Interpretation of Gas Delivery Diagrams

Gas delivery diagram symbols—gas panel 1 right side

Gas delivery diagram interpretation—gas panel 3

Gas delivery diagram interpretation—gas panel 2

First work out the I/Os;Then work out the mainprocess gas flow routeincluding the choking valves;See next slide for results

ChamberPump

Gas delivery diagram interpretation

Process chamber

V5

MFC 2

V20V22 Hand valve

Gas 2 supply

MFC 4

V40V42 Hand valve

Gas4 supply

V4

PSH3

Gas delivery diagram interpretation—gas panel 2

Now we will deal with theside branches. But we willMap it out more symmetricallyAround the I/Os. See nextSlide

ChamberPump

Gas delivery diagram interpretation—gas panel 2

MFC

N2pump

V4 V1

V2 V3

V85

outlet inlet

V42 V41

PSH9PSH2

Forward purging: V4 and V1 open, V41, V42 open, all others closed.Reverse purging: V2 and V3 open, V41, V42 open, all others closed, V85 is the pump ballast valve—dummy load for the pump when chamber iso valve is closed.