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Integrated circuits – Finn Müller-Hansen
Seminar talk by Finn Müller-Hansen on May 28, 2013
Integrated circuits
From basic solid state research to application
From simple transistors to modern microelectronics
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Integrated circuits – Finn Müller-Hansen
How does this work*?
* For example: How can this computer add the two numbers?
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Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com/show/6409/13inch-retina-macbook-pro-review
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Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com
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Integrated circuits – Finn Müller-Hansen
http://www.cellmatrix.comhttp://www.anandtech.com
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Integrated circuits – Finn Müller-Hansen
● How was it possible to develop complicated logic circuits like this computer?
● How are modern microchips manufactured?
● And how do microelectronics work?
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Integrated circuits – Finn Müller-Hansen
Outline
History
Technology
Future
web.mit.eduImages: strims.pl http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg
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Integrated circuits – Finn Müller-Hansen
Part I
Technology
Future
web.mit.eduImages: strims.pl http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg
History of a revolution
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Integrated circuits – Finn Müller-Hansen
The invention of the transistor
● 1925 Lilienfeld: theory of a field effect transistor
● 1947 Shockley, Bardeen and Brattain: point contact transistor at Bell Labs (Nobel prize in 1956)
● 1950 bipolar junction transistor
commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
The first integrated circuit
Further thought led me to the conclusion that semiconductors were all that were really required – that resistors and capacitors, in particular, could be made from the same material as the active devices [the transistors]. I also realised that, since all of the components could be made of a single material, they could also be made in situ, interconnected to form a complete circuit. I then quickly sketched a proposed design for a flip-flop using these components. Resistors were provided by bulk effect in the silicon, and capacitors by pn-junctions.
Kilby: Invention of the Integrated Circuit
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Integrated circuits – Finn Müller-Hansen
The first integrated circuit
1958 Jack Kilby at TI (Nobel price 2000)
http://www.ti.com/corp/docs/kilbyctr/jackbuilt.shtml
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Integrated circuits – Finn Müller-Hansen
Further developments
Between 1958 and 1960:
● Hoerni: planar process
● silicon instead of germanium
● Noyce: aluminium wiring
● Lehovec: insulation by pn-junctions
● J. Last: assembly of first planar IC
● Kahng and Atalla: first MOSFET
Robert Noyce
http://www.computerhope.com
Jean Hoerni Kurt LehovecWho invented the IC?
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Integrated circuits – Finn Müller-Hansen
Economy
● military and NASA in the semiconductor market
● 1955 Shockley Semiconductor Laboratories
● “Traitorous eight” (Hoerni, Noyce, Moore and others)
● 1957 Fairchild Semiconductors
● mid 1960s patent wars between TI, Fairchild, ...
● late 1960s Intel, AMD, Zilog, etc.
http://www.flickr.com/photos/wimar/4657299405/sizes/o/in/photostream/
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Integrated circuits – Finn Müller-Hansen
1965G.E. Moore: Cramming More Components onto Integrated Circuits
Moore's Law
commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
Keeping up with Moore's Law
● Downscaling
● Higher clock frequencies
● material research
● advances in lithography
● new deposition techniques
● multi-core computing
Data from http://www.semiconductors.org/industry_statistics/global_sales_report/
Semiconductor sales 1977-2012
rising capital requirementsreinvestments only possibledue to economic success
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Integrated circuits – Finn Müller-Hansen
●How was it possible to develop complicated logic circuits like this computer?
● various contributions of inventors and researchers
● cooperation of research, economics, and public sector
● self-fulfilling prophecy of Moore's Law● economic success of IC
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Integrated circuits – Finn Müller-Hansen
Part II
Future
web.mit.eduImages: strims.pl http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg
History
Technology of IC
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Integrated circuits – Finn Müller-Hansen
Logic● boolean logic
● logic gates implement boolean functions
● examples: NOT, AND, OR, XOR and combinations
● functional complete gates: NAND and NOR
NAND GateOR Gate constructed from NAND
commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
Example: Adder
Full Adder ...
Part of ALU (arithmetic logic unit) on a CPU (central processing unit)
commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
CMOS logic
CMOS NAND Gate
commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
Chip design
Register transfer level
Gate-level description(circuit diagram)
Physical layout
addition of two x bit numbers
http://www.iis.ee.ethz.ch/~kgf/aries/8.html
Example:
logic synthesis
placement,routing, etc.
