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Introduction to CMOS VLSI Design Lecture 19: Nonideal Transistors David Harris Harvey Mudd College Spring 2007

Introduction to CMOS VLSI Design Lecture 19: Nonideal Transistors David Harris Harvey Mudd College Spring 2007

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Introduction toCMOS VLSI

Design

Lecture 19: Nonideal Transistors

David Harris

Harvey Mudd College

Spring 2007

19: Nonideal Transistors Slide 2CMOS VLSI Design

Outline Transistor I-V Review Nonideal Transistor Behavior

– Velocity Saturation– Channel Length Modulation– Body Effect– Leakage– Temperature Sensitivity

Process and Environmental Variations– Process Corners

19: Nonideal Transistors Slide 3CMOS VLSI Design

Ideal Transistor I-V Shockley 1st order transistor models

2

cutoff

linear

saturatio

0

2

2n

gs t

dsds gs t ds ds dsat

gs t ds dsat

V V

VI V V V V V

V V V V

19: Nonideal Transistors Slide 4CMOS VLSI Design

Ideal vs. Simulated nMOS I-V Plot

180 nm TSMC process

Ideal Models– = 155(W/L) A/V2

– Vt = 0.4 V

– VDD = 1.8 VIds (A)

Vds0 0.3 0.6 0.9 1.2 1.5 1.8

100

200

300

400

Vgs = 0.6

Vgs = 0.9

Vgs = 1.2

Vgs = 1.5

Vgs = 1.8

0

Vds

0 0.3 0.6 0.9 1.2 1.5

Vgs = 1.8

Ids (A)

0

50

100

150

200

250

Vgs = 1.5

Vgs = 1.2

Vgs = 0.9

Vgs = 0.6

BSIM 3v3 SPICE models

19: Nonideal Transistors Slide 5CMOS VLSI Design

Simulated nMOS I-V Plot 180 nm TSMC process BSIM 3v3 SPICE models What differs?

– Less ON current– No square law– Current increases

in saturation

Vds

0 0.3 0.6 0.9 1.2 1.5

Vgs = 1.8

Ids (A)

0

50

100

150

200

250

Vgs = 1.5

Vgs = 1.2

Vgs = 0.9

Vgs = 0.6

19: Nonideal Transistors Slide 6CMOS VLSI Design

Velocity Saturation We assumed carrier velocity is proportional to E-field

– v = Elat = Vds/L

At high fields, this ceases to be true– Carriers scatter off atoms

– Velocity reaches vsat

• Electrons: 6-10 x 106 cm/s• Holes: 4-8 x 106 cm/s

– Better modelEsat0

0

slope =

Elat

2Esat3Esat

sat

sat / 2

latsat sat

lat

sat

μμ

1

Ev v E

EE

19: Nonideal Transistors Slide 7CMOS VLSI Design

Vel Sat I-V Effects Ideal transistor ON current increases with VDD

2

Velocity-saturated ON current increases with VDD

Real transistors are partially velocity saturated– Approximate with -power law model

– Ids VDD

– 1 < < 2 determined empirically

2

2

ox 2 2gs t

ds gs t

V VWI C V V

L

ox maxds gs tI C W V V v

19: Nonideal Transistors Slide 8CMOS VLSI Design

-Power Model

Ids (A)

Vds0 0.3 0.6 0.9 1.2 1.5 1.8

100

200

300

400

Vgs = 0.6

Vgs = 0.9

Vgs = 1.2

Vgs = 1.5

Vgs = 1.8

0

-lawSimulated

Shockley

0 cutoff

linear

saturation

gs t

dsds dsat ds dsat

dsat

dsat ds dsat

V V

VI I V V

V

I V V

/ 2

2dsat c gs t

dsat v gs t

I P V V

V P V V

19: Nonideal Transistors Slide 9CMOS VLSI Design

Channel Length Modulation Reverse-biased p-n junctions form a depletion region

– Region between n and p with no carriers

– Width of depletion Ld region grows with reverse bias

– Leff = L – Ld

Shorter Leff gives more current

– Ids increases with Vds

– Even in saturation

n+

p

GateSource Drain

bulk Si

n+

VDDGND VDD

GND

LLeff

Depletion RegionWidth: Ld

19: Nonideal Transistors Slide 10CMOS VLSI Design

Chan Length Mod I-V

= channel length modulation coefficient– not feature size– Empirically fit to I-V characteristics

21

2ds gs t dsI V V V

Ids (A)

Vds0 0.3 0.6 0.9 1.2 1.5 1.8

100

200

300

400

Vgs = 0.6Vgs = 0.9

Vgs = 1.2

Vgs = 1.5

Vgs = 1.8

0

19: Nonideal Transistors Slide 11CMOS VLSI Design

Body Effect Vt: gate voltage necessary to invert channel

Increases if source voltage increases because source is connected to the channel

Increase in Vt with Vs is called the body effect

19: Nonideal Transistors Slide 12CMOS VLSI Design

Body Effect Model

s = surface potential at threshold

– Depends on doping level NA

– And intrinsic carrier concentration ni

= body effect coefficient

0t t s sb sV V V

2 ln As T

i

Nv

n

sioxsi

ox ox

2q2q A

A

NtN

C

19: Nonideal Transistors Slide 13CMOS VLSI Design

OFF Transistor Behavior What about current in cutoff? Simulated results What differs?

