Integrated Molecular Beam Epitaxy Systemwith Liquid Phase Epitaxy and Electrochemical Cell

Model: IMBE300-LPE-EC

TECHNIQUES: OPTIONS:

FEATURES:

200 Stronach Cres., London, Ontario, Canada N5V 3A1Tel. (519) 457-0878, Fax (519) 457-0836

E-mail: info@ocivm.com, Web: www.ocivm.com

• No need to transfer to another chamber for analysis after film growth

• Short switching time between deposition and surface science analysis

• Load-lock with transfer arm and sample storage

• Sample transfer compatibility with other systems: SPM and SEM

• X-Ray Photoelectron Spectroscopy (XPS)

• Reflection High Energy Electron Diffraction (RHEED)

• Thermal Desorption Mass Spectroscopy (TDS)

• Low Energy Electron Diffraction (LEED)

• Auger Electron Spectroscopy (AES)

• 7 Deposition Sources

• Liquid Phase Epitaxy (LPE)

• Cyclic Voltammetry

• Surface Preparation

with Thermal Annealing and Ion

Bombardment

X-RaySource

IONPump

X-Y-Z-RManipulator

Deposition Sources

VerticalTransfer

Load-Lock

Sample Transfer

Hemispherical Analyser

LPEReactor

Viewport

LEED-AES Spectrometer

ION Sputter Gun

Electrochemical Cell

Wobble StickRHEEDScreen