Key Features

•Sub-NanometricHeightResolutioninSEM/SAM/FIB

•Closed-LoopScanningandCoarsePositioningin3D

•AutomatedTipReplacement•KinematicSampleandTunnelingTip/AFMSensorMount

•HVandUHVDesign

INTEgRATIoNoFSCANNINgPRoBEMICRoSCoPyANDSCANNINgELECTRoN/IoNMICRoSCoPy

Curlew SPM

INNoVATIoNINSURFACESPECTRoSCoPyANDMICRoSCoPySySTEMS

SPECS leads the way in state-of-the-art technology for electron spectroscopy and scanning probe microscopy.

SPECSSurfaceNanoAnalysisgmbH

SPECS headquarters with more than 150employeesislocatedinthecenterofgermany’scapital Berlin with subsidiaries in Switzerland(SPECS Zurich gmbH) and in the USA (SPECSInc.).Tobeclosetoourcustomerswehaveliasonoffices in France and Spain. Furthermore weare represented all over the globeby our salespartners.

We are a teamof scientists and engineerswhodedicate their knowledge and experience tothe development, design, and production ofinstruments for surface science, materialsresearch,andnanotechnologyformorethan25years.

our key to success is know-how, experience,intensivecontactwithscientistsfromallovertheworld,customerorientation,andreliablequalitycontrol.

Thus, we see ourselves as partner for systemsandcomponentsforyourresearch.

State-of-the-art scanning probe microscopy sytems

Curlew SPMIn SItu SPM

The combination of Scanning Probe Microscopy and Scanning Electron/Auger/Focused Ion Beam Microscopy is the perfect complement of imaging speed and resolution from millimeter field of views down to the atomic scale.

New Perspectives in Scanning Probe Microscopy

MicroscopyonDifferentLengthScales

TheCurlew in situ SPMprovides thepossibilityof analysis, probing, and manipulation of thesame sample feature by SPM and SEM/SAM/FIB techniques without the need for time-consuming feature backtracking. Futhermore, itadds sub-nanometer height resolution and theability to image insulating surfaces to SEM andFIB systems. The many electron-/ion-matterinteraction signals providing spectroscopic andcrystallographic surface information can besuperimposed with SPM topography data. TheCurlew in situ SPM gives new perspectiveswith respect to surface analysis, probing andmanipulationatthenanometerscale.

SEM/SAM/FIBIntegration

The Curlew is readily integrated upon thestageofvirtuallyanySEM/SAM/FIBsystemandiscompatiblewithsystemsoperatingatultra-highvacuum,high vacuumaswell as environmentalconditions. In particular the SPM geometryenables integrationwith shortworkingdistance

SEM/SAM/FIB optics. Standalone SEM/SAM/FIBimaging resolution and analytical performanceremain uncompromised. For SAM integrationa non-magnetic version of the Curlew SPM isideallysuited.

Side view of Curlew SPM: Ideal for integration with short working distance SEM/SAM/FIB optics

Curlew SPM

to tip leading to higher stiffness and lowersensitivitytomechanicalvibrationscomparedtotheconventionalstackedmotor-axesdesign.

SPMScanner

The Z tip scanner and the flexure-based Xysample stage can be optionally equipped withcapacitivesensorsthatensureperfectlylinearizedandcalibratedclosed-loopSPMscanning.

Tip/SensorMount

Tips and sensors are rigidly mounted to aprecisekinematicinterfacebetweentheceramictip holder and the Curlew tip receptor. Thisensures perfect stability as well as enhancedand reliableperformanceofoscillating sensors.The spring-loaded design of the receptor iscompletely non-magnetic with a weight ofless than 2 g. Four contact springs provide theelectronic connections to the sensor or tip.Coaxial cabling and shielding of the contactsup to the sensor/tip minimize cross-talk andinterferencefromtheenvironment.

The Curlew SPM is available with different kinds of tips and sensors, like the Akiyama-Probe, a self-sensing and self-actuating quartz tuning fork based cantilever sensor (left) and tungsten or Pt/Ir tunneling tips (right). Additional sensors are available on request.

MultiprobeStation

The Curlew concept is also expandable to amultiprobe station permitting advanced SPMand probing experiments with multiple tips tobe combined with SEM vision-controlled tipnavigation.