– Current doesn’t go

to 0 in cutoff

Vt

Sub-threshold

Slope

Sub-thresholdRegion

SaturationRegion

Vds = 1.8

Ids

Vgs

0 0.3 0.6 0.9 1.2 1.5 1.8

10 pA

100 pA

1 nA

10 nA

100 nA

1 A

10 A

100 A

1 mA

19: Nonideal Transistors Slide 14CMOS VLSI Design

Leakage Sources Subthreshold conduction

– Transistors can’t abruptly turn ON or OFF Junction leakage

– Reverse-biased PN junction diode current Gate leakage

– Tunneling through ultrathin gate dielectric

Subthreshold leakage is the biggest source in modern transistors

19: Nonideal Transistors Slide 15CMOS VLSI Design

Subthreshold Leakage Subthreshold leakage exponential with Vgs

n is process dependent, typically 1.4-1.5

0e 1 egs t ds

T T

V V V

nv vds dsI I

2 1.80 eds TI v

19: Nonideal Transistors Slide 16CMOS VLSI Design

DIBL Drain-Induced Barrier Lowering

– Drain voltage also affect Vt

– High drain voltage causes subthreshold leakage to ________.

ttdsVVVt t dsV V V

19: Nonideal Transistors Slide 17CMOS VLSI Design

DIBL Drain-Induced Barrier Lowering

– Drain voltage also affect Vt

– High drain voltage causes subthreshold leakage to increase.

ttdsVVVt t dsV V V

19: Nonideal Transistors Slide 18CMOS VLSI Design

Junction Leakage Reverse-biased p-n junctions have some leakage

Is depends on doping levels

– And area and perimeter of diffusion regions– Typically < 1 fA/m2

e 1D

T

V

vD SI I

n well

n+n+ n+p+p+p+

p substrate

19: Nonideal Transistors Slide 19CMOS VLSI Design

Gate Leakage Carriers may tunnel thorough very thin gate oxides Predicted tunneling current (from [Song01])

Negligible for older processes May soon be critically important

VDD

0 0.3 0.6 0.9 1.2 1.5 1.8J G

(A

/cm2

)

10-9

10-6

10-3

100

103

106

109

tox

0.6 nm0.8 nm

1.0 nm1.2 nm

1.5 nm

1.9 nm

VDD trend

19: Nonideal Transistors Slide 20CMOS VLSI Design

Temperature Sensitivity Increasing temperature

– Reduces mobility

– Reduces Vt

ION ___________ with temperature

IOFF ___________ with temperature

19: Nonideal Transistors Slide 21CMOS VLSI Design

Temperature Sensitivity Increasing temperature

– Reduces mobility

– Reduces Vt

ION decreases with temperature

IOFF increases with temperature

Vgs

dsI

increasingtemperature

19: Nonideal Transistors Slide 22CMOS VLSI Design

So What? So what if transistors are not ideal?

– They still behave like switches. But these effects matter for…

– Supply voltage choice– Logical effort– Quiescent power consumption– Pass transistors– Temperature of operation

19: Nonideal Transistors Slide 23CMOS VLSI Design

Parameter Variation Transistors have uncertainty in parameters

– Process: Leff, Vt, tox of nMOS and pMOS

– Vary around typical (T) values Fast (F)

– Leff: ______

– Vt: ______

– tox: ______

Slow (S): opposite Not all parameters are independent

for nMOS and pMOS

nMOS

pM

OS

fastslow

slow

fast

TT

FF

SS

FS

SF

19: Nonideal Transistors Slide 24CMOS VLSI Design

Parameter Variation Transistors have uncertainty in parameters

– Process: Leff, Vt, tox of nMOS and pMOS

– Vary around typical (T) values Fast (F)

– Leff: short

– Vt: low

– tox: thin

Slow (S): opposite Not all parameters are independent

for nMOS and pMOS

nMOS

pM

OS

fastslow

slow

fast

TT

FF

SS

FS

SF

19: Nonideal Transistors Slide 25CMOS VLSI Design

Environmental Variation VDD and T also vary in time and space

Fast:

– VDD: ____

– T: ____

Corner Voltage Temperature

F

T 1.8 70 C

S

19: Nonideal Transistors Slide 26CMOS VLSI Design

Environmental Variation VDD and T also vary in time and space

Fast:

– VDD: high

– T: low

Corner Voltage Temperature

F 1.98 0 C

T 1.8 70 C

S 1.62 125 C

19: Nonideal Transistors Slide 27CMOS VLSI Design

Process Corners Process corners describe worst case variations

– If a design works in all corners, it will probably work for any variation.

Describe corner with four letters (T, F, S)– nMOS speed– pMOS speed– Voltage– Temperature

19: Nonideal Transistors Slide 28CMOS VLSI Design

Important Corners Some critical simulation corners include

Purpose nMOS pMOS VDD Temp

Cycle time

Power

Subthrehold

leakage

Pseudo-nMOS

19: Nonideal Transistors Slide 29CMOS VLSI Design

Important Corners Some critical simulation corners include

Purpose nMOS pMOS VDD Temp

Cycle time S S S S

Power F F F F

Subthrehold

leakage

F F F S

Pseudo-nMOS S F ? ?