialist”

Expertise• Fully Configurable

Tools

• Integrated Analysis

• Apply Algorithms

Information Library

• Role-Based query

builder and library of

predefined queries

• Information Interaction

optimized for ease-of-use