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Integrated circuits – Finn Müller-Hansen
Manufacturing of ICs
● chip design● lithography● etching● material deposition● wiring● testing and packaging
www.amd.com
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Integrated circuits – Finn Müller-Hansen
Lithography
● electron beam lithography for mask production
● 193 nm argon fluoride excimer laser photolithography (deep UV)
● different resist material
● state of the art: 22nm processes
http://britneyspears.ac/physics/fabrication/photolithography.htm
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Integrated circuits – Finn Müller-Hansen
Beyond the diffraction limit
Optical Proximity Correction
Immersion lithography
Phase shifting techniques
http://www.tf.uni-kiel.de/matwis/amat/admat_en/kap_5/backbone/r5_3_2.html commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
Etching and deposition techniques
● chemical vapor deposition
● physical vapor deposition
● wet chemistry etching
● plasma etching:
● chemical etching● reactive ion etching● sputtering
Clemens, J.T.: Silicon Microelectronics Technology. Bell Labs Technical Journal, 1997
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Integrated circuits – Finn Müller-Hansen
http://huniv.hongik.ac.kr/~hmed/nanofet.html
TEM image of a modern MISFET
Fabrication of transistors
30nm
commons.wikimedia.org
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Integrated circuits – Finn Müller-Hansen
Wiring
completed silicon wafer
Peercy, P.S.: The drive to miniaturization. Nature 406, 2000 http://www.dailytech.com
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Integrated circuits – Finn Müller-Hansen
How are modern microchips manufactured?
● lithography as a key technology● chip is built in layers● more than 500 single steps● computational power makes design of
next generation possible
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Integrated circuits – Finn Müller-Hansen
Part III
Technology
web.mit.eduImages: strims.pl http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg
History
Future of ICs
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Integrated circuits – Finn Müller-Hansen
Limiting factors in downscaling of CMOS
● high current density in metal wires
● thickness of gate insulator (high k dielectrics)
● lithography
● EUV (1-10 nm)● electron beam
http://physics.nmsu.edu/~bkiefer/research.html
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Integrated circuits – Finn Müller-Hansen
Alternatives to silicon?
● Organic semiconductors, spintronics
● Molecular computing (e.g. DNA computer)
● Optical computer (→ presentation on photonic crystals)
●
probably not within the next 20 years
http://images.cryhavok.org/v/Quantum+Computer.jpg.html
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Integrated circuits – Finn Müller-Hansen
How do microelectronics work?
http://techreport.com/forums/viewtopic.php?f=14&t=77469
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Integrated circuits – Finn Müller-Hansen
References● Bratton, D. et al: Recent progress in high resolution lithography. Polymers for
advanced technologies 17, 2006
● Braun, E.: Revolution in miniature. Cambridge University Press, 1978
● Chen, Y and A. Pépin: Nanofabrication: Conventional and nonconventional methods. Electrophoresis 22, 2001
● Clemens, J.T.: Silicon Microelectronics Technology. Bell Labs Technical Journal, 1997
● Eckert, M. and H. Schubert: Kristalle, Elektronen, Transistoren. Rohwolt Hamburg, 1986
● Kilby, J.S.: Invention of the Integrated Circuit. IEEE Transactions on Electron Devices, vol 23, 1976
● www.halbleiter.org
● Moore, G.E.: Cramming More Components onto Integrated Circuits. Electronics, 1965
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Integrated circuits – Finn Müller-Hansen
● Peercy, P.S.: The drive to miniaturization. Nature 406, 2000
● Ruge, I and H. Mader: Halbleiter-Technologie. Springer Berlin, Heidelberg, New York, 1991
● Schulz, M.: The end of the road for silicon? Nature 399, 1999
● Seisyan, R.P.: Nanolithography in Microelectronics: A Review. Technical Physics 56, 2011
● Thompson, S.E. and S. Parthasarathy: Moore’s law: the future of Si microelectronics. Materials Today vol. 6, 2006
● Thompson, L.F.: Introduction to Microlithography. American Chemical Society Washington, DC, 1994
● Tietze, U. und C. Schenk: Halbleiter-Schaltungstechnik. Springer Berlin, 1999.
● Waser, R. (ed.): Nanoelectronics and Information Technology. Wiley-VCH Weinheim, 2005
References (II)
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Integrated circuits – Finn Müller-Hansen
How do microelectronics work?
(If you really want to know it start studying computer engineering.)
Questions?
http://techreport.com/forums/viewtopic.php?f=14&t=77469