SensorTypes

The Curlew SPM features a stiff sensor designbased on a ceramic tip holder with conductivepaths for tip/sensor contacting. Manipulationoftipsandsensorsiseasyandsafe.TheCurlewSPMacceptsdifferentkindsofelectricalsensorsincluding tunneling tips, Akiyama-Probes(Nanosensors™)aswellasquartz-basedsensors,liketheSPECSKolibriSensor™.Allsensorshaveaprotruding tip thatallows fordirectSEMvision-controlledtip/sensorpositioningandcontrol.

CoarseTipPositioning

The tip is positioned laterally and vertically byinertial piezo-motors with integrated opticalencoders for closed-loop operation. A compactparallel kinematic coarse positioning motordesignreducesthemechanicalloopfromsample

5SampleMount

Thesampleholder is kinematicallymountedonthreerubyspheresinthreeradialgrooves(Maxwellgeometry).Thisassuresamechanicallyfirmandperfectly defined position. Electrical biasingof the sample is available via shielded cables.Various sample holders can be installed inthe Curlew sample receptor. The basic designprovides an adapter for standard SEMpin stubholdersforconvenientmountingandstorageofsamples.

Tip/SensorReplacement

The Curlew SPM features sample and tip/sensor replacement inside a UHV chamber orthrough a load-lock chamber using a transferrodorawobblestick.Theautomatedtip/sensorreplacement procedure is highly user-friendlyand safe. The innovative design features tipmounting and unmounting without any frictionfrommetallicspringsorcontacts.

The kinematic sample receptor-mount of the Curlew SPM (top) enables tip/sensor replacement by means of a user-friendly tip/sensor transfer shuttle (bottom).

Curlew SPM

Nanonis™SPMControlSystem

The Nanonis Control System offers the highestresolution, lowest noise and the greatestflexibility in SPM. All SPM modes are availableandthecontrolsystemisreadilyexpandableformulti-tipcontrol.

TheCurlewControlSystemconsistsof:

•NanonisSPMControlSystemBasePackage

•NanonisoscillationController•FEMTopreamplifierkit

•Highvoltageamplifierandcontrollerforscanners

•Highvoltageamplifierandcontrollerforcoarseapproachmotors

IntegrationintoAnalyticalInstrumentsThe Curlew is a compact and versatile SPM,enablingintegrationintoalmostanykindofSEM,SAMorFIBandevenintomanyotheranalyticalinstrumentslikeSIMS.SuccessfulintegrationintoTescan and JEoLmicroscopes has already beenproven.

LivePerformanceofCurlewSPM

AFM height image (6 μm x 6 μm) of a calibration grating measured with an Akiyama-Probe sensor in FM-AFM mode. The height scale is blown up by 20 times relative to the lateral scale. The data was acquired during a live demonstration at the M&M conference 2011 in Nashville, USA.

AFM height profile along the line indicated above.

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7CurlewSPMoperatedinsideSEM Specifications

Curlew SPM Head

XyScanRange(Sample) 10μmx10μm,50μmx50μmoptional

ZScanRange(Tip) 2μm,8μmoptional

XyZSensorResolution(Closed-Loopoption)

<100pmrms@1kHzBW

CoarseTipPositioningRange ±5mm(X,y),5mm(Z)

CoarseTipPositioningMin.StepSize Approx.30nm

CoarseTipPositioningAbsoluteAccuracy ±5μm

UHVCompatibility <2x10-9mbar

BakeoutTemperature 120°C

Load-LockCompatibilitySampleandSPMtip/sensorreplacementviaload-lock

SPMTip/Sensor

Etchedandcutmetalwiretunnelingtips.QuartztuningforkbasedcantileverAFMsensor(Akiyama-Probe).

Weight Approx.350g

TemperatureControloptional

ResistiveheaterandtemperaturesensorintegratedintheSPMchassis.SeparatetemperaturecontrollerforthermalstabilizationofSPMheadatroom-temperature.

Customizationisthekeytoitsflexibility.Pleasediscussyourindividualneedswithus.

AFM topography data in the region of interest (4 μm x 4 μm) measured inside the SEM.

SEM images of Akiyama-Probe cantilever tip above patterned surface prepared by SEM e-beam lithography. The AFM tip is navigated to the region of interest by real-time SEM imaging.

Dimensions of standard Curlew SPM stage

sPeCsSurfaceNanoAnalysisgmbHVoltastrasse513355Berlin / germanywww.specs.com

T+4930467824-0F+49304642083Esupport@specs.com